KR101514179B1 - 3차원 형상 측정 장치용 프로브 - Google Patents

3차원 형상 측정 장치용 프로브 Download PDF

Info

Publication number
KR101514179B1
KR101514179B1 KR1020140005043A KR20140005043A KR101514179B1 KR 101514179 B1 KR101514179 B1 KR 101514179B1 KR 1020140005043 A KR1020140005043 A KR 1020140005043A KR 20140005043 A KR20140005043 A KR 20140005043A KR 101514179 B1 KR101514179 B1 KR 101514179B1
Authority
KR
South Korea
Prior art keywords
arm
probe
vertical
dimensional shape
side member
Prior art date
Application number
KR1020140005043A
Other languages
English (en)
Korean (ko)
Other versions
KR20140093621A (ko
Inventor
다카노리 후나바시
Original Assignee
파나소닉 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 파나소닉 주식회사 filed Critical 파나소닉 주식회사
Publication of KR20140093621A publication Critical patent/KR20140093621A/ko
Application granted granted Critical
Publication of KR101514179B1 publication Critical patent/KR101514179B1/ko

Links

Images

Classifications

    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01M—CATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
    • A01M9/00—Special adaptations or arrangements of powder-spraying apparatus for purposes covered by this subclass
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01C—PLANTING; SOWING; FERTILISING
    • A01C7/00—Sowing
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G24/00—Growth substrates; Culture media; Apparatus or methods therefor
    • A01G24/60—Apparatus for preparing growth substrates or culture media

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Environmental Sciences (AREA)
  • Soil Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Insects & Arthropods (AREA)
  • Pest Control & Pesticides (AREA)
  • Wood Science & Technology (AREA)
  • Zoology (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
KR1020140005043A 2013-01-18 2014-01-15 3차원 형상 측정 장치용 프로브 KR101514179B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013007244A JP5838370B2 (ja) 2013-01-18 2013-01-18 三次元形状測定装置用プローブ
JPJP-P-2013-007244 2013-01-18

Publications (2)

Publication Number Publication Date
KR20140093621A KR20140093621A (ko) 2014-07-28
KR101514179B1 true KR101514179B1 (ko) 2015-04-21

Family

ID=51188137

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140005043A KR101514179B1 (ko) 2013-01-18 2014-01-15 3차원 형상 측정 장치용 프로브

Country Status (4)

Country Link
JP (1) JP5838370B2 (ja)
KR (1) KR101514179B1 (ja)
CN (1) CN103940366B (ja)
TW (1) TWI495844B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101799280B1 (ko) 2016-03-29 2017-11-20 이노시스 주식회사 고정밀 3차원 측정시스템 및 이를 이용한 측정방법

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI495839B (zh) * 2014-11-21 2015-08-11 Univ Southern Taiwan Sci & Tec 具五軸量測功能之掃描探頭
CN104698632A (zh) 2015-03-30 2015-06-10 合肥京东方光电科技有限公司 一种基板检测装置及突起高度检测方法
JP6769764B2 (ja) * 2016-07-19 2020-10-14 株式会社ミツトヨ 測定プローブ及び測定装置
JP6797639B2 (ja) * 2016-11-02 2020-12-09 株式会社キーエンス 画像測定装置
CN108801161B (zh) * 2017-04-28 2021-06-29 北京小米移动软件有限公司 测量系统、方法及装置、可读存储介质
JP6799815B2 (ja) * 2018-05-21 2020-12-16 パナソニックＩｐマネジメント株式会社 形状測定用プローブ
JP7213059B2 (ja) * 2018-10-24 2023-01-26 株式会社ミツトヨ 表面性状測定装置およびその制御方法
JP7340761B2 (ja) * 2019-10-28 2023-09-08 パナソニックＩｐマネジメント株式会社 測定用プローブ
TWI765312B (zh) * 2019-11-04 2022-05-21 旺矽科技股份有限公司 邊緣感測器及其點測方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009002734A (ja) 2007-06-20 2009-01-08 Panasonic Corp 三次元測定プローブ
JP2010286475A (ja) 2009-05-15 2010-12-24 Panasonic Corp 三次元形状測定装置用プローブ及び三次元形状測定装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69201985T2 (de) * 1991-02-25 1995-08-24 Renishaw Metrology Ltd Kontaktprobe.
GB9111382D0 (en) * 1991-05-25 1991-07-17 Renishaw Metrology Ltd Improvements in measuring probes
JP3628938B2 (ja) * 2000-06-23 2005-03-16 株式会社ミツトヨ タッチ信号プローブ
EP1443301B1 (fr) * 2003-01-29 2010-02-10 Tesa SA Palpeur orientable
WO2007135857A1 (ja) * 2006-05-18 2007-11-29 Panasonic Corporation 形状測定装置用プローブ及び形状測定装置
JP4291849B2 (ja) * 2006-12-20 2009-07-08 パナソニック株式会社 三次元測定プローブ
JP4850265B2 (ja) * 2009-03-12 2012-01-11 パナソニック株式会社 形状測定装置用プローブ及び形状測定装置
CN103562672B (zh) * 2011-01-19 2016-09-28 瑞尼斯豪公司 用于机床设备的模拟测量探头
CN202350746U (zh) * 2011-10-28 2012-07-25 合肥工业大学 三维微纳米接触扫描探头

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009002734A (ja) 2007-06-20 2009-01-08 Panasonic Corp 三次元測定プローブ
JP2010286475A (ja) 2009-05-15 2010-12-24 Panasonic Corp 三次元形状測定装置用プローブ及び三次元形状測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101799280B1 (ko) 2016-03-29 2017-11-20 이노시스 주식회사 고정밀 3차원 측정시스템 및 이를 이용한 측정방법

Also Published As

Publication number Publication date
JP2014137330A (ja) 2014-07-28
TWI495844B (zh) 2015-08-11
CN103940366A (zh) 2014-07-23
CN103940366B (zh) 2017-01-11
TW201432220A (zh) 2014-08-16
KR20140093621A (ko) 2014-07-28
JP5838370B2 (ja) 2016-01-06

Similar Documents

Publication Publication Date Title
KR101514179B1 (ko) 3차원 형상 측정 장치용 프로브
JP4427580B2 (ja) 形状測定装置用プローブ及び形状測定装置
JP5066589B2 (ja) 三次元形状測定装置用プローブ及び三次元形状測定装置
EP1875158B1 (en) Surface sensing device with optical sensor
JP2005043177A (ja) 倣いプローブ
JP2012237686A (ja) 測定装置
JP5143931B2 (ja) 三次元形状測定装置
JP2017142161A (ja) 三次元座標測定機用プローブヘッド及び接触検出方法
JP4850265B2 (ja) 形状測定装置用プローブ及び形状測定装置
JP4663378B2 (ja) 形状測定装置及び方法
JP2014166675A (ja) パラレル機構
JP5171108B2 (ja) 三次元形状測定装置
JP2007078434A (ja) 三次元位置測定装置、波面収差測定装置および三次元形状測定装置
JP2018169160A (ja) 表面形状測定装置
JP6799815B2 (ja) 形状測定用プローブ
JP2005098936A (ja) 形状測定機
JP3064614B2 (ja) 高精度座標測定装置
JP6294111B2 (ja) 表面形状計測装置
WO2015093244A1 (ja) 測定プローブ及び形状測定装置
JP2009229246A (ja) 形状測定装置
JPH0760115B2 (ja) 表面粘弾性測定方法及びその装置

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
FPAY Annual fee payment

Payment date: 20180329

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20190401

Year of fee payment: 5