KR101556430B1 - 간섭 결함 검출 및 분류 - Google Patents

간섭 결함 검출 및 분류 Download PDF

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Publication number
KR101556430B1
KR101556430B1 KR1020117000031A KR20117000031A KR101556430B1 KR 101556430 B1 KR101556430 B1 KR 101556430B1 KR 1020117000031 A KR1020117000031 A KR 1020117000031A KR 20117000031 A KR20117000031 A KR 20117000031A KR 101556430 B1 KR101556430 B1 KR 101556430B1
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South Korea
Prior art keywords
sample
phase
defect
signal
light
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KR1020117000031A
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English (en)
Korean (ko)
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KR20110031306A (ko
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환 제이. 정
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환 제이. 정
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Priority claimed from US12/190,144 external-priority patent/US7864334B2/en
Application filed by 환 제이. 정 filed Critical 환 제이. 정
Publication of KR20110031306A publication Critical patent/KR20110031306A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020117000031A 2008-06-03 2009-06-02 간섭 결함 검출 및 분류 KR101556430B1 (ko)

Applications Claiming Priority (14)

Application Number Priority Date Filing Date Title
US13072908P 2008-06-03 2008-06-03
US61/130,729 2008-06-03
US13561608P 2008-07-22 2008-07-22
US61/135,616 2008-07-22
US12/190,144 US7864334B2 (en) 2008-06-03 2008-08-12 Interferometric defect detection
US12/190,144 2008-08-12
US18951008P 2008-08-20 2008-08-20
US18950908P 2008-08-20 2008-08-20
US18950808P 2008-08-20 2008-08-20
US61/189,509 2008-08-20
US61/189,508 2008-08-20
US61/189,510 2008-08-20
US21051309P 2009-03-19 2009-03-19
US61/210,513 2009-03-19

Publications (2)

Publication Number Publication Date
KR20110031306A KR20110031306A (ko) 2011-03-25
KR101556430B1 true KR101556430B1 (ko) 2015-10-01

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117000031A KR101556430B1 (ko) 2008-06-03 2009-06-02 간섭 결함 검출 및 분류

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EP (1) EP2286175A4 (fr)
JP (1) JP5444334B2 (fr)
KR (1) KR101556430B1 (fr)
CN (1) CN102089616B (fr)
WO (1) WO2009149103A1 (fr)

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Also Published As

Publication number Publication date
JP5444334B2 (ja) 2014-03-19
CN102089616B (zh) 2013-03-13
JP2011523711A (ja) 2011-08-18
EP2286175A4 (fr) 2017-04-12
KR20110031306A (ko) 2011-03-25
CN102089616A (zh) 2011-06-08
EP2286175A1 (fr) 2011-02-23
WO2009149103A1 (fr) 2009-12-10

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