201108299 六、發明說明： I：發明所屬之技術領域鴒 發明領域 本發明係有關一種具有製品之排氣口之密封機構的真 空排氣頭。 L· Λ. Ί 發明背景 在電聚顯示面板等之製造步驟中，必需進行將製品内 部之空氣真空排氣，且因應必要而封入氣體，並將製品之 排氣口密封之作業。為了實現高度真空，必需一面將=品 加熱-面抽真空。作為排氣口之密封方法，有將安裝於: 氣口之排氣管(ehip tube博斷的方法、與_航性之黏著 劑(熔融金屬等)將密封構件（蓋)黏接於排氣口 、 ㈣利文獻1至3所載之真空排氣頭具有接製品 之排氣口的周圍而密封之内部空間计 真空而可將製品抽真空。又，該内部空間抽 空間保持密封構件且在抽真空後將密封構1:有：: 排氣口的棒桿，然而進行棒桿之滑動部的“困:製= 在製==必需不對棒桿之轴封部加熱。… 文獻1至3之真空錢 内對真空賴社•熱， 不了在爐 熱爐一外原封不動地進行抽真 =之= 融黏著劑並以密封構件:封:::::型的加熱〜 户轧口之際，也不對棒桿之軸 3 201108299 封部施加過度的熱。 另一方面，於真空排氣步驟的效率化，如專利文獻4所 载，係以使則呆持多數製品且可將真空排氣頭押壓至各製 品的搬運車，且在加熱爐加熱各搬運車，而同時進行多數 製品之抽真空者為佳。 然而，如上所述，設置將密封構件押壓至排氣口的棒 桿時，由於為了棒桿的軸封而無法在爐内加熱真空排氣頭 全體，因此無法提高生產效率。 【習知技術文獻】 【專利文獻】 【專利文獻1】特開平6-139935號公報 【專利文獻2】特開2001-195983號公報 【專利文獻3】特開2004-55480號公報 【專利文獻4】特許第3866085號公報 【發明内容;1 發明概要 【發明所欲解決的課題】 鑒於前述之問題點，本發明係以提供一種在高溫之爐 内將密封構件押壓至製品之排氣口而可密封排氣口之真空 排氣頭為課題。 【用以解決課題之手段】 為解決前述課題，本發明之真空排氣頭包含：頭本體， 係劃分真空排氣空間及差壓驅動空間，前述真空排氣空間 係開口因製品而密封且可抽真空者，而前述差壓驅動空間 201108299 係與則述開口位於相反側’且藉由可變形之隔壁而與前述 真空排氣空間區分，與前述真空排氣空間獨立並可抽真空 者；及保持構件，係支撐於前述隔壁，保持用以密封前述 製品之排氣口的密封構件，且藉由前述隔壁之變形而可朝 前述頭本體之開口移動者。 依據該構成，將真空排氣空間與差壓驅動空間同時抽 真空，將製品内之氣體真空排氣且將空氣導入至差壓驅動 空間，藉以使隔壁朝真空排氣空間侧膨脹，以使保持構件 向製品移動，而可將密封構件押壓至製品的排氣口並密 封。又，在該構成中，由於對保持構件之驅動機構不需: 封，所以即使在爐内加熱真空排氣頭的狀態也可驅動。 又，本發明之真空排氣頭也可為前述保持構件係支撑 於前述隔壁，且設於朝前述開口延伸之棒桿的前端，於= 述真空排氣空間内更具有可沿軸方向滑動地保持前 之導引構件。 干 依據該構成，棒桿之姿勢及移動方向係藉由導引構件 而被限制，所㈣持構件可蚊移動且魏 又，於本發明之真空排氣頭 確貫讀。 而接丄吉而 引这差壓驅動空間其斷 面積也可杈刚述真空排氣空間小。 呵 依據該構成’於真空排氣 » . ^ ¥ 】兴差壓驅動空間之邊 由於可有冋低差，而可將隔壁固定於該 利用使差壓驅動空間之容積較小，在將直办 壓驅動空關咖真鱗，由，4氣空間與差 τ 田於差壓驅叙ίΛϊΒ日, 低，在製品抽真-成前，保持構 5 201108299 製品之排出口。 又，於本發明之真空排氣頭，也可在前述開口之周圍 具有與前述製品密接之〇環。 依據該構成，可確保真空排氣頭與製品之間的氣密。 【發明的效果】 依據本發明，藉由真空排氣頭内部之隔壁的變形而驅 動保持構件，且將密封製品之排氣口之密封構件押壓至製 品，所以保持構件及保持構件之驅動機構完全地收容於真 空排氣頭的内部。因此，不需驅動機構之軸封，由於沒有 不耐熱的部分，所以可在加熱爐内將真空排氣頭全體曝露 於高溫。藉此，可簡化真空排氣步驟及增大處理能力。 圖式簡單說明 第1圖係本發明之第1實施形態之真空排氣頭的斷面 圖。 第2圖係第1圖之真空排氣頭之排氣口密封時的斷面 圖。 第3圖係具有複數第1圖之真空排氣頭之處理搬運車。 第4圖係本發明之第2實施形態之真空排氣頭的斷面 圖。 【實施方式3 較佳實施例之詳細說明 【用以實施發明之形態】 以下，就有關本發明之實施形態一面參考圖面一面予 以說明。於第1圖顯示了本發明之第1實施形態的真空排氣 6 201108299 頭1。真空排氣頭1係用以將如電漿顯示器面板之中空製品2 與真空源3連接，且將製品2之内部氣體真空排氣並密封者。 真空排氣頭1具有上部開口且呈概略有底筒狀之頭本 體4。頭本體4之内部空間藉由橡膠製之隔壁（diaphragm) 7而區分成上側之斷面積較大的真空排氣空間5與下側（與 開口相反側）之斷面積較小的差壓驅動空間6。隔壁7係連 接固定於真空排氣空間5與差壓驅動空間6之高低差部分。 隔壁7之中央固定有朝向頭本體4之開口且垂直延伸之 棒桿8。棒桿8於上端具有保持用以密封製品2之排氣口 9的 密封構件10之桌狀保持構件ib又，棒桿8係可滑動地保持 於配設在真空排氣空間5内之板狀的導引構件12 。且容許空 氣通過之穴12a形成於導引構件12。 頭本體4具有分別開口於真空排氣空間5及差壓驅動空 間6之排氣路13、14。真空排氣空間5及差壓驅動空間6經由 耐壓軟管15、16而分別連接於用以從真空源3供給真空壓 (抽真空）之真空迴路17。 又，具有Ο環18以於上端包圍開口 ’而氣密地密接於製 再者，頭本體4具有使自冷水源19供給之冷卻水循環 的冷卻流路2〇。 加真二迴路17透過真空遮斷閥21及流量調節閥22而將真 ^ ^門5連接於真空源3，且包含具有用以檢測真空排 -門5内壓之壓力開關23的管路、與從連接於真空排氣空 J迷盲路分歧並透過連絡閥24連接於差壓驅動空間6 且具有用以檢測差壓驅動空間6内壓的壓力開關25之管路。 201108299 連接於真空排氣空間5之管路設有用以使真空排氣空 間5P級至大氣之真輯氣空間開放閥％，且連接於差壓驅 動空間6之管路設有透過流量調節閥27而使差壓驅動空間6 開放至大氣之差壓驅動空間開放闊28。 穴丄心吩1，吧丹有壓力計29、30以使 目視確認真空排氣空間5及差壓驅動空間6之内壓。 以真空排氣頭i將製品2抽真空時，將塗布了黏接劑η 之饮封構㈣載置於棒桿8之保持構件u。棒桿8在將真空 排乳空間5及差壓驅動空間6開放至大氣的狀態下，將保梏 ΓΓ1保持於真空排氣空間5内，並使密封構件1Q從配置於 、空排氣頭1上之製品2的排氣口9充分地離開。而且，此 時，隔壁7㈣桿8及保持構件11等之重量㈣微撓曲於差 壓驅動空間6側。 —面將真空排氣則及製品2配置於加熱爐内進行加 熱’一面開放真空迴路17之連絡閥24後開放真空遮斷闕 21 ’藉以同時將真空排氣空間5及差壓驅動空間6抽真空。 真空排氣頭1藉由0環18而與製品2密接，且通過配設於:空 排氣空間5内之導引構件12的穴12a及排氣路13，而將製品工2 内之氣體朝真空迴路17排氣。 —此時’真空排氣空間5由於與製品2之内部空間連通因 此合積較大’容積較小的差壓驅動空間6先成為真空。因 此’橡膠製的隔壁7係以朝差㈣動空間6侧突出的方式彈 ，變形，且使棒桿8下降。藉此，製品2之抽真空完成前棒 桿8並未上升而使黏著劑31抵接於製品2。 201108299 製品2之抽真空完成時，由於真空排氣空間項差壓驅 動空間6之壓力差消失，因此隔壁7將棒桿8支樓於與將真空 排氣空間5及差壓驅動空間6開放至大氣時大致相同的: 置。 真空迴路η在將製品2抽真空後，例如也可具有氣體供 給路以將電魏㈣®板狀發光氣料微量的氣體經由 真空排氣空間5而導入至製品2之内部。 製品2之抽真空完成(壓力開關23檢測預定之真空壓）， 必要時若對製品2供應氣體，將真空迴路17之連絡_閉鎖 之後’開放錢驅動空間開放_，而只使差壓驅動空間6 開放至大氣。如此，差壓驅動空間6之内料於相較真空排 氣空間5之内Μ為高’所以如第2圖所示’隔壁7朝真空排氣 空間5侧突出’而將棒桿8推舉。藉此，保持構件u向頭本 體4之開口移動’將密封構件1〇押壓至製品2，並藉密封橋 件10覆蓋排氣口9。 頭本體4係藉由在冷卻流路19内循環之冷卻水冷卻，並 將橡膠製之隔壁7及⑽18維持在耐熱溫度以下。無法藉由 冷部水直接冷卻之製品2的排氣σ9周圍，由於伴隨爐内溫 度之上升而胍度變〶’所以使塗布於被押壓之密封構件 的黏著劑31熔解。 之後’就在將差壓驅動空間6之關維持較真空排氣空 間5為尚且押壓密封構件1G的情況，下降爐内溫度以固化點 者劑3卜藉此而可確實排氣σ 9之因密封構件職產生之密 201108299 接著，從爐内將真空排氣頭丨與製品2一起取出後，閉 鎖真空遮斷閥21後開放真空排氣空間開放閥％，藉以將真 空排氣wmi放至大氣。如此，由於再度使真空排氣空間 5與差壓驅動m6之壓力差消失，因此隔壁7下降並使棒桿 8後退。此時，利用真空排氣空間5成為大氣壓，〇環之密著 力也消失，以將真空排氣頭i與製品2分離，而可將製品2送 至下一個步驟。 於真空排氣頭1，隔壁7係收容被於以冷卻水冷卻之頭 本體4之内部，而非直接曝露於加熱爐之熱。因此，隔壁7 即使疋耐熱性差，也可在將真空排氣頭丨配置於加熱爐内之 狀態’不破壞並可膨脹收縮。而且，也可變更冷卻水而使 用其他種類之冷卻流體。 又，於真空排氣頭1 ’藉由流量調節閥27之開放度調節 差壓驅動空間6的開放至大氣之速度，即空氣朝差壓動空間 6的供給速度’而可調節棒桿8之上升速度，並可防止黏著 劑31之飛散。 本發明之真空排氣頭1由於可以小型且在爐内與製品2 共同加熱，因此如第3圖所示，並排安裝於保持多數製。口 2 之搬運車32，而可同時將多數製品2真空排氣並密封。 第4圖係顯示本發明之第2實施形態的真空排氣頭&。 於本實施形態中，與第1實施形態相同之構成要素職予相同 符號而省略重複說明。 真空排氣頭la在棒桿8之下端設有圓板33，且藉由利用 頭本體4之底壁與圓板33密封兩端之金屬製的伸缩囊而 201108299 區劃差壓魅l^ 動空間6。即，在本實施形態中，伸縮囊34係區 刀真工排I空間5與差壓驅動空間6的隔壁。201108299 VI. Description of the Invention: I: TECHNICAL FIELD OF THE INVENTION The present invention relates to a vacuum exhaust head having a sealing mechanism for an exhaust port of a product. L· Λ. Ί BACKGROUND OF THE INVENTION In the manufacturing steps of an electropolymer display panel or the like, it is necessary to perform an operation of evacuating the air inside the product, and sealing the gas as necessary, and sealing the exhaust port of the product. In order to achieve a high vacuum, it is necessary to vacuum the surface of the product. As a method of sealing the exhaust port, there is an exhaust pipe attached to the air port (the method of breaking the ehip tube, and the adhesive member (melting metal, etc.) bonding the sealing member (cover) to the exhaust port) (4) The vacuum exhaust heads disclosed in the documents 1 to 3 have the periphery of the exhaust port of the product and the inner space of the seal is vacuumed to evacuate the product. Further, the inner space pumping space holds the sealing member and is pumping After the vacuum, the sealing structure 1: has:: the rod of the exhaust port, but the sliding portion of the rod is "sleepy: system = in the system = must not heat the shaft seal of the rod.... Documents 1 to 3 In the vacuum, it is not necessary to vacuum the heat in the heat of the furnace, and it is not possible to carry out the vacuuming of the furnace = the melt adhesive and the sealing member: the sealing of the type::::: type ~ when the household is rolling, It does not apply excessive heat to the shaft of the shaft 3 201108299. On the other hand, the efficiency of the vacuum evacuation step, as disclosed in Patent Document 4, is such that a plurality of products are held and the vacuum exhaust head can be used. Pressing the trucks to each product, and heating the trucks in the furnace, while making the majority However, as described above, when the rod for pressing the sealing member to the exhaust port is provided, since the entire vacuum exhaust head cannot be heated in the furnace for the shaft seal of the rod, it cannot be improved. [Production] [Patent Document 1] Japanese Laid-Open Patent Publication No. JP-A No. Hei. No. Hei. No. Hei. Patent Document 4: Patent No. 3866085 [Invention Summary] 1 SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] In view of the foregoing problems, the present invention provides a row in which a sealing member is pressed into a product in a furnace at a high temperature. In order to solve the above problems, the vacuum exhaust head of the present invention includes a head body that divides a vacuum exhaust space and a differential pressure. In the driving space, the vacuum evacuation space is sealed by the product and can be evacuated, and the differential pressure driving space 201108299 is located on the opposite side from the opening and is deformable a partition wall different from the vacuum evacuation space, independent of the vacuum evacuation space and capable of evacuating; and a holding member supported by the partition wall to hold a sealing member for sealing the exhaust port of the product, and by According to this configuration, the vacuum venting space and the differential pressure driving space are simultaneously evacuated, and the gas in the product is evacuated and the air is introduced into the differential pressure driving space. Thereby, the partition wall is expanded toward the vacuum exhaust space side to move the holding member toward the product, and the sealing member can be pressed to the exhaust port of the product and sealed. Further, in this configuration, due to the driving mechanism of the holding member No need to: Seal, so even if the vacuum exhaust head is heated in the furnace, it can be driven. Further, in the vacuum exhausting head according to the present invention, the holding member may be supported by the partition wall, and may be provided at a front end of the rod extending toward the opening, and further slidable in the axial direction in the vacuum evacuation space. Keep the front guiding member. According to this configuration, the posture and the moving direction of the rod are restricted by the guiding member, and the (4) holding member can be moved by the mosquito and can be read by the vacuum head of the present invention. In addition, the cross-sectional area of the differential pressure drive space can also be reduced by the vacuum space. According to the composition 'in vacuum exhaust» . ^ ¥ 】 The side of the differential pressure drive space can be fixed due to the difference in the gap, and the partition wall can be fixed to the use of the differential pressure drive space, the volume will be small The pressure-driven air-conditioner is really scaled, and the 4 gas space and the difference τ field are in the pressure of the pressure, and the low-pressure, in the product, before the production, the construction of the 5 201108299 products. Further, in the vacuum vent head of the present invention, an annulus which is in close contact with the above-mentioned product may be provided around the opening. According to this configuration, airtightness between the vacuum exhaust head and the product can be ensured. [Effects of the Invention] According to the present invention, the holding member is driven by the deformation of the partition wall inside the vacuum exhaust head, and the sealing member of the exhaust port of the sealing product is pressed against the product, so that the driving mechanism of the holding member and the holding member It is completely contained inside the vacuum exhaust head. Therefore, the shaft seal of the drive mechanism is not required, and since there is no heat-resistant portion, the entire vacuum exhaust head can be exposed to a high temperature in the heating furnace. Thereby, the vacuum evacuation step and the processing capability can be simplified. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a vacuum exhaust head according to a first embodiment of the present invention. Fig. 2 is a cross-sectional view showing the sealing of the exhaust port of the vacuum exhaust head of Fig. 1. Fig. 3 is a processing truck having a vacuum exhaust head of the first drawing. Fig. 4 is a cross-sectional view showing a vacuum exhaust head according to a second embodiment of the present invention. [Embodiment 3] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [Embodiment for Carrying Out the Invention] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 shows a first embodiment of a vacuum exhaust gas 6 201108299 according to a first embodiment of the present invention. The vacuum exhaust head 1 is for connecting a hollow product 2 such as a plasma display panel to a vacuum source 3, and vacuum-tightening and sealing the internal gas of the product 2. The vacuum exhaust head 1 has a head body 4 having an upper opening and having a substantially bottomed cylindrical shape. The inner space of the head main body 4 is divided into a differential pressure driving space in which the vacuum exhaust space 5 having a large sectional area on the upper side and the lower side (the side opposite to the opening) have a small sectional area by a rubber diaphragm 7 6. The partition wall 7 is connected and fixed to the difference between the vacuum evacuation space 5 and the differential pressure drive space 6. A rod 8 extending toward the opening of the head body 4 and extending vertically is fixed to the center of the partition wall 7. The rod 8 has a table-like holding member ib at the upper end of the sealing member 10 for holding the exhaust port 9 for sealing the product 2, and the rod 8 is slidably held in a plate shape disposed in the vacuum evacuation space 5. Guide member 12 . A hole 12a through which air is allowed to pass is formed in the guiding member 12. The head main body 4 has exhaust passages 13, 14 which are respectively opened in the vacuum exhaust space 5 and the differential pressure drive space 6. The vacuum evacuation space 5 and the differential pressure drive space 6 are respectively connected to a vacuum circuit 17 for supplying a vacuum pressure (vacuum) from the vacuum source 3 via the pressure resistant hoses 15, 16. Further, the cymbal ring 18 is provided with the cymbal ring 18 so as to surround the opening ‘ at the upper end and is airtightly attached thereto. The head main body 4 has a cooling flow path 2 that circulates the cooling water supplied from the cold water source 19. The second circuit 17 is connected to the vacuum source 3 through the vacuum interrupting valve 21 and the flow regulating valve 22, and includes a pipe having a pressure switch 23 for detecting the internal pressure of the vacuum exhaust door 5, A pipe that is connected to the differential pressure drive space 6 through the connection valve 24 and has a pressure switch 25 for detecting the internal pressure of the differential pressure drive space 6 is branched from the vacuum exhaust passage. 201108299 The pipeline connected to the vacuum exhaust space 5 is provided with a genuine air space open valve % for making the vacuum exhaust space 5P to the atmosphere, and the pipeline connected to the differential pressure drive space 6 is provided with a flow regulating valve 27 The differential pressure driving space that opens the differential pressure driving space 6 to the atmosphere is open wide 28 . The point is 1 and the bar has pressure gauges 29 and 30 to visually confirm the internal pressure of the vacuum evacuation space 5 and the differential pressure drive space 6. When the product 2 is evacuated by the vacuum head i, the beverage seal (4) coated with the adhesive η is placed on the holding member u of the rod 8. The rod 8 holds the heat retaining space 1 in the vacuum evacuation space 5 while the vacuum draining space 5 and the differential pressure driving space 6 are opened to the atmosphere, and the sealing member 1Q is disposed from the air exhaust head 1 The exhaust port 9 of the upper product 2 is sufficiently separated. Further, at this time, the weight (4) of the partition wall 7 (four) rod 8 and the holding member 11 is slightly deflected on the side of the differential pressure driving space 6. - The surface is evacuated and the product 2 is placed in a heating furnace for heating. 'A vacuum valve 17 is opened after opening the vacuum valve 17 and the vacuum is blocked 阙 21'. At the same time, the vacuum exhaust space 5 and the differential pressure driving space 6 are simultaneously pumped. vacuum. The vacuum exhaust head 1 is in close contact with the product 2 by the 0 ring 18, and the gas in the product 2 is passed through the hole 12a and the exhaust path 13 of the guiding member 12 disposed in the empty exhaust space 5. Venting toward the vacuum circuit 17. - At this time, the vacuum evacuation space 5 is connected to the internal space of the product 2, so that the vacuum drive space 6 is first vacuumed. Therefore, the partition wall 7 made of rubber is elastically deformed so as to protrude toward the side of the differential (four) moving space 6, and the rod 8 is lowered. Thereby, the rod 8 is not raised before the vacuuming of the product 2 is completed, and the adhesive 31 abuts against the product 2. 201108299 When the vacuuming of the product 2 is completed, since the pressure difference between the vacuum exhaust space and the differential pressure driving space 6 disappears, the partition wall 7 opens the rod 8 and the vacuum exhaust space 5 and the differential pressure driving space 6 to The atmosphere is roughly the same: set. After evacuating the product 2, the vacuum circuit η may, for example, also have a gas supply path for introducing a trace amount of gas of the electric (4) plate-like luminescent material into the inside of the product 2 via the vacuum evacuation space 5. The vacuuming of the product 2 is completed (the pressure switch 23 detects the predetermined vacuum pressure), and if necessary, if the gas is supplied to the product 2, the connection of the vacuum circuit 17 is _blocked, and the open money driving space is opened, and only the differential pressure driving space is provided. 6 Open to the atmosphere. As a result, the inside of the differential pressure driving space 6 is higher than the inside of the vacuum exhaust space 5, so that the partition wall 7 protrudes toward the vacuum evacuation space 5 as shown in Fig. 2, and the rod 8 is pushed. Thereby, the holding member u is moved toward the opening of the head body 4, and the sealing member 1 is pressed against the product 2, and the exhaust port 9 is covered by the sealing bridge 10. The head main body 4 is cooled by the cooling water circulating in the cooling flow path 19, and the rubber partition walls 7 and (10) 18 are maintained below the heat resistant temperature. The periphery of the exhaust gas σ9 of the product 2 which cannot be directly cooled by the cold water is melted by the temperature rise in the furnace, so that the adhesive 31 applied to the pressed sealing member is melted. After that, when the differential pressure driving space 6 is kept close to the vacuum evacuation space 5 and the sealing member 1G is pressed, the temperature in the furnace is lowered to cure the point agent 3, whereby the exhaust gas σ 9 can be surely discharged. Sealed by the sealing member, 201108299 Next, after the vacuum head 丨 is taken out from the furnace together with the product 2, the vacuum venting valve 21 is opened and the vacuum venting opening valve % is opened, thereby discharging the vacuum venting wmi atmosphere. Thus, since the pressure difference between the vacuum evacuation space 5 and the differential pressure drive m6 is again lost, the partition wall 7 is lowered and the rod 8 is retracted. At this time, the vacuum evacuation space 5 becomes atmospheric pressure, and the adhesion force of the ankle ring disappears, so that the vacuum exhaust head i is separated from the product 2, and the product 2 can be sent to the next step. In the vacuum exhaust head 1, the partition wall 7 accommodates the inside of the main body 4 which is cooled by the cooling water, instead of directly exposing it to the heat of the heating furnace. Therefore, even if the heat insulating property of the partition wall 7 is poor, the vacuum exhaust head 丨 can be disposed in the heating furnace without breaking and expanding and contracting. Further, other types of cooling fluids may be used instead of the cooling water. Further, the vacuum exhaust head 1' adjusts the speed of the opening of the differential pressure drive space 6 to the atmosphere by the opening degree of the flow regulating valve 27, that is, the supply speed of the air toward the differential pressure space 6, and the rod 8 can be adjusted. The rising speed and the scattering of the adhesive 31 can be prevented. Since the vacuum head 1 of the present invention can be used in a small size and heated together with the product 2 in the furnace, as shown in Fig. 3, it is mounted side by side in a conventional manner. The cart 32 of the port 2 can vacuum and seal most of the articles 2 at the same time. Fig. 4 is a view showing a vacuum head & of a second embodiment of the present invention. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof will not be repeated. The vacuum exhausting head la is provided with a circular plate 33 at the lower end of the rod 8 and is sealed by a metal telescopic bladder which is sealed at both ends by the bottom wall of the head body 4 and the circular plate 33. 6. That is, in the present embodiment, the bellows 34 is a partition wall between the space I and the differential pressure drive space 6.
真空排氣頭la， 藉由真空排氣空間5與差壓驅 動空間6之题士 M t力差’使伸縮囊34伸縮，而可將棒桿8升降。 在以上之實施形態中，藉由導引構件12限制棒桿8之姿 勢及移動方& <肉，然而，若隔壁之膨脹及收縮安定，也可省 略導？丨構株1 -) ’且伴隨此也可降低頭本體4之高度。 ^抑又’將從由空氣壓縮機等構成之壓縮空氣源35，以調 郎&36壓力調整後之壓縮空氣經由壓空供給閥37，而供給 至連接於本實施形態之真空迴路17的差壓驅動空間6之管 路。 产將差壓驅動空間6開放至大氣之後，或是省略開放至大 : 而在將連絡閥2 4及差壓驅動空間開放閥2 8閉鎖的狀 〜利用將麗縮空氣供給至差壓驅動空間6，而可以更強的 力里將费封構件10押壓至製品2 。藉此，即使差壓驅動空間 6之斷面積小時’也可確保密封構件10對製品2之密接。 又’在分離真空排氣頭la與製品2時，不開放真空排氣 空間開放閥26 ’而開放連絡閥24並將壓縮空氣供給至真空 排氣空間5 ’則可快速地將空氣供給至真空排氣空間5，且 將真空排氣頭la迅速地從製品2分離。其在真空迴路17之管 路及耐壓軟管15、16的直徑小、路徑長時特別有效》 【圖式簡單説明】 第1圖係本發明之第1實施形態之真空排氣頭的斷面 圖。 11 201108299 第2圖係第1圖之真空排氣頭之排氣口密封時的斷面 圖。 第3圖係具有複數第1圖之真空排氣頭之處理搬運車。 第4圖係本發明之第2實施形態之真空排氣頭的斷面 圖。 【主要元件符號說明】 1...真空排氣頭 17...真空迴路 la...真空排氣頭 18."0環 2.··製品 19...冷水源 3...真空源 20...冷卻流路 4...頭本體 21...真空遮斷閥 5…真空排氣空間 22...流量調節閥 6...差壓驅動空間 23...壓力開關 7...隔壁 24...連絡閥 8...棒桿 25…壓力開關 9...排氣口 26...真空排氣空間開放閥 10...密封構件 27...流量調節閥 11...保持構件 28...差壓驅動空間開放閥 12...導引構件 29··.壓力計 12a...穴 30...壓力計 13...排氣路 31...黏接劑 14...排氣路 32...搬運車 15...对壓軟管 33...圓板 16...耐壓軟管 34...伸縮囊 12 201108299 35.. .壓縮空氣源 37...壓空供給閥 36.. .調節器 13The vacuum head 1a expands and contracts the bellows 8 by the vacuum venting space 5 and the difference in the differential pressure driving space 6 to prevent the bellows 8 from moving up and down. In the above embodiment, the posture of the rod 8 and the moving side &< meat are restricted by the guiding member 12. However, if the expansion and contraction of the partition wall are stabilized, the guidance can be omitted. The plant body 1 -) 'and the height of the head body 4 can also be reduced. Further, 'compressed air from the compressed air source 35 composed of an air compressor or the like, and the compressed air adjusted by the pressure of the ampere & 36 is supplied to the vacuum circuit 17 connected to the present embodiment via the pressure supply valve 37. The pipeline of the differential pressure drive space 6. After the differential pressure driving space 6 is opened to the atmosphere, or the opening to the outside is omitted: the connection valve 24 and the differential pressure driving space opening valve 28 are locked to each other, and the air is supplied to the differential pressure driving space. 6, and the force seal member 10 can be pressed to the product 2 with a stronger force. Thereby, even if the sectional area of the differential pressure driving space 6 is small, the adhesion of the sealing member 10 to the product 2 can be ensured. Further, when the vacuum exhaust head 1a and the product 2 are separated, the vacuum exhaust space opening valve 26' is not opened, and the connection valve 24 is opened and the compressed air is supplied to the vacuum exhaust space 5', so that the air can be quickly supplied to the vacuum. The venting space 5 is opened, and the vacuum vent 1a is quickly separated from the article 2. It is particularly effective when the diameter of the piping and the pressure-resistant hoses 15 and 16 of the vacuum circuit 17 is small and the path is long. [FIG. 1] The vacuum exhaust head of the first embodiment of the present invention is broken. Surface map. 11 201108299 Fig. 2 is a cross-sectional view showing the air vent of the vacuum exhaust head of Fig. 1 sealed. Fig. 3 is a processing truck having a vacuum exhaust head of the first drawing. Fig. 4 is a cross-sectional view showing a vacuum exhaust head according to a second embodiment of the present invention. [Main component symbol description] 1...vacuum exhaust head 17...vacuum circuit la...vacuum exhaust head 18."0 ring 2.·product 19...cold water source 3...vacuum Source 20... Cooling flow path 4... Head body 21... Vacuum shut-off valve 5... Vacuum exhaust space 22... Flow regulating valve 6... Differential pressure driving space 23... Pressure switch 7 ...partition 24...connection valve 8...rod 25...pressure switch 9...exhaust port 26...vacuum exhaust space open valve 10...sealing member 27...flow regulating valve 11... holding member 28... differential pressure driving space opening valve 12... guiding member 29·.. pressure gauge 12a... hole 30...pressure gauge 13...exhaust road 31.. Adhesive 14...exhaust passage 32...transporter 15...pressure hose 33...disk 16...pressure hose 34... bellows 12 201108299 35.. Compressed air source 37...pressure supply valve 36.. adjuster 13