KR101522806B1 - 세라믹스 회로 기판 - Google Patents

세라믹스 회로 기판 Download PDF

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KR101522806B1
KR101522806B1 KR1020137027479A KR20137027479A KR101522806B1 KR 101522806 B1 KR101522806 B1 KR 101522806B1 KR 1020137027479 A KR1020137027479 A KR 1020137027479A KR 20137027479 A KR20137027479 A KR 20137027479A KR 101522806 B1 KR101522806 B1 KR 101522806B1
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South Korea
Prior art keywords
circuit board
alumina substrate
alumina
mass
substrate
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KR1020137027479A
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English (en)
Korean (ko)
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KR20130137029A (ko
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마사노리 호시노
노리타카 나카야마
다카유키 나바
히데키 사토
히로시 고모리타
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가부시끼가이샤 도시바
도시바 마테리알 가부시키가이샤
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    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/706—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the metallic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/86—Joining of two substrates at their largest surfaces, one surface being complete joined and covered, the other surface not, e.g. a small plate joined at it's largest surface on top of a larger plate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Compositions Of Oxide Ceramics (AREA)
KR1020137027479A 2011-07-14 2012-07-13 세라믹스 회로 기판 KR101522806B1 (ko)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11498878B2 (en) 2016-02-26 2022-11-15 Heraeus Deutschland GmbH & Co. KG Copper-ceramic composite
US11584696B2 (en) 2016-02-26 2023-02-21 Heraeus Deutschland GmbH & Co. KG Copper-ceramic composite

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3315476B1 (en) * 2015-06-26 2020-02-26 Kyocera Corporation Ceramic substrate and mounting substrate using same, and electronic device
DE102016203058B3 (de) * 2016-02-26 2017-05-18 Heraeus Deutschland GmbH & Co. KG Kupfer-Keramik-Verbund und Modul
HUE053117T2 (hu) * 2016-02-26 2021-06-28 Heraeus Deutschland Gmbh & Co Kg Réz-kerámia kompozitok
DE102016203030A1 (de) * 2016-02-26 2017-08-31 Heraeus Deutschland GmbH & Co. KG Kupfer-Keramik-Verbund
EP3210956B1 (de) * 2016-02-26 2018-04-11 Heraeus Deutschland GmbH & Co. KG Kupfer-keramik-verbund
WO2019073783A1 (ja) 2017-10-12 2019-04-18 住友電気工業株式会社 セラミック基板、積層体およびｓａｗデバイス
JP7180607B2 (ja) 2017-10-12 2022-11-30 住友電気工業株式会社 セラミック基板、積層体およびｓａｗデバイス
WO2019167330A1 (ja) * 2018-03-01 2019-09-06 株式会社村田製作所 積層基板
CN112573903B (zh) * 2019-09-30 2022-08-26 国网河南省电力公司桐柏县供电公司 一种氧化铝复合基板材料及其制备方法
WO2021111508A1 (ja) * 2019-12-03 2021-06-10 日本碍子株式会社 接合基板及び接合基板の製造方法
CN114031375A (zh) * 2021-11-26 2022-02-11 潮州市三泰陶瓷有限公司 基于高温烧结的高硬度陶瓷材料及其制备工艺
WO2024111484A1 (ja) * 2022-11-25 2024-05-30 デンカ株式会社 接合体及びパワーモジュール

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960007510A (ko) * 1994-08-18 1996-03-22 오까무라 카네오우 세라믹 히터용 알루미나기 소결재료
JP2000277662A (ja) * 1999-03-26 2000-10-06 Toshiba Corp セラミックス回路基板
JP2005281063A (ja) * 2004-03-30 2005-10-13 Denki Kagaku Kogyo Kk 高純度球状アルミナ粉末、その製造方法及び組成物
JP2006298703A (ja) * 2005-04-21 2006-11-02 Nishimura Togyo Kk 陶磁器熱放射性固体物

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6483512A (en) * 1987-09-24 1989-03-29 Showa Denko Kk Low soda alumina
TW579372B (en) * 1998-07-29 2004-03-11 Sumitomo Chemical Co Process for producing alumina sintered body
JP2006199584A (ja) * 2006-02-17 2006-08-03 Toshiba Corp セラミックス回路基板の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960007510A (ko) * 1994-08-18 1996-03-22 오까무라 카네오우 세라믹 히터용 알루미나기 소결재료
JP2000277662A (ja) * 1999-03-26 2000-10-06 Toshiba Corp セラミックス回路基板
JP2005281063A (ja) * 2004-03-30 2005-10-13 Denki Kagaku Kogyo Kk 高純度球状アルミナ粉末、その製造方法及び組成物
JP2006298703A (ja) * 2005-04-21 2006-11-02 Nishimura Togyo Kk 陶磁器熱放射性固体物

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11498878B2 (en) 2016-02-26 2022-11-15 Heraeus Deutschland GmbH & Co. KG Copper-ceramic composite
US11584696B2 (en) 2016-02-26 2023-02-21 Heraeus Deutschland GmbH & Co. KG Copper-ceramic composite

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CN103503130B (zh) 2016-11-16
JP6129738B2 (ja) 2017-05-17

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