KR101210342B1 - 진공 배기계용 밸브 - Google Patents
진공 배기계용 밸브 Download PDFInfo
- Publication number
- KR101210342B1 KR101210342B1 KR1020057014487A KR20057014487A KR101210342B1 KR 101210342 B1 KR101210342 B1 KR 101210342B1 KR 1020057014487 A KR1020057014487 A KR 1020057014487A KR 20057014487 A KR20057014487 A KR 20057014487A KR 101210342 B1 KR101210342 B1 KR 101210342B1
- Authority
- KR
- South Korea
- Prior art keywords
- valve
- vacuum exhaust
- aluminum
- exhaust system
- flow path
- Prior art date
Links
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 43
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 43
- 238000002161 passivation Methods 0.000 claims abstract description 38
- 238000010494 dissociation reaction Methods 0.000 claims abstract description 26
- 230000005593 dissociations Effects 0.000 claims abstract description 26
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 239000012530 fluid Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 8
- 229910000963 austenitic stainless steel Inorganic materials 0.000 claims description 6
- 229920001577 copolymer Polymers 0.000 claims description 6
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 54
- 238000000354 decomposition reaction Methods 0.000 abstract description 27
- 238000005260 corrosion Methods 0.000 abstract description 16
- 230000007797 corrosion Effects 0.000 abstract description 16
- 230000008021 deposition Effects 0.000 abstract description 7
- 230000009467 reduction Effects 0.000 abstract description 2
- 238000004904 shortening Methods 0.000 abstract description 2
- 230000008569 process Effects 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 11
- 239000000047 product Substances 0.000 description 9
- 229910000838 Al alloy Inorganic materials 0.000 description 7
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 230000003197 catalytic effect Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 238000012824 chemical production Methods 0.000 description 2
- -1 composed of aluminum Chemical compound 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/005—Particular materials for seats or closure elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/04—Arrangements for preventing erosion, not otherwise provided for
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Valve Housings (AREA)
- Details Of Valves (AREA)
- Lift Valve (AREA)
Abstract
Description
Claims (10)
- 유입로와 유출로에 연통하는 밸브실의 저면에 밸브시트가 설치된 보디, 상기 밸브시트에 접촉 또는 분리되는 밸브체, 및 상기 밸브체를 밸브시트에 접촉시킴과 아울러 밸브시트로부터 분리시키는 구동수단을 갖고, 상기 밸브체가 밸브시트에 접촉 또는 분리됨으로써 유로를 차단 또는 개방하여 유체의 흐름을 제어하는 밸브에 있어서,상기 보디를, 3~8 중량%의 알루미늄을 함유하는 오스테나이트계 스테인레스강에 의해 형성하도록 함과 아울러,상기 보디의 유체에 접하는 내주면 전체를 알루미늄 부동태로 하고,상기 알루미늄 부동태의 두께는 20nm 내지 200nm로 하며,상기 알루미늄 부동태는 Al2O3로 이루어지고, 상기 보디를 가열하는 열처리에 의해 형성된 알루미늄 부동태이며,상기 밸브체를, 유체가 접하는 부분을 불소수지 피막에 의해 코팅한 금속제 다이어프램으로 하고,상기 밸브의 유로부를 150℃까지 가열할 수 있고, 상기 밸브의 유로부에 있어서 유체의 해리를 방지할 수 있는 것을 특징으로 하는 진공 배기계용 밸브.
- 삭제
- 삭제
- 삭제
- 삭제
- 삭제
- 제1항에 있어서, 상기 밸브의 유로는 상기 유로 내의 유체가 점성 흐름으로 되는 내경으로 한 것을 특징으로 하는 진공 배기계용 밸브.
- 제1항에 있어서, 상기 밸브 유로의 내경은 12mm이하로 한 것을 특징으로 하는 진공 배기계용 밸브.
- 삭제
- 제1항에 있어서, 상기 불소수지 피막을 4불화에틸렌수지(PTFE), 4불화에틸렌 6불화프로필렌 공중합체(FEP) 혹은 테트라플루오로에틸렌-퍼플루오로알킬비닐에테르 공중합체(PFA)로 한 것을 특징으로 하는 진공 배기계용 밸브.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2003-00034762 | 2003-02-13 | ||
JP2003034762A JP4085012B2 (ja) | 2003-02-13 | 2003-02-13 | 真空排気系用バルブ |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050101322A KR20050101322A (ko) | 2005-10-21 |
KR101210342B1 true KR101210342B1 (ko) | 2012-12-10 |
Family
ID=32866279
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020057014487A KR101210342B1 (ko) | 2003-02-13 | 2004-02-09 | 진공 배기계용 밸브 |
Country Status (9)
Country | Link |
---|---|
US (2) | US7472887B2 (ko) |
EP (1) | EP1593888B1 (ko) |
JP (1) | JP4085012B2 (ko) |
KR (1) | KR101210342B1 (ko) |
CN (1) | CN100357642C (ko) |
DE (1) | DE602004005829T2 (ko) |
IL (1) | IL169611A (ko) |
TW (1) | TWI243881B (ko) |
WO (1) | WO2004072519A1 (ko) |
Families Citing this family (20)
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US8628055B2 (en) * | 2005-07-27 | 2014-01-14 | The Board Of Trustees Of The University Of Illinois | Bi-direction rapid action electrostatically actuated microvalve |
WO2009012479A1 (en) | 2007-07-19 | 2009-01-22 | Swagelok Company | Coated seals |
US8123841B2 (en) * | 2008-01-16 | 2012-02-28 | The Board Of Trustees Of The University Of Illinois | Column design for micro gas chromatograph |
US8269029B2 (en) * | 2008-04-08 | 2012-09-18 | The Board Of Trustees Of The University Of Illinois | Water repellent metal-organic frameworks, process for making and uses regarding same |
US8387822B2 (en) | 2010-07-08 | 2013-03-05 | Sonoco Development, Inc. | Sealing lid for a container |
DE102010061271A1 (de) * | 2010-12-15 | 2012-06-21 | Contitech Schlauch Gmbh | Beheizbare Anschlussvorrichtung für medienführende, elektrisch beheizbare Schläuche |
US9188990B2 (en) * | 2011-10-05 | 2015-11-17 | Horiba Stec, Co., Ltd. | Fluid mechanism, support member constituting fluid mechanism and fluid control system |
EP2791561B1 (en) | 2011-12-14 | 2017-10-18 | Numatics Incorporated | Adjustable pressure controlled valve |
JP5837869B2 (ja) | 2012-12-06 | 2015-12-24 | 株式会社フジキン | 原料気化供給装置 |
US9454158B2 (en) | 2013-03-15 | 2016-09-27 | Bhushan Somani | Real time diagnostics for flow controller systems and methods |
JP6218470B2 (ja) * | 2013-07-18 | 2017-10-25 | 株式会社フジキン | ダイヤフラム弁 |
JP6193679B2 (ja) * | 2013-08-30 | 2017-09-06 | 株式会社フジキン | ガス分流供給装置及びガス分流供給方法 |
JP6258016B2 (ja) * | 2013-11-21 | 2018-01-10 | 株式会社ジェイテクト | 弁本体及びその製造方法 |
US10151402B2 (en) | 2014-01-21 | 2018-12-11 | Asco, L.P. | Pressure controlled and pressure control valve for an inflatable object |
JP6336345B2 (ja) * | 2014-06-30 | 2018-06-06 | 株式会社フジキン | ダイヤフラム弁、流体制御装置、半導体製造装置および半導体製造方法 |
US10550947B2 (en) * | 2015-01-16 | 2020-02-04 | Kitz Sct Corporation | Block valve and block valve for raw material container |
CN106151672A (zh) * | 2015-03-30 | 2016-11-23 | 安徽春辉仪表线缆集团有限公司 | 一种保温型调节阀 |
US10983538B2 (en) | 2017-02-27 | 2021-04-20 | Flow Devices And Systems Inc. | Systems and methods for flow sensor back pressure adjustment for mass flow controller |
WO2021039027A1 (ja) | 2019-08-30 | 2021-03-04 | 株式会社フジキン | ダイヤフラムバルブ |
KR20230145432A (ko) * | 2021-04-01 | 2023-10-17 | 가부시키가이샤 후지킨 | 제어기 및 기화 공급 장치 |
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KR20010040922A (ko) * | 1998-02-20 | 2001-05-15 | 모서 다니엘 | 고압-유압밸브 |
JP2002323147A (ja) * | 2001-04-23 | 2002-11-08 | Tomoe Tech Res Co | バタフライバルブの弁体の製造方法 |
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2003
- 2003-02-13 JP JP2003034762A patent/JP4085012B2/ja not_active Expired - Fee Related
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2004
- 2004-02-04 TW TW093102547A patent/TWI243881B/zh not_active IP Right Cessation
- 2004-02-09 US US10/545,672 patent/US7472887B2/en not_active Expired - Lifetime
- 2004-02-09 EP EP04709363A patent/EP1593888B1/en not_active Expired - Fee Related
- 2004-02-09 KR KR1020057014487A patent/KR101210342B1/ko active IP Right Grant
- 2004-02-09 CN CNB2004800040840A patent/CN100357642C/zh not_active Expired - Fee Related
- 2004-02-09 DE DE602004005829T patent/DE602004005829T2/de not_active Expired - Fee Related
- 2004-02-09 WO PCT/JP2004/001352 patent/WO2004072519A1/ja active IP Right Grant
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2005
- 2005-07-10 IL IL169611A patent/IL169611A/en not_active IP Right Cessation
-
2008
- 2008-09-11 US US12/208,949 patent/US7988130B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR950012809A (ko) * | 1993-10-01 | 1995-05-17 | 발도르프, 옴케 | 플러그타입 전기 커넥터 |
JPH102452A (ja) * | 1996-06-14 | 1998-01-06 | Smc Corp | 高真空バルブ |
KR19980024431A (ko) * | 1996-09-10 | 1998-07-06 | 타다히로 오오미 | 압력검출기 |
KR20010040922A (ko) * | 1998-02-20 | 2001-05-15 | 모서 다니엘 | 고압-유압밸브 |
JP2002323147A (ja) * | 2001-04-23 | 2002-11-08 | Tomoe Tech Res Co | バタフライバルブの弁体の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2004072519A1 (ja) | 2004-08-26 |
KR20050101322A (ko) | 2005-10-21 |
EP1593888A4 (en) | 2006-02-01 |
CN1748102A (zh) | 2006-03-15 |
TWI243881B (en) | 2005-11-21 |
EP1593888A1 (en) | 2005-11-09 |
CN100357642C (zh) | 2007-12-26 |
US20060071192A1 (en) | 2006-04-06 |
US7988130B2 (en) | 2011-08-02 |
IL169611A (en) | 2009-09-22 |
EP1593888B1 (en) | 2007-04-11 |
DE602004005829T2 (de) | 2007-08-02 |
JP2004265928A (ja) | 2004-09-24 |
US20090020721A1 (en) | 2009-01-22 |
DE602004005829D1 (de) | 2007-05-24 |
JP4085012B2 (ja) | 2008-04-30 |
US7472887B2 (en) | 2009-01-06 |
TW200424464A (en) | 2004-11-16 |
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