KR101441159B1 - 유기 박막 트랜지스터 기판 및 그의 제조 방법, 및 화상 표시 패널 및 그의 제조 방법 - Google Patents

유기 박막 트랜지스터 기판 및 그의 제조 방법, 및 화상 표시 패널 및 그의 제조 방법 Download PDF

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KR101441159B1
KR101441159B1 KR1020097022309A KR20097022309A KR101441159B1 KR 101441159 B1 KR101441159 B1 KR 101441159B1 KR 1020097022309 A KR1020097022309 A KR 1020097022309A KR 20097022309 A KR20097022309 A KR 20097022309A KR 101441159 B1 KR101441159 B1 KR 101441159B1
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layer
substrate
electrode
thin film
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KR20090128511A (ko
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겐지 가사하라
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스미또모 가가꾸 가부시키가이샤
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment
    • H10D86/021—Manufacture or treatment of multiple TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/484—Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/125—Active-matrix OLED [AMOLED] displays including organic TFTs [OTFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H10K71/233—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers by photolithographic etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Thin Film Transistor (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
KR1020097022309A 2007-03-27 2008-03-25 유기 박막 트랜지스터 기판 및 그의 제조 방법, 및 화상 표시 패널 및 그의 제조 방법 Expired - Fee Related KR101441159B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2007-082278 2007-03-27
JP2007082278A JP5372337B2 (ja) 2007-03-27 2007-03-27 有機薄膜トランジスタ基板及びその製造方法、並びに、画像表示パネル及びその製造方法
PCT/JP2008/055570 WO2008123244A1 (ja) 2007-03-27 2008-03-25 有機薄膜トランジスタ基板及びその製造方法、並びに、画像表示パネル及びその製造方法

Publications (2)

Publication Number Publication Date
KR20090128511A KR20090128511A (ko) 2009-12-15
KR101441159B1 true KR101441159B1 (ko) 2014-09-17

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KR1020097022309A Expired - Fee Related KR101441159B1 (ko) 2007-03-27 2008-03-25 유기 박막 트랜지스터 기판 및 그의 제조 방법, 및 화상 표시 패널 및 그의 제조 방법

Country Status (7)

Country Link
US (2) US8030125B2 (enExample)
EP (1) EP2136606B1 (enExample)
JP (1) JP5372337B2 (enExample)
KR (1) KR101441159B1 (enExample)
CN (1) CN101647320B (enExample)
TW (1) TWI442815B (enExample)
WO (1) WO2008123244A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4953166B2 (ja) * 2007-11-29 2012-06-13 カシオ計算機株式会社 表示パネルの製造方法
US8617920B2 (en) * 2010-02-12 2013-12-31 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
KR101084192B1 (ko) * 2010-02-16 2011-11-17 삼성모바일디스플레이주식회사 유기 발광 표시 장치
JP5701861B2 (ja) 2010-04-22 2015-04-15 出光興産株式会社 有機薄膜トランジスタ
KR101839930B1 (ko) * 2010-12-29 2018-04-27 삼성디스플레이 주식회사 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법
DE102011086689B4 (de) 2011-11-21 2017-02-16 Osram Oled Gmbh Verfahren zum Herstellen eines opto-elektronischen Bauelements
US9012259B2 (en) 2013-01-17 2015-04-21 Stmicroelectronics S.R.L. Thin film transistors formed by organic semiconductors using a hybrid patterning regime
CN103560211B (zh) * 2013-11-13 2017-04-05 深圳市华星光电技术有限公司 有机电致发光器件的制作方法及制作的有机电致发光器件
CN105742311B (zh) * 2014-12-11 2018-11-13 昆山国显光电有限公司 一种显示装置及其制备方法
CN111837458B (zh) * 2018-03-02 2023-06-13 夏普株式会社 显示装置及其制造方法
JP7138673B2 (ja) * 2020-03-31 2022-09-16 キヤノントッキ株式会社 電子デバイスの製造方法、測定方法、及び、成膜装置
TWI787720B (zh) 2021-01-25 2022-12-21 友達光電股份有限公司 有機半導體基板

Citations (3)

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JP2006005329A (ja) 2004-06-17 2006-01-05 Samsung Sdi Co Ltd 薄膜トランジスタ，その製造方法及び該薄膜トランジスタを備える平板ディスプレイ装置
JP2006093652A (ja) 2004-09-20 2006-04-06 Samsung Sdi Co Ltd 有機薄膜トランジスタ及びこれを備えた平板表示装置
JP2006186332A (ja) 2004-11-30 2006-07-13 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法

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EP0925112A1 (en) 1996-09-10 1999-06-30 Imperial Chemical Industries Plc Fluorination catalyst and process
US6380672B1 (en) 1997-08-21 2002-04-30 Seiko Epson Corporation Active matrix display device
US6661180B2 (en) * 2001-03-22 2003-12-09 Semiconductor Energy Laboratory Co., Ltd. Light emitting device, driving method for the same and electronic apparatus
JP2004171861A (ja) * 2002-11-19 2004-06-17 Seiko Epson Corp 有機ｅｌ装置の製造方法及び有機ｅｌ装置、並びに電子機器
US7985677B2 (en) 2004-11-30 2011-07-26 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing semiconductor device
KR100683766B1 (ko) 2005-03-30 2007-02-15 삼성에스디아이 주식회사 평판표시장치 및 그의 제조방법
US7737629B2 (en) * 2005-03-31 2010-06-15 Seiko Epson Corporation Light emitting device, method of manufacturing the same, and electronic apparatus
JP2006310289A (ja) * 2005-03-31 2006-11-09 Seiko Epson Corp 発光装置、発光装置の製造方法、及び電子機器
JP2006294484A (ja) * 2005-04-13 2006-10-26 Konica Minolta Holdings Inc 有機エレクトロルミネッセンス素子とその製造方法及び有機エレクトロルミネッセンス表示装置
KR100626082B1 (ko) * 2005-07-06 2006-09-20 삼성에스디아이 주식회사 평판표시장치
JP2007019014A (ja) 2005-07-06 2007-01-25 Samsung Sdi Co Ltd 平板表示装置及びその製造方法

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Publication number Priority date Publication date Assignee Title
JP2006005329A (ja) 2004-06-17 2006-01-05 Samsung Sdi Co Ltd 薄膜トランジスタ，その製造方法及び該薄膜トランジスタを備える平板ディスプレイ装置
JP2006093652A (ja) 2004-09-20 2006-04-06 Samsung Sdi Co Ltd 有機薄膜トランジスタ及びこれを備えた平板表示装置
JP2006186332A (ja) 2004-11-30 2006-07-13 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法

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Publication number Publication date
CN101647320B (zh) 2012-12-12
EP2136606A1 (en) 2009-12-23
EP2136606B1 (en) 2012-05-16
US20110309366A1 (en) 2011-12-22
US8324627B2 (en) 2012-12-04
EP2136606A4 (en) 2011-04-06
KR20090128511A (ko) 2009-12-15
TWI442815B (zh) 2014-06-21
CN101647320A (zh) 2010-02-10
TW200904241A (en) 2009-01-16
JP2008243582A (ja) 2008-10-09
US20100072464A1 (en) 2010-03-25
US8030125B2 (en) 2011-10-04
JP5372337B2 (ja) 2013-12-18
WO2008123244A1 (ja) 2008-10-16

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