CN100586721C - Apparatus for sucking function liquid droplet ejection head - Google Patents

Apparatus for sucking function liquid droplet ejection head Download PDF

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Publication number
CN100586721C
CN100586721C CN200610084499A CN200610084499A CN100586721C CN 100586721 C CN100586721 C CN 100586721C CN 200610084499 A CN200610084499 A CN 200610084499A CN 200610084499 A CN200610084499 A CN 200610084499A CN 100586721 C CN100586721 C CN 100586721C
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China
Prior art keywords
droplet ejection
ejection head
liquid droplet
function liquid
injector
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CN200610084499A
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CN1865008A (en
Inventor
中村真一
山田善昭
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Tokyo Electron Ltd
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Seiko Epson Corp
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Abstract

The provided suction device for functional drip injector comprises: a cap clung to the injector, an injection device connected to the cap to attract all sprayers of the injector, a feeding device forliquid, a pressure detector for the pressure in cap and pipeline of suction port, a first control part to operate the flow regulation valve and hold some pressure for suction.

Description

The suction device of function liquid droplet ejection head
The application is an application number: 200310114268X, the applying date: 2003.11.12, denomination of invention: the dividing an application of the invention of " function liquid droplet ejection head sucking method and device, electrooptical device and manufacture method thereof ".
Technical field
The present invention relates to make function liquid droplet ejection head and cap to be close to, attract the sucking method of function liquid droplet ejection head of function liquid droplet ejection head and suction device, droplet ejection apparatus, the manufacture method of electro-optical device, electro-optical device, electronic instrument by cap.
Background technology
A kind of as droplet ejection apparatus, from the ink-jet recording apparatus of just knowing in the past, the head cap (cap) that is connected on the ink pump is close to printhead (function liquid droplet ejection head), by driving ink pump, pass through head cap, (for example, the spy opens 2000-127454 communique (with reference to 2-3 page or leaf, 7-8 page or leaf, Fig. 4) to carry out the attraction of ink from whole nozzles of printhead.
In droplet ejection apparatus, when being used to prevent the cleaning that printhead that drying etc. causes stops up, or when in the head of the new function liquid droplet ejection head that imports, filling functional liquid in the stream (initial filling), attract from whole nozzles of function liquid droplet ejection head.
If attract, before functional liquid, in stream, attract air (bubble) from function liquid droplet ejection head.Therefore, ink-jet recording apparatus is such as described, if the use pump carries out the attraction to droplet ejection apparatus, then before discharging the air that attracts from pump, has the problem of pump idle running.Such problem is remarkable especially when the function liquid droplet ejection head of new importing is filled functional liquid, and relevant the time, functional liquid can't be guaranteed sufficient attraction before arriving pump, so the filling required time of functional liquid drags very longly.In addition, because the decline of attraction is discharged the property deterioration from the bubble of stream in the head,, produce the problem of the functional liquid of waste high price so required functional liquid consumption increases when filling functional liquid.Because pump has rotary part or reciprocating parts (movable part),, in being provided with, need wide space so be difficult to miniaturization.
Summary of the invention
The present invention proposes in view of such problem, and its purpose is: provide and can efficiently carry out the sucking method of the function liquid droplet ejection head of the attraction of function liquid droplet ejection head and suction device, droplet ejection apparatus, the manufacture method of electro-optical device, electro-optical device, electronic instrument.
The invention provides a kind of suction device of function liquid droplet ejection head, cap is close on the function liquid droplet ejection head of ejection function liquid droplet, attract described function liquid droplet ejection head by described cap, it is characterized in that, comprise: be communicated with described cap, attract the injector of whole nozzles of described function liquid droplet ejection head; Supply with the working fluid supply part of working fluid to described injector; Detect the pressure detecting part of the attraction pipeline inner pressure of the attraction mouth that connects described cap and described injector; Testing result according to described pressure detecting part, control first control assembly of described flow control valve, in addition, when the suction pressure in the described attraction pipeline during less than authorized pressure, control described flow rate regulating valve and increase the quantity delivered of described working fluid, when the suction pressure in the described attraction pipeline during greater than authorized pressure, control described flow rate regulating valve and reduce the quantity delivered of described working fluid, the attraction of a plurality of function liquid droplet ejection heads is controlled as under certain suction pressure is carrying out.
The sucking method of function liquid droplet ejection head of the present invention is characterised in that: by the cap on the nozzle face that is close to the function liquid droplet ejection head that sprays function liquid droplet, attract the nozzle of function liquid droplet ejection head by injector.
According to this structure, because attract the nozzle of function liquid droplet ejection head by injector, thus can make attraction directly act on functional liquid and the air before functional liquid, different when attracting with pump, the air leakage does not take place.That is, the bubble of invading injector is discharged smoothly with the working fluid of injector, so the change of the suction pressure that is caused by bubble is little by cap.Therefore, can stablize the attraction of carrying out from the function liquid droplet ejection head nozzle.In addition, can attract, also can only attract employed nozzle for whole nozzles.
At this moment, wish the flow of the working fluid that control is supplied with to injector, make suction pressure in the attraction pipeline of the attraction mouth from the cap to the injector for certain.
According to this structure, control is to the flow of the working fluid of injector supply, attracting the suction pressure in the pipeline to keep certain, so can carry out the attraction from function liquid droplet ejection head.For example, when initial filling functional liquid, attract bubble and liquid, flow path resistance is not simultaneously when in each situation, by the flow of control working fluid, can make the pressure oscillation that attracts in the pipeline be limited in Min., can not damage attraction to function liquid droplet ejection head.
At this moment, when to the attraction release of function liquid droplet ejection head, wish the attraction pipeline of the attraction mouth from the cap to the injector atmosphere opening.
According to this structure, when the end of moving, attract pipeline, so, can discharge residual functional liquid in the attraction pipeline fully by injector to atmosphere opening for the attraction of function liquid droplet ejection head.Therefore, after attracting release, can prevent residual or attached to the obstruction that produces in the attraction pipeline owing to functional liquid.
The present invention is a kind of suction device of function liquid droplet ejection head, cap is close on the function liquid droplet ejection head of ejection function liquid droplet, attract function liquid droplet ejection head by cap, it is characterized in that: comprising: be communicated with cap, attract the injector of whole nozzles of function liquid droplet ejection head; Supply with the working fluid supply part of working fluid to injector.
According to this structure, attract by cap, so the influence of air bubbles that stream is discharged from the beginning is little, can stablize the whole nozzles that attract function liquid droplet ejection head.In addition, injector does not have movable position, is small-sized, so compare with the structure of using pump to attract, can save the space.
At this moment, wish injector be configured in cap near.
According to this structure, near cap, dispose injector, so can make (attraction) pipeline from the cap to the injector the shortest, the cap by being close to function liquid droplet ejection head can efficiently carry out the attraction of function liquid droplet ejection head by injector.
At this moment, wish also to comprise: the pressure detecting part of the attraction pipeline inner pressure of the attraction mouth of detection attachment cap and injector; Be arranged in the working fluid feeding pipe of the supply port that connects working fluid supply part and injector, regulate the flow control valve of the working fluid flow that offers injector; According to the testing result of pressure detecting part, first control assembly of control flow control valve.
According to this structure, testing result according to pressure detecting part, regulate the working fluid flow that offers injector by first control assembly, can appropriately regulate suction pressure, can stablize and appropriately attract whole nozzles of function liquid droplet ejection head function liquid droplet ejection head.
At this moment, wish that first control assembly when the attraction for function liquid droplet ejection head finishes, closes flow control valve gradually.
According to this structure, when the attraction for function liquid droplet ejection head finishes, flow control valve cuts out,, prevent that pressure in the function liquid droplet ejection head from becoming also lower than the pressure in the cap of being close to function liquid droplet ejection head so sharply descend for the suction pressure of function liquid droplet ejection head.In addition, when attracting to finish, close gradually by making flow control valve, by regulating suction pressure, the negative pressure of (attraction) pipeline from the function liquid droplet ejection head to the injector is descended gradually, after attract finishing, when when function liquid droplet ejection head takes off cap, air can be in function liquid droplet ejection head adverse current.
At this moment, wish also to have: be arranged in the attraction pipeline, switch attracts the suction tube path switch valve of pipeline; When first control assembly finishes when the attraction for function liquid droplet ejection head, when closing flow control valve, close the suction tube path switch valve.
According to this structure, when the attraction for function liquid droplet ejection head finishes, close flow control valve, so do not supply with working fluid, can make to attract action to stop to injector.In addition,, close the suction tube path switch valve by when closing flow control valve, can straight and upright reliably attraction to function liquid droplet ejection head, can not continue invalidly attract functional liquid from function liquid droplet ejection head.
At this moment, the suction tube path switch valve is made of the triple valve with atmosphere opening port, and closing simultaneously of first control assembly and suction tube path switch valve opened the atmosphere opening port, and opened flow control valve once more.
According to this structure, if to the attraction release of function liquid droplet ejection head, suction tube road direction atmosphere opening then is so attract the functional liquid of pipeline to discharge by injector by attracting action to be full of.Promptly in attracting pipeline, functional liquid can be owing to drying etc. and viscosity increases and makes the attraction pipeline blockage.In addition, when opening, open flow control valve once more, can discharge the functional liquid that attracts in the pipeline fast with the atmosphere opening port.When working fluid is liquid, can prevent that working fluid is trapped in the working fluid feeding pipe.
At this moment, wish also to have: storage function liquid in advance, and be connected hold-up vessel on the outlet of injector by discharge line; The working fluid supply part is made of pump, and is connected on the hold-up vessel by circulation line, and functions of physical supply liquid is as working fluid.
According to this structure, as the working fluid of injector, supply with incompressible functional liquid, so can efficiently attract.In addition, when using compressed air, the functional liquid that attracts from function liquid droplet ejection head (whole nozzles), can not mix, can utilize again easily as working fluid.In addition, be the structure of functional liquid circulation as making working fluid, thus can be suppressed at Min. to the function liquid measure of using as working fluid, and can reduce to be used to store space as the functional liquid of working fluid.
At this moment, also wish to have: the circulation line switch valve that is made of the triple valve with atmosphere opening port is set in the circulation line that connects working fluid supply part and hold-up vessel; When the attraction to function liquid droplet ejection head finishes, close the circulation line switch valve, and open second control assembly of the atmosphere opening port of circulation line switch valve.
According to this structure, when the attraction of function liquid droplet ejection head is finished, close the circulation line switch valve, stop from hold-up vessel stopping attraction for function liquid droplet ejection head to working fluid supply part functions of physical supply liquid.In addition, by the atmosphere opening port of open loop pipeline switch valve, circulation line to atmosphere opening, can be discharged to the functional liquid in the circulation line in the hold-up vessel.
At this moment, wish to be provided with a plurality of function liquid droplet ejection heads, corresponding a plurality of caps, injector and the attraction pipeline of being provided with respectively with a plurality of function liquid droplet ejection heads.
According to this structure, for a plurality of function liquid droplet ejection heads that are provided with, a plurality of caps, injector and attraction pipeline are set, so can regulate the quantity delivered of the working fluid that offers each injector to each function liquid droplet ejection head corresponding, can under suitable state, attract each function liquid droplet ejection head respectively with this injector.In the present invention promptly, can be when not attracting a plurality of function liquid droplet ejection head with single pump, because the different influence of flow path resistance, suction pressure produces skew in each function liquid droplet ejection head, can efficiently attract each function liquid droplet ejection head.Therefore, the functional liquid flow velocity in the time of can not attracting descends, and can efficiently discharge the start of a race from stream, can cut down the functional liquid that consumes in order to discharge bubble.In addition, can make the pull up time of each function liquid droplet ejection head identical, can shorten the pull up time of function liquid droplet ejection head, can reduce the functional liquid that consumes when attracting.
Droplet ejection apparatus of the present invention is characterised in that: have: described suction device, to the function liquid droplet ejection head of workpiece ejection functional liquid.
According to this structure, can be efficiently and attract function liquid droplet ejection head rightly by injector, so when initially filling for the functional liquid of function liquid droplet ejection head or during the cleaning of function liquid droplet ejection head etc., required time when carrying out the attraction of function liquid droplet ejection head can be shortened, and the functional liquid that consumes when attracting can be cut down.
The manufacture method of electro-optical device of the present invention is characterised in that: use described droplet ejection apparatus, form the one-tenth membranous part that is made of the function liquid droplet from the function liquid droplet ejection head ejection on workpiece.
In addition, electro-optical device of the present invention is characterised in that: use described droplet ejection apparatus, form the one-tenth membranous part that is made of the function liquid droplet from the function liquid droplet ejection head ejection on workpiece.
According to these structures, use can efficiently attract the droplet ejection apparatus manufacturing of functional liquid from function liquid droplet ejection head, so can efficiently make electro-optical device.In addition, as electro-optical device (device), can be liquid crystal indicator, organic EL (Electro-Luminescence) device, electron emitting device, PDP (Plasma Display Panel) device and electrophoretic display apparatus.In addition, electron emitting device is the notion that comprises so-called FED (Field Emission Display) or SED (Surface-Conduction Electron-Emitter Display) device.As electro-optical device, can be the formation that comprises metal line, the formation of lens, the formation of resist and the devices such as formation of light diffusion body.
Electronic instrument of the present invention is characterised in that: carried described electro-optical device.
At this moment, as electronic instrument, can be mobile phone, personal computer and the various electrical article that has carried so-called flat-panel monitor.
Description of drawings
Fig. 1 is the stereoscopic figure of the function liquid droplet blowoff of present embodiment.
Fig. 2 is the right side view of the function liquid droplet blowoff of present embodiment.
Fig. 3 is the plane of head member.
Fig. 4 A is the stereoscopic figure of function liquid droplet ejection head, and 4B is the cutaway view when being installed in function liquid droplet ejection head on the pipeline adapter.
Fig. 5 is the stereoscopic figure that attracts parts.
Fig. 6 is the cap cutaway view on every side that attracts parts.
Fig. 7 is the figure of explanation wiper member, and 7A is the ideograph of wiper member, and 7B is the key diagram of wiping action.
Fig. 8 be the embodiment of the invention 1 function liquid droplet ejection head, connect the ideograph of thereon functional liquid feed system, air supply system, attraction parts.
Fig. 9 is the embodiment of the invention 2 function liquid pumps and attracts parts ideograph on every side.
Figure 10 is the program flow diagram of explanation colour filter manufacturing process.
Figure 11 A～11E is the pattern cutaway view of the colour filter represented by the order of manufacturing process of expression.
What Figure 12 was to use the liquid-crystal apparatus schematic configuration of having used colour filter of the present invention wants portion's cutaway view.
Figure 13 be to use second example of having used colour filter of the present invention the liquid-crystal apparatus schematic configuration want portion's cutaway view.
Figure 14 be to use the 3rd example of having used colour filter of the present invention the liquid-crystal apparatus schematic configuration want portion's cutaway view.
Figure 15 be organic El device display unit want portion's cutaway view.
Figure 16 is the flow chart of the display unit manufacturing process of explanation organic El device.
Figure 17 is the process chart of the formation of explanation inorganic matter barrier layer.
Figure 18 is the process chart of the formation of explanation organic matter barrier layer.
Figure 19 is the process chart that explanation forms the process of hole injection/transfer layer.
Figure 20 is the process chart that explanation forms the process of hole injection/transfer layer.
Figure 21 is the process chart that explanation forms the process of blue light-emitting layer.
Figure 22 forms the process chart of the state of blue light-emitting layer.
Figure 23 is the process chart that explanation forms the state of luminescent layer of all kinds.
Figure 24 is the process chart of the formation of explanation negative electrode.
Figure 25 is the major part exploded perspective view of the display unit of plasm display device (PDP device).
Figure 26 be electron emitting device (FED device) display unit want portion's cutaway view.
Figure 27 A is the electron emission part plane on every side of display unit, and Figure 27 B is the plane of its formation method of expression.
The specific embodiment
Below, with reference to accompanying drawing, embodiments of the invention 1 are described.Fig. 1 is the stereoscopic figure that has used droplet ejection apparatus of the present invention, and Fig. 2 is a right side view of using droplet ejection apparatus of the present invention.To be described in detail later, but this droplet ejection apparatus 1 is used for functional liquid import feature droplet jetting heads 31 such as special ink and luminiferous resin liquid, on workpiece W such as substrate, forms the one-tenth membranous part that constitutes by function liquid droplet.
Shown in two figure, droplet ejection apparatus 1 has: be used to spray functional liquid ejection parts 2, spray the maintenance of parts 2 apparatus of repair parts 3, supply with recovery part 4, be used to drive and control the compressed-air actuated air supply part 5 of supply (working fluid supply part) of each parts to each parts feed fluid (for example functional liquid) and the liquid that reclaims liquid not.The major part of ejection parts 2 is configured on the pallet 11 on the chassis 12 that is provided with, with these public boards 13 that are wholely set on dispose the major part that apparatus of repair parts 3, liquid are supplied with recovery part 4, air supply part 5.And these each parts are by control assembly 6 controls.Below, each parts is described.
Ejection parts 2 comprise: the main carriage 41, the XY travel mechanism 51 that head member 21 (function liquid droplet ejection head 31) is relatively moved by main carriage 41 for workpiece W of head member 21, supporting member parts 21 with function liquid droplet ejection head 31 of ejection functional liquid.
Shown in Fig. 3 and Fig. 4 A, B, head member 21 by 12 function liquid droplet ejection heads 31, carry function liquid droplet ejection head 31 sub-balladeur train 22, be used for the holding member 23 that each function liquid droplet ejection head 31 is installed on the sub-balladeur train 22 is constituted.On sub-balladeur train 22,12 function liquid droplet ejection heads 31 are two groups by 6 one components, and in order to ensure the sufficient coating density to workpiece W, the fixed angle of the regulation that tilts is on sub-balladeur train 22.In addition, on sub-balladeur train 22, be provided for connecting the pipe joint 24 of each function liquid droplet ejection head 31 and fluidsupply container 153 (back description).In addition, the number of function liquid droplet ejection head 31 and arrangement are not limited to described structure, be arbitrarily,, just need not take the structure of tilt function droplet jetting head 31 if for example function liquid droplet ejection head 31 is used and the special-purpose droplet jetting head that utilizes the purpose coupling.
Shown in Fig. 4 A, B, function liquid droplet ejection head 31 is so-called duplexs, comprising: have the functional liquid introduction part 32 of the connection pin 33 of duplex, the duplex that links to each other with function liquid droplet ejection head 32 head substrate 34, be connected the below of functional liquid introduction part 32 and the head main body 35 of stream in inside forms the head that is full of with functional liquid.Each connects pin 33 and is connected the fluidsupply container of describing later 153 by pipeline adapter 25, and functional liquid introduction part 32 connects the supply that pin 33 is accepted functional liquid from each.Head main body 35 has the pump portion 36 of duplex, the nozzle of a plurality of jetting nozzles 39 of formation forms plate 37, in function liquid droplet ejection head 31, by the effect of pump portion 36, from jetting nozzle 39 ejection function liquid droplets.In addition, the lower surface that nozzle forms plate 37 becomes nozzle formation face 38 (nozzle face), and it is outstanding downwards that function liquid droplet ejection head 31 makes nozzle form face 38, is fixed on the sub-balladeur train 22 (with reference to Fig. 4) by a holding member 23.
As shown in Figure 2, main carriage 41 is by constituting with the lower part: the hanging of outward appearance " I " shape that is fixed on from the below on the Y-axis platform of describing later 54 established parts 42; Be installed in to hang and establish on parts 42 following, be used to carry out θ platform 43 position correction of (head member 21) θ direction; Be installed as the balladeur train main body 44 of hanging the below that is located at θ platform 43.Having on balladeur train main body 44 is used to move about embeds the square aperture of head member 21, positions fixing to head member 21.In addition, on balladeur train main body 44, dispose the workpiece identification camera (omitting diagram) that is used to discern workpiece W.
XY travel mechanism 51 has the absorptive table 53 of absorption (fixing) workpiece W, comprising: make workpiece W at the mobile X-axis platform 52 of X-direction (main scanning direction), make head member 21 at the mobile Y-axis platform 54 of Y direction (sub scanning direction) by main carriage 41 by absorptive table 53.XY travel mechanism 51 is configured on the described chassis 12, can keep the flatness of workpiece W, and head member 21 is correctly moved.
Here, a series of actions of simple declaration ejection parts 2.At first, as the preparation before the ejection functional liquid, carry out the position correction of the workpiece W of head member 21 and setting.Then, XY travel mechanism 51 (X-axis platform 52) makes workpiece W round mobile at main scanning direction (X-axis).Come and go to move synchronously with workpiece W, drive a plurality of function liquid droplet ejection heads 31, carry out the ejection of selection action being arranged for the function liquid droplet of workpiece W.If workpiece W carries out once coming and going moving, then XY travel mechanism 51 (Y-axis platform 54) makes head member 21 move in subscan (Y state) direction.Then, carry out the come and go driving of moving with function liquid droplet ejection head 31 of workpiece W once more to main scanning direction.In addition, in the present embodiment,, workpiece W is moved at main scanning direction, but also can be the structure that head member 21 is moved at main scanning direction for head member 21.In addition, also can be fixing head member 21, the structure that workpiece W is moved at main scanning direction and sub scanning direction.
Below, apparatus of repair parts 3 is described.Apparatus of repair parts 3 maintenance function droplet jetting heads 31, function liquid droplet ejection head 31 can suitably spray functional liquid, has flushing parts 61, attracts parts 71, wiper member 141 (with reference to Fig. 1).
The functional liquid that the flushing action of a plurality of (12) function liquid droplet ejection head when flushing parts 61 are used to accept spray by drop sprays in order from the preparation ejection (useless ejection) of whole jetting nozzles 39.Flushing parts 61 are fixed on the X-axis platform 52, and a pair of flushing box 62 of the functional liquid of acceptance ejection clips absorptive table and fixes.Flushing box 62 is accompanied by main scanning and moves to head member 21 with workpiece W, so can wash action successively from the jetting nozzle that faces the function liquid droplet ejection head that washes box 62.And the functional liquid of being accepted by flushing box 62 is stored in the waste fluid container of describing later 182.In addition, in the flushing of present embodiment action, be the preparation ejection of carrying out from whole jetting nozzles 39, like that only allow a part of jetting nozzle prepare ejection but also can for example only allow the jetting nozzle 39 that uses prepare ejection.
Attract parts 71 to be set on the above-mentioned public board 13, be used to attract function liquid droplet ejection head 31.Specifically be, as new head member 21 that function liquid droplet ejection head 31 is packed in the time carry out under the situation that functional liquid fills and carrying out for the situation of the attraction (cleaning) of removing the functional liquid that viscosity function liquid droplet ejection head 31 in increased under use attraction parts 71.
As shown in Figure 5, attract parts 71 to comprise: cap member 72 with 12 caps 73 being close to each function liquid droplet ejection head 31; By making cap member 72 liftings, make cap 73 leave or contact the elevating mechanism 91 of function liquid droplet ejection head 31; By the cap of being close to 73, carry out the injector 101 of the attraction of functional liquid; The attraction that connects each cap 73 and injector 101 is with managing 111; The support component 131 of support cap parts 72.
Cap member 72 as shown in Figure 5, and is corresponding with the configuration of carrying 12 function liquid droplet ejection heads 31 on head member 21, and 12 caps 73 are configured on the cap seat 74, and each cap 73 is close on each corresponding function liquid droplet ejection head 31.
As shown in Figure 6, cap 73 is made of cap main body 81, cap holder 82.Cap main body 81 relies on the top by two springs, and remains on the cap holder 82 under mobile a little state.Form the recess 83 of the 2 row jetting nozzles 39 that comprise function liquid droplet ejection head 31 at the upper surface of cap main body 81, gasket seal 84 is installed at the periphery of recess 83.And, in the bottom of recess 83 to be provided with absorption piece 85 by the state of pushing by press box 86.When attracting function liquid droplet ejection head 31, gasket seal 84 to be pushed the nozzle that is close to function liquid droplet ejection head 31 form on the face 39, sealed-in nozzles forms face 38, makes it comprise two row jetting nozzles 39.In addition, each cap 73 is provided with atmospheric open valve 88, can be at the bottom surface of recess 83 a side direction atmosphere opening (with reference to Fig. 6).And the terminal stage attracting action by opening atmospheric open valve 88 to atmosphere opening, also can attract to contain the functional liquid that is immersed in the absorption piece 85.
Elevating mechanism 91 is made of cylinder, has two lift cylinders 92,93 that stroke differs from one another.And, selection work by two lift cylinders 92,93, can switch to the lifting position of cap member 72 than the higher primary importance and the lower second place, when cap member 72 is positioned at primary importance, each cap 73 is close to each function liquid droplet ejection head 31, when cap member 72 is positioned at the second place, produce very little gap between each function liquid droplet ejection head 31 and each cap 73.
Injector 101 is connected with cap 73 with pipe 111 by attracting, and attracts by whole nozzles 39 of cap 73 from function liquid droplet ejection head 31.Injector 101 is arranged near the cap 73, can efficiently carry out the attraction of function liquid droplet ejection head, as Fig. 8 and shown in Figure 9, promptly amounts to 12 injectors 101 for injector 101 of each cap 73 configuration.In addition, between cap 73 and injector 101, from cap 73 1 sides the functional liquid detecting sensor 121 that has or not of measuring ability liquid, cap one side pressure sensor 122 (pressure detecting part) that detection attracts to use pipe 111 internal pressures, the cap one side switch valve (suction tube path switch valve) that switch attracts to use pipe 111 are set in order respectively.
Injector 101 has: be connected on the described air supply part 5, acceptance becomes the supply port 102 of the compressed-air actuated supply of working fluid; Be connected on the cap 73, make the attraction mouth 103 of attraction force acts; Be connected with supply port 102, be used to discharge the working fluid of supply and from attracting mouthful 103 bubbles that attract or the outlet 104 of functional liquid.That is,, make the injector 101 inner negative pressure that produce, can carry out by attracting mouthfuls 103 attractions that make the function liquid droplet ejection head 31 that cap 73 is close to by being accompanied by the stream of following that compressed-air actuated supply produces.And, by the flow control valve of describing later 196, regulate compressed-air actuated quantity delivered, can regulate the attraction (suction pressure) of coming self-gravitation mouth 103.Because injector 101 does not have movable part, and is more small-sized,, can make equipment miniaturization so, compare with the structure of using pump to attract by adopting the structure of using injector 101 to carry out the attraction of function liquid droplet ejection head 31.In addition, before functional liquid from attracting mouthful 103 bubbles that attract to discharge fast from outlet 104 with compressed air, so different when attracting with pump, can not produce the attraction decline that the air leakage causes.
Attract with pipe 111 by suction tube 112, suction tube 112 is branched into branch's suction tube 113 (attraction pipeline) formation of a plurality of (12), by branch's suction tube 113 attachment caps 73 and injector 101.In addition, in the droplet ejection apparatus 1 of present embodiment, when each cap is held a concurrent post the non-ejection that is received in functional liquid, promptly, the functional liquid receiving portion of the functional liquid of ejection in the flushing action of the function liquid droplet ejection head 31 the when ejection of the functional liquid of workpiece W is temporarily stopped to be provided for attracting by cap the suction pump 114 of the functional liquid that sprays in flushing in suction tube 112.As shown in Figure 8, in the suction tube 112 of suction pump 114 upstreams, be provided with triple valve 115.In triple valve 115, an end is connected and utilizes on the container 162 again, connects to be used for the working fluid of discharging from injector 101 and functional liquid to the discharge pipe 116 that utilizes container 162 guiding again.
And, by switch three-way valve 115, can separately use injector 101 and suction pump 114 according to different purposes.Particularly, when when function liquid droplet ejection head 31 is filled functional liquid, or during clearing function droplet jetting head 31, use injector 101, so switch three-way valve 115 makes suction tube 112 be communicated with discharge pipe 116, when as when attracting the functional liquid that in flushing, sprays, using suction pump 114, switch three-way valve 115 makes suction tube 112 be communicated with suction pump 114.
Wiper member 141 is arranged on the public board 13 equally with attracting parts 71, attraction (cleaning) by function liquid droplet ejection head 31, make the nozzle formation face 38 of contaminated each function liquid droplet ejection head 31 that has adhered to functional liquid on X-direction, move side polished on one side.Shown in Fig. 7 A, B, wiper member 141 is by constituting with the lower part: Yi Bian the wiper cord 144 of carrying wiping to use, Yi Bian the winding unit 142 of reeling; Have the wiping that is used to make wiper cord 144 contact nozzles form the take up roll 145 of face 38 and get parts 143.Wiper member 141 is carried wiper cords 144 from winding unit 142 under abundant state near function liquid droplet ejection head 31, the wiper cord 144 that uses take up roll 145 to carry is pressed on the nozzle formation face 38 of function liquid droplet ejection head 31 the side polished dirt.In addition, the cleaning solution supplying system 171 of Miao Shuing supplies with cleaning fluid to the wiper cord of carrying 144 from behind, and efficient the wiping got attached to the functional liquid on the function liquid droplet ejection head 31.
Below, liquid supply recovery part 4 is described.Liquid supply with recovery part 4 by to the functional liquid feed system 151 of each function liquid droplet ejection head 31 functions of physical supply liquid of head member 21, reclaim the functional liquid that the attraction parts 71 by apparatus of repair parts 3 attract functional liquid recovery system 161, the solvent of functional material as clean with and offer the cleaning solution supplying system 171 of wiper member 141; Recovery is made of the Mead-Bauer recovery system 181 of the functional liquid that flushing parts 61 are accepted.And, as shown in Figure 2, in the reception room 14 of public board 13, beginning in order from the diagram right side, landscape configuration has the pressurizing vessel 152 of function liquid supply system 151, the soda liquor container 172 that utilizes container 162, cleaning solution supplying system 171 again of functional liquid recovery system 161.And, near utilizing container 162 and soda liquor container 172 again, be provided with the waste fluid container 182 that forms small-sized Mead-Bauer recovery system 181.
Functional liquid feed system 151 has with the lower part and constitutes: the pressurizing vessel 152 of a large amount of (3L) functional liquids of storage; The functional liquid that storage is carried from pressurizing vessel 152, and the fluidsupply container 153 of functional liquid to each function liquid droplet ejection head 31 supply; Form the feed flow path, connect their feed pipe 154 (with reference to Fig. 1, Fig. 2, Fig. 8).Be stored in the compressed air (inert gas) that the functional liquid in the pressurizing vessel 152 imports by the air supply part of describing from behind 5, give fluidsupply container 153 by 154 functional liquid force feeds of storing of feed pipe.
Fluidsupply container 153 is removed the pressure from pressurizing vessel 152 to atmosphere opening.Then, fluidsupply container 153 remained on than function liquid droplet ejection head 31 be a little negative liquid level difference (state of 25mm ± 0.5mm) for example, prevent that functional liquid from dripping from function liquid droplet ejection head, and pump action with function liquid droplet ejection head 31, promptly, the pump of the piezoelectric element in the pump portion 36 drives, high accuracy ejection drop.
Connecting 6 feed pipes 154 that extend to function liquid droplet ejection head 31 on fluidsupply container 153, these feed pipes 154 branch into two by T word joint 157 respectively, form to amount to 12 branch's feed pipes 155.12 branch's feed pipes 155 are connected in the pipe joint 24 that is arranged on as device one side pipe road parts on the head member 21, amount to functional liquid (with reference to Fig. 1 and Fig. 8) to each function liquid droplet ejection head 31.In addition, in each branch's feed pipe 155, be provided for the first side supply valve 156 of switch branch feed pipe 155, control by control assembly 6 switches.
Functional liquid recovery system 161 is used to store the functional liquid that is attracted by injector 101 that attracts parts 71 and suction pump 114, has: the functional liquid that storage attracts utilize container 162 again; Be connected on the suction pump 114, the functional liquid that attracts used to the recovery that utilizes container 162 guiding again managed 164.
Cleaning solution supplying system 171 is used for supplying with cleaning fluids to the wiper cord 144 of wiper member 141, has: store washing liquid container 172, be used to supply with the cleaning solution supplying pipe (omitting diagram) of the cleaning fluid of soda liquor container 172.In addition, by importing compressed air to soda liquor container 172, carry out the supply of cleaning fluid from air supply part 5.In addition, in cleaning fluid, use the solvent of volatility, can efficiently wipe the functional liquid of getting attached on the function liquid droplet ejection head 31 than higher functional liquid.
Mead-Bauer recovery system 181 is used to reclaim the functional liquid to 61 ejections of flushing parts, have: the waste fluid container 182 of the functional liquid of storage recovery: be connected on the flushing parts 61 (flushing box 62), the waste drains pump that guides to waste fluid container 182 to the functional liquid that washes box 62 ejections (omitting diagram); The waste liquid that connects them is with managing (omitting diagram).
Below, air supply part 5 is described.As shown in Figure 8, air supply part 5 is compressed inert (N 2) compressed air to for example supply such as pressurizing vessel 152 or injector 101 of each, have: the air pump 191 (compressor) of compressed inert; With supply target coupling, compressed air is kept the adjuster 192 of certain pressure; Air pump 191 is connected by pipeline with each one, the air supply pipe 193 of compressed air to each supply.In addition, the separator 196 that in the air supply pipe 193 that connects air pump 191 and adjuster 192, is provided for removing air (liquid) filter 194 of the dust in the compressed air (functional liquid) and is used to remove oil content.In addition, in the air supply pipe 193 (working fluid feeding pipe) that connects air pump 191 and injector 101, be provided with the flow rate regulating valve 196 (flow control valve) of regulating the compressed air quantity delivered, can regulate the compressed-air actuated quantity delivered that offers each injector 101.
Below, control assembly 6 is described.Control assembly 6 has the control part of the action that is used to control each parts, and control part has storage control program or control data, and is used to carry out the operation area that various controls are handled.And control assembly 6 is connected with described each parts, and control device is all.
As a example, illustrate to use to attract parts 71 that the situation when attracting function liquid droplet ejection head 31 below with reference to Fig. 8, describes based on the control of control assembly 6.When attracting function liquid droplet ejection head 31, control assembly 6 (first control assembly) drives described XY travel mechanism, head member 21 is faced be configured in the attraction parts 71 on the public board 13.Then, drive the elevating mechanism 91 that attracts parts 71, make cap member 72 rise to primary importance, each cap 73 is close on the corresponding function liquid droplet ejection head 31.
Then, open the flow rate regulating valve 196 that is arranged in the air supply pipe 193 gradually, supply with compressed air to 12 injectors 101, the attraction of beginning function liquid droplet ejection head 31 from air supply part 5.By testing result according to described each cap one side pressure sensor 122, switch control flow rate regulating valve 196, the compressed air quantity delivered when suitably regulating attraction for each injector 101.Particularly, when the pressure that attracts to stipulate with the suction pressure ratio in pipe 111 (the branch's suction tubes 113) is also low, control flow rate regulating valve 196, the compressed air quantity delivered is increased, when the pressure that attracts to stipulate with the ratio of the suction pressure in the pipe 111 was also high, control flow rate regulating valve 196 descended the compressed air quantity delivered, control, so that under certain suction pressure, carry out the attraction of each function liquid droplet ejection head 31.Like this, by not regulating the compressed air quantity delivered with 101 of each injectors, can be efficiently and attract each function liquid droplet ejection head 31 rightly.
In addition, in the present embodiment, for the suction pressure of indivedual controls for each function liquid droplet ejection head 31, become the structure that each cap 73 is provided with injector 101, but also can be by making branch's suction tube 113 branches in the attraction 103 that is connected injector 101, the structure of an injector 101 being set for a plurality of caps 73.That is, also can adopt the structure that attracts two caps 73 with an injector 101, or, according to circumstances, can suitably change the number that is provided with of injector 101 with the structure of 12 caps 73 of an injector 101 attractions.
When the attraction that makes function liquid droplet ejection head 31 finishes, close flow rate regulating valve 196 at first gradually.Thus, prevented that suction pressure from sharply descending, after attracting end, prevented bubble adverse current in function liquid droplet ejection head 31.In addition,, control described cap one side switch valve 123, make to attract reliable in action to finish, so that do not waste the functional liquid of high price with closing of flow rate regulating valve 196.
Then, drive elevating mechanism 91, cap member 72 is descended, each cap 73 to atmosphere opening, and is opened flow rate regulating valve 196 once more.Thus, the functional liquid that can absorb the absorbing material 85 by each cap 73 attracts with the functional liquid in the pipe 111 to utilizing container 162 guiding again with remaining in.In addition, when the structure of cap 73 is can not be to atmosphere opening the time, wish to constitute described cap one side switch valve 123 with triple valve with atmosphere opening port.And, when closing flow rate regulating valve 196, cap one side switch valve 123 switched to the atmosphere opening port after, open flow rate regulating valve 196, prevent that functional liquid from remaining in and attract to produce and stop up with in the pipe 111.
Below, embodiments of the invention 2 are described.Basic structure and the above embodiments 1 of the droplet ejection apparatus 1 of present embodiment are roughly same, but in the droplet ejection apparatus 1 of embodiment 2, difference is: the working fluid of supplying with to the injector 101 that attracts parts 71 is not the compressed air from air supply part 5, and function of use liquid.
If describe with reference to Fig. 9, then the supply port 102 of injector 101 is connected by pressure-regulating valve 202 on the function liquid pump 201 that is made of high-pressure pump, and outlet 104 is connected by tube connector 203 (discharge line) and utilizes (hold-up vessel) on the container 162 again.And, in the present embodiment, adjust the pressure of valve 202 controls from the functional liquid of function liquid pump 201 conveyings by working pressure, adjust the attraction of injector 101.In addition, the attraction mouth 103 of injector 101 is connected on the cap 73 by branch's suction tube 113 similarly to Example 1, can attract from function liquid droplet ejection head 31 by cap 73.
Utilize container 162 to be connected by tube connector 203 again with function liquid pump 201, by from function liquid pump 201 to injector 101 and utilize again container 162 pipeline, constitute the circulation line 204 of the functional liquid circulation that becomes working fluid to the pipeline of function liquid pump 201 from utilizing container 162 again.And, in connecting the circulation line 204 that utilizes container 162 and function liquid pump 201 again, be provided with the switch valve 205 (circulation line switch valve) that constitutes by triple valve with atmosphere opening port.
In addition, in utilizing container 162 again, storing the functional liquid of the amount that can be full of circulation line 204 in advance,, can carry out stable attraction by incessantly the functional liquid as working fluid being supplied with to injector 101.
Here, with reference to Fig. 9, a series of attraction actions and the control of functions droplet jetting head 31.At first, after head member 21 being faced attract parts 71, cap 73 is close on each function liquid droplet ejection head 31.Then, the driving of beginning function liquid pump 201 is from the functional liquid of the working fluid that utilizes container 162 sucking-offs becoming injector 101 again, to pressure-regulating valve 202 conveying function liquid.
Pressure-regulating valve 202 is according to the testing result of each cap one side pressure sensor 122, by control assembly 6 controls, so that each is kept suitable suction pressure.Particularly, when the pressure of the ratio of the suction pressure in branch's suction tube 113 regulation hangs down, the conveying capacity of functional liquid is increased, when the suction pressure in branch's suction tube 113 is also higher than the pressure of stipulating, the conveying capacity of functional liquid is reduced.
Give the supply port 102 of injector 101 through the functional liquid of pressure-regulating valve 202 by suitable number pressure, Yi Bian the attraction of generation is utilized the container 162 Yi Bian be discharged to from outlet 104 again.In addition, the functional liquid that attracts from function liquid droplet ejection head 31 also collaborates with the functional liquid of being supplied with by supply port 102 in injector 101, is discharged to from outlet 104 and utilizes the container 162 again.Then, be discharged to the functional liquid that utilizes again in the container 162 by 201 sucking-offs of function liquid pump, as working fluid cycles.
Like this, in the present embodiment, also use incompressible functional liquid, so can more efficient attraction function liquid droplet ejection head 31 as working fluid.In addition, become the structure that makes functional liquid circulation, thus can be suppressed at Min. to the function liquid measure of using by the attraction of function liquid droplet ejection head 31, and make and utilize container 162 miniaturizations again, can seek the save space of device.Different when working fluid is used compressed air, when discharging the functional liquid that attracts, can not mix bubble (compressed air), so can easily utilize the functional liquid of discharging again.
When the attraction release that makes function liquid droplet ejection head 31, in order to prevent the rapid decline of suction pressure, control assembly 6 controlled pressures are adjusted valve 202, and the pressure of the functional liquid that offers injector 101 is descended gradually, and reduce the functional liquid quantity delivered by function liquid pump 201.Then, described switch valve 205 cuts out, stop to supply with from the functional liquid that utilizes container 162 again.Then, switch valve 205 is switched to the atmosphere opening port, by circulation line to atmosphere opening, functional liquid residual in the circulation line sent into utilizes again in the container 162.Then, the driving of function liquid pump 201 is stopped, finishing to attract action.
Like this, in the droplet ejection apparatus 1 of embodiment 1 and embodiment 2, become the structure of using injector to carry out the attraction of function liquid droplet ejection head 31, so it is different when attracting with the use pump, the influence of air bubbles that before functional liquid, attracts can be subjected to and attraction descends, the attraction of function liquid droplet ejection head 31 can be efficiently carried out.Therefore, by described droplet ejection apparatus 1 being applied to the manufacturing of various goods, can make efficiently.
Below, electro-optical device (flat-panel monitor) as droplet ejection apparatus 1 manufacturing of using present embodiment, with colour filter, organic El device, plasma scope (PDP device), electron emitting device (FED device, SED device) etc. is example, and their structure and manufacture method thereof is described.
At first, the manufacturing method of color filter that is provided with is described in liquid crystal indicator and organic El device.Figure 10 is the program flow diagram of manufacturing process of expression colour filter, and Figure 11 A～E is the pattern cutaway view of the colour filter 500 (colour filter matrix 500A) of the present embodiment represented according to process sequence.
At first, form in the operation (S11), shown in Figure 11 A, on substrate (W) 501, form black matrix 502 at black matrix.Black matrix 502 forms by the duplexer of crome metal and chromium oxide or by resin black.When forming the black matrix 502 that constitutes by metallic film, can use sputter or vapour deposition method.In addition, when forming the black matrix 502 that constitutes by resin film, can use gravure processes, photoetching process, hot replica method.
Then, form in the operation (S12), form barrier 503 with the state that is layered on the black matrix 502 at barrier.Promptly at first shown in Figure 11 B, covered substrate 501 and black matrix 502 form the resist layer 504 that is made of the transparent photoresist of negative film shape.Then, covering under the state of its upper surface, carry out exposure-processed with the mask layer 505 that forms matrix pattern.
Shown in Figure 11 C,,, form barrier 503 to resist layer 504 compositions by resist layer 504 is carried out etch processes.In addition, when forming black matrix by resin black, can hold a concurrent post black matrix and barrier.
This barrier 503 and the black matrix 502 under it become the division wall 507b of portion that divides each pixel region 507a, dyed layer afterwards forms in the operation, when forming dyed layer 508R, 508G, 508B by function liquid droplet ejection head 31, the fixed function drop fall the zone.
Form operation and barrier formation operation through above black matrix, obtain described wave filter matrix 500A.
In addition, at present embodiment,, use coated surface to become the resin material of scolding liquid (scolding water) property as the material of barrier 503.And the surface of substrate (glass substrate 501) is lyophily (hydrophilic), so the dyed layer of describing forms in the operation in the back, the lowering position precision of drop in each the pixel region 507a that is surrounded by barrier 503 (dividing the wall 507b of portion) improves.
Then, form in the operation (S13), shown in Figure 11 D,, drop on by in each the pixel region 507a that divides the wall 507b of portion encirclement by function liquid droplet ejection head 31 ejection function liquid droplets at dyed layer.At this moment, function of use droplet jetting head 31 imports 3 look functional liquids (color filter materials) such as R, G, B, the ejection of carrying out.In addition, the Pareto diagram as 3 looks such as R, G, B has banded arrangement, mosaic arrangement and triangle arrangement.
Then, handle (heating waits processing) through super-dry functional liquid is fixed, form dyed layer 508R, 508G, the 508B of three looks.After having formed dyed layer 508R, 508G, 508B, transfer to diaphragm and form operation (S14), shown in Figure 11 E, the upper surface of covered substrate 501, the division wall 507b of portion and dyed layer 508R, 508G, 508B forms diaphragm 509.
That is, all spray diaphragm with after applying liquid, handle, form diaphragm 509 through super-dry to the formation dyed layer 508R of substrate 501, the face of 508G, 508B.
Then, behind the formation diaphragm 509,, obtain colour filter 500 by substrate 501 is cut to each effective pixel area.
What Figure 12 was expression as the schematic configuration of the passive matrix liquid-crystal apparatus (liquid-crystal apparatus) of liquid crystal indicator one example of using described colour filter 500 wants portion's cutaway view.By liquid crystal drive is installed on this liquid-crystal apparatus 520, obtain transmissive liquid crystal display device as end article with subsidiary key elements such as IC, backlight, supporters.In addition, colour filter 500 is same as shown in Figure 11, so adopt identical symbol for the position of correspondence, omits its explanation.
The counter substrate 521 that this liquid-crystal apparatus 520 constitutes by colour filter 500, with glass substrate etc., the liquid crystal layer 522 that constitutes with STN (Super Twisted Nematic) liquid-crystal composition that is clipped between them constitute, and colour filter 500 configurations are top (observer's one side) in the drawings.
In addition, though not shown, dispose polarizer respectively at the outer surface (with the face of liquid crystal layer 522 opposite sides) of counter substrate 521 and colour filter 500, dispose backlight in the polarizer outside that is positioned at counter substrate 521 1 sides in addition.
On the diaphragm 509 of colour filter 500 (liquid crystal layer one side), be formed on long rectangle first electrode 523 of left and right directions among Figure 12 with the interval of stipulating, the face with the opposite side of colour filter 500 1 sides that covers this first electrode 523 forms first oriented film 524.
And with the face relative of counter substrate 521 with colour filter 500 on, with the interval of regulation form a plurality of rectangle second electrode 526 long with the direction of first electrode, 523 quadratures, the face that covers liquid crystal layer 522 1 sides of this second electrode 526 forms second oriented film 527.These first electrodes 523 and second electrode 526 are formed by ITO transparent conductive materials such as (Indium Tin Oxide).
The spacing block 528 that is arranged in the liquid crystal layer 522 is to be used for liquid crystal layer 522 thickness (unit interval) are kept certain parts.In addition, encapsulant 529 is to be used to prevent that liquid-crystal composition in the liquid crystal layer 522 is to the parts of external leaks.In addition, an end of first electrode 523 is as the outside that extends to encapsulant 529 around wiring 523a.
And the part that first electrode 523 and second electrode 526 intersect is a pixel, and dyed layer 508R, the 508G of colour filter 500,508B are positioned at the part that becomes this pixel.
In common manufacturing process, colour filter 500 is carried out the coating of the composition and first oriented film 524 of first electrode 523, generate the part of colour filter 500 1 sides, on counter substrate 521, carry out the coating of the composition and second oriented film 527 of second electrode 526 in addition, generate the part of counter substrate 521 1 sides.Then, spacing block 528 and encapsulant 529 are set, under this state, pluck the part of iron colour filter 500 1 sides in the part of counter substrate 521 1 sides.Then, inject the liquid crystal that constitutes liquid crystal layer 522, close inlet from the inlet of encapsulant 529.Then, stacked two polarizers and backlight.
Droplet ejection apparatus 1 coating of embodiment constitutes the spacing block material (functional liquid) of described unit interval, and before the part of counter substrate 521 1 sides is pasted the part of colour filter 500 1 sides, can be to by the even coated with liquid crystal of encapsulant 529 area surrounded (functional liquid).In addition, also can carry out the printing of described encapsulant 529 with function liquid droplet ejection head 31.Also can carry out the coating of first and second oriented films 524,527 with function liquid droplet ejection head 31.
Figure 13 be the expression liquid-crystal apparatus that uses the colour filter of making in the present embodiment 500 the second routine schematic configuration want portion's cutaway view.
This liquid-crystal apparatus 530 is with the big difference of described liquid-crystal apparatus 520: below (an opposite side with observer's one side) disposes colour filter 500 in the drawings.
This colour filter 500 clips the liquid crystal layer 532 that is made of stn liquid crystal between colour filter 500 and the counter substrate 531 that is made of glass substrate.In addition, though not shown, dispose polarizer respectively at the outer surface of counter substrate 531 and colour filter 500.
On the diaphragm 509 of colour filter 500 (liquid crystal layer 532 1 sides), with a plurality of first long electrodes 533 of direction inwards in the drawings of the arranged spaced of regulation, the face that covers liquid crystal layer 532 1 sides of this first electrode 533 forms first oriented film 534.
On the face relative of counter substrate 531 with colour filter 500, interval with regulation is formed on a plurality of rectangles second electrode 536 that extends with the direction of first electrode, 533 quadratures of colour filter 500 1 sides, and the face that covers liquid crystal layer 532 1 sides of this second electrode 536 forms second oriented film 537.
Be provided for that on liquid crystal layer 532 thickness of this liquid crystal layer 532 kept certain spacing block 538 and be used to prevent that liquid-crystal composition in the liquid crystal layer 532 is to the encapsulant 539 of external leaks.
And same with described liquid-crystal apparatus 520, first electrode 533 is a pixel with the part that second electrode 536 intersects, and dyed layer 508R, 508G, 508B are positioned at the position that becomes this pixel.
Figure 14 represents to use and uses the 3rd example that colour filter 500 of the present invention constitutes liquid-crystal apparatus, is the exploded perspective view of schematic configuration of TFT (Thin Film Transistor) the type liquid-crystal apparatus of expression transmission-type.
This liquid-crystal apparatus 550 is above colour filter 500 configurations in the drawings (observer's one side).
This liquid-crystal apparatus 550 by the counter substrate 551 of colour filter 500, relative configuration with it, be clipped in not shown liquid crystal layer between them, be configured in the polarizer 555 of upper surface one side (observer's one side) of colour filter 500, the polarizer (not shown) that is configured in lower surface one side of counter substrate 551 constitutes.
Go up on the surface (faces of counter substrate 551 1 sides) of the diaphragm 509 of colour filter 500 and to form the electrode 556 that liquid crystal drive is used.This electrode 556 is made of transparent conductive materials such as ITO, becomes to cover the regional all comprehensive electrodes that form the pixel electrode of describing later 560.In addition, at the covering state with faces pixel electrode 560 opposite sides this electrode 556 oriented film 557 is set.
On the face relative of counter substrate 551, form insulating barrier 558, on this insulating barrier 558, form scan line 561 and holding wire 562 with orthogonal state with colour filter 500.And, in by these scan lines 561 and holding wire 562 area surrounded, form pixel electrode 560.In addition, in the liquid-crystal apparatus of reality, on pixel electrode 560, oriented film is set, but has omitted diagram.
In addition, the part setting of surrounding at notch part, scan line 561 and holding wire 562 by pixel electrode 560 has the thin film transistor (TFT) 563 of source electrode, drain electrode, semiconductor and gate electrode.And, by scan line 561 and holding wire 562 are applied signal, make thin film transistor (TFT) 563 conductings and disconnection, can carry out energising control to pixel electrode 560.
In addition, described each routine liquid-crystal apparatus 520,530,550 is the structure of transmission-type, but reflecting layer or semi-transparent semi-reflecting layer also can be set, and becomes the liquid-crystal apparatus of reflection-type or the liquid-crystal apparatus of semi-transparent semi-reflective.
Figure 15 be organic El device viewing area (following is called display unit 600) want portion's cutaway view.
Stacked under the state of component portion 602, light-emitting component portion 603 and negative electrode 604 on substrate (W) 601, summary constitutes this display unit 600.
In this display unit 600, the light transmission component portion 602 and the substrate 601 that send to substrate 601 from light-emitting component portion 603, to observer's one side outgoing, and from light-emitting component portion 603 after light that substrate 601 opposite sides are sent is by negative electrode 604 reflections, transmission component portion 602 and substrate 601 are to observer's one side outgoing.
Form the bottom protective film 606 that is made of silica between component portion 602 and substrate 601, (light-emitting component portion 603 1 sides) form the semiconductor film 607 of the island that is made of polysilicon on this bottom protective film 606.In the zone about this semiconductor film 607, inject by the high concentration cation respectively, form source region 607a and drain region 607b.And, do not inject cationic central portion and become channel region 607c.
In addition; form the transparent gate insulating film 608 that covers bottom protective film 606 and semiconductor film 607 in component portion 602, the position corresponding with channel region 607c semiconductor film 607 on this gate insulating film 608 forms the gate electrode 609 that is made of Al, Mo, Ta, Ti, W etc.On this gate electrode 609 and gate insulating film 608, form the transparent first interlayer dielectric 611a and the second interlayer dielectric 611b.In addition, connecting first, second interlayer dielectric 611a, 611b forms respectively and the source region 607a of semiconductor film 607, contact hole 612a, the 612b that drain region 607b is communicated with.
Then, composition on the second interlayer dielectric 611b forms the pattern of regulation to the pixel electrode 613 that is made of ITO etc., and this pixel electrode 613 is connected on the 607a of source region by contact hole 612a.
In addition, configuration power line 614 on the first interlayer dielectric 611a, this power line 614 is connected on the 607b of drain region by contact hole 612b.
Like this, forming the driving thin film transistor (TFT) 615 that is connected on each pixel electrode 613 in the component portion 602 respectively.
Described light-emitting component portion 603 is made of the barrier portion 618 that is layered in functional layer 617 on a plurality of pixel electrodes 613, is arranged on each functional layer 617 of division between each pixel electrode 613 and the functional layer 617.
Constitute light-emitting component by these pixel electrodes 613, functional layer 617 and the negative electrode 604 that is configured on the functional layer 617.In addition, pixel electrode 613 compositions form the rectangle in the plan view, form barrier portion 618 between each pixel electrode 613.
Barrier portion 618 is by constituting with the lower part: for example by SiO, SiO 2, TiO 2Inorganic matter barrier layer 618a (the first barrier layer) etc. the inorganic material formation; Be layered on the inorganic matter barrier layer 618a, the cross section that is formed by the resist of hear resistances such as acrylic resin, polyimide resin, solvent resistance excellence is trapezoidal organic matter barrier layer 618b (the second barrier layer).The part of this barrier portion 618 forms with the state on the periphery of pixel electrode 613.
And, between each barrier portion 618, form the peristome 619 that relative pixel electrode 613 enlarges upward gradually.
Described functional layer 617 is made of the hole injection/transfer layer 617a that forms with the state that is layered on the pixel electrode 613 in peristome 619, the luminescent layer 617b that is formed on the injection/transfer layer 617a of this hole.The functional layer that can also have in addition, other functions with the adjacent formation of this luminescent layer 617b.For example, also can form electron supplying layer.
Hole injection/transfer layer 617a has from pixel electrode 613 1 sides conveying hole, injects the function of luminescent layer 617b.Comprise first constituent (functional liquid) that hole injection/transfer layer forms material by ejection, form this hole injection/transfer layer 617a.Form material as hole injection/transfer layer, use the mixture of polythiofuran derivative such as polyethylene dioxythiophene and sulfo-polystyrene etc.
Luminescent layer 617b sends any one light of redness (R), green (G) or blue (B), and second constituent (functional liquid) that comprises luminescent layer formation material (luminescent material) by ejection forms.As the solvent of second constituent, wish for hole injection/transfer layer 120a it is undissolved, for example, can use cyclohexyl benzene, dihydrobenzene furans, trimethylbenzene, durol etc.Use such non-polar solven by second constituent, under the prerequisite that hole injection/transfer layer 617a is dissolved once more, can form luminescent layer 617b luminescent layer 617b.
And, in luminescent layer 617b, be coupled again at luminescent layer from hole injection/transfer layer 617a injected holes with from negative electrode 604 injected electrons, luminous.
Negative electrode 604 forms with the comprehensive state of covering luminous element portion 603, and is paired with pixel electrode 613, finishes the task of making current direction functional layer 617.In addition, at the not shown seal member of the top of this negative electrode 604 configuration.
Below, the manufacturing process of described display unit 600 is described with reference to Figure 16～Figure 24.
This display unit 600 forms operation (S25) manufacturing through barrier portion formation operation (S21), surface treatment procedure (S22), hole injection/transfer layer formation operation (S23), luminescent layer formation operation (S24), opposite electrode as shown in figure 16.In addition, manufacturing process is not limited to illustrative, appends other operations sometimes according to necessity, deletes other operations sometimes.
At first, form in the operation (S21), as shown in figure 17, on the second interlayer dielectric 611b, form inorganic matter barrier layer 618a in barrier portion.After forming the inorganic matter film on the formation position, to this inorganic matter film composition, form this inorganic matter barrier layer 618a by photoetching technique.At this moment, the part of inorganic matter barrier layer 618a is layered on the edge part of pixel electrode 613.
After having formed inorganic matter barrier layer 618a, as shown in figure 18, on inorganic matter barrier layer 618a, form organic matter barrier layer 618b.This organic matter barrier layer 618b is also same with inorganic matter barrier layer 618a, and by photoetching technique, composition forms.
Formed barrier portion 618 like this.In addition, be accompanied by this, between each barrier portion 618, form relative pixel electrode 613 peristome 619 of opening up.By these peristome 619 determined pixel districts.
In surface treatment procedure (S22), carry out the lyophily processing and scold liquefaction to handle.The zone of carrying out the lyophily processing is the 618aa of first cascade portion of inorganic matter barrier layer 618a and the electrode surface 613a of pixel electrode 613, and these zones are for example by being that the plasma treatment of handling gas is a lyophily by surface treatment with oxygen.This plasma is handled the cleaning of the ITO that also holds a concurrent post pixel electrode 613.
In addition, scold liquefaction to handle the wall 618s of organic matter barrier layer 618b and the upper surface 618t of organic matter barrier layer 618b are carried out,, fluorination treatment (be treated to be and scold fluidity) is carried out on the surface by for example being the plasma treatment of handling gas with the tetrafluoromethane.
By carrying out this surface treatment procedure, when function of use droplet jetting head 31 forms functional layer 617, function liquid droplet is dropped in the pixel region, in addition, the function liquid droplet that can prevent to drop in the pixel region overflows from peristome 619.
And, through above operation, obtain display unit matrix 600A.600A is placed on the absorptive table 53 of droplet ejection apparatus shown in Figure 11 this display unit matrix, carries out following hole injection/transfer layer and forms operation (S23), luminescent layer formation operation (S24).
As shown in figure 19, form operation (S23), in pixel region is each peristome 619, spray first constituent that comprises hole injection/transfer layer formation material from function liquid droplet ejection head 31 in hole injection/transfer layer.Then, as shown in figure 20, carry out drying and handle and heat treatment, make the polar solvent evaporation that comprises in first constituent, go up at pixel electrode 613 (electrode surface 613a) and form hole injection/transfer layer 617a.
Below, illustrate that luminescent layer forms operation (S24).Form in operation at this luminescent layer, as mentioned above, in order to prevent the dissolving once more of hole injections/transfer layer 617a, the solvent of second constituent that uses during as the formation of luminescent layer, use is for the undissolved non-polar solven of hole injection/transfer layer 617a.
; because hole injection/transfer layer 617a is low for the compatibility of non-polar solven; even so second constituent that comprises non-polar solven is gone up ejection to hole injection/transfer layer 617a; hole injection/transfer layer 617a and luminescent layer 617b are close to, or can't evenly apply luminescent layer 617b.
Therefore, in order to improve the surperficial compatibility of hole injection/transfer layer 617a, wish before forming luminescent layer, to carry out surface treatment (surfaction processing) for non-polar solven and luminescent layer formation material.The solvent that the non-polar solven of second constituent that uses when coating is with the formation of luminescent layer on the injection/transfer layer 617a of hole is identical or with its similar solvent surface modified material, make its drying, carry out this surface treatment.
By implementing such processing, it is affine with non-polar solven easily that the surface of hole injection/transfer layer 617a becomes, and in operation after this, evenly applies second constituent that comprises luminescent layer formation material on the injections/transfer layer 617a of hole.
Then, as shown in figure 21, second constituent that any one (in the example of Figure 21, blue (B)) the pairing luminescent layer that comprises in of all kinds is formed material injects the amount of regulation to pixel region (peristome 619) as function liquid droplet.Second constituent that injects pixel region spreads on the injection/transfer layer 617a of hole, is full of in the peristome 619.In addition, just in case second constituent is offset from pixel region, when the upper surface 618t that drops on barrier portion 618 went up, this upper surface 618t had carried out scolding liquid to handle as mentioned above, so second constituent easily falls in the peristome 619.
Then,, second constituent after the ejection is carried out drying handle, make the non-polar solven evaporation that comprises in second constituent, as shown in figure 22, on the injection/transfer layer 617a of hole, form luminescent layer 617b by carrying out drying process.At this moment, form and blue (B) corresponding luminescent layer 617b.
Equally, as shown in figure 23, function of use droplet jetting head 31, same operation when carrying out with the pairing luminescent layer 617b of described blueness (B) successively forms the pairing luminescent layer 617b of other colors (red (R), green (G)).In addition, the formation of luminescent layer 617b is not limited to illustrative order in proper order, can be arbitrarily in proper order.For example, can form material decision order according to luminescent layer.In addition, the Pareto diagram as three looks such as R, G, B has banded arrangement, mosaic arrangement, triangle arrangement.
As mentioned above, on pixel electrode 613, form functional layer 617, that is, and hole injection/transfer layer 617a and luminescent layer 617b.Then, transfer to opposite electrode and form operation (S25).
Form in the operation (S25) at opposite electrode, as shown in figure 24, luminescent layer 617b and organic matter barrier layer 618b comprehensively on form negative electrodes 604 (opposite electrode) by for example vapour deposition method, sputtering method, CVD method etc.This negative electrode 604 in the present embodiment, for example by the calcium layer with aluminium lamination is stacked constitutes.
Suitably be provided as Al film, the Ag film of electrode on the top of this negative electrode 604 or prevent the SiO of its oxidation 2, diaphragm such as SiN.
After forming negative electrode 604 like this, handle and wait other processing, obtain display unit 600 by carrying out sealing the encapsulation process on top of this negative electrode 604 and wiring by seal member.
Below, Figure 25 be expression plasm display device (the PDP device below is called display unit 700) want portion's cutaway view.In addition, at same figure, to cut its a part of STA representation display unit 700.
This display unit 700 comprises: first substrate 701 opposite each other, second substrate 702, be formed on the discharge display part 703 between them.Discharge display part 703 is made of a plurality of arc chambers 705.In these arc chambers 705,3 arc chambers 705 such as red arc chamber 705R, green arc chamber 705G, blue arc chamber 705B become group, constitute a pixel.
Interval with regulation on first substrate 701 forms striated to calculated address electrode 706, and the upper surface that covers this address electrode 706 and first substrate 701 forms dielectric layer 707.On this dielectric layer 707, dividing wall 708 is set, be located between each address electrode 706, and along each address electrode 706.This dividing wall 708 as shown in the figure, be included in that extend the width both sides of address electrode 706, with the direction of address electrode 706 quadratures extend not shown.
And the zone of being divided by this dividing wall 708 becomes arc chamber 705.
In arc chamber 705, dispose fluorophor 709.Fluorophor 709 sends any one light of redness (R), green (G) or blue (B), dispose red-emitting phosphors 709R in the bottom of red arc chamber 705R, dispose green-emitting phosphor 709 in the bottom of green arc chamber 705G, dispose blue emitting phophor 709B in the bottom of blue arc chamber 705B.
With the interval of regulation, form a plurality of show electrodes 711 on the face below in the figure of second substrate in direction with described address electrode 706 quadratures.Then, cover the diaphragm 713 that these form dielectric layers 712, are made of MgO.
First substrate 701 and second substrate 702 be relative being pasted together under the orthogonal state of address electrode 706 and show electrode 711.In addition, described address electrode 706 and show electrode 711 are connected on the not shown AC power.
And by to each electrode 706,711 energising, in discharge display part 703, fluorophor 709 excitation discharges can be carried out colour and show.
In the present embodiment, can use droplet ejection apparatus shown in Figure 11 to form described address electrode 706, show electrode 711 and fluorophor 709.Below, represent the formation operation of the address electrode 706 of first substrate 701.
At this moment, under the state on the absorptive table 53 that first substrate is placed in droplet ejection apparatus 1, carry out following operation.
At first, by function liquid droplet ejection head 31, make the fluent material (functional liquid) that comprises conducting film wiring formation material drop on address electrode and form in the zone as function liquid droplet.This fluent material forms material as conducting film wiring, is that electrically conductive microparticles such as metal are distributed in the dispersant.As this electrically conductive microparticle, use the metal particle, the electric conductive polymer that contain gold, silver, copper, palladium or nickel.
When for after becoming the whole address electrodes that replenish object and forming the zone and finish the supply of fluent material, the fluent material after the ejection is carried out drying handle, make the dispersant that comprises in the fluent material evaporate calculated address electrode 706.
, in each above-mentioned operation, illustration the formation of address electrode 706, but for described show electrode 711 and fluorophor 709, also can form by described each operation of institute.
When forming show electrode 711, same with address electrode 706, the fluent material (functional liquid) that contains conducting film wiring formation material is dropped in the show electrode type city as function liquid droplet.
In addition, under the situation that forms fluorophor 709, comprise the drop of the fluent material (functional liquid) of the fluorescent material corresponding, make in its arc chamber that drops on corresponding color 705 with (R, G, B) of all kinds from function liquid droplet ejection head 31 ejections.
Figure 26 be electron emitting device (FED device, below only be called display unit 800) want portion's cutaway view.In addition, in same figure, its part is represented display unit 800 as section.
This display unit 800 comprises: first substrate 801, second substrate 802 opposite each other and be formed on field emission display part 803 between them.Field emission display part 803 constitutes by being configured to rectangular a plurality of electron emission part 805.
On first substrate 801, orthogonal formation constitutes the first element electrode 806a and the second element electrode 806b of negative electrode 806.In addition, be formed with the conductive film 807 that forms interval 808 in the part of separating by the first element electrode 806a and the second element electrode 806b.That is, constitute a plurality of electron emission part 805 by the first element electrode 806a, the second element electrode 806b and conductive film 807.Conductive film 807 is for example by palladium oxide formations such as (PdO), in addition, after forming conductive film 807, forms at interval 808 by physics shaping etc.
On the lower surface of second substrate 802, form anode 809 with negative electrode 806 subtends.The cancellate barrier of formation portion 811 below this anode 809 is in each the downward peristome 812 that is surrounded by this barrier portion 811, with electron emission part 805 corresponding configuration fluorophor 813.Fluorophor 813 sends any one light of redness (R), green (G) or blue (B), and in each peristome 812, described red-emitting phosphors 813R, green-emitting phosphor 813G, blue emitting phophor 813B are with the pattern arrangement of described regulation.
Then, keep first substrate 801, second substrate 802 that constitute like this small gap to be pasted together.By conductive film (interval 808) 807, be that the electronic impact anode that the first element electrode 806a or the second element electrode 806b fly out is the fluorophor 813 that anode 809 forms from negative electrode in this display unit 800, excitation luminescence can display color.
At this moment, same with other embodiment, can use droplet ejection apparatus 1 to form the first element electrode 806a, the second element electrode 806b and conductive film 807, and can use droplet ejection apparatus 1 to form fluorophor 813R, 813G, 813B of all kinds.
The first element electrode 806a, the second element electrode 806b and conductive film 807 have the flat shape shown in Figure 27 A, to their film forming the time, shown in Figure 27 B, stay the part that the first element electrode 806a, the second element electrode 806b and conductive film 807 are set in advance, form the barrier BB of portion (photoetching process).Then, partly form the first element electrode 806a, the second element electrode 806b (based on the ink-jet method of droplet ejection apparatus 1) at the ditch that constitutes by the BB of barrier portion, make its solvent seasoning, carry out film forming after, form conductive film 807 (based on the ink-jet method of droplet ejection apparatus 1).Then, behind the formation conductive film 807, remove the BB of barrier portion (ashing lift-off processing), transfer to described shaping and handle.In addition, same with described organic El device, wish to carry out to handle to the lyophily processing of first substrate 801 and second substrate 802 or for the liquefaction of scolding of barrier portion 811, BB.
In addition, as other electro-optical devices, can be the device that is formed with metal line, lens, resist and light diffusion body etc.By in the manufacturing of various electro-optical devices (device), using described droplet ejection apparatus 1, can efficiently make various electro-optical devices.
As mentioned above, the sucking method of function liquid droplet ejection head of the present invention and suction device use the attraction parts of injector as function liquid droplet ejection head, so can not be subjected to the influence of air bubbles before the functional liquid, can keep suitable attraction, efficiently carry out the attraction of function liquid droplet ejection head.Therefore, efficiently discharge gas from function liquid droplet ejection head and run, can cut down the functional liquid that consumes in the attraction of function liquid droplet ejection head, and can be attracting required time to be suppressed at Min..In addition, injector is more small-sized than pump, so can make equipment miniaturization.
In addition, droplet ejection apparatus of the present invention has described suction device, so the save space of energy implement device.In addition, when function liquid droplet ejection head is filled functional liquid, or during as the clearing function droplet jetting head, when carrying out the attraction of function liquid droplet ejection head, can efficiently attract.
In the manufacture method of electro-optical device of the present invention, electro-optical device, electronic instrument, use described droplet ejection apparatus manufacturing, so can cut down required function liquid measure and time in the attraction of function liquid droplet ejection head, can make efficiently.

Claims (1)

1. the suction device of a function liquid droplet ejection head is close on the function liquid droplet ejection head of ejection function liquid droplet cap, attracts described function liquid droplet ejection head by described cap, it is characterized in that,
Comprise: be communicated with described cap, attract the injector of whole nozzles of described function liquid droplet ejection head; Supply with the working fluid supply part of working fluid to described injector; Be arranged between described cap and the described injector, and detect the pressure detecting part of the attraction pipeline inner pressure of the attraction mouth that connects described cap and described injector; Be arranged in the working fluid feeding pipe of the supply port that connects described working fluid supply part and described injector, regulate the flow control valve of the described working fluid flow that offers described injector; According to the testing result of described pressure detecting part, control first control assembly of described flow control valve,
When the suction pressure in the described attraction pipeline during less than authorized pressure, control described flow rate regulating valve and increase the quantity delivered of described working fluid, when the suction pressure in the described attraction pipeline during greater than authorized pressure, control described flow rate regulating valve and reduce the quantity delivered of described working fluid, the attraction of function liquid droplet ejection head is controlled as under certain suction pressure is carrying out.
CN200610084499A 2002-11-12 2003-11-12 Apparatus for sucking function liquid droplet ejection head Expired - Lifetime CN100586721C (en)

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US20080158321A1 (en) * 2006-12-28 2008-07-03 Toshiba Tec Kabushiki Kaisha Ink jet recording apparatus, ink supplying mechanism and ink jet recording method
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