KR101389402B1 - 복수개의 기판의 파지 및 유지 장치 및 전지 도금 장치 - Google Patents

복수개의 기판의 파지 및 유지 장치 및 전지 도금 장치 Download PDF

Info

Publication number
KR101389402B1
KR101389402B1 KR1020087005705A KR20087005705A KR101389402B1 KR 101389402 B1 KR101389402 B1 KR 101389402B1 KR 1020087005705 A KR1020087005705 A KR 1020087005705A KR 20087005705 A KR20087005705 A KR 20087005705A KR 101389402 B1 KR101389402 B1 KR 101389402B1
Authority
KR
South Korea
Prior art keywords
substrates
frame members
contact
substrate
receiving device
Prior art date
Application number
KR1020087005705A
Other languages
English (en)
Korean (ko)
Other versions
KR20080034992A (ko
Inventor
크리스티안 쉬미트
Original Assignee
게부르. 쉬미트 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 게부르. 쉬미트 게엠베하 filed Critical 게부르. 쉬미트 게엠베하
Publication of KR20080034992A publication Critical patent/KR20080034992A/ko
Application granted granted Critical
Publication of KR101389402B1 publication Critical patent/KR101389402B1/ko

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/06—Wires; Strips; Foils
    • C25D7/0614—Strips or foils
    • C25D7/0621—In horizontal cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/005—Contacting devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06—Suspending or supporting devices for articles to be coated
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06—Suspending or supporting devices for articles to be coated
    • C25D17/08—Supporting racks, i.e. not for suspending
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing the conductive pattern
    • H05K3/241—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus
KR1020087005705A 2005-08-09 2006-08-09 복수개의 기판의 파지 및 유지 장치 및 전지 도금 장치 KR101389402B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005039100A DE102005039100A1 (de) 2005-08-09 2005-08-09 Einrichtung zur Aufnahme bzw. Halterung mehrerer Substrate und Galvanisiereinrichtung
DE102005039100.1 2005-08-09
PCT/EP2006/007903 WO2007017279A1 (de) 2005-08-09 2006-08-09 Einrichtung zur aufnahme bzw. halterung mehrerer substrate und galvanisiereinrichtung

Publications (2)

Publication Number Publication Date
KR20080034992A KR20080034992A (ko) 2008-04-22
KR101389402B1 true KR101389402B1 (ko) 2014-05-27

Family

ID=37075698

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087005705A KR101389402B1 (ko) 2005-08-09 2006-08-09 복수개의 기판의 파지 및 유지 장치 및 전지 도금 장치

Country Status (13)

Country Link
US (1) US20080142358A1 (de)
EP (1) EP1913179B1 (de)
JP (1) JP4908509B2 (de)
KR (1) KR101389402B1 (de)
CN (1) CN101316952B (de)
AT (1) ATE472000T1 (de)
AU (1) AU2006278145B2 (de)
CA (1) CA2617502A1 (de)
DE (2) DE102005039100A1 (de)
ES (1) ES2348148T3 (de)
IL (1) IL189256A0 (de)
NO (1) NO20081174L (de)
WO (1) WO2007017279A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007054093B3 (de) 2007-11-13 2009-07-23 Rena Sondermaschinen Gmbh Vorrichtung und Verfahren zum Transport von flachem Gut in Durchlaufanlagen
DE102008022282A1 (de) * 2008-04-24 2009-10-29 Gebr. Schmid Gmbh & Co. Einrichtung und Verfahren zur Behandlung von Silizium-Wafern oder flachen Gegenständen
DE102008026199B3 (de) 2008-05-30 2009-10-08 Rena Gmbh Vorrichtung und Verfahren zur elektrischen Kontaktierung von ebenem Gut in Durchlaufanlagen
DE102009018360A1 (de) 2009-04-23 2010-11-04 Rena Gmbh Verfahren und Vorrichtung zur elektrolytischen Behandlung von Solarzellen
TWI487442B (zh) 2009-05-13 2015-06-01 Atotech Deutschland Gmbh 用於處理待處理平面材料的方法、處理台與組件
DE102010008233A1 (de) * 2010-02-11 2011-08-11 Schmid Technology GmbH, 68723 Vorrichtung und Verfahren zum Transport von Substraten
WO2011120714A2 (de) 2010-04-01 2011-10-06 Somont Gmbh Solarzellen und herstellverfahren dafür
DE102010014555A1 (de) 2010-04-01 2011-10-06 Somont Gmbh Verfahren und Vorrichtung zur elektrochemischen Metallisierung von flachem Gut
CN203795007U (zh) * 2010-09-23 2014-08-27 太阳能公司 用于电镀的不可渗透基板载体
DE102010042481A1 (de) 2010-10-15 2012-04-19 Roth & Rau Ag Verfahren zur galvanischen Erzeugung von Kontaktstrukturen auf Wafern für die Produktion von Solarzellen und Modulen
WO2013050805A1 (de) * 2011-10-06 2013-04-11 Roth & Rau Ag Substratwendeeinrichtung
KR101392779B1 (ko) * 2012-04-05 2014-05-08 주식회사 호진플라텍 태양전지용 양면 전기 도금을 위한 기판 캐리어 장치
DE102014225270A1 (de) 2014-12-09 2016-06-09 Gebr. Schmid Gmbh Kontaktrahmen für elektrochemische Substratbeschichtung
US20170145577A1 (en) * 2015-11-19 2017-05-25 Rohm And Haas Electronic Materials Llc Method of electroplating low internal stress copper deposits on thin film substrates to inhibit warping
US11078025B2 (en) * 2017-11-21 2021-08-03 Chemcut Holdings LLC Lightweight roller
DE102018111868A1 (de) * 2018-05-17 2019-11-21 Meyer Burger (Germany) Gmbh Substratträger

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5078852A (en) * 1990-10-12 1992-01-07 Microelectronics And Computer Technology Corporation Plating rack
US5914016A (en) * 1996-07-17 1999-06-22 Gebr. Schmid Gmbh & Co. Apparatus for the treatment of articles
US6319383B1 (en) * 1997-08-21 2001-11-20 Atotech Deutschland Gmbh Device and method for evening out the thickness of metal layers on electrical contact points on items that are to be treated
US20050061665A1 (en) * 2003-08-06 2005-03-24 Sunpower Corporation Substrate carrier for electroplating solar cells

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3347771A (en) * 1965-01-25 1967-10-17 Bendix Corp Lead-tin alloy plating fixture for silicon
US3824176A (en) * 1972-08-28 1974-07-16 Buckbee Mears Co Matrix holder
US4192729A (en) * 1978-04-03 1980-03-11 Burroughs Corporation Apparatus for forming an aluminum interconnect structure on an integrated circuit chip
US4378281A (en) * 1981-06-25 1983-03-29 Napco, Inc. High speed plating of flat planar workpieces
CA1190514A (en) * 1981-06-25 1985-07-16 George R. Scanlon High speed plating of flat planar workpieces
ES2024439B3 (es) * 1986-02-28 1992-03-01 Schering Ag Berlin Und Bergkamen Armazones alargados y piezas correspondientes para la fijacion soltable de placas de circuito impreso que han de galvanizarse, y placas de circuito impreso correspondientes.
US5135636A (en) * 1990-10-12 1992-08-04 Microelectronics And Computer Technology Corporation Electroplating method
JPH04263097A (ja) * 1991-02-16 1992-09-18 Murata Mfg Co Ltd 電子部品の外部電極形成方法
US6395163B1 (en) * 1992-08-01 2002-05-28 Atotech Deutschland Gmbh Process for the electrolytic processing especially of flat items and arrangement for implementing the process
DE4330346C1 (de) * 1993-09-08 1994-11-03 Stohrer Doduco Gmbh & Co Vorrichtung zum anodischen Oxidieren von Werkstücken
DE4340346A1 (de) * 1993-11-26 1995-06-01 Audi Ag Verwendung und Herstellverfahren für ein Deformationselement im Fahrzeugbau sowie Deformationselement
JPH08302497A (ja) * 1995-05-10 1996-11-19 Hitachi Cable Ltd めっき装置用給電ロールおよびロール支持機構
JPH10226897A (ja) * 1997-02-19 1998-08-25 Dainippon Printing Co Ltd メッキ方法および装置
US5869139A (en) * 1997-02-28 1999-02-09 International Business Machines Corporation Apparatus and method for plating pin grid array packaging modules
DE19842974A1 (de) * 1998-09-19 2000-03-23 Schmid Gmbh & Co Geb Einrichtung zur Behandlung von Gegenständen, insbesondere Galvanisiereinrichtung für Leiterplatten
US6080289A (en) * 1998-10-28 2000-06-27 International Business Machines Corporation Electroplating apparatus with self-cleaning contacts
KR20010104651A (ko) * 2000-05-08 2001-11-26 히가시 데쓰로 액 처리 장치 및 액 처리 방법
US6524463B2 (en) * 2001-07-16 2003-02-25 Technic, Inc. Method of processing wafers and other planar articles within a processing cell
GB0218259D0 (en) * 2002-08-06 2002-09-11 Money Controls Ltd Fraud prevention
JP2005023398A (ja) * 2003-07-04 2005-01-27 Kaneko Denki Kk メッキ方法およびメッキ装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5078852A (en) * 1990-10-12 1992-01-07 Microelectronics And Computer Technology Corporation Plating rack
US5914016A (en) * 1996-07-17 1999-06-22 Gebr. Schmid Gmbh & Co. Apparatus for the treatment of articles
US6319383B1 (en) * 1997-08-21 2001-11-20 Atotech Deutschland Gmbh Device and method for evening out the thickness of metal layers on electrical contact points on items that are to be treated
US20050061665A1 (en) * 2003-08-06 2005-03-24 Sunpower Corporation Substrate carrier for electroplating solar cells

Also Published As

Publication number Publication date
US20080142358A1 (en) 2008-06-19
JP4908509B2 (ja) 2012-04-04
CA2617502A1 (en) 2007-02-15
ES2348148T3 (es) 2010-11-30
CN101316952A (zh) 2008-12-03
AU2006278145A1 (en) 2007-02-15
AU2006278145B2 (en) 2010-11-18
EP1913179B1 (de) 2010-06-23
NO20081174L (no) 2008-03-05
IL189256A0 (en) 2008-08-07
KR20080034992A (ko) 2008-04-22
JP2009504906A (ja) 2009-02-05
WO2007017279A1 (de) 2007-02-15
CN101316952B (zh) 2011-09-07
DE502006007271D1 (de) 2010-08-05
DE102005039100A1 (de) 2007-02-15
EP1913179A1 (de) 2008-04-23
ATE472000T1 (de) 2010-07-15

Similar Documents

Publication Publication Date Title
KR101389402B1 (ko) 복수개의 기판의 파지 및 유지 장치 및 전지 도금 장치
US20170025300A1 (en) System architecture for vacuum processing
JP6816132B2 (ja) 基板製造のためのウエハプレートおよびマスク器具
KR20160137989A (ko) 기판의 양면 처리를 위한 시스템 및 방법
US20220098750A1 (en) Workpiece Holding Jig and Electroplating Apparatus
KR101696935B1 (ko) 태양 전지를 제조하는 방법 및 소자
KR20120067934A (ko) 반도체 웨이퍼 프로세싱을 위한 고 효율 정전 척 조립체
CN102332538B (zh) 清洁装置
CN110959051A (zh) 工件保持夹具和电镀装置
EP3725916A1 (de) Verbesserte elektrolyseplatte
RU2010102905A (ru) Устройство и способ для электрического контактирования плоского изделия в проходных установках
CN113330146A (zh) 工件保持夹具以及电镀装置
JP2017515301A (ja) 保護カバーを有する基板キャリアシステム
CN111621832B (zh) 镀覆装置
TW200806822A (en) Method and apparatus for handling flat and fragile substrate
KR960002124B1 (ko) 도금 장치
KR20140075033A (ko) 쉐도우 마스크 및 이를 구비하는 기판 처리 장치
MX2008001801A (en) Device for picking up and holding a plurality of substrates and an electroplating device
EP3080018B1 (de) Transportelement zum transport von plattenförmigen substraten zur elektrolytischen verzinkung in einem bad sowie vorrichtung und verfahren zur elektrolytischen verzinkung solcher substrate
US20220372647A1 (en) Substrate holder, substrate plating device equipped therewith, and electrical contact
KR101739010B1 (ko) 기판처리시스템 및 그에 사용되는 트레이
JP2018056452A (ja) 搬送トレイ、及び搬送トレイの給電装置
CN111471982A (zh) 基板载具、基板载具阵列和气相沉积装置及其使用方法
KR102100315B1 (ko) 플라즈마 반응기 용기 및 어셈블리, 플라즈마 처리를 실행하는 방법
KR20200030651A (ko) 인쇄회로기판용 개별 전기 도금장치

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20180417

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20190411

Year of fee payment: 6