KR101473709B1 - 전기기계 변환장치의 제조 방법 - Google Patents

전기기계 변환장치의 제조 방법 Download PDF

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Publication number
KR101473709B1
KR101473709B1 KR1020120099744A KR20120099744A KR101473709B1 KR 101473709 B1 KR101473709 B1 KR 101473709B1 KR 1020120099744 A KR1020120099744 A KR 1020120099744A KR 20120099744 A KR20120099744 A KR 20120099744A KR 101473709 B1 KR101473709 B1 KR 101473709B1
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South Korea
Prior art keywords
insulating layer
blocking wall
silicon substrate
substrate
height
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Expired - Fee Related
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KR1020120099744A
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English (en)
Korean (ko)
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KR20130031206A (ko
Inventor
아야코 카토
카즈토시 토라시마
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캐논 가부시끼가이샤
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0075—For improving wear resistance
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0221—Variable capacitors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0369—Static structures characterized by their profile
    • B81B2203/0392—Static structures characterized by their profile profiles not provided for in B81B2203/0376 - B81B2203/0384
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Medical Informatics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Computer Hardware Design (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Manufacturing & Machinery (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
KR1020120099744A 2011-09-20 2012-09-10 전기기계 변환장치의 제조 방법 Expired - Fee Related KR101473709B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2011-204970 2011-09-20
JP2011204970A JP5896665B2 (ja) 2011-09-20 2011-09-20 電気機械変換装置の製造方法

Publications (2)

Publication Number Publication Date
KR20130031206A KR20130031206A (ko) 2013-03-28
KR101473709B1 true KR101473709B1 (ko) 2014-12-17

Family

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KR1020120099744A Expired - Fee Related KR101473709B1 (ko) 2011-09-20 2012-09-10 전기기계 변환장치의 제조 방법

Country Status (5)

Country Link
US (1) US8518733B2 (enExample)
EP (1) EP2572804A3 (enExample)
JP (1) JP5896665B2 (enExample)
KR (1) KR101473709B1 (enExample)
CN (1) CN103011054B (enExample)

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* Cited by examiner, † Cited by third party
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JP5511260B2 (ja) * 2009-08-19 2014-06-04 キヤノン株式会社 容量型電気機械変換装置、及びその感度調整方法
JP5479390B2 (ja) * 2011-03-07 2014-04-23 信越半導体株式会社 シリコンウェーハの製造方法
JP6381195B2 (ja) 2013-10-22 2018-08-29 キヤノン株式会社 静電容量型トランスデューサ及びその作製方法
WO2016113199A1 (en) * 2015-01-16 2016-07-21 Chambre De Commerce Et D'industrie De Region Paris Ile De France (Esiee Paris) Miniature kinetic energy harvester for generating electrical energy from mechanical vibrations
CN105036058B (zh) * 2015-05-27 2016-10-05 华南理工大学 集成化电容式微加工超声换能器及其制备方法
JP6606034B2 (ja) * 2016-08-24 2019-11-13 株式会社日立製作所 容量検出型超音波トランスデューサおよびそれを備えた超音波撮像装置
KR20220098075A (ko) 2021-01-02 2022-07-11 김동호 참여용 골인보드
CN114380271B (zh) * 2021-09-02 2025-07-01 苏州清听声学科技有限公司 一种定向发声屏绝缘凸点压印制作方法

Citations (4)

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JP2006516368A (ja) 2002-08-08 2006-06-29 ザ・ボード・オブ・トラスティーズ・オブ・ザ・レランド・スタンフォード・ジュニア・ユニバーシティ マイクロ機械加工された超音波トランスデューサ及び製造方法
JP2009194934A (ja) 2004-06-03 2009-08-27 Olympus Corp 静電容量型超音波振動子および積層型静電容量型超音波振動子の製造方法
KR100977826B1 (ko) 2007-11-27 2010-08-27 한국전자통신연구원 멤스 마이크로폰 및 그 제조 방법
KR101150186B1 (ko) 2009-12-04 2012-05-25 주식회사 비에스이 멤스 마이크로폰 및 그 제조방법

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JPH0462875A (ja) * 1990-06-25 1992-02-27 Seiko Instr Inc 半導体装置
EP1093571B1 (en) * 1998-07-07 2003-05-21 The Goodyear Tire & Rubber Company Method of fabricating silicon capacitive sensor
US7037746B1 (en) * 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
CN101238754A (zh) * 2005-10-18 2008-08-06 株式会社日立制作所 超声波换能器、超声波探头以及超声波摄像装置
TWI268183B (en) * 2005-10-28 2006-12-11 Ind Tech Res Inst Capacitive ultrasonic transducer and method of fabricating the same
US7745248B2 (en) * 2007-10-18 2010-06-29 The Board Of Trustees Of The Leland Stanford Junior University Fabrication of capacitive micromachined ultrasonic transducers by local oxidation
JP2010004199A (ja) * 2008-06-19 2010-01-07 Hitachi Ltd 超音波トランスデューサおよびその製造方法
JP5594986B2 (ja) 2008-06-24 2014-09-24 キヤノン株式会社 機械電気変換素子及び機械電気変換装置の製造方法
JP5350092B2 (ja) * 2008-06-24 2013-11-27 キヤノン株式会社 機械電気変換素子及び機械電気変換装置の製造方法
US20100173437A1 (en) * 2008-10-21 2010-07-08 Wygant Ira O Method of fabricating CMUTs that generate low-frequency and high-intensity ultrasound
JP5550363B2 (ja) * 2010-01-26 2014-07-16 キヤノン株式会社 静電容量型電気機械変換装置
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JP5677016B2 (ja) * 2010-10-15 2015-02-25 キヤノン株式会社 電気機械変換装置及びその作製方法
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JP5812660B2 (ja) 2011-04-19 2015-11-17 キヤノン株式会社 電気機械変換装置及びその製造方法
JP5751026B2 (ja) * 2011-05-31 2015-07-22 セイコーエプソン株式会社 超音波トランスデューサー、生体センサー、及び超音波トランスデューサーの製造方法
KR101761819B1 (ko) * 2011-08-24 2017-07-26 삼성전자주식회사 초음파 변환기 및 그 제조 방법
JP2013051459A (ja) * 2011-08-30 2013-03-14 Canon Inc 電気機械変換装置及びその製造方法
JP5834657B2 (ja) * 2011-09-12 2015-12-24 セイコーエプソン株式会社 超音波プローブおよび超音波画像診断装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006516368A (ja) 2002-08-08 2006-06-29 ザ・ボード・オブ・トラスティーズ・オブ・ザ・レランド・スタンフォード・ジュニア・ユニバーシティ マイクロ機械加工された超音波トランスデューサ及び製造方法
JP2009194934A (ja) 2004-06-03 2009-08-27 Olympus Corp 静電容量型超音波振動子および積層型静電容量型超音波振動子の製造方法
KR100977826B1 (ko) 2007-11-27 2010-08-27 한국전자통신연구원 멤스 마이크로폰 및 그 제조 방법
KR101150186B1 (ko) 2009-12-04 2012-05-25 주식회사 비에스이 멤스 마이크로폰 및 그 제조방법

Also Published As

Publication number Publication date
US20130071964A1 (en) 2013-03-21
JP5896665B2 (ja) 2016-03-30
EP2572804A3 (en) 2017-12-27
JP2013070112A (ja) 2013-04-18
KR20130031206A (ko) 2013-03-28
CN103011054B (zh) 2015-10-14
US8518733B2 (en) 2013-08-27
EP2572804A2 (en) 2013-03-27
CN103011054A (zh) 2013-04-03

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