KR101417061B1 - 레이저광 발생 장치 - Google Patents

레이저광 발생 장치 Download PDF

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Publication number
KR101417061B1
KR101417061B1 KR1020080028174A KR20080028174A KR101417061B1 KR 101417061 B1 KR101417061 B1 KR 101417061B1 KR 1020080028174 A KR1020080028174 A KR 1020080028174A KR 20080028174 A KR20080028174 A KR 20080028174A KR 101417061 B1 KR101417061 B1 KR 101417061B1
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KR
South Korea
Prior art keywords
external resonator
external
signal
optical path
resonator
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Expired - Fee Related
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KR1020080028174A
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English (en)
Korean (ko)
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KR20080088440A (ko
Inventor
히사시 마스다
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소니 주식회사
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35Non-linear optics
    • G02F1/353Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0121Operation of devices; Circuit arrangements, not otherwise provided for in this subclass
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35Non-linear optics
    • G02F1/3501Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
    • G02F1/3507Arrangements comprising two or more nonlinear optical devices
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00Function characteristic
    • G02F2203/15Function characteristic involving resonance effects, e.g. resonantly enhanced interaction

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)
KR1020080028174A 2007-03-28 2008-03-27 레이저광 발생 장치 Expired - Fee Related KR101417061B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007085305A JP4420051B2 (ja) 2007-03-28 2007-03-28 レーザ光発生装置
JPJP-P-2007-00085305 2007-03-28

Publications (2)

Publication Number Publication Date
KR20080088440A KR20080088440A (ko) 2008-10-02
KR101417061B1 true KR101417061B1 (ko) 2014-07-08

Family

ID=39365817

Family Applications (1)

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KR1020080028174A Expired - Fee Related KR101417061B1 (ko) 2007-03-28 2008-03-27 레이저광 발생 장치

Country Status (6)

Country Link
US (1) US7773643B2 (enExample)
EP (1) EP1975681B1 (enExample)
JP (1) JP4420051B2 (enExample)
KR (1) KR101417061B1 (enExample)
CN (1) CN101276125B (enExample)
TW (1) TW200900828A (enExample)

Cited By (1)

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KR102068125B1 (ko) * 2018-11-28 2020-01-20 주식회사 한화 파장 선택 장치

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US20100253769A1 (en) * 2008-09-04 2010-10-07 Laser Light Engines Optical System and Assembly Method
US8830564B2 (en) * 2009-01-23 2014-09-09 Ipg Photonics Corporation Apparatus for controlling resonant conditions within nonlinear resonator
US10678061B2 (en) 2009-09-03 2020-06-09 Laser Light Engines, Inc. Low etendue illumination
DE102010022585B4 (de) * 2010-06-03 2012-03-08 Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zum Erzeugen von phasenkohärenten Lichtfeldern mit vorgebbarem Wert ihrer Frequenz und optischer Frequenz-Synthesizer
KR101047171B1 (ko) 2011-01-11 2011-07-07 김영태 엔코더용 레이저조사장치
JP6166032B2 (ja) 2012-11-06 2017-07-19 浜松ホトニクス株式会社 半導体デバイス検査装置及び半導体デバイス検査方法
US9509112B2 (en) 2013-06-11 2016-11-29 Kla-Tencor Corporation CW DUV laser with improved stability
US9293882B2 (en) 2013-09-10 2016-03-22 Kla-Tencor Corporation Low noise, high stability, deep ultra-violet, continuous wave laser
JP6508058B2 (ja) * 2013-12-20 2019-05-08 ソニー株式会社 光源装置及び波長変換方法
CN103837166B (zh) * 2014-03-03 2016-01-20 中国人民解放军国防科学技术大学 光程差匹配的远程光纤干涉系统相位噪声抑制方法与装置
EP2990866A1 (en) * 2014-08-25 2016-03-02 Ludwig-Maximilians-Universität München Method and device for cavity-enhanced broadband intrapulse difference frequency generation
FR3047118B1 (fr) * 2016-01-22 2018-03-02 Centre National De La Recherche Scientifique - Cnrs - Dispositif de generation d’un faisceau de photons polychromatique et spatialement autoadapte
US10175555B2 (en) 2017-01-03 2019-01-08 KLA—Tencor Corporation 183 nm CW laser and inspection system
CN112005547B (zh) * 2018-04-26 2022-09-13 索尼半导体解决方案公司 光学相位控制装置和显示装置
CN109346918B (zh) * 2018-12-26 2020-09-15 吉林大学 一种便携式阻抗自适应激光二极管驱动模块
KR102255408B1 (ko) * 2019-12-13 2021-05-24 주식회사 루트로닉 레이저 장치
US20240012203A1 (en) * 2020-11-19 2024-01-11 Telefonaktiebolaget Lm Ericsson (Publ) Optical filter and methods
CN114578323B (zh) * 2020-12-01 2025-05-13 上海禾赛科技有限公司 注入锁定控制方法、注入锁定控制装置及激光雷达
CN113189768B (zh) * 2021-04-12 2022-11-11 山西大学 一种提取真空边模的装置和方法
JP7192156B2 (ja) * 2021-05-21 2022-12-19 レーザーテック株式会社 光源装置及び検査装置
KR102773663B1 (ko) * 2022-12-23 2025-02-27 한국과학기술연구원 레이저 장치 및 그를 포함하는 레이저 시스템
CN116380424A (zh) * 2023-03-24 2023-07-04 浙江可胜技术股份有限公司 镜场反射光线大气传输损失率测量系统、方法及控制系统

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US5621744A (en) * 1994-10-18 1997-04-15 Sony Corporation Continuous-wave ultraviolet laser light generating apparatus
US6285691B1 (en) 1998-05-01 2001-09-04 Sony Corporation Laser light generating method and apparatus
JP2002311467A (ja) 2001-04-11 2002-10-23 Sony Corp レーザー光発生装置及び方法

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JPH07154381A (ja) * 1993-11-30 1995-06-16 Hitachi Ltd データ転送装置
JP3514073B2 (ja) * 1997-06-10 2004-03-31 株式会社ニコン 紫外レーザ装置及び半導体露光装置
JP3997450B2 (ja) * 1998-03-13 2007-10-24 ソニー株式会社 波長変換装置
JP2001300301A (ja) 2000-04-24 2001-10-30 Nitto Denko Corp ガス吸着体及びその使用方法
JP2002099007A (ja) * 2000-09-21 2002-04-05 Sony Corp レーザ光発生装置およびそれを用いた光学装置
WO2002075874A1 (en) * 2001-03-16 2002-09-26 Intel Corporation (A Corporation Of Delaware) Method and apparatus for tuning a laser
JP3885529B2 (ja) 2001-08-06 2007-02-21 ソニー株式会社 レーザー光発生装置
US7110426B2 (en) * 2001-08-06 2006-09-19 Sony Corporation Laser beam generating apparatus
DE102005015497B4 (de) 2005-03-31 2008-10-16 Nlg-New Laser Generation Gmbh Stabilisierung kaskadierter optischer Resonatoren

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US5621744A (en) * 1994-10-18 1997-04-15 Sony Corporation Continuous-wave ultraviolet laser light generating apparatus
US6285691B1 (en) 1998-05-01 2001-09-04 Sony Corporation Laser light generating method and apparatus
JP2002311467A (ja) 2001-04-11 2002-10-23 Sony Corp レーザー光発生装置及び方法
US20020171912A1 (en) * 2001-04-11 2002-11-21 Sony Corporation Laser light generating apparatus and method

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Publication number Priority date Publication date Assignee Title
KR102068125B1 (ko) * 2018-11-28 2020-01-20 주식회사 한화 파장 선택 장치

Also Published As

Publication number Publication date
TWI379146B (enExample) 2012-12-11
JP4420051B2 (ja) 2010-02-24
US7773643B2 (en) 2010-08-10
JP2008242270A (ja) 2008-10-09
EP1975681B1 (en) 2013-12-18
CN101276125B (zh) 2011-03-23
TW200900828A (en) 2009-01-01
US20080240176A1 (en) 2008-10-02
KR20080088440A (ko) 2008-10-02
CN101276125A (zh) 2008-10-01
EP1975681A1 (en) 2008-10-01

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