KR101530747B1 - 노광 장치 및 디바이스 제조 방법 - Google Patents

노광 장치 및 디바이스 제조 방법 Download PDF

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Publication number
KR101530747B1
KR101530747B1 KR1020110065509A KR20110065509A KR101530747B1 KR 101530747 B1 KR101530747 B1 KR 101530747B1 KR 1020110065509 A KR1020110065509 A KR 1020110065509A KR 20110065509 A KR20110065509 A KR 20110065509A KR 101530747 B1 KR101530747 B1 KR 101530747B1
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KR
South Korea
Prior art keywords
pattern
imaging position
optical system
depth
substrate
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Expired - Fee Related
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KR1020110065509A
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English (en)
Korean (ko)
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KR20120005382A (ko
Inventor
도시끼 이와이
료 사사끼
Original Assignee
캐논 가부시끼가이샤
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Publication of KR20120005382A publication Critical patent/KR20120005382A/ko
Application granted granted Critical
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7046—Strategy, e.g. mark, sensor or wavelength selection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G03B27/53—Automatic registration or positioning of originals with respect to each other or the photosensitive layer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020110065509A 2010-07-08 2011-07-01 노광 장치 및 디바이스 제조 방법 Expired - Fee Related KR101530747B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010156185A JP5662717B2 (ja) 2010-07-08 2010-07-08 露光装置及びデバイスの製造方法
JPJP-P-2010-156185 2010-07-08

Publications (2)

Publication Number Publication Date
KR20120005382A KR20120005382A (ko) 2012-01-16
KR101530747B1 true KR101530747B1 (ko) 2015-06-22

Family

ID=45438357

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KR1020110065509A Expired - Fee Related KR101530747B1 (ko) 2010-07-08 2011-07-01 노광 장치 및 디바이스 제조 방법

Country Status (4)

Country Link
US (2) US8810774B2 (https=)
JP (1) JP5662717B2 (https=)
KR (1) KR101530747B1 (https=)
TW (2) TWI447531B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5662717B2 (ja) * 2010-07-08 2015-02-04 キヤノン株式会社 露光装置及びデバイスの製造方法
CN103969967B (zh) * 2013-02-01 2016-08-24 上海微电子装备有限公司 用于硅片对准级间串绕测试和拟合的信号处理方法
JP2018081224A (ja) * 2016-11-17 2018-05-24 キヤノン株式会社 撮像装置およびその制御方法
US10748821B2 (en) 2017-04-26 2020-08-18 Samsung Electronics Co., Ltd. Method and system for measuring pattern placement error on a wafer
JP7378265B2 (ja) * 2019-10-18 2023-11-13 キヤノン株式会社 露光装置、露光方法及び物品の製造方法
JP7566590B2 (ja) * 2020-11-05 2024-10-15 キヤノン株式会社 露光装置、露光方法、及び物品の製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10284404A (ja) * 1997-04-07 1998-10-23 Nikon Corp 面位置調整装置及びその方法並びに露光装置及びその方法
JPH11145054A (ja) * 1988-04-25 1999-05-28 Nikon Corp 投影露光方法及び投影露光装置
JP2002110511A (ja) * 2000-09-27 2002-04-12 Nikon Corp 露光方法及び露光装置
JP2008112991A (ja) * 2006-10-12 2008-05-15 Asml Netherlands Bv フォーカステスト実施方法およびデバイス製造方法

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
JPH088204B2 (ja) * 1988-04-25 1996-01-29 株式会社ニコン 投影露光装置
JPH03155112A (ja) * 1989-11-13 1991-07-03 Nikon Corp 露光条件測定方法
JP2803936B2 (ja) * 1992-01-21 1998-09-24 三菱電機株式会社 投影露光装置及びパターン露光方法
JP2766575B2 (ja) * 1992-01-23 1998-06-18 三菱電機株式会社 投影レンズの評価装置及び評価方法
JPH0817719A (ja) * 1994-06-30 1996-01-19 Nikon Corp 投影露光装置
JPH0922868A (ja) * 1995-07-06 1997-01-21 Canon Inc 投影露光装置及びそれを用いた半導体デバイスの製造方法
JP2003197510A (ja) * 2001-12-27 2003-07-11 Nikon Corp 収差測定装置、収差測定方法、光学系、および、露光装置
AU2003211559A1 (en) * 2002-03-01 2003-09-16 Nikon Corporation Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method, exposure device, program, and device manufacturing method
JP2004047786A (ja) * 2002-07-12 2004-02-12 Nikon Corp 照明光学装置，露光装置および露光方法
JP2004319937A (ja) * 2003-04-21 2004-11-11 Nikon Corp 計測方法、光学特性計測方法、露光装置の調整方法及び露光方法、並びにデバイス製造方法
TWI396225B (zh) * 2004-07-23 2013-05-11 尼康股份有限公司 成像面測量方法、曝光方法、元件製造方法以及曝光裝置
JP2006344648A (ja) * 2005-06-07 2006-12-21 Matsushita Electric Ind Co Ltd 露光方法
WO2009018846A1 (en) * 2007-08-09 2009-02-12 Carl Zeiss Smt Ag Method of structuring a photosensitive material
JP2009272387A (ja) 2008-05-01 2009-11-19 Canon Inc 走査露光装置及びデバイス製造方法。
JP2010182718A (ja) * 2009-02-03 2010-08-19 Toshiba Corp 露光方法及び露光システム
JP2010251500A (ja) * 2009-04-15 2010-11-04 Toshiba Corp 半導体デバイスの製造方法及び露光条件決定プログラム
JP5662717B2 (ja) 2010-07-08 2015-02-04 キヤノン株式会社 露光装置及びデバイスの製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11145054A (ja) * 1988-04-25 1999-05-28 Nikon Corp 投影露光方法及び投影露光装置
JPH10284404A (ja) * 1997-04-07 1998-10-23 Nikon Corp 面位置調整装置及びその方法並びに露光装置及びその方法
JP2002110511A (ja) * 2000-09-27 2002-04-12 Nikon Corp 露光方法及び露光装置
JP2008112991A (ja) * 2006-10-12 2008-05-15 Asml Netherlands Bv フォーカステスト実施方法およびデバイス製造方法

Also Published As

Publication number Publication date
KR20120005382A (ko) 2012-01-16
US20140218712A1 (en) 2014-08-07
US8810774B2 (en) 2014-08-19
JP5662717B2 (ja) 2015-02-04
US9152059B2 (en) 2015-10-06
TWI447531B (zh) 2014-08-01
TW201202870A (en) 2012-01-16
US20120008122A1 (en) 2012-01-12
JP2012019110A (ja) 2012-01-26
TW201430507A (zh) 2014-08-01
TWI526791B (zh) 2016-03-21

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