KR101252753B1 - Blade module for treating of surface of substrate - Google Patents

Abstract

The present invention provides a compact structure that allows simple equipment configuration, effectively removes a silicon oxide film formed on the surface of a substrate, especially a silicon film, increases the uniformity of the surface of the substrate, and precisely adjusts the cleaning rate. A liquid supply module for providing at least one of an etchant and water toward the substrate along a direction, an air injection module provided with an air spray nozzle along a longitudinal direction to inject liquid air toward the substrate, and both ends of the liquid supply module And a frame for fixing the both ends of the air injection module to assemble the liquid supply module and the air injection module.

Description

Blade module for treating of surface of substrate}

The present invention relates to a blade module for treating a substrate surface, and more particularly to a blade module for treating a substrate surface capable of providing an etchant and liquid air.

Driving elements including a plurality of thin film transistors are formed on a substrate for forming an organic light emitting display or a liquid crystal display.

To this end, a silicon film such as a polysilicon film is formed on the substrate.

However, the polysilicon film has a silicon oxide film on its surface in its natural state.

As described above, the silicon oxide film formed on the surface of the polysilicon film affects the characteristics of the electronic device to be formed of the polysilicon film and may act as a contaminant such as particles during the process.

In addition, the polysilicon film forms an amorphous silicon film through a crystallization process such as ELA. However, it is necessary to increase the surface uniformity due to high surface roughness.

For this reason, the surface of the substrate on which the silicon film is formed has to be surface treated. In the case of the equipment for surface treatment, various nozzles for providing the surface treatment liquid have to be installed, resulting in a complicated configuration. do.

In the case of the prior art document 1, the same cleaning liquid is sprayed using a shower nozzle and a spray nozzle, and the cleaning liquid is strongly sprayed through a spray nozzle using gas pressure to increase the cleaning effect of the substrate. However, since this is to increase the injection pressure of the cleaning liquid for the cleaning effect, there is a limit that does not fit the compact configuration of the equipment and precise control of the cleaning rate.

1: Republic of Korea Patent Publication No. 2007-0097715

The present invention is to provide a blade module for substrate surface treatment that can effectively remove the silicon oxide film formed on the surface of the substrate, in particular the surface of the silicon film, improve the uniformity of the substrate surface, and precisely control the cleaning rate. have.

It is another object of the present invention to provide a blade module for treating a substrate surface with a simple structure and a compact structure.

In order to achieve the above object, the present invention, the liquid supply module for providing at least one of the etching liquid and water toward the substrate along the longitudinal direction, and the air injection nozzle is provided along the longitudinal direction liquid air toward the substrate It provides a blade module for treating the substrate surface comprising a frame for assembling the air supply module and the air supply module, and the both ends of the liquid supply module and the both ends of the air injection module to assemble the liquid supply module and the air injection module.

According to another feature of the invention, the liquid supply module, a plurality of liquid supply holes formed along the longitudinal direction, and a liquid supply nozzle formed toward the substrate, between the liquid supply hole and the liquid supply nozzle May be provided in a multi-stage path.

According to another feature of the invention, it may include a plurality of first supply pipes coupled to the liquid supply hole, respectively, and a second supply pipe connecting the first supply pipes.

According to another feature of the invention, the liquid supply module, the receiving portion is provided with the etching liquid or water and the etching liquid or water flows from the top, and the etching liquid or water flowing over the containing portion of the substrate It may include a guide portion connected to the receiving portion to guide in the surface direction.

According to another feature of the present invention, the liquid supply module may further include a transmission slit formed so that the upper surface of the receiving portion is partially opened so that the etching liquid or water is permeated.

According to another feature of the present invention, the liquid supply module may further include a plurality of guide grooves formed on the upper surface of the accommodation portion and connected to the transmission slit and extending in the width direction and the outward direction of the accommodation portion. .

According to another feature of the invention, the receiving portion, the lower receiving portion including the inlet of the etching liquid or water and connected to the guide portion, the upper receiving portion in communication with the lower receiving portion and the transmissive slit is formed on the upper surface; The interposed between the lower accommodating part and the upper accommodating part may communicate with the lower accommodating part and the upper accommodating part with each other, and may include a narrower provided narrower than the lower accommodating part and the upper accommodating part.

According to another feature of the invention, the accommodating portion may be formed in a rectangular cross section, the accommodating portion may further include an opening formed to open the entire upper surface.

According to another feature of the invention, the liquid supply module may further include a buffer partition wall disposed in the horizontal direction inside the receiving portion.

According to another feature of the invention, the buffer partition wall may further include a plurality of buffer penetration holes.

According to another feature of the invention, the receiving portion is connected to the liquid supply pipe, the buffer partition wall may be disposed above the connection portion with the liquid supply pipe.

According to another feature of the invention, the guide portion may be provided to form a gradual inclination to narrow toward the vertical lower.

According to another feature of the invention, the air injection module may be installed in the inclined direction to the frame to inject liquid air in an oblique direction toward the substrate.

According to another feature of the invention, the frame is coupled to both ends of the air injection module and a pair of first frame having an angle adjusting slit and a pair of second frame to which the first frames are coupled It may include.

According to another feature of the present invention, the second frame includes a coupling portion to which the first frames are coupled and a support portion spaced apart from the coupling portion, wherein the support portion supports to connect between the pair of second frames. It may be coupled to the frame.

According to another feature of the invention, the liquid supply module may include a first liquid supply module for providing an etchant toward the substrate and a second liquid supply module for providing water toward the substrate.

According to another feature of the invention, the frame may include a third frame for coupling the first liquid providing module and the second liquid providing module.

According to another feature of the invention, it may include a plurality of third supply pipe coupled to the air injection module along the longitudinal direction of the air injection module, and a fourth supply pipe connecting the third supply pipe.

According to the present invention as described above, it is possible to configure a substrate surface treatment apparatus of a simpler and more compact structure.

Etch rate can be easily adjusted to perform more precise substrate surface treatment.

By etching, the silicon oxide film can be etched together with the cleaning of the silicon film surface, and the smoothness of the silicon film surface after the silicon oxide film is etched can be further improved.

In addition, by providing etchant, water and different etchant at different time periods, the etching degree of the etchant may be controlled.

By providing water after the provision of the etchant, the buffering function enables precise control of the degree of etching, and the problem that the desired etching rate is changed due to the mixing of the first liquid and the second liquid can be prevented and the resulting decrease in productivity. have.

The present invention also removes the etchant and water from the surface of the substrate through the provision of liquefied air, thereby preventing the etchant and water from mixing on the surface of the substrate, thereby achieving etching precision as desired.

By providing such etchant and water in the same chamber, a more compact device configuration is possible.

In the present invention, by supplying the etchant and water using one nozzle, the apparatus can be made compact and the number of parts can be reduced.

In addition, the device can be made more compact by providing the liquid supplying air supply unit integrally with the liquid supplying unit.

1 is a configuration diagram schematically showing the configuration of a processing apparatus for a silicon substrate according to an embodiment of the present invention;
2 is a device configuration diagram of the blade module of FIG.
3 is an exploded perspective view illustrating an example of the blade module of FIG. 1 in more detail;
4 is a front view illustrating a coupling relationship between a first frame and a second frame of FIG. 1;
5 is a cross-sectional view of the first air injection module of FIG.
6 is a cross-sectional view of the first liquid supply module of FIG.
7 is an exploded perspective view illustrating another example of the blade module of FIG. 1 in more detail;
8 is a cross-sectional view showing an embodiment of the first liquid supply module of FIG. 7;
9 is a plan view illustrating an example of a transmission slit and a guide groove of the first liquid supply module of FIG. 8;
FIG. 10 is a plan view illustrating another example of a transmission slit and a guide groove of the first liquid supply module of FIG. 8;
11 is a cross-sectional view showing another embodiment of the first liquid supply module of FIG. 7;
12 is a cross-sectional view showing another embodiment of the first liquid supply module of FIG. 7;
FIG. 13 is a cross-sectional view showing another embodiment of the first liquid supply module of FIG. 7; FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic view showing a substrate surface treatment apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the substrate surface treatment apparatus of the present invention includes a chamber 20 and a blade module 30 installed in the chamber 20.

The plurality of rollers 21 are arranged in one direction in the chamber 2. These rollers 21 are connected to a separate drive source to be able to transfer the substrate 10 supplied thereon in the planar direction from side to side as seen in FIG.

A support 22 supporting the substrate 10 is disposed below the rollers 21.

The support 22 includes a plurality of support pins 222 arranged between the rollers 21, which are arranged on the drive bar 221 so that the drive bar 221 is provided. As the substrate moves upward and downward, the substrate 10 may be pushed up to be supported by passing between the rollers 21. An elastic member 223 is disposed at the tip of the support pin 222 to prevent the impact on the substrate 10 and to prevent the substrate 10 from slipping. The drive bar 221 is connected to a separate drive device (not shown) is provided to move in the vertical direction when viewed in FIG.

In the present invention, the support 22 is not necessarily limited to the example shown in FIG. 1, and any type of structure capable of fixing and / or aligning the substrate 10 may be applied. to be. The support 22 may be provided horizontally on the ground, but the present invention is not necessarily limited thereto, and includes a separate inclination adjuster (not shown), so that the substrate 10 is disposed to be inclined with the ground. 22 can be adjusted. The tilt adjusting part may rotate the support 22 so that the substrate 10 is perpendicular to the ground, or the substrate 10 may be inclined at an acute angle to the ground. At this time, the support 22 may have any shape as long as it can fix the substrate 10 when the substrate 10 is inclined. In addition, the substrate 10 does not necessarily need to be fixedly supported by the support 22 and may be placed on the rollers 21 while the substrate is being processed.

The blade module 30 is installed on the substrate 10, and the blade module 30 may reciprocate in a horizontal direction by the driving block 41 and the guide 42. The drive block 41 and guide 42 may be a linear motor system.

The blade module 30 may have a length corresponding to at least the width of the substrate 10 so that a predetermined liquid is supplied over the entire area of the substrate 10.

The drive block 41 reciprocates along the guide 42, whereby the surface of the substrate 10 is processed by the liquid and liquid air discharged from the blade module 30.

1 is a substrate surface treatment apparatus according to an embodiment of the present invention, in the embodiment shown in FIG. 1, the blade module 30 moves in a state where the substrate 10 is fixed, and is predetermined on the surface of the substrate 10. To supply liquid and / or liquid air. However, the present invention is not necessarily limited thereto, and the substrate 10 may be moved while the blade module 30 is fixed.

2 is a schematic view showing the configuration of a surface treatment apparatus of a substrate including a blade module 30 according to an embodiment of the present invention.

As shown in FIG. 2, the surface treatment apparatus of the substrate installed in a specific chamber includes a blade module 30, a controller 70, a first reservoir 35 to a third reservoir 55, and an air tank 65. do.

The substrate 10 before being processed by the present invention may include various kinds of substrates used for display, in particular, including a base substrate 11, a silicon film 12, and a silicon oxide film 13. .

The base substrate 11 may include a glass, plastic, or metal substrate. Although not shown in the drawings, an insulating film made of an organic material and / or an inorganic material may be further provided on the surface of the base substrate 11.

The silicon film 12 may be obtained by forming an amorphous silicon film on the surface of the base substrate 11. The silicon film 12 may be a polysilicon film through a crystallization process in a subsequent process. The crystallization process may be a laser crystallization process such as ELA, but is not necessarily limited thereto, various crystallization processes may be used. The polysilicon film obtained by crystallizing the silicon film 12 may be used as an active layer of a thin film transistor of a display. Of course, the amorphous silicon film may also be used as an active layer of the thin film transistor through patterning and doping.

The silicon oxide film 13 is formed on the surface of the silicon film 12. The silicon oxide film 13 is an oxide film formed naturally by combining the surface of the silicon film 12 with oxygen or nitrogen in air, and is generally formed to have a thickness of 5 to 1,000 mW.

As described above, the substrate 10 is not limited to a substrate on which the silicon film 12 is formed on the base substrate 11, and various kinds of substrates including a silicon film, such as a silicon wafer including a silicon film, may be used. Of course, it can be applied.

The blade module 30 is for selectively providing the first to third liquids on the surface of the substrate 10, and strictly on the surface of the silicon oxide film 13 formed on the surface of the silicon film 12. It is for selectively providing the first to third liquid.

The first liquid is stored in the first reservoir 35, and includes a solution of a component capable of etching the silicon oxide film 13 formed on the surface of the silicon film 12. In one preferred embodiment of the present invention, the first liquid may be a solution containing an ozone solution. The first liquid may use a lower etching rate for the silicon oxide film 13 than a second liquid, which will be described later. Instead, the first liquid may function as a cleaning agent for cleaning the organic material on the surface of the substrate 10. For this reason, the first liquid can be replaced with a neutral or alkaline detergent.

The second liquid is stored in the second storage tank 45, and may etch the silicon oxide film 13 formed on the surface of the silicon film 12, and has a component different from that of the first liquid. A solution having a higher etching rate for the silicon oxide film is used. In one preferred embodiment of the present invention, the second liquid may be a solution containing a hydrofluoric acid or ammonium fluoride solution.

The third liquid is stored in the third storage tank 55, and the first liquid and the second liquid can be at least diluted from the surface of the substrate 10, according to a preferred embodiment of the present invention It may include, the water is preferably to use deionized pure water (DI water). The third liquid may function as a buffer water to stop the first liquid and the second liquid, which are etchant, on the surface of the substrate 10.

The blade module 30 provides the first liquid to the third liquid to spread evenly on the substrate 10, for this purpose, the surface of the substrate 10 in a state spaced a predetermined distance from the surface of the substrate 10 The first liquid to the third liquid is provided on the surface of the substrate 10 while one-way or reciprocating in one of the directions.

The blade module 30 may be designed to function as a function of selectively supplying the first to third liquids to the blade module 30. To this end, a separate pump means (not shown) for discharging first to third liquids to the blade module 30 may be provided.

The first reservoir 35 and the third reservoir 55 are connected to the first solution providing module 311, and the second reservoir 45 is connected to the second solution providing module 312. A first opening and closing side 36 may be interposed between the first reservoir 35 and the first liquid providing module 311. A second opening and closing valve 46 may be interposed between the second reservoir 45 and the second liquid providing module 312. A third opening and closing valve 56 may be interposed between the third reservoir 55 and the first liquid providing module 311. The first opening and closing 36 to the third opening and closing 56 is connected to the control unit 70, respectively, the electronic valve which is controlled by the control unit 70 can be used.

The third reservoir 55 is connected to only the first liquid providing module 311, but the present invention is not limited thereto, and is also connected to the second liquid providing module 312 so that the second liquid and the third liquid The second liquid supply module 312 may be selectively provided to the substrate 10.

In the embodiment according to FIG. 2, only a combination of the first liquid providing module 311 and the second liquid providing module 312 is shown, but the present invention is not necessarily limited thereto, and a separate third liquid providing module is provided. Further, the first liquid to the third liquid may be provided to the substrate through a separate liquid supply module, respectively, so that only one liquid supply module is provided so that the first liquid to the third liquid is a single liquid supply module It may also be provided to the substrate through. Even when using a single liquid supplying module, all of the first opening and closing sides 36 to 56 may be selectively sprayed.

The substrate 10 may be provided in the order of the first liquid, the third liquid, and the second liquid. When the blade module 30 operates while reciprocating, the blade module 30 may be provided in the order of the first liquid, the third liquid, the second liquid, the third liquid, and the first liquid.

The order of providing the first liquid to the third liquid can be changed according to the process conditions, for example, the second liquid, the third liquid, and the first liquid may be provided in the order of the first liquid, and the third liquid. Or in the order of the second liquid and the third liquid. Of course, even in this case, when the blade module 30 operates while reciprocating, the reverse order may be repeatedly provided.

In addition, the third liquid may be provided in the order of the first liquid and the second liquid without providing the third liquid. Even in this case, when the blade module 30 operates while reciprocating, the reverse order may be repeated.

The present invention effectively controls the etching degree of the silicon oxide film 13 simultaneously with cleaning the surface of the substrate 10 by providing the first liquid and the second liquid, which are etchants having different etching rates, to the substrate 10 at different times. In addition, the smoothness of the surface of the silicon film 12 from which the silicon oxide film 13 is removed can be improved.

In addition, by providing the third liquid to the substrate 10, the first liquid and / or the second liquid remaining on the surface of the substrate 10 may be washed with the third liquid, thereby providing the substrate 10. The first liquid and the second liquid remaining on the surface may be mixed to prevent a problem of failing to obtain a desired etching rate in advance. As a result, accurate etching rate management is possible and quality uniformity can be increased even when applied to mass production process.

The provision of the first liquid to the third liquid as described above is not limited to one round trip scan and includes the case where at least two liquids of the first liquid to the third liquid are selectively provided in at least two or more scans per liquid. do.

Meanwhile, a first air injection module 321 is provided at a front end of the first liquid supply module 311, and a second air injection module 322 is provided at a rear end of the second liquid supply module 312. The first air injection module 321 and the second air injection module 322 are both connected to the air tank 65, and the fourth open / close sides 66a and 66b controlled by the control unit 70 are the first. The air injection module 321 and the second air injection module 322 are interposed between the air tank 65, respectively. The fourth opening and closing sides 66a and 66b may also be electronic sides connected to the control unit 70 and controlled to be opened and closed by the control unit 70.

The liquid liquefied air is provided to the substrate 10 in the previous step to remove at least one of the first liquid to the third liquid remaining on the surface of the substrate 10 by air pressure, thereby removing the first liquid. The third to third liquids do not mix with each other on the surface of the substrate 10, and thus, it is possible to prevent the concentration of etchant, such as the first liquid and the second liquid, from changing from the originally intended concentration. Therefore, the liquid liquefied air can precisely control the etching rate of the first liquid and the second liquid, and the like, and the buffering effect by the third liquid can also be easily controlled.

Such liquid air may be injected to the substrate simultaneously with and / or sequentially with at least one of the above-described first to third liquids.

3 is a partial perspective view illustrating an example of the blade module 30 in more detail.

The blade module 30 according to the exemplary embodiment of the present invention illustrated in FIG. 3 is provided with a liquid supply nozzle along a length direction and provides a liquid supply module 310 that provides at least one of at least one etching solution and water toward a substrate. And an air spray nozzle disposed along the longitudinal direction to inject liquid air toward the substrate, and both ends of the liquid supply module 310 and both ends of the air spray module 320. It is fixed to include a frame 31 for assembling the liquid supply module 310 and the air injection module 320.

According to an embodiment of the present invention shown in Figure 3, the liquid supply module 310 is provided with a first liquid supply module 311 and the second liquid supply module 312, they are attached to the side of each other Both ends in the longitudinal direction of the log are fixed by the third frame 350.

As described above, the first liquid supply module 311 may be to provide water, such as ozone solution and / or pure water to the substrate, the second liquid supply module 312 is to provide an etching solution to the substrate Can be Of course, only the ozone solution from the first liquid supply module 311 may cause the etching liquid to come out from the second liquid supply module 312, and the ozone solution from the first liquid supply module 311 may provide the second liquid. Only water may come from module 312. In the second liquid providing module 312, the etchant and water may be selectively released. The first liquid providing module 311 and the second liquid providing module 312 may be connected to a separate control unit to selectively operate with each other.

Meanwhile, according to the exemplary embodiment of the present invention illustrated in FIG. 3, the liquid providing module 310 is provided as a combination of the first liquid providing module 311 and the second liquid providing module 312. The invention is not necessarily limited thereto, and a separate third liquid providing module (not shown) may be further provided to allow the first liquid to the third liquid to be provided to the substrate through separate liquid providing modules.

The air injection module 320 may also include a first air injection module 321 and a second air injection module 322. The first air injection module 321 and the second air injection module 322 may be arranged to be spaced apart from each other with the liquid supply module 310 therebetween.

The air injection module 320 is installed in the inclined direction to the frame 31 to inject liquid air in an oblique direction toward the substrate.

The frame 31 includes a pair of first frames 330 coupled to both ends of the air injection module 320, a pair of second frames 340 coupled to the first frames, and the first frame. The first liquid providing module 311 and the second liquid providing module 312 is coupled to the second frame 340 includes a pair of third frame (350).

As shown in FIG. 4, each of the first frames 330 is provided with an angle adjusting slit 333.

The first frame 330 is provided in pairs for each of the first air injection module 321 and the second air injection module 322. The first frame 330 is coupled to both ends of the first air injection module 321 and the second air injection module 322 by the fastening bolts 331, 332, one of the fastening bolts 332 ) Is fastened to the angle adjusting slit 333 of the first frame 330. The angle adjusting slit 333 is formed to form an arc of a fan shape, one fastening bolt 331 is fixed to the top of the first frame 330 is fixed, the other fastening bolt 332 is an angle adjusting slit ( The first air injection module 321 and the second air injection module 322 may be installed to be inclined to the first frame 330 by being fastened to an appropriate position along the 333. A scale 333 is set along the angle adjusting slit 333 in the first frame 330 to set the inclination angles of the first air injection module 321 and the second air injection module 322.

The first frame 330 is coupled to the second frame 340. The coupling part 341 of the second frame 340 is provided with a fastening slit 343 formed long in the vertical direction, and a pair of fastening bolts 344 and 345 are coupled to the fastening slit 343 to form a first. One edge of the frame 330 is fixed.

Each of the second frames 340 includes a coupling part 341 to which the first frames 330 and the third frames 350 are coupled, and a support part 342 spaced apart from the coupling part. The support part is coupled to a support frame 360 connecting between the pair of second frames 340. In FIG. 3, the support frame 360 may be formed in a rectangular hollow plate body along a longitudinal direction thereof, and the support part 342 of the second frame 340 may be formed on the lower portion of the hollow frame. The coupling part 341 of the two frames 340 may be disposed in a shape in which the coupling part 341 is positioned. The support 342 may be fixedly coupled to an appropriate position along the support frame 360.

On the other hand, the liquid supply module 310 is provided with a plurality of first supply pipe 313 along the longitudinal direction to supply the etching liquid and / or water. A second supply pipe 314 is installed between the first supply pipes 313 to connect the first supply pipes 313 to each other.

Therefore, the etchant and / or water supplied from an external separate reservoir (not shown) is supplied to the liquid supply module 310 via the second supply pipe 314 and the first supply pipe 313.

A plurality of third supply pipes 323 are also installed in the air injection module 320 along the longitudinal direction to supply liquid air. A fourth supply pipe 324 is installed between the third supply pipes 323 to connect the third supply pipes 323 with each other.

Therefore, the liquefied air supplied from an external separate air tank (not shown) is supplied to the air injection module 320 via the fourth supply pipe 324 and the third supply pipe 323.

In the above-described embodiment, the liquid supply module 310 is provided with a combination of the first liquid supply module 311 and the second liquid supply module 312, the present invention is not necessarily limited to this, a single first liquid Only one of the providing module 311 and the second liquid providing module 312 may be provided. In addition, although the air injection module 320 is provided with the first air injection module 321 and the second air injection module 322 one at the front and the rear of the liquid supply module 310, the present invention is not necessarily limited thereto. Only one of the first air injection module 321 and the second air injection module 322 may be provided.

5 illustrates a cross section of the first air injection module 321. Although the first air injection module 321 is illustrated in FIG. 5, the second air injection module 322 also has the same configuration.

As shown in FIG. 5, the first air injection module 321 may be formed by combining the first plate member 322a and the second plate member 322b with each other.

Air supply holes 325 are formed at the side surface of the first air injection module 321. A plurality of air supply holes 325 are formed along the side surface of the first air injection module 321 at regular intervals in the longitudinal direction. As shown in FIG. 3, the air supply holes 325 are coupled to the third supply pipes 323 described above.

An air jet nozzle 328 is provided at a lower end of the first air jet module 321.

The interior of the first air injection module 321 passes through the first air path space 326a to the third air path space 326c connected to the air supply holes 325 to the air injection nozzle 328. Are connected while forming. The air supply holes 325 and the first air path space 326a to the third air path space 326c forming the multi-stage path are machined on the inner surface of the second plate member 322b as shown in FIG. 5. The first plate member 322a may be formed in a plane.

6 illustrates a cross section of the first liquid supply module 311. 6 illustrates the first liquid providing module 311, but the second liquid providing module 312 also has the same configuration.

As shown in FIG. 6, the first liquid supply module 311 may be formed by combining two plate members, that is, a third plate member 311a and a fourth plate member 311b, and a portion to be coupled thereto. Although not shown in the drawing, the O-ring can be placed so that the fluid does not leak through the binding site.

The first liquid supply module 311 has liquid supply holes 315 formed on a side thereof. A plurality of the liquid supply holes 315 are formed along the side surface of the first liquid supply module 311 at regular intervals. The first supply pipes 313 described above are coupled to the liquid supply holes 315, respectively.

A plurality of path spaces, for example, the first liquid path space 316a to the seventh liquid path space 316g are defined in the first liquid supply module 311. Between the first liquid path space 316a and the third liquid path space 316c and the fifth liquid path space 316e provided between the first liquid path space 316a and the third liquid path space 316c. Inside the first liquid supply module 311 by the third liquid barrier 317c provided between the second liquid barrier 317b and the fifth liquid path space 316e to 316g. The liquid path forms a zigzag multistage path. By forming a multi-stage path as described above, even when foreign matter is contained in the liquid introduced into the first liquid providing module 311, foreign matter can be filtered out, and the precise flow rate can be supplied to the substrate by finely controlling the liquid supply flow rate. You can do that.

At this time, the second liquid path space 316b, the fourth liquid path space 316d, and the sixth liquid path space 316f, which are liquid paths in the vertical direction, are formed in the first liquid path space ( It is formed narrower than 316a), the 3rd liquid path space 316c, and the 7th liquid path space 316g. Accordingly, the falling speed of the liquid falling in the first liquid providing module 311 can be adjusted, and foreign substances that may be included in the liquid do not fall. In addition, since the first liquid path space 316a, the third liquid path space 316c, and the seventh liquid path space 316g, which are horizontal liquid paths, are widely formed, the liquid can be sufficiently stored in these spaces. In this case, it is possible to provide sufficient hydraulic pressure for the liquid to flow in a vertical path, and to allow particles or foreign substances to be stored in the liquid to be stored.

The fifth liquid path space 316e, which is one of the horizontal liquid paths, includes the first liquid path space 316a, the third liquid path space 316c, and the seventh liquid path space ( Narrower than 316g) allows precise control of the flow rate.

The seventh liquid path space 316g, which is the last horizontal liquid path, is connected to the liquid supply nozzle 318 formed in the vertical direction. The liquid supply nozzle 318 may be formed to extend in a straight line along the longitudinal direction of the first liquid supply module 311. The first liquid path space 316a to the seventh liquid path space 316g may also be formed to extend in a straight line along the length direction of the first liquid supply module 311. In this case, a part of the first liquid path space 316a connected to the liquid supply hole 315 may be provided to be partitioned by the liquid supply hole 315.

As described above, the multi-stage path from the liquid supply hole 315 to the liquid supply nozzle 318 may be variously designed in consideration of the supply speed of the liquid.

7 is a partial perspective view illustrating another example of the blade module 30 in more detail.

7 except for the first liquid supply module 311 and the second liquid supply module 312, all of the other configurations are different from the embodiment of the blade module 30 according to FIG. 3. Same or similar.

The liquid supply module 310 is provided with a liquid supply pipe (P) at both ends in the longitudinal direction to supply the etching liquid and / or water. The liquid supply pipe P may be installed only at one end of the liquid supply module 310, or a plurality of liquid supply pipes P may be installed at regular intervals along the longitudinal direction of the liquid supply module 310. The etchant and / or water supplied from an external separate reservoir (not shown) is supplied to the liquid supply module 310 via the liquid supply pipe P.

FIG. 8 is a sectional view showing an embodiment of the first liquid supply module 311 of the blade module 30 shown in FIG. 7, and FIG. 9 is a plan view thereof. Although the first liquid providing module 311 is shown in FIG. 8, the second liquid providing module 312 also has the same configuration, which is the same as that of all embodiments of the first liquid providing module 311 which will be described below. The same applies to the case.

As shown in FIG. 8, the first liquid supply module 311 is connected to the liquid supply pipe P to accommodate an etching solution or water and an etching solution or water accommodated in the accommodation part 3111. It includes a guide portion 3112 for guiding to flow out of the receiving portion 3111 and to flow down to the surface of the substrate 10.

The guide part 3112 may be configured to allow the etching solution or water to move along the outer circumferential surface of the accommodating part 3111 to be naturally transferred to the surface of the substrate 10. It is preferable that the portion connected to the lower portion and the portion extending in the direction of the substrate from the portion to be connected to each other are formed in an inclined shape that gradually narrows as shown. Although the guide part 3112 is shown as being integrally formed with the receiving part 3111 in FIG. 8, the present invention is not necessarily limited thereto, and may be bonded to the receiving part 3111. In addition, the guide portion 3112 may be formed by bending a plate.

A transmissive slit 3113 having a predetermined portion is formed on an upper surface of the accommodating part 3111 to allow the etchant or water overflowing from the accommodating part 3111 to flow out of the accommodating part 3111.

As shown in FIG. 9, the transmission slit 3113 may be formed in the longitudinal direction of the accommodation portion 3111.

A plurality of guide grooves 3114 may be provided in the outward direction of the transmission slit 3113 to evenly guide the etching solution or water to the guide part 3112. The guide groove 3114 is formed on an upper surface of the accommodating part 3111, is connected to the transmission slit 3113, and extends in a width direction and an outward direction of the accommodating part 3111. The guide grooves 3114 may form induction grooves in an intaglio manner so that the etchant or water flows in a direction orthogonal to the transmission slits 3113. Through this, the etchant or water may naturally be guided to the guide part 3112 by riding on the curvature of the body part of the accommodating part 3111.

In another embodiment, as illustrated in FIG. 10, the transmission slit 3113 and the guide groove 3114 are integrally formed to form the transmission slit 3113 in a direction perpendicular to the longitudinal direction of the accommodation portion 3111. After that, it is also possible to form guide grooves 3114 at both ends of the transmission slit 3113.

A buffer partition 3115 is provided in the accommodation portion 3111. The buffer partition 3115 is disposed in the accommodation portion 3111, and a plurality of buffer penetration holes 3116 are formed in a thin thin plate shape. The buffer partition 3115 prevents the rapid rise of the etchant or water supplied to the accommodating portion 3111, thereby controlling the supply speed and flow rate of the etchant or water, and inducing an even flow of the etchant or water.

The buffer penetration hole 3116 may be simply provided as a through hole corresponding to the thickness of the buffer partition 3115. The through hole may have a cylindrical shape or a wedge shape to more efficiently control the rising speed of the etchant or water. Preferably, the cross-sectional shape of the through hole may use various shapes such as a square shape, a rhombus, an ellipse, and the like.

The shape of the accommodation portion 3111 can be formed in various ways. If the etching liquid or water can be supplied evenly, the cross section may have an elliptical shape, or the cross section may have a circular shape, or the upper portion may have a predetermined slope to smooth the flow of the etching liquid or water and to form a curvature of the outer peripheral surface of the receiving portion. It is also possible.

11 is a cross-sectional view showing another embodiment of the first liquid supply module 311. 11 may have the same planar shape as that of FIG. 9 or 10.

In the embodiment according to Fig. 11, the receiving portion is divided into two receiving portions, and the portions to which the two receiving portions are connected are connected by narrow passages 3117, which are narrow passages. Specifically, the receiving portion is composed of an upper receiving portion (3111a) and the lower receiving portion (3111b), the lower receiving portion (3111b) and the upper receiving portion (3111a) is connected to communicate, the upper receiving portion (3111a) And a narrow passage 3117, which is smaller than the space of the lower accommodating portion 3111b.

The lower accommodating part 3111b is connected to the liquid supply pipe P to accommodate the etching liquid or water injected from the outside. In the process of accommodating the etchant or water, the etchant or water is filled in the lower accommodating portion 3111b.

The upper accommodating portion 3111a is connected to an upper side of the lower accommodating portion 3111b. The upper accommodating portion 3111a communicates with the upper end of the lower accommodating portion 3111b through the narrow passage 3117 and accommodates the etching solution or water flowing upward from the lower accommodating portion 3111b. That is, the amount of etching liquid or water continuously flowing into the lower accommodating portion 3111b increases, and is filled up to the upper accommodating portion 3111a via the narrow passage 3117. The etchant or water filled into the upper accommodating portion 3111a flows through the upper portion of the upper accommodating portion 3111a, and the overflowed etchant or water flows into the outer surface and the lower accommodating portion of the upper accommodating portion 3111a. It flows down on the outer surface of the part 3111b. This flowing down etchant or water is transferred along the guide portion 3112 to the substrate surface.

As shown in FIG. 11, the narrow passage 3117 that allows the lower receiving portion 3111b and the upper receiving portion 3111a to communicate with each other forms a narrow passage. The narrow passage 3117 prevents the etchant filling from the lower accommodating portion 3111b from rapidly escaping to the upper accommodating portion 3111a. As a result, the etchant or water flowing into the upper accommodating portion 3111a slowly rises inside the upper accommodating portion 3111a and flows out constantly through the upper portion of the upper accommodating portion 3111a.

The narrow passage 3117 illustrated in FIG. 11 is in the form of a narrow passage that is completely open. In some cases, a plate (not shown) having a plurality of through holes may be installed to block the narrow passage 3117. In this case, the etchant or water flowing into the upper accommodating portion 3111a from the lower accommodating portion 3111b may flow more slowly, and as a result, the etching liquid or water may be introduced into the upper accommodating portion 3111a in a constant amount. Can flow out through the top surface.

The above-described transmission slit 3113 and / or guide grooves 3114 may be formed on the upper surface of the upper accommodating portion 3111a so that the etchant or water may overflow.

According to this embodiment according to FIG. 11, the lower receiving portion 3111b and the upper receiving portion 3111a constitute a narrow passageway between the lower receiving portion 3111b and the upper receiving portion 3111a. Since it connects to 3117, the quantity of etching liquid or water which flows out through the upper surface of the upper accommodating part 3111a can be kept constant, and it can prevent the rapid outflow of etching liquid or water.

Therefore, the size and width of the accommodating part constituted by the lower accommodating part 3111b and the upper accommodating part 3111a may be made small, and accordingly, the number of the liquid supply modules may be further increased.

On the other hand, the buffer partition 3115 is installed in the lower receiving portion 3111b, the present invention is not necessarily limited to this, the buffer partition 3115 may also be installed in the upper receiving portion 3111a, or the lower side It may be provided in both the accommodating part 3111b and the upper accommodating part 3111a.

In the embodiment according to FIG. 11, the etchant or water flowing over the upper accommodating portion 3111a flows sequentially through the upper accommodating portion 3111a and the lower accommodating portion 3111b and is provided to the substrate 10 through the guide portion 3112. At this time, the etchant or water should flow down along the curved shape leading to the upper accommodating portion 3111a and the lower accommodating portion 3111b. In this process, the etchant or water may directly fall from the side of the upper accommodating portion 3111a to the side of the lower accommodating portion 3111b, so that the amount of liquid in the guide portion 3112 may not be uniform. Therefore, the width of the upper accommodating portion 3111a can be formed to be narrower than the width of the lower accommodating portion 3111b, so that the etching liquid or water can flow sequentially to the upper accommodating portion 3111a and the lower accommodating portion 3111b.

12, the side member 3118 is further attached between the upper accommodating portion 3111a and the lower accommodating portion 3111b so that the etchant or water passes through the side member 3118 and the guide portion 3112. You can also let it flow naturally.

13 is a cross-sectional view showing another embodiment of the first liquid supply module 311.

In the embodiment according to FIG. 13, the accommodating part 3111 further includes an opening part 3119 having a quadrangular cross section and formed to open the entire upper surface.

In this case, since the inner width of the accommodating part 3111 is constant, the flow rate and flow rate of the etching liquid or water filling up in the accommodating part 3111 can be made constant, and accordingly, the opening part 3119 of the upper part of the accommodating part 3111 is provided. The flow rate and flow rate of the etchant or water flowing through the can be constant.

Therefore, the width of the accommodating portion 3111 is the same for each section of the accommodating portion 3111 in this embodiment. That is, the opposite sides of the receiving portion 3111 are formed to be parallel to each other and vertical. As a result, the accommodating portion 3111 according to the present embodiment has a long hexahedron shape having a rectangular cross section and a completely open top surface. The upper surface of the accommodating portion 3111 is fully open, so that the etchant or water can flow evenly.

The buffer partition 3115 is also installed in the accommodation portion 3111, but is installed above the connection portion with the liquid supply pipe P. The buffer partition 3115 may not necessarily be one, as shown in FIG. 13, and a plurality of buffer partitions 3115 may be installed from the top to the bottom.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation and that those skilled in the art will recognize that various modifications and equivalent arrangements may be made therein. It will be possible. Therefore, the true scope of protection of the present invention should be defined only by the appended claims.

Claims (18)

A liquid supply module for providing at least one of an etchant and water toward the substrate along the longitudinal direction;
An air injection module provided with an air injection nozzle along a longitudinal direction to inject liquid air toward the substrate; And
And a frame for assembling the liquid supply module and the air injection module by fixing both ends of the liquid supply module and both ends of the air injection module.
The liquid supply module includes a first liquid supply module for providing an etchant toward the substrate and a second liquid supply module for providing water toward the substrate,
The frame includes a blade module for substrate surface treatment comprising a third frame for coupling the first liquid supply module and the second liquid supply module. A liquid supply module for providing at least one of an etchant and water toward the substrate along the longitudinal direction;
An air injection module provided with an air injection nozzle along a longitudinal direction to inject liquid air toward the substrate; And
And a frame for assembling the liquid supply module and the air injection module by fixing both ends of the liquid supply module and both ends of the air injection module.
The liquid supply module includes a plurality of liquid supply holes formed along a longitudinal direction, and a liquid supply nozzle formed toward the substrate.
Blade module for substrate surface treatment provided between the liquid supply hole and the liquid supply nozzle in a multi-stage path. delete The method of claim 1,
The liquid supply module may include a receiving part configured to accommodate the etching liquid or water and to overflow the etching liquid or water from the upper part, and to guide the etching liquid or water flowing over the receiving part toward the surface of the substrate. Blade module for substrate surface treatment comprising a guide portion connected. delete delete A liquid supply module for providing at least one of an etchant and water toward the substrate along the longitudinal direction;
An air injection module provided with an air injection nozzle along a longitudinal direction to inject liquid air toward the substrate; And
And a frame for assembling the liquid supply module and the air injection module by fixing both ends of the liquid supply module and both ends of the air injection module.
The liquid supply module may include a receiving part configured to accommodate the etching liquid or water and to overflow the etching liquid or water from the upper part, and to guide the etching liquid or water flowing over the receiving part toward the surface of the substrate. It includes a connected guide portion,
The liquid supply module further includes a transmission slit formed to partially open the upper surface of the accommodation portion and provided to allow the etching solution or water to pass therethrough,
The receiving portion includes:
A lower receiving part including the inlet of the etchant or water and connected to the guide part;
An upper accommodating portion communicating with the lower accommodating portion and having the transmissive slit formed on an upper surface thereof; And
And a narrower interposed between the lower receiving portion and the upper receiving portion to communicate with the lower receiving portion and the upper receiving portion, and a narrower provided narrower than the lower receiving portion and the upper receiving portion. 5. The method of claim 4,
The receiving portion is formed in a square cross section,
The receiving portion blade module for surface treatment of the substrate further comprises an opening formed to open the entire upper surface. delete delete delete delete The method according to any one of claims 1, 2, 4, 7, and 8,
The air injection module is installed on the frame in an oblique direction to the substrate surface treatment blade module for injecting liquid air in an oblique direction toward the substrate. A liquid supply module for providing at least one of an etchant and water toward the substrate along the longitudinal direction;
An air injection module provided with an air injection nozzle along a longitudinal direction to inject liquid air toward the substrate; And
And a frame for assembling the liquid supply module and the air injection module by fixing both ends of the liquid supply module and both ends of the air injection module.
The frame includes:
A pair of first frames coupled to both ends of the air injection module and having an angle adjusting slit; And
And a pair of second frames to which the first frames are coupled. 15. The method of claim 14,
The second frame includes a coupling part to which the first frames are coupled and a support part spaced apart from the coupling part, and the support part is a substrate surface treatment blade coupled to a support frame connecting between the pair of second frames. module. delete delete The method according to any one of claims 1, 2, 4, 7, and 8,
Blade module for substrate surface treatment comprising a plurality of third supply pipe coupled to the air injection module along the longitudinal direction of the air injection module, and a fourth supply pipe connecting the third supply pipe.

Images