KR101475541B1 - 긴 혼을 포함하는 초음파 변환기 - Google Patents

긴 혼을 포함하는 초음파 변환기 Download PDF

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Publication number
KR101475541B1
KR101475541B1 KR1020097020554A KR20097020554A KR101475541B1 KR 101475541 B1 KR101475541 B1 KR 101475541B1 KR 1020097020554 A KR1020097020554 A KR 1020097020554A KR 20097020554 A KR20097020554 A KR 20097020554A KR 101475541 B1 KR101475541 B1 KR 101475541B1
Authority
KR
South Korea
Prior art keywords
horn
transducer
ultrasonic
piezoelectric
ultrasonic vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020097020554A
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English (en)
Korean (ko)
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KR20100014729A (ko
Inventor
질반 튀르레만
아르스 마르틴 폰
Original Assignee
에섹 에스에이
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Publication of KR20100014729A publication Critical patent/KR20100014729A/ko
Application granted granted Critical
Publication of KR101475541B1 publication Critical patent/KR101475541B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004—Wire welding
    • B23K20/005—Capillary welding
    • B23K20/007—Ball bonding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/30—Combinations of transducers with horns, e.g. with mechanical matching means, i.e. front-loaded horns
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01015—Phosphorus [P]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01018—Argon [Ar]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01019—Potassium [K]

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Signal Processing (AREA)
  • Acoustics & Sound (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Otolaryngology (AREA)
  • Wire Bonding (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Dental Tools And Instruments Or Auxiliary Dental Instruments (AREA)
KR1020097020554A 2007-04-04 2008-03-20 긴 혼을 포함하는 초음파 변환기 Expired - Fee Related KR101475541B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH00583/07A CH700015B1 (de) 2007-04-04 2007-04-04 Ultraschall Transducer.
CH583/07 2007-04-04

Publications (2)

Publication Number Publication Date
KR20100014729A KR20100014729A (ko) 2010-02-10
KR101475541B1 true KR101475541B1 (ko) 2014-12-22

Family

ID=39831460

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097020554A Expired - Fee Related KR101475541B1 (ko) 2007-04-04 2008-03-20 긴 혼을 포함하는 초음파 변환기

Country Status (8)

Country Link
US (1) US8106564B2 (enExample)
JP (1) JP5055423B2 (enExample)
KR (1) KR101475541B1 (enExample)
CN (1) CN101678400B (enExample)
CH (1) CH700015B1 (enExample)
MY (1) MY147838A (enExample)
TW (1) TWI387500B (enExample)
WO (1) WO2008122499A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200059246A (ko) * 2017-09-25 2020-05-28 슈운크 소노시스템스 게엠바하 초음파 용접 장치에 용접 금속을 위치시키기 위한 방법 및 초음파 용접 장치

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009003312A1 (de) * 2008-10-14 2010-04-15 Hesse & Knipps Gmbh Bondvorrichtung, Ultraschall-Transducer und Bondverfahren
US8251275B2 (en) 2009-08-12 2012-08-28 Kulicke And Soffa Industries, Inc. Ultrasonic transducers for wire bonding and methods of forming wire bonds using ultrasonic transducers
US8919631B2 (en) * 2012-03-15 2014-12-30 Asm Technology Singapore Pte Ltd Wire bonder including a transducer, a bond head, and a mounting apparatus
EP2843188A1 (en) * 2013-09-03 2015-03-04 Welltec A/S A downhole communication module
JP5930419B2 (ja) * 2014-03-14 2016-06-08 株式会社カイジョー ボンディング装置
KR101935180B1 (ko) * 2014-08-25 2019-01-03 닛산 지도우샤 가부시키가이샤 초음파 접합 장치
DE102015120824A1 (de) * 2015-12-01 2017-06-01 Hesse Gmbh Betriebsverfahren für einen Ultraschalldrahtbonder
EP3603826B1 (en) * 2018-07-31 2023-05-10 Infineon Technologies AG Method for calibrating an ultrasonic bonding machine
TWI741705B (zh) 2020-07-28 2021-10-01 國立中興大學 主軸之外電源供應器
US11798911B1 (en) * 2022-04-25 2023-10-24 Asmpt Singapore Pte. Ltd. Force sensor in an ultrasonic wire bonding device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6135339A (en) * 1998-01-26 2000-10-24 Esec Sa Ultrasonic transducer with a flange for mounting on an ultrasonic welding device, in particular on a wire bonder
JP2001179179A (ja) * 1999-12-27 2001-07-03 Taga Electric Co Ltd 超音波振動子及び複合振動発生超音波振動子
KR200249520Y1 (ko) * 2001-07-05 2001-11-16 주식회사 몰코 연속 초음파용 자기 왜곡 변환기의 구조
KR20020072928A (ko) * 2001-03-13 2002-09-19 한국생산기술연구원 초음파 진동공구를 이용한 금형 다듬질 자동화장치

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JPS6034433B2 (ja) * 1977-03-07 1985-08-08 株式会社豊田中央研究所 超音波変換器
JPS63214381A (ja) * 1987-03-03 1988-09-07 多賀電気株式会社 超音波振動子とその駆動制御方法
ATE102410T1 (de) * 1987-11-25 1994-03-15 Esec Sa Einrichtung zur durchfuehrung der zustellbewegung eines arbeitsorgans zu einer arbeitsstation.
US5305556A (en) * 1989-06-19 1994-04-26 Kopp Verfahrenstechnik Gmbh Method and apparatus for shaping the interior surfaces of bores
US5180093A (en) * 1991-09-05 1993-01-19 Cray Research, Inc. Apparatus for ultrasonic bonding
JPH0574874A (ja) * 1991-09-11 1993-03-26 Hitachi Ltd 金属細線の超音波接合方法および装置
JP2527399B2 (ja) * 1992-09-29 1996-08-21 完テクノソニックス株式会社 ワイヤ―・ボンダ―・システム
JP3151691B2 (ja) * 1992-11-24 2001-04-03 株式会社新川 超音波ホーンのキヤピラリ保持構造
US5364005A (en) * 1993-11-08 1994-11-15 Verity Instruments Inc. Ultrasonic transducer and mount
US5469011A (en) * 1993-12-06 1995-11-21 Kulicke & Soffa Investments, Inc. Unibody ultrasonic transducer
US5603445A (en) * 1994-02-24 1997-02-18 Hill; William H. Ultrasonic wire bonder and transducer improvements
US5578888A (en) * 1994-12-05 1996-11-26 Kulicke And Soffa Investments, Inc. Multi resonance unibody ultrasonic transducer
US5595328A (en) * 1994-12-23 1997-01-21 Kulicke And Soffa Investments, Inc. Self isolating ultrasonic transducer
JPH10303240A (ja) * 1997-04-25 1998-11-13 Mitsubishi Electric Corp ワイヤボンディング装置の超音波ホーン
CN2364981Y (zh) * 1999-03-15 2000-02-23 李智群 一种串联谐振式超声信号源
DE10028774A1 (de) 1999-06-17 2001-09-13 Hesse & Knipps Gmbh Ultraschall-Transducer
SG92747A1 (en) * 1999-11-02 2002-11-19 Esec Trading Sa Bonhead for a wire bonder
DE10114672A1 (de) 2001-03-23 2002-09-26 Hesse & Knipps Gmbh Ultraschallschwinger
DE10160228A1 (de) * 2001-12-07 2003-06-18 Hesse & Knipps Gmbh Kreuztransducer
US7297238B2 (en) * 2003-03-31 2007-11-20 3M Innovative Properties Company Ultrasonic energy system and method including a ceramic horn
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CN2701537Y (zh) * 2004-06-29 2005-05-25 山东强力超声波设备有限公司 超声波振动处理机
US20060060631A1 (en) 2004-09-22 2006-03-23 Kulicke And Soffa Industries, Inc. Motion control device for wire bonder bondhead
JP4271674B2 (ja) * 2005-07-26 2009-06-03 超音波工業株式会社 ワイヤボンディング装置
JP4657964B2 (ja) * 2005-10-07 2011-03-23 株式会社新川 超音波ホーン
WO2007072681A1 (ja) * 2005-12-19 2007-06-28 Konica Minolta Opto, Inc. 切削用振動体、振動切削ユニット、加工装置、成形金型、及び光学素子

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6135339A (en) * 1998-01-26 2000-10-24 Esec Sa Ultrasonic transducer with a flange for mounting on an ultrasonic welding device, in particular on a wire bonder
JP2001179179A (ja) * 1999-12-27 2001-07-03 Taga Electric Co Ltd 超音波振動子及び複合振動発生超音波振動子
KR20020072928A (ko) * 2001-03-13 2002-09-19 한국생산기술연구원 초음파 진동공구를 이용한 금형 다듬질 자동화장치
KR200249520Y1 (ko) * 2001-07-05 2001-11-16 주식회사 몰코 연속 초음파용 자기 왜곡 변환기의 구조

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200059246A (ko) * 2017-09-25 2020-05-28 슈운크 소노시스템스 게엠바하 초음파 용접 장치에 용접 금속을 위치시키기 위한 방법 및 초음파 용접 장치
KR102565064B1 (ko) 2017-09-25 2023-08-08 슈운크 소노시스템스 게엠바하 초음파 용접 장치에 용접 금속을 위치시키기 위한 방법 및 초음파 용접 장치

Also Published As

Publication number Publication date
TW200843887A (en) 2008-11-16
KR20100014729A (ko) 2010-02-10
HK1139097A1 (en) 2010-09-10
JP2010524314A (ja) 2010-07-15
WO2008122499A2 (de) 2008-10-16
JP5055423B2 (ja) 2012-10-24
US20100127599A1 (en) 2010-05-27
WO2008122499A3 (de) 2009-02-26
MY147838A (en) 2013-01-31
US8106564B2 (en) 2012-01-31
TWI387500B (zh) 2013-03-01
CH700015B1 (de) 2010-06-15
CN101678400A (zh) 2010-03-24
CN101678400B (zh) 2011-05-04

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