KR101205834B1 - Cleaning unit, Apparatus of discharging treating fluid with the unit and Method for cleaing head - Google Patents

Abstract

SUMMARY OF THE INVENTION The present invention discloses a treatment liquid ejecting apparatus, wherein in a head cleaning unit for cleaning a nozzle surface of a head, liquid crystals remaining on an upper portion of a suction nozzle in order to efficiently remove fine liquid crystal remaining on the nozzle surface of the head are suction nozzles. It characterized in that one or a plurality of injection nozzles are provided to push the gas in the direction. Further, a horizontal drive member for adjusting the distance between the injection nozzle and the suction nozzle and a lifting member for adjusting the height of the discharge port of the injection nozzle are provided, and a pressure regulating means for adjusting the injection pressure of the discharge port of the injection nozzle is provided. It is characterized by.

Description

Cleaning unit, Apparatus of discharging treating fluid with the unit and Method for cleaing head}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing liquid ejecting apparatus, and more particularly, to an apparatus for ejecting a processing liquid onto a substrate by an inkjet method for ejecting droplets.

In recent years, liquid crystal displays have been widely used in display units of electronic devices such as mobile phones and portable computers. The liquid crystal display device comprises: a color filter substrate on which a black matrix, a color filter, a common electrode, and an alignment layer are formed; The liquid crystal is injected into a space between the thin film transistor (TFT), the pixel electrode, and the array substrate on which the alignment layer is formed, thereby obtaining an image effect by using a difference in refractive index of light due to the anisotropy of the liquid crystal.

An inkjet coating apparatus is used as an apparatus which apply | coats an alignment liquid or a liquid crystal on a color filter substrate and an array substrate. However, even after the liquid crystal is applied to the substrate and the liquid crystal remaining in the head is washed, there is a problem in that the fine liquid crystal remains in the head because the cleaning is not performed smoothly. For this reason, the problem that the film uniformity of the liquid crystal apply | coated to a board | substrate falls.

An object of the present invention is to provide a treatment liquid discharge device capable of efficiently removing the fine liquid crystal remaining on the nozzle face of the head.

The objects of the present invention are not limited thereto, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, a processing liquid discharge device according to an embodiment of the present invention is provided on a base and the base, a substrate support unit on which a substrate is placed, and an upper portion of a movement path of the substrate support unit. A gantry coupled to the heads for discharging the chemical liquid on the inkjet method and a cleaning unit installed on the base and cleaning the nozzle surface of the head, wherein the cleaning unit includes a suction hole formed toward the head. It characterized in that it comprises a suction nozzle and a gas injection unit provided with one or a plurality of injection nozzles having a discharge port toward the head located above the suction nozzle.

In addition, it characterized in that it further comprises a horizontal drive member for moving the injection nozzle in the horizontal direction.

The horizontal driving member may include a guide member coupled to the base upper surface, a slider linearly moving along the guide member, and a driver for driving the slider.

In addition, a plurality of spray nozzles are provided, and the horizontal driving member is coupled to each of the spray nozzles to drive independently.

In addition, a plurality of spray nozzles may be provided, and the heights of the ends of the discharge ports of the spray nozzles may be different from each other.

In addition, it characterized in that it further comprises a lifting member which is respectively coupled to the injection nozzle in order to independently adjust the height of the end of the discharge port of the injection nozzle.

In addition, it characterized in that it further comprises a pressure adjusting means respectively coupled to the injection nozzle to independently control the injection pressure of the discharge port of the injection nozzle.

In order to achieve the above object, the cleaning unit for cleaning the nozzle of the processing liquid according to an embodiment of the present invention, the suction nozzle having a suction hole formed to face the upper portion and the injection port toward the head in which the suction nozzle is located And a gas injection unit provided with at least one nozzle, wherein the injection nozzle comprises a first injection nozzle and a second injection nozzle, wherein the first injection nozzle and the second injection nozzle face the suction nozzle. It is arranged in line with the suction nozzle, it characterized in that the height of the end of the discharge port of the first injection nozzle and the height of the end of the discharge port of the second injection nozzle are different from each other.

The apparatus may further include a horizontal driving member which moves the first spray nozzle and the second spray nozzle in a horizontal direction.

The apparatus may further include a first horizontal member for moving the first spray nozzle in a horizontal direction and a second horizontal member for moving the second spray nozzle in a horizontal direction, wherein the first horizontal member and the second horizontal member Independently controlled.

The apparatus may further include a first elevating member for adjusting the height of the discharge port of the first injection nozzle and a second elevating member for adjusting the height of the discharge port of the second injection nozzle, wherein the first elevating member and the second elevating member are included. The member is characterized in that it is controlled independently.

The apparatus may further include first pressure adjusting means for adjusting the injection pressure of the discharge port of the first injection nozzle and second pressure adjusting means for adjusting the injection pressure of the discharge port of the second injection nozzle. It is characterized in that the two pressure regulating means are independently controlled.

In order to achieve the above-described problem, the cleaning method of the processing liquid discharge device according to the embodiment of the present invention, the injection nozzle of the plurality of injection nozzles close to the suction nozzle is directed toward the liquid crystal remaining in the nozzle of the processing liquid After spraying to push the liquid crystal in the direction of the suction nozzle, the gas is again sprayed toward the liquid crystal remaining in the ejection nozzle, which is far from the suction nozzle, and the liquid crystal is pushed toward the suction nozzle and sucked by the suction nozzle. It is characterized by washing.

In addition, the height of the discharge port of the injection nozzle close to the distance of the suction nozzle of the plurality of injection nozzles is characterized in that the distance from the suction nozzle of the plurality of injection nozzles is lower than the height of the discharge port of the remote nozzle.

According to the present invention, the fine liquid crystal remaining on the nozzle face of the head can be efficiently removed.

The drawings described below are for illustrative purposes only and are not intended to limit the scope of the invention.
BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure of the inkjet system liquid crystal coating installation.
FIG. 2 is a perspective view of the liquid crystal discharge part of FIG. 1.
3 is a plan view of the liquid crystal discharge part of FIG. 1.
4 is a diagram illustrating the first driving unit of FIG. 3.
FIG. 5 is a diagram illustrating a second driving unit of FIG. 3.
6 is a view illustrating a process of linear movement and rotation of the gantry.
7 is a view showing the side of the head moving unit of FIGS. 2 and 3.
8 is a front view of the first mobile unit of FIG. 7.
9 shows a nozzle inspection unit.
10 is a view schematically showing an embodiment of a head cleaning unit.
11 is a view schematically showing another embodiment of the head cleaning unit.
12 is a view schematically showing a part of the head cleaning unit of FIG. 11.
FIG. 13 is a view schematically showing another embodiment of the head cleaning unit. FIG.
FIG. 14 is an enlarged cross-sectional view illustrating a part of the head cleaning unit of FIG. 13.
15 is an enlarged cross-sectional view showing another embodiment of a part of the head cleaning unit.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention. The problem, the problem solving means, and effects to be solved by the present invention described above will be easily understood through embodiments related to the accompanying drawings. Each drawing is partly or exaggerated for clarity. In adding reference numerals to the components of each drawing, it should be noted that the same components are shown with the same reference numerals as much as possible, even if displayed on different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

Hereinafter, a facility for applying the treatment liquid to the object by an inkjet method of discharging droplets, and a method of applying the treatment liquid to the object using the same will be described.

For example, the object may be a color filter (CF) substrate or a thin film transistor (TFT) substrate of a liquid crystal display panel, and the treatment liquid may be a red (R) liquid pigment (Liquid Crystal), an alignment liquid, and a pigment particle mixed in a solvent. , Green (G) and blue (B) ink. Polyimide may be used as the alignment liquid.

The alignment liquid may be applied to the entire surface of the color filter (CF) substrate and the thin film transistor (TFT) substrate, and the liquid crystal may be applied to the entire surface of the color filter (CF) substrate or the thin film transistor (TFT) substrate. The ink may be applied to the inner region of the black matrix arranged in a grid pattern on the color filter CF substrate.

In the present embodiment, the equipment using the liquid crystal as the processing liquid is described as an example, but the technical idea of the present invention is not limited thereto.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure of the inkjet system liquid crystal coating installation. The liquid crystal coating facility 1 of FIG. 1 is a facility for applying liquid crystal to a substrate by an inkjet method of discharging liquid crystal.

The substrate may be a color filter (CF) substrate or a thin film transistor (TFT) substrate of the liquid crystal display panel, and the liquid crystal may be coated on the entire surface of the color filter (CF) substrate or the thin film transistor (TFT) substrate.

Referring to FIG. 1, the liquid crystal coating apparatus 1 may include a liquid crystal discharge unit 10, a substrate transfer unit 20, a loading unit 30, an unloading unit 40, a liquid crystal supply unit 50, and a main control unit 90. ). The liquid crystal discharge part 10 and the substrate transfer part 20 may be disposed in a line in the first direction I and may be adjacent to each other. The liquid crystal supply unit 50 and the main controller 90 are disposed at positions facing the substrate transfer unit 20 with the liquid crystal discharge unit 10 as the center. The liquid crystal supply unit 50 and the main controller 90 may be arranged in a second direction (II). The loading unit 30 and the unloading unit 40 are disposed at positions facing the liquid crystal discharge unit 10 with respect to the substrate transfer unit 20. The loading unit 30 and the unloading unit 40 may be arranged in a line in the second direction (II).

Here, the first direction (I) is an arrangement direction of the liquid crystal discharge unit 10 and the substrate transfer unit 20, the second direction (II) is a direction perpendicular to the first direction (I) on the horizontal plane, the third direction (III) is a direction perpendicular to the first direction I and the second direction II.

The substrate to which the liquid crystal is to be applied is loaded into the loading unit 30. The substrate transfer unit 20 transfers the substrate loaded into the loading unit 30 to the liquid crystal discharge unit 10. The liquid crystal discharge unit 10 receives liquid crystal from the liquid crystal supply unit 50, and discharges the liquid crystal onto the substrate by an inkjet method of discharging liquid droplets. When the liquid crystal discharge is completed, the substrate transfer unit 20 transfers the substrate from the liquid crystal discharge unit 10 to the unloading unit 40. The substrate coated with the liquid crystal is carried out from the unloading part 40. The main controller 90 controls the overall operations of the liquid crystal discharge unit 10, the substrate transfer unit 20, the loading unit 30, the unloading unit 40, and the liquid crystal supply unit 50.

2 is a perspective view of the liquid crystal discharge part of FIG. 1, and FIG. 3 is a plan view of the liquid crystal discharge part of FIG. 1. 2 and 3, the liquid crystal discharge unit 10 may include a base B, a substrate support unit 100, a gantry 200, a gantry moving unit 300, inkjet head units 400, and head movements. The unit 500, the liquid crystal supply unit 600, the individual head control unit 700, the liquid crystal discharge amount measuring unit 800, the nozzle inspection unit 900, and the head cleaning unit 1000 are included.

Hereinafter, each configuration of the liquid crystal discharge unit will be described in detail.

Base (B) may be provided in a rectangular parallelepiped shape having a constant thickness. The substrate support unit 100 is disposed on the upper surface of the base B. The substrate support unit 100 has a support plate 110 on which the substrate S is placed. The support plate 110 may be a rectangular plate. The rotation driving member 120 is connected to the lower surface of the support plate 110. The rotation drive member 120 may be a rotation motor. The rotation drive member 120 rotates the support plate 110 about a rotation center axis perpendicular to the support plate 100.

When the support plate 110 is rotated by the rotation driving member 120, the substrate S may be rotated by the rotation of the support plate 110. When the long side direction of the cell formed on the substrate to which the liquid crystal is to be applied faces the second direction (II), the rotation driving member 120 may rotate the substrate such that the long side direction of the cell faces the first direction (I).

The support plate 110 and the rotation driving member 120 may be linearly moved in the first direction I by the linear driving member 130. The linear drive member 130 includes a slider 132 and a guide member 134. The rotation drive member 120 is installed on the upper surface of the slider 132. The guide member 134 extends in the first direction (I) at the center of the upper surface of the base (B). The slider 132 may include a linear motor (not shown), and the slider 132 is linearly moved in the first direction I along the guide member 134 by the linear motor (not shown).

The gantry 200 is provided at the top of the path through which the support plate 110 is moved. The gantry 200 is spaced apart from the upper surface of the base B in the upward direction, and the gantry 200 is disposed such that the longitudinal direction thereof faces the second direction II. The inkjet head unit 400 is coupled to the gantry 200 by the head moving unit 500. The inkjet head unit 400 may be linearly moved in the longitudinal direction of the gantry, that is, the second direction II by the head moving unit 500, and may also be linearly moved in the third direction III.

The gantry moving unit 300 linearly moves the gantry 200 in the first direction (I), or moves the gantry 200 so that the longitudinal direction of the gantry 200 is inclined in the first direction (I). Can be rotated. By the rotation of the gantry 200, the nozzles (not shown) of the inkjet head unit 400 are aligned in a direction inclined in the first direction I.

As described below, the gantry moving unit 300 may rotate the other end of the gantry 200 using one end of the gantry 200 as the rotation center. Alternatively, the gantry moving unit 300 may be configured to rotate the gantry 200 using the center of the gantry 200 as the rotation center.

The gantry driving unit 300 includes a first driving unit 310 and a second driving unit 320. The second drive unit 320 is provided at one end of the gantry 200, which is a rotation center, and the first drive unit 310 is provided at the other end of the gantry 200.

4 is a diagram illustrating the first driving unit of FIG. 3. Referring to FIG. 4, the first drive unit 310 includes a slider 312, a first rotation support member 314, and a first linear drive member 318. The lower end of the gantry 200 is provided with a guide rail 210 along the longitudinal direction of the gantry 200, the slider 312 is guided by the guide rail 210 to move linearly. The first rotary support member 314 is coupled to the lower end of the slider 312. The first rotation support member 314 may be a bearing capable of relative rotation of the upper and lower portions. The first linear drive member 318 is coupled to the bottom surface of the first rotational support member 314. The first linear drive member 318 linearly moves the first rotary support member 314 in the first direction (I).

The first linear drive member 318 includes a guide rail 315 and a slider 317. The guide rail 315 has a longitudinal direction toward the first direction I and is disposed at the other edge portion of the upper surface of the base B with respect to the guide member 134 of the substrate support unit 100. The slider 317 is movably coupled to the guide rail 315. The first rotary support member 314 is coupled to the upper surface of the slider 317. The slider 317 may have a built-in linear motor (not shown). The slider 317 linearly moves in the first direction I along the guide rail 315 by the driving force of the linear motor (not shown).

FIG. 5 is a diagram illustrating a second driving unit of FIG. 3. Referring to FIG. 5, the second driving unit 320 linearly moves one end of the gantry 200 in the first direction I when the gantry 200 moves linearly, and the gantry 200 when the gantry 200 rotates. It operates as the center of rotation.

The second drive unit 320 includes a second rotational support member 324 and a second straight drive member 328. The connection member 322 is coupled to one bottom surface of the gantry 200, and the second rotation support member 324 is coupled to the bottom surface of the connection member 322. The second rotation support member 324 may be a bearing capable of relative rotation of the upper and lower parts. The second linear drive member 328 is coupled to the bottom surface of the second rotation support member 324. The second linear drive member 328 linearly moves the second rotary support member 324 in the first direction (I). By linear movement of the second rotation support member 324, one end of the connection member 322 and the gantry 200 sequentially coupled to the upper portion is linearly moved.

The second straight drive member 328 includes a guide rail 325 and a slider 327. The guide rail 325 has a longitudinal direction toward the first direction (I) and is disposed on one side edge portion of the upper surface of the base B with respect to the guide member 134 of the substrate support unit 100. The slider 327 is movably coupled to the guide rail 325. The second rotating support member 324 is coupled to the upper surface of the slider 327. The slider 327 may have a built-in linear motor (not shown). The slider 327 linearly moves in the first direction I along the guide rail 325 by the driving force of the linear motor (not shown).

6 is a view illustrating a process of rotating and linearly moving the gantry. 3 and 6 omit the liquid crystal supply unit for convenience of drawing.

 4, 5, and 6, the gantry 200 is rotated by the first driving unit 310 and the second driving unit 320 to face a direction inclined in the first direction I. , May be linearly moved in the first direction (I).

In a state in which the second linear drive member 328 of the second drive unit 320 is fixed, the gantry when the first linear drive member 318 of the first drive unit 310 moves linearly in the first direction (I). 200 is rotated. This will be described in detail as follows.

First, the slider 317 of the first linear drive member 318 moves in the first direction I along the guide rail 315 by the driving force of the linear motor (not shown). At this time, one end of the gantry 200 is rotated by the second rotation support member 324 in a state in which there is no movement in the first direction I because the second linear driving member 328 is not driven.

As the slider 317 of the first linear drive member 318 moves in the first direction (I), the first rotary support member 314 disposed thereon moves in the first direction along the guide rail 315. Go straight to I). At the same time, the slider 312 coupled to the upper end of the first rotary support member 314 is rotated by the relative rotation between the top and the bottom of the first rotary support member 314, while the guide rail 210 provided in the gantry 200. Move to the lower side of the gantry 200 along. As a result, the gantry 200 rotates around the support position of the second drive unit 320, and the support position of the gantry 200 of the first drive unit 310 is moved to the outside of the other end. Through this operation, the gantry 200 may be rotated in a direction inclined in the first direction (I), whereby the inkjet head unit 400 is aligned in a direction inclined in the first direction (I).

As such, when the inkjet head unit 400 is aligned in the direction inclined in the first direction I, the liquid crystal discharge pitch may be flexibly adjusted in response to the pixel pitch change of the substrate S to which the liquid crystal is applied. Through this, the film uniformity of the liquid crystal applied to the substrate can be increased.

The gantry 200 may be rotated by the above method, and the slider 317 of the first linear drive member 318 and the slider of the second linear drive member 328 may be rotated in the gantry 200. 327 may additionally linearly move in the first direction (I). One end of the gantry 200 is linearly moved in the first direction I by the slider 327 of the second linear drive member 328, and the other end of the gantry 200 is the first linear drive member 318. The linear movement of the slider 317 in the first direction (I) is possible.

When the gantry 200 is fixed and the substrate moves in the first direction I, since the substrate needs to be moved from one side of the gantry 200 to the other side, the footprint of the facility may be increased. However, in the present invention, since the gantry 200 can be linearly moved in the first direction (I) in a state where the substrate is fixed or along with the linear movement of the substrate, the footprint of the equipment can be reduced.

The head moving unit 500 may be provided to the inkjet head unit 400, respectively. In the present embodiment, since three inkjet head units 400a, 400b, and 400c are provided by way of example, three head moving units 500 may also be provided to correspond to the number of heads. Alternatively, one head moving unit 500 may be provided, and in this case, the inkjet head unit 400 may be moved integrally instead of individually moving.

FIG. 7 is a side view of the head moving unit of FIGS. 2 and 3, and FIG. 8 is a front view of the first moving unit of FIG. 7.

7 to 8, the head moving unit 500 includes a first moving unit 520 and a second moving unit 540. The first moving unit 520 linearly moves the inkjet head unit 400a in the longitudinal direction of the gantry, that is, the second direction II, and the second moving unit 540 moves the inkjet head unit 400a in the third direction. It moves linearly to (III).

The first moving unit 520 includes guide rails 522a and 522b, sliders 524a and 524b, and a moving plate 526. The guide rails 522a and 522b extend in the second direction II and may be spaced apart in the third direction III on the front surface of the gantry 200. Sliders 524a and 524b are movably coupled to the guide rails 522a and 524b, and a linear driver, for example, a linear motor (not shown) may be built in the sliders 524a and 524b. The moving plate 526 is coupled to the sliders 524a and 524b. The upper region of the moving plate 526 is coupled to the slider 524a located above, and the lower region of the moving plate 526 is coupled to the slider 524b located below. As illustrated in FIG. 8, the moving plate 526 linearly moves in the second direction II along the guide rails 522a and 522b by a driving force of a linear motor (not shown). As such, as the inkjet head units 400a, 400b and 400c are individually moved along the second direction II, the distance between the inkjet head units 400a, 400b and 400c may be adjusted.

The second moving unit 540 includes a guide member 542, a slider 544, a detector 546, and a controller 548. The guide member 542 is coupled to the moving plate 526 of the first moving unit 520 and guides the linear movement of the slider 544 in the third direction (III). The slider 544 is coupled to the guide member 542 to be linearly movable, and the slider 544 may include a linear driver, for example, a linear motor (not shown). The inkjet head unit 400a is coupled to the slider 544 and is moved in the third direction III by linear movement of the slider 544 in the third direction III.

The detector 546 may be installed in the gantry 200, and detects a gap between the inkjet head unit 400a and the substrate S. The detector 546 may be a vision camera and is used for the purpose of positioning and checking the state of glass printing. The controller 548 generates a control signal corresponding to the detection signal of the detector 546 and transmits a control signal to the linear motor included in the slider 544 to control the driving of the linear motor. If it is determined that the distance between the inkjet head unit 400a and the substrate S is out of a predetermined reference value according to the detection result of the detector 546, the controller 548 controls the driving of the linear motor (not shown) to control the inkjet. The distance between the head unit 400a and the substrate S is adjusted.

The inkjet head unit 400 discharges liquid crystal droplets onto the substrate. The inkjet head unit 400 may be provided in plurality. In the present embodiment, an example in which three inkjet head units 400a, 400b, and 400c are provided will be described, but the present invention is not limited thereto. The inkjet head units 400 may be arranged side by side in a second direction (II) and coupled to the gantry 200.

The bottom of the inkjet head unit 400 is provided with a plurality of nozzles (not shown) for discharging liquid crystal droplets. For example, each head may be provided with 128 or 256 nozzles (not shown). The nozzles (not shown) may be arranged in a row at intervals of a predetermined pitch. The nozzles (not shown) can eject the liquid crystal in an amount of μg.

In the case of the point dotting method using a conventional syringe, since the discharge pitch of the liquid crystal is large and the amount of the liquid crystal discharged is in mg unit, the liquid crystal does not spread evenly on the substrate due to the viscous flow resistance of the liquid crystal. There was a problem. However, in the present invention, since the liquid crystal is discharged in μg units through a plurality of nozzles (not shown) having a narrow pitch interval, the liquid crystal may be more evenly applied onto the substrate despite the viscous flow resistance of the liquid crystal.

Each inkjet head unit 400 may be provided with a number of piezoelectric elements corresponding to nozzles (not shown), and the droplet discharge amount of the nozzles (not shown) may be used to control the voltage applied to the piezoelectric elements. Can be adjusted independently.

The liquid crystal supply unit 600 includes a liquid crystal supply module 620 and a pressure regulation module 640. The liquid crystal supply module 620 and the pressure regulation module 640 may be coupled to the gantry 200. The liquid crystal supply module 620 receives the liquid crystal from the liquid crystal supply unit (reference numeral 50 of FIG. 1), and supplies the liquid crystal to the individual heads 410, 420, and 430. The pressure regulation module 640 adjusts the pressure of the liquid crystal supply module 620 by providing a positive pressure or a negative pressure to the liquid crystal supply module 620.

The head control unit 700 controls liquid crystal ejection of each of the heads 410, 420, and 430. The head control unit 700 may be disposed in the liquid crystal discharge unit 10 adjacent to the heads 410, 420, and 430. For example, the head control unit 700 may be disposed at one end of the gantry 200. In the present exemplary embodiment, the case in which the head control unit 700 is disposed at one end of the gantry 200 is described as an example, but the position of the head control unit 700 is not limited thereto.

Although not shown, the head control unit 700 is electrically connected to the respective heads 410, 420, 430 and applies a control signal to the respective heads 410, 420, 430. Each of the heads 410, 420, and 430 may be provided with a number of piezoelectric elements (not shown) corresponding to the nozzles (not shown), and the head control unit 700 controls the voltages applied to the piezoelectric elements to control the nozzles. It is possible to adjust the discharge amount of the droplet (not shown).

The liquid crystal discharge amount measuring unit 800 measures the liquid crystal discharge amount of the individual heads 410, 420, and 430. Specifically, the liquid crystal discharge amount measuring unit 800 measures the liquid crystal amount discharged from all nozzles (not shown) for each of the individual heads 410, 420, and 430. By measuring the liquid crystal discharge amount of the individual heads 410, 420, 430, the presence or absence of abnormalities of nozzles (not shown) of the individual heads 410, 420, 430 may be confirmed. That is, when the liquid crystal discharge amounts of the individual heads 410, 420, 430 deviate from the reference value, it can be seen that at least one of the nozzles (not shown) is abnormal. It may be disposed on one side of the (100). The liquid crystal discharge amount measuring unit 800 may have first to third liquid crystal discharge amount measuring units 800a, 800, and 800c.

The nozzle inspection unit 900 checks the abnormality of the individual nozzles provided to the heads 410, 420, and 430 through optical inspection. When it is determined that there is an abnormality in the unspecified nozzle, when the liquid crystal discharge amount measuring unit 800 confirms whether there is an abnormality in the macroscopic nozzle, the nozzle inspection unit 900 checks the entirety of the nozzles while confirming the abnormality of the individual nozzles. You can proceed.

The nozzle inspection unit 900 may be disposed on one side of the substrate support unit 100 on the base B. The heads 410, 420, 430 may be moved in the first direction (I) and the second direction (II) by the gantry moving unit 300 and the head moving unit 500 to be positioned above the nozzle inspection unit 900. . The head moving unit 500 may move the heads 410, 420, 430 in the third direction III to adjust the vertical distance between the heads 410, 420, 430 and the nozzle inspection unit 900.

9 is a view showing a nozzle inspection unit.

Referring to FIG. 9, the nozzle inspection unit 900 may include a first nozzle inspection member 920, a first driving member 940, a second nozzle inspection member 960, and a second driving member 980 and a recovery member. 990. The first nozzle inspecting member 920 inspects whether the nozzles of the heads 410, 420, and 430 eject liquid crystals, that is, whether the nozzles are clogged. The first drive member 940 moves the first nozzle inspection member 920 in the alignment direction of the nozzles. The second nozzle inspecting member 960 inspects whether the nozzles are aligned. The second drive member 980 moves the second nozzle inspection member 960 in the alignment direction of the nozzles. In FIG. 9, the nozzles are aligned in the second direction II.

The first nozzle inspecting member 920 includes a bath 922, a light emitting unit 924, and a light receiving unit 926. The bath 922 is provided in a cylindrical shape having an open top and accommodates liquid crystals that are discharged from the nozzles (not shown) of the heads 410, 420, and 430 and drop. The light emitting unit 924 is disposed at one upper side of the bath 922, and the light receiving unit 926 is disposed to face the light emitting unit 924 at the other upper side of the bath 922. The light emitter 924 emits an optical signal, and the light receiver 926 receives the light signal emitted by the light emitter 924. The liquid crystal discharged from the nozzles (not shown) of the heads 410, 420, and 430 passes through the region between the light emitting unit 924 and the light receiving unit 926, and it is determined whether the liquid crystal falls due to the difference in the amount of light received by the light receiving unit 926. Can be detected. If it is determined that the liquid crystal falls normally, it can be seen that there is no clogging of nozzles (not shown) of the heads 410, 420, and 430.

The first drive member 940 includes a guide member 942, a slider 944, and a driver 946. The guide member 942 extends in the second direction (II) on the upper surface of the base (B). Slider 944 may have a built-in driver 946, such as a linear motor. The slider 944 is driven by the driver 946 and linearly moved in the second direction II along the guide member 942. The bath 922 is disposed in the slider 944, and the bath 922 is linearly moved in the second direction (II) by the linear movement of the slider 944 in the second direction (II).

The second nozzle inspection member 960 includes a frame 962, an illuminator 964, and an imager 966. The frame 962 may be disposed adjacent to the bath 922 of the first nozzle inspection member 920 along the second direction II. In the frame 962, an illuminator 964 and a camera 966 are disposed. The illuminator 964 irradiates light onto the nozzle faces of the inspected heads 410, 420 and 430, and the imager 966 captures the nozzle faces of the heads 410, 420 and 430 to which the illuminator 964 is irradiated to obtain images of the nozzles. . From the acquired image, it is determined whether the nozzles are aligned in position.

The second drive member 980 includes a slider 984 and a driver 986. Slider 984 may have a built-in driver 986, such as a linear motor. The slider 984 is driven by the driver 986 and is linearly moved in the second direction II along the guide member 942. The frame 962 of the second nozzle inspection member 960 is disposed on the slider 984, and the frame 962, the illuminator 964, and the camera 966 are moved by the linear movement of the slider 984 in the second direction (II). ) Is linearly moved in the second direction (II).

The recovery member 990 recovers the liquid crystal discharged from the bath 922. The recovery member 990 includes a housing 992 and a recovery container 994. The housing 992 is disposed under the bath 922 and provides a space for receiving the recovery container 994. The recovery container 994 is moved to the space of the housing 992 by a sliding method, separated and inserted, and recovers the liquid crystal discharged from the bath 922. The recovered liquid crystal can be recycled.

10 is a view schematically showing an embodiment of a head cleaning unit.

9 and 10, the head cleaning unit 1000 performs a purging process and a suction process. Purging is a process of spraying a part of the liquid crystal contained in the heads 410, 420, and 430 at high pressure. The suction process is a process of sucking and removing liquid crystal remaining on the nozzle faces of the heads 410, 420, and 430 after a purging process.

The head cleaning unit 1000 sucks liquid crystal remaining on the nozzle surfaces of the heads 410, 420, and 430 and introduces the liquid into the bath 922. The head cleaning unit 1000 and the first nozzle inspection member 940 of the nozzle inspection unit 900 may use one bath 922 in common or separately. The bath 922 may accommodate the liquid crystal discharged during the purging process of the heads 410, 420, and 430, and may also accommodate the liquid crystal discharged during the inspection of whether the nozzles of the heads 410, 420, 430 are discharged. have.

The head cleaning unit 1000 includes a suction nozzle 1100, a gas injection unit 1200, and a support member 1300. The support member 1300 supports the suction nozzle 1100 and the gas injection unit 1200.

The suction nozzle 1100 is provided along the moving direction of the heads 410, 420, and 430. The suction nozzle 1100 is a suction line 1112 for sucking chemicals remaining on the nozzle faces of the heads 410, 420, 430 at the center and a suction hole 1114 formed toward the nozzle faces of the heads 410, 420, 430 formed at the end of the suction line. ) The suction nozzle 1100 is provided spaced apart from the nozzle faces of the heads 410, 420, and 430. The suction nozzle 1100 sucks and cleans the liquid crystal remaining on the nozzle surfaces of the heads 410, 420, 430 along the nozzle surfaces of the heads 410, 420, 430.

The gas injection unit 1200 injects gas toward the liquid crystal remaining on the nozzle surfaces of the heads 410, 420, and 430, thereby pushing out the remaining liquid crystal to the suction nozzle 1100 to easily suck the chemical liquid remaining in the suction nozzle 1100. To remove it.

The gas injection unit 1200 is an injection nozzle 1210. A horizontal drive member 1220, a vertical drive member 1230, and a pressure regulating means 1240.

The spray nozzle 1210 is provided in line with the suction nozzle 1100. The injection nozzle 1210 has an ejection opening 1214 toward the heads 410, 420, 430 located above the suction nozzle 1210 to inject gas toward the liquid crystal remaining on the nozzle surfaces of the heads 410, 420, 430.

At least one spray nozzle 1210 is provided. The spray nozzle 1210 may have various arrangements around the suction nozzle 1100. The injection nozzle 1210 is disposed so that the discharge port 1214 of the injection nozzle 1210 faces the heads 410, 420, and 430 located above the suction nozzle 1100. When a plurality of spray nozzles 1210 are provided, all of the plurality of spray nozzles 1210 may be disposed before and after the suction nozzle 1100, or may be disposed to face the suction nozzle 1100.

The horizontal driving member 1220 moves the spray nozzle 1210 in the horizontal direction to adjust the gap between the suction nozzle 1100 and the spray nozzle 1210 or the gap between the spray nozzles 1210. This is to correspond to a change in the amount and size of the liquid crystal remaining on the nozzle surface of the head (410, 420, 430).

For example, when the amount and size of the liquid crystal remaining on the nozzle surfaces of the heads 410, 420, 430 are large, the gas is injected by narrowing the distance between the injection nozzle 1210 and the suction nozzle 1100, and remaining on the nozzle surfaces of the heads 410, 420, 430. When the amount and size of the liquid crystal are small, the distance between the injection nozzle 1210 and the suction nozzle 1100 is widened to inject gas.

The horizontal drive member 1220 includes a guide member 1222, a slider 1224, and a horizontal driver 1226. The guide member 1222 extends in the second direction 2 on the upper surface of the support member 1300. The slider 1224 may include a horizontal driver 1226 such as a linear motor. The slider 122 is driven by the horizontal driver 1226 and is linearly moved in the second direction 2 along the guide member 1222.

The horizontal driving member 1220 may be coupled to each of the plurality of injection nozzles 1210 to be driven independently, or may be coupled to simultaneously drive the plurality of injection nozzles 1210 horizontally.

The lifting member 1230 linearly moves the injection nozzle 1210 in the vertical direction. The elevating member 1230 adjusts the height of the discharge port 1214 of the injection nozzle 1210. That is, when spraying gas toward the liquid crystal remaining on the nozzle surface of the head (410, 420, 430), the relative height of the injection nozzle 1210 with respect to the nozzle surface of the head (410, 420, 430) as the injection nozzle 1210 is moved up and down Is changed.

The elevating member 1230 includes a moving shaft 1232 and an elevating driver 1234. The lifting members 1230 are fixedly coupled to the outer shaft of the injection nozzle 1210 by a lifting driver 1234 which moves in the vertical direction. The elevating member 1230 is coupled to the injection nozzle 1210 so that each height can be independently adjusted.

The elevating member 1230 couples the elevating member 1230 to the suction nozzle 1100 so that the height of the end portion of the injection nozzle 1210 is adjusted according to the amount and size of the liquid crystal remaining on the nozzle surfaces of the heads 410, 420, and 430.

The pressure adjusting means 1240 changes the injection pressure of the discharge port 1214 of the injection nozzle 1210. The pressure adjusting means 1240 is respectively coupled to the injection nozzle 1210 to adjust the injection pressure of the discharge port 1214, respectively. By measuring the remaining amount of the liquid crystal remaining on the nozzle surface of the head (410, 420, 430) by setting different pressure values to correspond to the change in the remaining amount of the liquid crystal to adjust the injection pressure of each of the injection nozzle 1210 differently.

In order to push out the liquid crystal having a relatively large size of liquid crystal remaining in the nozzle surface of the heads 410, 420, 430 in the suction nozzle direction, the injection nozzle 1210a having a large gap between the nozzle surfaces of the heads 410, 420, 430 and the injection nozzle 1210 is large. In the case of setting a large suction pressure value, and in order to push the remaining fine liquid crystal in the direction of the suction nozzle 1100 after the injection of gas in the first direction, between the nozzle surface of the head (410, 420, 430) and the injection nozzle 1210 In the case of the injection nozzle 1210b with a small space | interval, a relatively small suction pressure value is set.

11 is a view schematically showing another embodiment of the head cleaning unit.

12 is a view schematically showing a part of the head cleaning unit of FIG. 11.

According to an embodiment, as illustrated in FIGS. 11 and 12, the spray nozzle 1210 may have a first spray nozzle 1210a and a second spray nozzle 1210b. The first spray nozzle 1210a and the second spray nozzle 1210b may be arranged in a line in front of the suction nozzle 1100 in the moving direction of the heads 410, 420, and 430. The first spray nozzle 1210a and the second spray nozzle 1210b may be coupled to one horizontal driving member 1220 to be simultaneously driven horizontally. The elevating member 1230 and the pressure regulating means 1240 are individually coupled to the first spray nozzle 1210a and the second spray nozzle 1210b to operate independently. According to the liquid crystal remaining on the nozzle surface of the head (410, 420, 430), the distance between the suction nozzle 1100 and the injection nozzle 1210, the interval between the discharge port 1214 of each injection nozzle 1210 and each of the injection nozzle 1210 The injection pressure of the discharge port 1214 may be adjusted. Since the height and the suction pressure of the discharge port 1214a of the first injection nozzle 1210a can be adjusted differently from the height and the suction pressure of the discharge port 1214b of the second injection nozzle 1210b, the first injection nozzle 1210a When the liquid crystals of the heads 410, 420, and 430 are not pushed toward the suction nozzle 1100 in the direction of the suction nozzle 1100, the height of the discharge port that is higher than the first injection nozzle 1210a in the second injection nozzle 1210b The residual liquid crystal remaining finely by the suction pressure may be pushed toward the suction nozzle 1100.

According to another embodiment, the spray nozzle 1210 may have a first spray nozzle 1210a and a second spray nozzle 1210b. The first spray nozzle 1210a and the second spray nozzle 1210b may be arranged in a line in front of the suction nozzle 1100 in the moving direction of the heads 410, 420, and 430. The first spray nozzle 1210a and the second spray nozzle 1210b may be independently coupled to the horizontal driving member 1220 to be independently driven horizontally. The elevating member 1230 and the pressure regulating means 1240 are individually coupled to the first spray nozzle 1210a and the second spray nozzle 1210b to operate independently. Depending on the liquid crystal remaining on the nozzle surfaces of the heads 410, 420, 430, the distance between the suction nozzle 1100 and the injection nozzles 1210a and 1210b, the distance between the discharge ports 1214a and 1214b of the respective injection nozzles 1210a and 1210b and the respective The injection pressure of the discharge ports 1214a and 1214b of the injection nozzles 1210a and 1210b may be adjusted. Further, the first spray nozzle 1210a and the first horizontal drive member 1220a of the first spray nozzle 1210a and the second spray nozzle 1210b of the second spray nozzle 1210b are driven independently. The interval between the second injection nozzles 1210b may also be adjusted according to the liquid crystal remaining on the nozzle surfaces of the heads 410, 420, and 430.

FIG. 13 is a view schematically showing another embodiment of the head cleaning unit. FIG.

FIG. 14 is an enlarged cross-sectional view illustrating a part of the head cleaning unit of FIG. 13.

According to another embodiment, as shown in FIGS. 13 and 14, the spray nozzle 1210 may have a first spray nozzle 1210a and a second spray nozzle 1210b. The first spray nozzle 1210a and the second spray nozzle 1210b may be arranged in a line facing each other with respect to the suction nozzle 1100. The first spray nozzle 1210a and the second spray nozzle 1210b may be separately coupled to the horizontal driving members 1220a and 1220b to be independently driven horizontally. The elevating members 1230a and 1230b and the pressure regulating means 1240a and 1240b are separately coupled to the first spray nozzle 1210a and the second spray nozzle 1210b and operated independently. Depending on the liquid crystal remaining on the nozzle surfaces of the heads 410, 420, 430, the distance between the suction nozzle 1100 and the injection nozzles 1210a and 1210b, the distance between the discharge ports 1214a and 1214b of the respective injection nozzles 1210a and 1210b and the respective The injection pressure of the discharge ports 1214a and 1214b of the injection nozzles 1210a and 1210b can be adjusted. In addition, when the remaining liquid crystals of the heads 410, 420, and 430 are not pushed toward the suction nozzle 1100 by the gas injected from the first injection nozzle 1210a, the first injection nozzle 1210a based on the suction nozzle 1100. In the second injection nozzle 1210b disposed in the opposite direction to the second injection nozzle 1210b, the liquid crystal remaining finely at the height and suction pressure of the discharge port 1214b higher than the first injection nozzle 1210a is pushed toward the suction nozzle 1100. I can make it.

15 is an enlarged cross-sectional view showing another embodiment of a part of the head cleaning unit.

The spray nozzle 1210 may have a first spray nozzle 1210a and a second spray nozzle 1210b. The first spray nozzle 1210a and the second spray nozzle 1210b may be arranged in a line behind the suction nozzle 1100 in the moving direction of the heads 410, 420, and 430. The first spray nozzle 1210a and the second spray nozzle 1210b are separately coupled to the horizontal drive member 1220 to independently drive horizontally, or the first spray nozzle 1240a and the second spray nozzle 1210b may be Coupled to the horizontal drive member 1220 may be horizontally driven at the same time. The elevating member 1230 and the pressure regulating means 1240 are individually coupled to the first spray nozzle 1210a and the second spray nozzle 1210b to operate independently. Depending on the liquid crystal remaining on the nozzle surfaces of the heads 410, 420, 430, the distance between the suction nozzle 1100 and the injection nozzles 1210a and 1210b, the distance between the discharge ports 1214a and 1214b of the respective injection nozzles 1210a and 1210b and the respective The injection pressure of the discharge ports 1214a and 1214b of the injection nozzles 1210a and 1210b may be adjusted.

As such, by adjusting the interval between the injection nozzle 1210 and the suction nozzle 1100 or the interval between the injection nozzles 1210a and 1210b and the injection pressure and height of the injection nozzles 1210a and 1210b, the heads 410, 420, 430 of the head 410, 420, 430 are adjusted. During the cleaning process, fine liquid crystals remaining on the nozzle surfaces of the heads 410, 420, and 430 may be quickly and completely removed.

In the above embodiment, the head cleaning unit 1000 is composed of a plurality of spray nozzles 1210 including a first spray nozzle 1210a and a second spray nozzle 1210b. However, the spray nozzle 1210 may provide the head cleaning unit 1000 configured as one.

In addition, the embodiment provides a head cleaning unit 1000 for cleaning the nozzle surface of the head (410, 420, 430) while moving the head (410, 420, 430). But. As the head cleaning unit 1000 moves, the head cleaning unit 1000 may be provided to clean the nozzle surfaces of the heads 410, 420, and 430.

The embodiment also provides a horizontal drive member 1220 comprising a guide member 1222, a slider 1224, and a horizontal driver 1226. However, the present invention is not limited thereto, and a horizontal driving member 1220 including driving means capable of horizontal driving, such as a rack and pinion gear or a chain gear, may be provided.

In addition, the above embodiment provides a head cleaning unit 1000 for cleaning the nozzle surface of the head (410, 420, 430). However, the present invention is not limited thereto and may be applied to a cleaning unit for cleaning the nozzle from which the processing liquid is discharged.

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

B base 100 substrate support unit
200 gantry 300 gantry moving unit
400 head 500 head moving unit
600 liquid crystal supply unit 700 head control unit
800 Liquid Crystal Discharge Measurement Unit 900 Nozzle Inspection Unit
1000 head cleaning units
1100 suction nozzle
1200 gas injection unit 1300 support member
1210 injection nozzle 1220 horizontal drive member
1230 elevating member 1240 pressure regulating means

Claims (14)

In the inkjet type treatment liquid discharge device,
Base;
A substrate support unit installed on the base and on which a substrate is placed;
A gantry provided on an upper portion of a movement path of the substrate support unit, to which heads for discharging the chemical liquid on the substrate are coupled; And
Is installed in the base, including a cleaning unit for cleaning the nozzle surface of the head,
The cleaning unit
A suction nozzle having a suction hole formed toward the head; And
Including a gas injection unit having an injection nozzle having a discharge port toward the head located above the suction nozzle and a horizontal drive member for moving the injection nozzle in a horizontal direction,
The spray nozzle is provided in plurality,
And the horizontal drive member is coupled to each of the injection nozzles to drive independently. delete The method of claim 1,
The horizontal drive member,
A guide member coupled to the upper surface of the base;
A slider linearly moving along the guide member; And
And a driver for driving the slider. delete In the inkjet type treatment liquid discharge device,
Base;
A substrate support unit installed on the base and on which a substrate is placed;
A gantry provided on an upper portion of a movement path of the substrate support unit, to which heads for discharging the chemical liquid on the substrate are coupled; And
Is installed in the base, including a cleaning unit for cleaning the nozzle surface of the head,
The cleaning unit
A suction nozzle having a suction hole formed toward the head; And
Including a gas injection unit having a spray nozzle having a discharge port toward the head located above the suction nozzle,
The spray nozzle is provided in plurality,
And a height at each end of a discharge port of the injection nozzle is different from each other. In the inkjet type treatment liquid discharge device,
Base;
A substrate support unit installed on the base and on which a substrate is placed;
A gantry provided on an upper portion of a movement path of the substrate support unit, to which heads for discharging the chemical liquid on the substrate are coupled; And
Is installed in the base, including a cleaning unit for cleaning the nozzle surface of the head,
The cleaning unit
A suction nozzle having a suction hole formed toward the head; And
Including a gas injection unit having a spray nozzle having a discharge port toward the head located above the suction nozzle,
The spray nozzle is provided in plurality,
And a lifting member coupled to each of the injection nozzles to independently adjust a height of an end of the discharge port of the injection nozzle. In the inkjet type treatment liquid discharge device,
Base;
A substrate support unit installed on the base and on which a substrate is placed;
A gantry provided on an upper portion of a movement path of the substrate support unit, to which heads for discharging the chemical liquid on the substrate are coupled; And
Is installed in the base, including a cleaning unit for cleaning the nozzle surface of the head,
The cleaning unit
A suction nozzle having a suction hole formed toward the head; And
Including a gas injection unit having a spray nozzle having a discharge port toward the head located above the suction nozzle,
The spray nozzle is provided in plurality,
And pressure regulating means respectively coupled to the spray nozzles to independently adjust the spray pressure of the ejection openings of the spray nozzles. In the cleaning unit for cleaning the nozzle of the processing liquid,
A suction nozzle having a suction hole formed to face upward; And
And a gas injection unit provided with at least one injection nozzle having a discharge port toward the head at which the suction nozzle is located.
The injection nozzle,
A first spray nozzle and a second spray nozzle,
The first spray nozzle and the second spray nozzle are arranged in line with the suction nozzle toward the suction nozzle,
The height of the end of the discharge port of the first injection nozzle and the height of the end of the discharge port of the second injection nozzle are different from each other. The method of claim 8,
And a horizontal driving member for moving the first spray nozzle and the second spray nozzle in a horizontal direction. The method of claim 9,
And a first horizontal member for moving the first spray nozzle in a horizontal direction and a second horizontal member for moving the second spray nozzle in a horizontal direction, wherein the first horizontal member and the second horizontal member are independently Head cleaning unit, characterized in that controlled. 11. The method according to any one of claims 8 to 10,
A first lifting member for adjusting the height of the discharge port of the first injection nozzle and a second lifting member for adjusting the height of the discharge port of the second injection nozzle, wherein the first lifting member and the second lifting member is Head cleaning unit, characterized in that controlled independently. 11. The method according to any one of claims 8 to 10,
Further comprising a first pressure control means for adjusting the injection pressure of the discharge port of the first injection nozzle and a second pressure control means for adjusting the injection pressure of the discharge port of the second injection nozzle, the first pressure adjusting means and the second pressure Head cleaning unit, characterized in that the adjusting means are controlled independently. In the cleaning method of a processing liquid discharge apparatus,
Among the plurality of spray nozzles, the spray nozzle closest to the suction nozzle ejects gas toward the liquid crystal remaining in the nozzle of the processing liquid, pushes the liquid crystal toward the suction nozzle, and then the distance between the suction nozzle among the plurality of spray nozzles A head cleaning method, comprising: jetting gas back toward a liquid crystal remaining in a distant injection nozzle, pushing the liquid crystal toward the suction nozzle, and sucking and cleaning the liquid by the suction nozzle. The method of claim 13,
The height of the discharge port of the injection nozzle of the plurality of injection nozzles near the distance to the suction nozzle is lower than the height of the discharge port of the injection nozzle far from the suction nozzle of the plurality of injection nozzles.

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