KR101456840B1 - 압력 검출기 - Google Patents

압력 검출기 Download PDF

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Publication number
KR101456840B1
KR101456840B1 KR1020130013215A KR20130013215A KR101456840B1 KR 101456840 B1 KR101456840 B1 KR 101456840B1 KR 1020130013215 A KR1020130013215 A KR 1020130013215A KR 20130013215 A KR20130013215 A KR 20130013215A KR 101456840 B1 KR101456840 B1 KR 101456840B1
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KR
South Korea
Prior art keywords
pressure
hole
sensor
seal member
fluid
Prior art date
Application number
KR1020130013215A
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English (en)
Korean (ko)
Other versions
KR20130092464A (ko
Inventor
요시히로 후카노
타다시 우치노
Original Assignee
에스엠씨 가부시키 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 에스엠씨 가부시키 가이샤 filed Critical 에스엠씨 가부시키 가이샤
Publication of KR20130092464A publication Critical patent/KR20130092464A/ko
Application granted granted Critical
Publication of KR101456840B1 publication Critical patent/KR101456840B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0023—Fluidic connecting means for flowthrough systems having a flexible pressure transmitting element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
KR1020130013215A 2012-02-09 2013-02-06 압력 검출기 KR101456840B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-025755 2012-02-09
JP2012025755A JP5594541B2 (ja) 2012-02-09 2012-02-09 圧力検出器

Publications (2)

Publication Number Publication Date
KR20130092464A KR20130092464A (ko) 2013-08-20
KR101456840B1 true KR101456840B1 (ko) 2014-11-03

Family

ID=48868413

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130013215A KR101456840B1 (ko) 2012-02-09 2013-02-06 압력 검출기

Country Status (6)

Country Link
US (1) US9164008B2 (de)
JP (1) JP5594541B2 (de)
KR (1) KR101456840B1 (de)
CN (1) CN103245456B (de)
DE (1) DE102013100889B8 (de)
TW (1) TWI519771B (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101483769B1 (ko) * 2014-04-01 2015-01-16 한국단자공업 주식회사 압력센서
DE102014221067A1 (de) * 2014-10-16 2016-04-21 Robert Bosch Gmbh Drucksensor zur Erfassung eines Drucks eines fluiden Mediums
JP6993626B2 (ja) * 2015-04-10 2022-01-13 タカラベルモント株式会社 炭酸水生成装置
KR101740014B1 (ko) 2015-06-15 2017-05-26 주식회사 아이티엠반도체 압력센서장치 및 그 제조방법
JP6410105B2 (ja) * 2015-09-18 2018-10-24 Smc株式会社 圧力センサ及びその製造方法
CN105444942B (zh) * 2015-12-22 2018-05-22 湖北中南勘察基础工程有限公司 一种注浆压力计底座装置
CN106706200B (zh) * 2016-11-16 2019-02-22 罗子懿 一种压力检测器的制造方法
JP6850152B2 (ja) * 2017-02-22 2021-03-31 サーパス工業株式会社 圧力検出装置
JP6857095B2 (ja) * 2017-07-05 2021-04-14 サーパス工業株式会社 圧力検出装置
CN109199395A (zh) * 2018-07-20 2019-01-15 渝新智能科技（上海）有限公司 一种睡眠状态识别方法、装置及设备
WO2021096706A1 (en) 2019-11-12 2021-05-20 Fresenius Medical Care Deutschland Gmbh Blood treatment systems
WO2021094144A1 (en) 2019-11-12 2021-05-20 Fresenius Medical Care Deutschland Gmbh Blood treatment systems
CA3160850A1 (en) 2019-11-12 2021-05-20 Fresenius Medical Care Deutschland Gmbh Blood treatment systems
CA3160853A1 (en) 2019-11-12 2021-05-20 Fresenius Medical Care Deutschland Gmbh Blood treatment systems
KR20230035405A (ko) * 2020-10-15 2023-03-13 가부시키가이샤 후지킨 압력 센서용의 커버 부품 및 이것을 구비하는 압력 센서 장치
US20220178029A1 (en) * 2020-12-03 2022-06-09 Tokyo Electron Limited Deposition apparatus and deposition method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135639U (ja) * 1984-02-20 1985-09-09 日本特殊陶業株式会社 圧電センサ−
JPH0394132A (ja) * 1989-06-13 1991-04-18 Texas Instr Inc <Ti> 圧力トランスデューサ外装体
JPH08178785A (ja) * 1994-12-26 1996-07-12 Mitsubishi Electric Corp 圧力検出装置とその取付け方法
JP2006125982A (ja) * 2004-10-28 2006-05-18 Denso Corp 圧力検出装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7928697U1 (de) * 1979-10-09 1980-02-21 Ritzinger, Klaus, Dipl.-Ing. Stoesselbetaetigtes druckmessgeraet
JPH02236431A (ja) * 1989-03-10 1990-09-19 Matsushita Electric Ind Co Ltd 圧電型圧力センサ
DE4013403C2 (de) * 1990-04-26 1994-06-30 Infurex Ag Cham Vorrichtung zur Erkennung der Innendruckverhältnisse in flexiblen Leitungen
JPH06265430A (ja) * 1993-03-11 1994-09-22 Nissan Motor Co Ltd 筒内圧センサ
US5542300A (en) 1994-01-24 1996-08-06 Setra Systems, Inc. Low cost, center-mounted capacitive pressure sensor
US5693887A (en) 1995-10-03 1997-12-02 Nt International, Inc. Pressure sensor module having non-contaminating body and isolation member
US5869766A (en) 1995-10-03 1999-02-09 Nt International, Inc. Non-contaminating pressure transducer module
JPH09166512A (ja) 1995-12-15 1997-06-24 T & T:Kk 流体圧力センサー
US5993395A (en) * 1996-04-18 1999-11-30 Sunscope International Inc. Pressure transducer apparatus with disposable dome
US5834652A (en) 1996-08-15 1998-11-10 Mitsubishi Denki Kabushiki Kaisha Pressure sensing device with elastic sealing member and method of easy installation
JP3494594B2 (ja) * 1999-08-05 2004-02-09 忠弘 大見 圧力検出器の取付け構造
JP2002156302A (ja) 2000-11-17 2002-05-31 Surpass Kogyo Kk 圧力センサー
JP4234024B2 (ja) 2004-01-23 2009-03-04 サーパス工業株式会社 インライン型圧力センサー
ITTO20080484A1 (it) * 2008-06-19 2009-12-20 Eltek Spa Dispositivo sensore di pressione
EP2607875B1 (de) * 2011-12-20 2018-02-14 ViscoTec Pumpen- und Dosiertechnik GmbH Durchströmter Drucksensor und Fördereinrichtung mit einem durchströmten Drucksensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135639U (ja) * 1984-02-20 1985-09-09 日本特殊陶業株式会社 圧電センサ−
JPH0394132A (ja) * 1989-06-13 1991-04-18 Texas Instr Inc <Ti> 圧力トランスデューサ外装体
JPH08178785A (ja) * 1994-12-26 1996-07-12 Mitsubishi Electric Corp 圧力検出装置とその取付け方法
JP2006125982A (ja) * 2004-10-28 2006-05-18 Denso Corp 圧力検出装置

Also Published As

Publication number Publication date
US20130205907A1 (en) 2013-08-15
DE102013100889A1 (de) 2013-08-14
DE102013100889B8 (de) 2017-07-27
JP2013160747A (ja) 2013-08-19
DE102013100889B4 (de) 2017-05-04
CN103245456A (zh) 2013-08-14
US9164008B2 (en) 2015-10-20
CN103245456B (zh) 2016-04-06
TW201337227A (zh) 2013-09-16
TWI519771B (zh) 2016-02-01
JP5594541B2 (ja) 2014-09-24
KR20130092464A (ko) 2013-08-20

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