KR101325542B1 - 자력 센서 - Google Patents

자력 센서 Download PDF

Info

Publication number
KR101325542B1
KR101325542B1 KR1020127015722A KR20127015722A KR101325542B1 KR 101325542 B1 KR101325542 B1 KR 101325542B1 KR 1020127015722 A KR1020127015722 A KR 1020127015722A KR 20127015722 A KR20127015722 A KR 20127015722A KR 101325542 B1 KR101325542 B1 KR 101325542B1
Authority
KR
South Korea
Prior art keywords
magnetic
conversion element
magnetic flux
generating source
flux generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020127015722A
Other languages
English (en)
Korean (ko)
Other versions
KR20120093382A (ko
Inventor
슈우이치 사토
Original Assignee
캐논 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20120093382A publication Critical patent/KR20120093382A/ko
Application granted granted Critical
Publication of KR101325542B1 publication Critical patent/KR101325542B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G01L5/0076—Force sensors associated with manufacturing machines
    • G01L5/009—Force sensors associated with material gripping devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
KR1020127015722A 2009-11-26 2010-11-11 자력 센서 Expired - Fee Related KR101325542B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2009-269186 2009-11-26
JP2009269186A JP5500957B2 (ja) 2009-11-26 2009-11-26 磁気式力覚センサ
PCT/JP2010/070522 WO2011065267A2 (en) 2009-11-26 2010-11-11 Magnetic force sensor

Publications (2)

Publication Number Publication Date
KR20120093382A KR20120093382A (ko) 2012-08-22
KR101325542B1 true KR101325542B1 (ko) 2013-11-07

Family

ID=44067022

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127015722A Expired - Fee Related KR101325542B1 (ko) 2009-11-26 2010-11-11 자력 센서

Country Status (5)

Country Link
US (2) US8978488B2 (https=)
JP (1) JP5500957B2 (https=)
KR (1) KR101325542B1 (https=)
CN (1) CN102667433B (https=)
WO (1) WO2011065267A2 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5735882B2 (ja) * 2011-08-02 2015-06-17 Ntn株式会社 磁気式荷重センサ
JP6168868B2 (ja) * 2012-06-29 2017-07-26 キヤノン株式会社 力覚センサ及び力覚センサを備えたロボットアーム
US9245551B2 (en) * 2014-03-18 2016-01-26 Seagate Technology Llc Nitrogen-vacancy nanocrystal magnetic source sensor
WO2016145011A1 (en) * 2015-03-09 2016-09-15 Worcester Polytechnic Institute Soft-body deformation and force sensing
CN104729768A (zh) * 2015-03-09 2015-06-24 苏州森特克测控技术有限公司 一种压力传感器
JP6443256B2 (ja) * 2015-07-31 2018-12-26 株式会社デンソー センサ装置
CN108344531A (zh) * 2017-01-23 2018-07-31 中国科学院沈阳自动化研究所 一种基于电磁感应的三维测力传感器
JP6843726B2 (ja) 2017-10-17 2021-03-17 キヤノン株式会社 力覚センサ及びロボット
KR102002814B1 (ko) 2018-06-29 2019-10-17 (주)이디에스 변위 익스텐소미터
US11879792B2 (en) 2019-02-18 2024-01-23 Xela Robotics Co., Ltd. Magnetic sensing system, detection device, and magnetic interference offset method
KR102135402B1 (ko) 2019-07-16 2020-07-17 (주)이디에스 변위 익스텐소미터
DE102019212091A1 (de) * 2019-08-13 2021-02-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrosystem und verfahren zum herstellen desselben
CN111693185A (zh) * 2020-07-27 2020-09-22 广州特种机电设备检测研究院 一种基于矫顽力的起重机轮压测试装置及测试方法
EP4113085B1 (en) * 2021-06-28 2025-03-26 Melexis Technologies SA Force sensor with target on semiconductor package

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000214002A (ja) 1999-01-21 2000-08-04 Fuji Univance Corp 荷重センサ
JP2009075083A (ja) 2007-08-28 2009-04-09 Canon Inc 磁気式力センサ

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB804849A (en) * 1950-04-12 1958-11-26 Sperry Gyroscope Co Ltd Improvements in or relating to accelerometers and to control systems employing accelerometers
US2983211A (en) * 1957-03-19 1961-05-09 Kollsman Instr Corp Cabin pressurization-pressure monitor system
US3274826A (en) * 1962-09-28 1966-09-27 Ingram Maxwell Direct reading shaft horsepower meter systems
FR1364146A (fr) 1963-05-10 1964-06-19 Crouzet Sa Procédé et dispositif pour la mesure de forces par application de l'effet hall
DE3110107A1 (de) * 1981-03-16 1982-09-23 Mannesmann Rexroth GmbH, 8770 Lohr Kraftmessverfahren und kraftmessvorrichtung zur steuerung des krafthebers eines ackerschleppers
CN85103183A (zh) 1985-04-26 1987-04-08 株式会社岛津制作所 电磁力发生装置
JPS63149569A (ja) * 1986-12-12 1988-06-22 Canon Inc 加速度計
DE3843869A1 (de) 1988-12-24 1990-06-28 Deere & Co Kraftsensor zur bestimmung von zug- und druckkraeften
CN2241875Y (zh) * 1995-11-20 1996-12-04 上海铁道大学 霍尔型土壤压力传感器
WO2002086694A1 (fr) * 2001-04-19 2002-10-31 Asahi Kasei Emd Corporation Dispositif pointeur
JP2004325328A (ja) * 2003-04-25 2004-11-18 Asahi Kasei Electronics Co Ltd 多分力検出器
WO2005053146A2 (en) * 2003-11-20 2005-06-09 University Of Virginia Patent Foundation Method and system for enhanced resolution, automatically- calibrated position sensor
JP4201140B2 (ja) 2004-05-10 2008-12-24 株式会社コルグ 操作子
DE102007009389A1 (de) * 2007-02-20 2008-08-21 Bizerba Gmbh & Co. Kg Kraftmessvorrichtung und Verfahren zur Signalauswertung
JP5113613B2 (ja) 2008-04-30 2013-01-09 理想科学工業株式会社 画像形成装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000214002A (ja) 1999-01-21 2000-08-04 Fuji Univance Corp 荷重センサ
JP2009075083A (ja) 2007-08-28 2009-04-09 Canon Inc 磁気式力センサ

Also Published As

Publication number Publication date
US20120227513A1 (en) 2012-09-13
KR20120093382A (ko) 2012-08-22
WO2011065267A2 (en) 2011-06-03
US9574953B2 (en) 2017-02-21
US8978488B2 (en) 2015-03-17
JP5500957B2 (ja) 2014-05-21
CN102667433A (zh) 2012-09-12
CN102667433B (zh) 2015-04-29
US20150068326A1 (en) 2015-03-12
JP2011112511A (ja) 2011-06-09
WO2011065267A3 (en) 2011-11-17

Similar Documents

Publication Publication Date Title
KR101325542B1 (ko) 자력 센서
KR101270359B1 (ko) 자기력 센서
JP5408508B2 (ja) 位置検出装置
JP5474195B2 (ja) 磁性体検出装置
US8558539B2 (en) Stroke amount detecting device
JP5684442B2 (ja) 磁気センサ装置
JP2005195481A (ja) 磁気式リニアポジションセンサ
EP3084456A1 (en) Magnetic field sensor and method for sensing relative location of the magnetic field sensor and a target object along a movement line
JP2007232718A (ja) サーボ補償加速度計
JP5677065B2 (ja) 磁気式力覚センサ
JP2022517862A (ja) 長尺リニア永久磁石モータのための位置センサ
JP2000258109A (ja) 変位量測定装置
JP2000258449A (ja) 磁気式加速度センサ及び加速度検知装置
US9068817B2 (en) Location detector device
CN210638641U (zh) 抗干扰磁场的位移传感器、马达组件以及变速箱
JP2004117198A (ja) 荷重検出装置
JP2011180009A (ja) 位置センサ及び位置検出方法
JPH1138035A (ja) 加速度センサ
JP2015087213A (ja) 磁気エンコーダ
KR20210076387A (ko) 전자식 브레이크 장치

Legal Events

Date Code Title Description
A201 Request for examination
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20160926

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20170925

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20180928

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20211031

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20211031