KR101319768B1 - 진공 배기 헤드 - Google Patents
진공 배기 헤드 Download PDFInfo
- Publication number
- KR101319768B1 KR101319768B1 KR1020100071825A KR20100071825A KR101319768B1 KR 101319768 B1 KR101319768 B1 KR 101319768B1 KR 1020100071825 A KR1020100071825 A KR 1020100071825A KR 20100071825 A KR20100071825 A KR 20100071825A KR 101319768 B1 KR101319768 B1 KR 101319768B1
- Authority
- KR
- South Korea
- Prior art keywords
- vacuum
- vacuum exhaust
- space
- product
- head
- Prior art date
Links
Images
Landscapes
- Engineering & Computer Science (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Manufacturing & Machinery (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Gasket Seals (AREA)
- Diaphragms And Bellows (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009191096A JP4773552B2 (ja) | 2009-08-20 | 2009-08-20 | 真空排気ヘッド |
JPJP-P-2009-191096 | 2009-08-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20110019700A KR20110019700A (ko) | 2011-02-28 |
KR101319768B1 true KR101319768B1 (ko) | 2013-10-17 |
Family
ID=43776962
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020100071825A KR101319768B1 (ko) | 2009-08-20 | 2010-07-26 | 진공 배기 헤드 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4773552B2 (zh) |
KR (1) | KR101319768B1 (zh) |
CN (1) | CN101996832B (zh) |
TW (1) | TWI446401B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103560064A (zh) * | 2013-11-13 | 2014-02-05 | 天津兰普里克照明电器有限公司 | 红外线加热石英灯管排气系统 |
JPWO2021090782A1 (zh) * | 2019-11-06 | 2021-05-14 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0139923Y1 (ko) * | 1994-02-16 | 1999-05-15 | 이대원 | 진공흡착헤드 |
JP2001099344A (ja) * | 1999-09-29 | 2001-04-10 | Advance Denki Kogyo Kk | 背圧制御弁 |
JP2001195983A (ja) * | 2000-01-07 | 2001-07-19 | Nec Corp | プラズマディスプレイパネルの製造装置とその製造方法 |
JP2002329464A (ja) * | 2001-05-01 | 2002-11-15 | Chugai Ro Co Ltd | ガラスパネルのチップ管と排気ヘッドとの接続方法およびその真空排気装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3093641B2 (ja) * | 1996-06-27 | 2000-10-03 | 鹿児島日本電気株式会社 | 蛍光表示管の排気装置 |
JP3966891B2 (ja) * | 2006-01-19 | 2007-08-29 | 大亜真空株式会社 | 排気装置 |
-
2009
- 2009-08-20 JP JP2009191096A patent/JP4773552B2/ja not_active Expired - Fee Related
-
2010
- 2010-06-08 TW TW99118534A patent/TWI446401B/zh not_active IP Right Cessation
- 2010-07-26 KR KR1020100071825A patent/KR101319768B1/ko not_active IP Right Cessation
- 2010-08-16 CN CN 201010258919 patent/CN101996832B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR0139923Y1 (ko) * | 1994-02-16 | 1999-05-15 | 이대원 | 진공흡착헤드 |
JP2001099344A (ja) * | 1999-09-29 | 2001-04-10 | Advance Denki Kogyo Kk | 背圧制御弁 |
JP2001195983A (ja) * | 2000-01-07 | 2001-07-19 | Nec Corp | プラズマディスプレイパネルの製造装置とその製造方法 |
JP2002329464A (ja) * | 2001-05-01 | 2002-11-15 | Chugai Ro Co Ltd | ガラスパネルのチップ管と排気ヘッドとの接続方法およびその真空排気装置 |
Also Published As
Publication number | Publication date |
---|---|
CN101996832B (zh) | 2013-09-11 |
TWI446401B (zh) | 2014-07-21 |
TW201108299A (en) | 2011-03-01 |
JP4773552B2 (ja) | 2011-09-14 |
CN101996832A (zh) | 2011-03-30 |
KR20110019700A (ko) | 2011-02-28 |
JP2011044308A (ja) | 2011-03-03 |
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