KR101531112B1 - 척 및 처리 장치 - Google Patents

척 및 처리 장치 Download PDF

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Publication number
KR101531112B1
KR101531112B1 KR1020130157817A KR20130157817A KR101531112B1 KR 101531112 B1 KR101531112 B1 KR 101531112B1 KR 1020130157817 A KR1020130157817 A KR 1020130157817A KR 20130157817 A KR20130157817 A KR 20130157817A KR 101531112 B1 KR101531112 B1 KR 101531112B1
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KR
South Korea
Prior art keywords
chuck
treated
processed
fixed
spring
Prior art date
Application number
KR1020130157817A
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English (en)
Korean (ko)
Other versions
KR20140088010A (ko
Inventor
노리히로 오타
Original Assignee
니혼덴산리드가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 니혼덴산리드가부시키가이샤 filed Critical 니혼덴산리드가부시키가이샤
Publication of KR20140088010A publication Critical patent/KR20140088010A/ko
Application granted granted Critical
Publication of KR101531112B1 publication Critical patent/KR101531112B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/10—Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0823—Devices involving rotation of the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • ing And Chemical Polishing (AREA)
KR1020130157817A 2012-12-28 2013-12-18 척 및 처리 장치 KR101531112B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012289142A JP6168384B2 (ja) 2012-12-28 2012-12-28 チャック及び処理装置
JPJP-P-2012-289142 2012-12-28

Publications (2)

Publication Number Publication Date
KR20140088010A KR20140088010A (ko) 2014-07-09
KR101531112B1 true KR101531112B1 (ko) 2015-06-23

Family

ID=51409104

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130157817A KR101531112B1 (ko) 2012-12-28 2013-12-18 척 및 처리 장치

Country Status (3)

Country Link
JP (1) JP6168384B2 (ja)
KR (1) KR101531112B1 (ja)
TW (1) TWI509372B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6448338B2 (ja) 2014-12-05 2019-01-09 三菱電機株式会社 タッチパネル構造の製造方法及び表示装置の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002045988A (ja) * 2000-08-04 2002-02-12 Olympus Optical Co Ltd 可撓性管の溶接接合装置
JP2002052085A (ja) * 2000-08-11 2002-02-19 Nippon Sharyo Seizo Kaisha Ltd ステントのレーザ加工装置
KR20020020689A (ko) * 1999-04-28 2002-03-15 데쓰오 이나바 자동선반용 봉재 지지장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002178188A (ja) * 2000-12-07 2002-06-25 Nippon Sharyo Seizo Kaisha Ltd レーザ切断加工における極薄板金属板の保持装置
JP4572303B1 (ja) * 2010-02-12 2010-11-04 株式会社ルス・コム 通電検査治具用接触子の製造方法及び、これにより製造した通電検査治具用接触子、並びにこれを備えている通電検査治具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020020689A (ko) * 1999-04-28 2002-03-15 데쓰오 이나바 자동선반용 봉재 지지장치
JP2002045988A (ja) * 2000-08-04 2002-02-12 Olympus Optical Co Ltd 可撓性管の溶接接合装置
JP2002052085A (ja) * 2000-08-11 2002-02-19 Nippon Sharyo Seizo Kaisha Ltd ステントのレーザ加工装置

Also Published As

Publication number Publication date
JP6168384B2 (ja) 2017-07-26
JP2014130972A (ja) 2014-07-10
TWI509372B (zh) 2015-11-21
TW201426204A (zh) 2014-07-01
KR20140088010A (ko) 2014-07-09

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