KR101319768B1 - 진공 배기 헤드 - Google Patents

진공 배기 헤드 Download PDF

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Publication number
KR101319768B1
KR101319768B1 KR1020100071825A KR20100071825A KR101319768B1 KR 101319768 B1 KR101319768 B1 KR 101319768B1 KR 1020100071825 A KR1020100071825 A KR 1020100071825A KR 20100071825 A KR20100071825 A KR 20100071825A KR 101319768 B1 KR101319768 B1 KR 101319768B1
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KR
South Korea
Prior art keywords
vacuum
vacuum exhaust
space
product
head
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KR1020100071825A
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English (en)
Korean (ko)
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KR20110019700A (ko
Inventor
나오후미 고토
교스케 우치다
Original Assignee
쥬가이로 고교 가부시키가이샤
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Publication of KR20110019700A publication Critical patent/KR20110019700A/ko
Application granted granted Critical
Publication of KR101319768B1 publication Critical patent/KR101319768B1/ko

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  • Engineering & Computer Science (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Gasket Seals (AREA)
  • Diaphragms And Bellows (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
KR1020100071825A 2009-08-20 2010-07-26 진공 배기 헤드 KR101319768B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009191096A JP4773552B2 (ja) 2009-08-20 2009-08-20 真空排気ヘッド
JPJP-P-2009-191096 2009-08-20

Publications (2)

Publication Number Publication Date
KR20110019700A KR20110019700A (ko) 2011-02-28
KR101319768B1 true KR101319768B1 (ko) 2013-10-17

Family

ID=43776962

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100071825A KR101319768B1 (ko) 2009-08-20 2010-07-26 진공 배기 헤드

Country Status (4)

Country Link
JP (1) JP4773552B2 (zh)
KR (1) KR101319768B1 (zh)
CN (1) CN101996832B (zh)
TW (1) TWI446401B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103560064A (zh) * 2013-11-13 2014-02-05 天津兰普里克照明电器有限公司 红外线加热石英灯管排气系统
JPWO2021090782A1 (zh) * 2019-11-06 2021-05-14

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0139923Y1 (ko) * 1994-02-16 1999-05-15 이대원 진공흡착헤드
JP2001099344A (ja) * 1999-09-29 2001-04-10 Advance Denki Kogyo Kk 背圧制御弁
JP2001195983A (ja) * 2000-01-07 2001-07-19 Nec Corp プラズマディスプレイパネルの製造装置とその製造方法
JP2002329464A (ja) * 2001-05-01 2002-11-15 Chugai Ro Co Ltd ガラスパネルのチップ管と排気ヘッドとの接続方法およびその真空排気装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3093641B2 (ja) * 1996-06-27 2000-10-03 鹿児島日本電気株式会社 蛍光表示管の排気装置
JP3966891B2 (ja) * 2006-01-19 2007-08-29 大亜真空株式会社 排気装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0139923Y1 (ko) * 1994-02-16 1999-05-15 이대원 진공흡착헤드
JP2001099344A (ja) * 1999-09-29 2001-04-10 Advance Denki Kogyo Kk 背圧制御弁
JP2001195983A (ja) * 2000-01-07 2001-07-19 Nec Corp プラズマディスプレイパネルの製造装置とその製造方法
JP2002329464A (ja) * 2001-05-01 2002-11-15 Chugai Ro Co Ltd ガラスパネルのチップ管と排気ヘッドとの接続方法およびその真空排気装置

Also Published As

Publication number Publication date
CN101996832B (zh) 2013-09-11
TWI446401B (zh) 2014-07-21
TW201108299A (en) 2011-03-01
JP4773552B2 (ja) 2011-09-14
CN101996832A (zh) 2011-03-30
KR20110019700A (ko) 2011-02-28
JP2011044308A (ja) 2011-03-03

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