JP2012045936A - Processing liquid discharge device, cleaning unit and cleaning method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently remove fine liquid crystals remaining on the nozzle surface of a head.SOLUTION: A processing liquid discharge device includes one or a plurality of injection nozzles which inject gas to the fine liquid crystals remaining on the nozzle surface of the head and push the liquid crystals toward a suction nozzle so as to efficiently remove the remaining liquid crystals by means of a head cleaning unit for cleaning the nozzle surface of the head. The processing liquid discharge device further includes: a horizontal drive member for adjusting an interval between the injection nozzle and the suction nozzle; a lifting member for adjusting the level of a discharge port of the injection nozzle; and a pressure adjusting means for adjusting the injection pressure at the discharge port of the injection nozzle.

Description

  The present invention relates to a processing liquid discharge apparatus, a cleaning unit, and a cleaning method.

  In recent years, liquid crystal display devices have been widely used as display units for electronic devices such as mobile phones and portable computers. In this liquid crystal display device, liquid crystal is provided in a space between a color filter substrate on which a black matrix, a color filter, a common electrode and an alignment film are formed, and an array substrate on which thin film transistor TFTs, pixel electrodes and an alignment film are formed. The image effect is obtained by using the difference in the refractive index of light injected and according to the anisotropy of the liquid crystal.

  As an apparatus for applying an alignment liquid or liquid crystal on a color filter substrate and an array substrate, an ink jet type coating apparatus is used. However, when cleaning the liquid crystal remaining on the head after applying the liquid crystal to the substrate, if the cleaning here is not performed smoothly, fine liquid crystal remains in the head. For this reason, the problem that the film uniformity of the liquid crystal apply | coated to a board | substrate falls arises.

Korean Patent Publication No. 10-2010-0036166

  An object of the present invention is to provide a processing liquid discharge apparatus, a cleaning unit, and a cleaning method capable of efficiently removing fine liquid crystals remaining on a nozzle surface of a head.

  The object of the present invention is not limited here, and other objects can be clearly understood by those skilled in the art from the following description.

  In order to achieve the above-described problem, a processing liquid discharge apparatus according to an embodiment of the present invention includes a base, a substrate support unit installed on the base and on which the substrate is placed, and the substrate support. A gentry, which is arranged on the upper part of the moving path of the unit, and on which the head for ejecting the chemical liquid in an ink jet system is coupled, and a head cleaning unit installed on the base and cleaning the nozzle surface of the head. The head cleaning unit includes a suction nozzle having a suction hole formed so as to face the head, and a jet nozzle having a discharge port formed so as to face the head located above the suction nozzle. One or a plurality of gas injection units.

  The apparatus further includes a horizontal driving member that moves the spray nozzle in a horizontal direction.

  The horizontal driving member may include a guide member coupled to the upper surface of the base, a slider that linearly moves along the guide member, and a horizontal driver that drives the slider.

  In addition, a plurality of the injection nozzles are provided, and the horizontal driving member is coupled to each of the injection nozzles and driven independently.

  In addition, a plurality of the injection nozzles are provided, and the heights of the terminal ends of the discharge nozzles are different from each other.

  The spray nozzle may further include a lifting member coupled to each of the spray nozzles to independently adjust a height of a terminal end of the discharge nozzle.

  In addition, a plurality of the injection nozzles are provided, and pressure adjusting means coupled to each of the injection nozzles to independently adjust the injection pressure of the discharge port of the injection nozzle.

  In order to achieve the above-described problem, a cleaning unit according to an embodiment of the present invention includes a suction nozzle having a suction hole formed so as to face upward in a cleaning unit for cleaning a nozzle of a processing liquid, and the suction nozzle. A gas injection unit provided with at least one injection nozzle having a discharge port formed to face a head positioned above, the injection nozzle comprising a first injection nozzle and a second injection nozzle. The first injection nozzle and the second injection nozzle are arranged in a line with the suction nozzle toward the suction nozzle, and the end height of the discharge port of the first injection nozzle and the discharge port of the second injection nozzle The terminal height is different.

  The apparatus further includes a horizontal driving member that moves the first injection nozzle and the second injection nozzle in a horizontal direction.

  A first horizontal driving member that moves the first injection nozzle in the horizontal direction; and a second horizontal driving member that moves the second injection nozzle in the horizontal direction. The second horizontal driving member is controlled independently.

  The first elevating member for adjusting the height of the discharge port of the first injection nozzle, and the second elevating member for adjusting the height of the discharge port of the second injection nozzle, further comprising: The second elevating member is controlled independently.

  The first pressure adjusting means for adjusting the injection pressure of the discharge port of the first injection nozzle, and the second pressure adjusting means for adjusting the injection pressure of the discharge port of the second injection nozzle, The pressure adjusting means and the second pressure adjusting means are controlled independently.

  In order to achieve the above-described problem, a cleaning method according to an embodiment of the present invention is a cleaning method for a processing liquid discharge apparatus, wherein a spray nozzle that is close to a suction nozzle among a plurality of spray nozzles is a nozzle for a processing liquid. After jetting the gas toward the liquid crystal remaining in the nozzle and pushing the liquid crystal in the direction of the suction nozzle, the gas is sprayed again toward the liquid crystal where the jet nozzle that is far from the suction nozzle among the multiple jet nozzles remains Then, the liquid crystal is pushed out in the direction of the suction nozzle and sucked into the suction nozzle to be washed.

  In addition, the height of the discharge nozzle of the injection nozzle that is close to the suction nozzle among the plurality of injection nozzles is the height of the discharge nozzle of the injection nozzle that is far from the suction nozzle among the plurality of injection nozzles. It is characterized by being lower than that.

  According to the present invention, the fine liquid crystal remaining on the nozzle surface of the head can be efficiently removed.

It is drawing which shows the structure of an inkjet system liquid-crystal coating equipment. It is a perspective view of the liquid-crystal discharge part of FIG. It is a top view of the liquid-crystal discharge part of FIG. 4 is a diagram illustrating a first drive unit of FIG. 3. 4 is a diagram illustrating a second drive unit of FIG. 3. 6 is a diagram illustrating a straight line movement and rotation process of Gentry. 4 is a side view of the head moving unit of FIGS. 2 and 3. FIG. It is a front view of the 1st movement unit of FIG. It is drawing which shows a nozzle test | inspection unit. 1 is a diagram schematically illustrating an embodiment of a head cleaning unit. It is drawing which shows other embodiment of a head washing | cleaning unit roughly. 12 is a drawing schematically showing a part of the head cleaning unit of FIG. 11. It is drawing which shows other one Embodiment of a head washing | cleaning unit roughly. FIG. 14 is an enlarged cross-sectional view showing a part of the head cleaning unit of FIG. 13. It is an expanded sectional view showing other embodiments to a part of head washing unit.

  Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. The problems, problem-solving means, and effects to be solved by the present invention described above can be easily understood through the accompanying drawings and embodiments related thereto. Each drawing is partly simplified or exaggerated for clarity of explanation. When the reference numerals are given to the constituent elements of the drawings, the same constituent elements are denoted by the same reference numerals as much as possible on the other drawings. Further, in the description of the present invention, when it is determined that specific descriptions of related known configurations and functions make the gist of the present invention unclear, detailed descriptions thereof are omitted. Each drawing is merely an example and should not limit the scope of the invention.

  In the following, a facility for applying a treatment liquid to an object by an inkjet method for discharging droplets and a method for applying the treatment liquid to the object using this will be described.

  For example, the object is a color filter CF substrate or a thin film transistor TFT substrate of a liquid crystal display panel, and the treatment liquid is liquid crystal (Liquid Crystal), alignment liquid, red R, green G, and blue B in which pigment particles are mixed in a solvent. Ink. As the alignment liquid, polyimide is used.

  The alignment liquid is applied to the entire surface of the color filter CF substrate and the thin film transistor TFT substrate, and the liquid crystal is applied to the entire surface of the color filter CF substrate or the thin film transistor TFT substrate. The ink is applied to the inner area of the black matrix arranged in a lattice pattern on the color filter CF substrate.

  In the present embodiment, the facility using liquid crystal as the processing liquid has been described as an example, but the technical idea of the present invention is not limited to this.

  FIG. 1 is a diagram showing a configuration of an ink jet type liquid crystal coating equipment 1. The liquid crystal application equipment 1 in FIG. 1 is an equipment for applying a liquid crystal to a substrate S (see FIGS. 2 and 3 etc.) by an ink jet method for discharging droplets.

  The substrate S is a color filter CF substrate or a thin film transistor TFT substrate of a liquid crystal display panel, and the liquid crystal is applied to the entire surface of the color filter CF substrate or the thin film transistor TFT substrate.

  As shown in FIG. 1, the liquid crystal coating equipment 1 includes a liquid crystal discharge unit 10, a substrate transfer unit 20, a loading unit 30, an unloading unit 40, a liquid crystal supply unit 50, and a main control unit 90. The liquid crystal discharge unit 10 and the substrate transfer unit 20 are arranged in a row in the first direction I and are positioned adjacent to each other. A liquid crystal supply unit 50 and a main control unit 90 are disposed at a position facing the substrate transfer unit 20 with the liquid crystal discharge unit 10 as the center. The liquid crystal supply unit 50 and the main control unit 90 are arranged in a row in the second direction II. A loading unit 30 and an unloading unit 40 are arranged at positions facing the liquid crystal discharge unit 10 with the substrate transfer unit 20 as the center. The loading unit 30 and the unloading unit 40 are arranged in a row in the second direction II.

  Here, the first direction I is an arrangement direction of the liquid crystal discharge unit 10 and the substrate transfer unit 20, the second direction II is a direction perpendicular to the first direction I on the horizontal plane, and the third direction III is the first direction I. This is a direction perpendicular to the first direction I and the second direction II.

  The substrate S on which the liquid crystal is applied is carried into the loading unit 30. The substrate transfer unit 20 transfers the substrate S carried into the loading unit 30 to the liquid crystal discharge unit 10. The liquid crystal discharge unit 10 is supplied with liquid crystal from the liquid crystal supply unit 50 and discharges the liquid crystal onto the substrate S by an ink jet method that discharges droplets. When the liquid crystal discharge is completed, the substrate transfer unit 20 transfers the substrate S from the liquid crystal discharge unit 10 to the unloading unit 40. The substrate S coated with the liquid crystal is unloaded from the unloading unit 40. The main controller 90 controls all operations of the liquid crystal discharge unit 10, the substrate transfer unit 20, the loading unit 30, the unloading unit 40, and the liquid crystal supply unit 50.

  2 is a perspective view of the liquid crystal discharge unit 10 of FIG. 1, and FIG. 3 is a plan view of the liquid crystal discharge unit 10 of FIG. 2 and 3, the liquid crystal discharge unit 10 includes a base B, a substrate support unit 100, a gentry 200, a gentry moving unit 300, an ink jet head unit 400, a head moving unit 500, a liquid crystal supply unit 600, and an individual head control unit. 700, a liquid crystal discharge amount measuring unit 800, a nozzle inspection unit 900, and a head cleaning unit 1000.

  Below, each structure of the liquid-crystal discharge part 10 is demonstrated in detail.

  The base B has a rectangular parallelepiped shape having a constant thickness. A substrate support unit 100 is disposed on the upper surface of the base B. The substrate support unit 100 has a support plate 110 on which the substrate S is placed. The support plate 110 is a quadrangular plate. A rotation driving member 120 is connected to the lower surface of the support plate 110. The rotation drive member 120 is a rotation motor. The rotation driving member 120 rotates the support plate 110 around a rotation center axis perpendicular to the support plate 110.

  If the support plate 110 is rotated by the rotation driving member 120, the substrate S is rotated by the rotation of the support plate 110. When the long side direction of the cell formed on the substrate S to which the liquid crystal is applied is in the second direction II, the rotation driving member 120 rotates the substrate S so that the long side direction of the cell is in the first direction I.

  The support plate 110 and the rotation driving member 120 are linearly moved in the first direction I by the linear driving member 130. The linear drive member 130 includes a slider 132 and a guide member 134. The rotation driving member 120 is installed on the upper surface of the slider 132. The guide member 134 is extended at the center of the upper surface of the base B so as to be longer in the first direction I. The slider 132 can include a linear motor (not shown), and the slider 132 is linearly moved in the first direction I along the guide member 134 by the linear motor.

  The gentry 200 is disposed on the upper part of the path along which the support plate 110 is moved. The gentry 200 is spaced apart from the upper surface of the base B in the upward direction, and is arranged such that its lateral direction is directed to the second direction II. The inkjet head unit 400 is coupled to the gentle 200 by the head moving unit 500. The inkjet head unit 400 is linearly moved in the lateral direction of the gentry 200 by the head moving unit 500, that is, in the second direction II, and is linearly moved in the third direction III.

  The gentle movement unit 300 linearly moves the gentle 200 in the first direction I, or rotates the gentle 200 so that the lateral direction of the gentle 200 is inclined in the first direction I. The nozzles (not shown) of the inkjet head unit 400 are aligned in a direction inclined in the first direction I by the rotation of the gentle 200.

  As will be described below, the gentry moving unit 300 can rotate the other end of the gentry 200 with one end of the gentry 200 as the rotation center, or can rotate the gentry 200 with the center of the gentry 200 as the rotation center. .

  The gentry moving unit 300 includes a first driving unit 310 and a second driving unit 320. The second drive unit 320 is provided at one end of the gentry 200 serving as the rotation center, and the first drive unit 310 is provided at the other end of the gentry 200.

  FIG. 4 is a diagram illustrating the first drive unit 310 of FIG. As shown in FIG. 4, the first drive unit 310 includes a slider 312, a first rotation support member 314, and a first linear drive member 318. A guide rail 210 is provided at the lower end of the other end side of the gentry 200 along the lateral direction of the gentry 200, and the slider 312 is guided by the guide rail 210 and moves linearly. A first rotation support member 314 is coupled to the lower end portion of the slider 312. The first rotation support member 314 is a bearing in which an upper part and a lower part are relatively rotatable. A first linear drive member 318 is coupled to the lower surface of the first rotation support member 314. The first linear drive member 318 linearly moves the first rotation support member 314 in the first direction I.

The first linear drive member 318 includes a guide rail 315 and a slider 317. The guide rail 315 is arranged in the other side edge portion of the upper surface of the base B around the guide member 134 of the substrate support unit 100 with the lateral direction thereof directed in the first direction I. A slider 317 is coupled to the guide rail 315 so as to be movable. A first rotation support member 314 is coupled to the upper surface of the slider 317. The slider 317 is internally provided with a linear motor (not shown). The slider 317 linearly moves in the first direction I along the guide rail 315 by the driving force of the linear motor.

FIG. 5 illustrates the second drive unit of FIG. As shown in FIG. 5, the second drive unit 320 linearly moves one end of the gentle 200 in the first direction I when the gentle 200 moves, and becomes the rotational center of the gentle 200 when the gentle 200 rotates. Operate.

  The second drive unit 320 includes a second rotation support member 324 and a second linear drive member 328. A connecting member 322 is coupled to the lower surface of one end of the gentry 200, and a second rotation support member 324 is coupled to the lower surface of the connecting member 322. The second rotation support member 324 is a bearing in which an upper part and a lower part are relatively rotatable. A second linear drive member 328 is coupled to the lower surface of the second rotation support member 324. The second linear drive member 328 linearly moves the second rotation support member 324 in the first direction I. By the linear movement of the second rotation support member 324, the connecting member 322 and the one end of the gentle 200 that are sequentially coupled to the upper part thereof are linearly moved.

  The second linear drive member 328 includes a guide rail 325 and a slider 327. The lateral direction of the guide rail 325 is directed to the first direction I, and is arranged on one side edge of the upper surface of the base B around the guide member 134 of the substrate support unit 100. A slider 327 is movably coupled to the guide rail 325. A second rotation support member 324 is coupled to the upper surface of the slider 327. The slider 327 is internally provided with a linear motor (not shown). The slider 327 moves linearly in the first direction I along the guide rail 325 by the driving force of the linear motor.

  FIG. 6 is a diagram illustrating a rotation and linear movement process of the gentry 200. 3 and 6, the liquid crystal supply unit 600 is omitted for the sake of simplicity.

  As shown in FIGS. 4 to 6, the gentle 200 is rotated by the first drive unit 310 and the second drive unit 320 in the direction inclined in the first direction I and linearly moved in the first direction I. .

  If the first linear drive member 318 of the first drive unit 310 linearly moves in the first direction I while the second linear drive member 328 of the second drive unit 320 is fixed, the gentle 200 is rotated. This will be described in detail as follows.

  First, the slider 317 of the first linear drive member 318 moves in the first direction I along the guide rail 315 by the driving force of the linear motor. At this time, since the second linear drive member 328 is not driven at one end of the gentry 200, the second rotation support member 324 is rotated without being moved in the first direction I.

  When the slider 317 of the first linear drive member 318 moves in the first direction I, the first rotation support member 314 disposed on the slider 317 linearly moves in the first direction I along the guide rail 315. At the same time, the slider 312 coupled to the upper end of the first rotation support member 314 is rotated by the relative rotation between the upper part and the lower part of the first rotation support member 314, along the guide rail 210 provided on the gentle 200. Move to the other end. As a result, the gentry 200 rotates around the support position of the second drive unit 320, and the gentry 200 support position of the first drive unit 310 is moved outward from the other end. Through this operation, the gentle 200 is rotated in the direction inclined in the first direction I, and the inkjet head unit 400 is aligned in the direction inclined in the first direction I accordingly.

  Thus, if the inkjet head unit 400 is aligned in a direction inclined in the first direction I, the liquid crystal discharge pitch can be adjusted while having flexibility in accordance with the pixel pitch change of the substrate S to which the liquid crystal is applied, Through this, the film uniformity of the liquid crystal applied to the substrate S can be increased.

  The gentle 200 can be rotated by the above-described method, and further in the first direction I by the slider 317 of the first linear driving member 318 and the slider 327 of the second linear driving member 328 in the rotated state. It can move in a straight line. One end of the gentry 200 is linearly moved in the first direction I by the movement of the slider 327 of the second linear driving member 328, and the other end of the gentry 200 is linearly moved in the first direction I by the movement of the slider 317 of the first linear driving member 318. Can be moved.

  When the gentry 200 is fixed and the substrate S moves in the first direction I, it is necessary to move the substrate S from one side of the gentry 200 to the other side, which may increase the footprint of the facility (Footprint). . However, in the present invention, since the gentle 200 can be linearly moved in the first direction I while the substrate S is fixed or together with the linear movement of the substrate S, the footprint of the facility can be reduced.

  The head moving unit 500 is disposed in each inkjet head unit 400. In the case of this embodiment, since three inkjet head units 400a, 400b, and 400c are provided, three head moving units 500 are provided corresponding to the number of heads. Unlike this, only one head moving unit 500 may be provided, and the inkjet head unit 400 may be moved integrally instead of individually.

  FIG. 7 is a side view of the head moving unit 500 of FIGS. 2 and 3, and FIG. 8 is a front view of the first moving unit of FIG.

  As shown in FIGS. 7 to 8, the head moving unit 500 includes a first moving unit 520 and a second moving unit 540. The first moving unit 520 linearly moves the inkjet head unit 400a in the lateral direction of the gentle 200, that is, the second direction II, and the second moving unit 540 linearly moves the inkjet head unit 400a in the third direction III.

  The first moving unit 520 includes guide rails 522a and 522b, sliders 524a and 524b, and a moving plate 526. The guide rails 522a and 522b extend in the second direction II and are spaced apart in the third direction III on the front surface of the gentry 200. Sliders 524a and 524b are movably coupled to the guide rails 522a and 522b, and linear sliders, for example, linear motors (not shown) are incorporated in the sliders 524a and 524b. The moving plate 526 is coupled to the sliders 524a and 524b. The upper area of the moving plate 526 is coupled to the upper slider 524a, and the lower area of the moving plate 526 is coupled to the lower slider 524b. The moving plate 526 linearly moves in the second direction II along the guide rails 522a and 522b by the driving force of the linear motor. As described above, the inkjet head units 400a, 400b, and 400c are individually moved along the second direction II, whereby the intervals between the inkjet head units 400a, 400b, and 400c are adjusted.

  The second moving unit 540 includes a guide member 542, a slider 544, a detector 546, and a controller 548. The guide member 542 is coupled to the moving plate 526 of the first moving unit 520 and guides the linear movement of the slider 544 in the third direction III. The slider 544 is coupled to the guide member 542 so as to be linearly movable. The slider 544 includes a linear driver, for example, a linear motor (not shown). The inkjet head unit 400a is coupled to the slider 544, and is moved in the third direction III by the linear movement of the slider 544 in the third direction III.

  The detector 546 is installed in the gentry 200 and detects the interval between the inkjet head unit 400a and the substrate S. The detector 546 is a vision camera and is used to confirm the position confirmation and the glass printing state. The controller 548 generates a control signal corresponding to the detection signal of the detector 546, transmits the control signal to the linear motor built in the slider 544, and controls the driving of the linear motor. If it is determined from the detection result of the detector 546 that the distance between the inkjet head unit 400a and the substrate S has deviated from the preset reference value, the controller 548 controls the driving of the linear motor to control the inkjet head unit 400a and the substrate S. Adjust the distance between.

  The inkjet head unit 400 discharges liquid crystal droplets onto the substrate S. A plurality of inkjet head units 400 are provided. Although this embodiment has been described as an example in which three inkjet head units 400a, 400b, and 400c are provided, the present invention is not limited to this. The inkjet head units 400 are arranged in a line in the second direction II and are coupled to the gentle 200.

  A plurality of nozzles (not shown) for discharging liquid crystal droplets are provided on the bottom surface of the inkjet head unit 400. As an example, each head is provided with 128 or 256 nozzles. The nozzles are arranged in a line at regular pitch intervals, and each can eject liquid crystal in an amount of μg.

  In the case of a point doting method using a conventional syringe, the liquid crystal discharge pitch is large, the amount of liquid crystal to be discharged is in mg, and the substrate S There is a problem that the liquid crystal is difficult to scatter uniformly. However, according to the present invention, since the liquid crystal is discharged in units of μg through a large number of nozzles having a narrow pitch, the liquid crystal can be more uniformly applied on the substrate S regardless of the viscous flow resistance of the liquid crystal.

  Each inkjet head unit 400 is provided with a number of piezoelectric elements corresponding to the nozzles, and the droplet discharge amount of the nozzles is independently adjusted by controlling the voltage applied to the piezoelectric elements.

  The liquid crystal supply unit 600 includes a liquid crystal supply module and a pressure adjustment module. The liquid crystal supply module and the pressure adjustment module are coupled to the gentry 200. The liquid crystal supply module is supplied with liquid crystal from the liquid crystal supply unit 50 (see FIG. 1), and supplies the liquid crystal to the individual heads 400a, 400b, and 400c. The pressure adjustment module adjusts the pressure of the liquid crystal supply module by providing a positive pressure or a negative pressure to the liquid crystal supply module.

  The head control unit 700 controls the liquid crystal ejection of each head 400a, 400b, 400c. The head control unit 700 is disposed in the liquid crystal discharge unit 10 so as to be adjacent to the heads 400a, 400b, and 400c. In the present embodiment, the head control unit 700 is disposed at one end of the gentle 200, but the position of the head control unit 700 is not limited to this.

  The head control unit 700 is electrically connected to each of the heads 400a, 400b, and 400c, and applies a control signal to each of the heads 400a, 400b, and 400c. Each head 400a, 400b, 400c is provided with a number of piezoelectric elements corresponding to the nozzles, and the head control unit 700 controls the voltage applied to the piezoelectric elements to adjust the droplet discharge amount of the nozzles. it can.

  The liquid crystal discharge amount measuring unit 800 measures the liquid crystal discharge amount of the individual heads 400a, 400b, and 400c. Specifically, the liquid crystal discharge amount measurement unit 800 measures the amount of liquid crystal discharged from all nozzles for each of the individual heads 400a, 400b, and 400c. Through the liquid crystal discharge amount measurement of the individual heads 400a, 400b, and 400c, it can be macroscopically confirmed whether or not the nozzles of the individual heads 400a, 400b, and 400c are abnormal. That is, if the liquid crystal discharge amount of the individual heads 400a, 400b, and 400c is out of the reference value, it can be understood that at least one of the nozzles is abnormal. The liquid crystal discharge amount measuring unit 800 is disposed on one side of the support plate 110 on the base B. The liquid crystal discharge amount measuring unit 800 includes first to third liquid crystal discharge amount measuring units 800a, 800, and 800c.

  The nozzle inspection unit 900 confirms whether there is an abnormality in the individual nozzles provided in the heads 400a, 400b, and 400c through optical inspection. As a result of checking the presence or absence of a macroscopic nozzle abnormality in the liquid crystal discharge amount measurement unit 800, if it is determined that there is an abnormality in an unspecified nozzle, the nozzle inspection unit 900 checks the presence or absence of an abnormality in the individual nozzle while checking the nozzle. Advance 100% inspection for.

  The nozzle inspection unit 900 is disposed on one side of the support plate 110 on the base B. The heads 400a, 400b, and 400c may be moved above the nozzle inspection unit 900 by being moved in the first direction I and the second direction II by the gentle movement unit 300 and the head movement unit 500. The head moving unit 500 can adjust the vertical distance between the heads 400a, 400b, 400c and the nozzle inspection unit 900 by moving the heads 400a, 400b, 400c in the third direction III.

  FIG. 9 is a view showing the nozzle inspection unit 900.

  As shown in FIG. 9, the nozzle inspection unit 900 includes a first nozzle inspection member 920, a first drive member 940, a second nozzle inspection member 960, a second drive member 980, and a recovery member 990. The first nozzle inspection member 920 inspects whether or not the nozzles of the heads 400a, 400b, and 400c can be discharged, that is, the presence or absence of nozzle clogging. The first driving member 940 moves the first nozzle inspection member 920 in the nozzle alignment direction. The second nozzle inspection member 960 inspects whether the nozzles are aligned. The second driving member 980 moves the second nozzle inspection member 960 in the nozzle alignment direction. In FIG. 9, the nozzles are aligned in the second direction II.

  The first nozzle inspection member 920 includes a bus 922, a light emitting unit 924, and a light receiving unit 926. The bus 922 has a cylindrical shape having an open upper portion, and accommodates liquid crystal that is discharged from the nozzles (not shown) of the heads 400a, 400b, and 400c and falls. The light emitting unit 924 is disposed on the upper side of the bus 922, and the light receiving unit 926 is disposed on the other side of the bus 922 so as to face the light emitting unit 924. The light emitting unit 924 emits an optical signal, and the light receiving unit 926 receives the optical signal emitted by the light emitting unit 924. The liquid crystal discharged from the nozzles (not shown) of the heads 400a, 400b, and 400c passes through the region between the light emitting unit 924 and the light receiving unit 926, and the liquid crystal falls due to the difference in the amount of light received by the light receiving unit 926. Permission is sensed. If it is determined that the liquid crystal has fallen normally, it can be seen that the nozzles (not shown) of the heads 400a, 400b, and 400c are not clogged.

  The first driving member 940 includes a guide member 942, a slider 944, and a driver 946. The guide member 942 extends in the second direction II on the upper surface of the base B. The slider 944 includes a driver 946 such as a linear motor. The slider 944 is driven by a driver 946 and linearly moves in the second direction II along the guide member 942. A bus 922 is disposed on the slider 944, and the bus 922 is linearly moved in the second direction II by the linear movement of the slider 944 in the second direction II.

  The second nozzle inspection member 960 includes a frame 962, an illuminator 964, and an imager 966. The frame 962 is disposed adjacent to the bus 922 of the first nozzle inspection member 920 along the second direction II. An illuminator 964 and a photographing device 966 are disposed on the frame 962. The illuminator 964 irradiates the nozzle surfaces of the heads 400a, 400b, and 400c to be inspected, and the imaging unit 966 images the nozzle surfaces of the heads 400a, 400b, and 400c that are irradiated with the light of the illuminator 964, and Get an image. It is determined from the obtained image whether the nozzles are aligned at the correct positions.

  The second driving member 980 includes a slider 984 and a driver 986. The slider 984 includes a driver 986 such as a linear motor. The slider 984 is driven by a driver 986 and linearly moves in the second direction II along the guide member 942. A frame 962 of the second nozzle inspection member 960 is disposed on the slider 984, and the frame 962, the illuminator 964, and the photographing device 966 are linearly moved in the second direction II by the linear movement of the slider 984 in the second direction II. .

  The recovery member 990 recovers the liquid crystal discharged from the bus 922. The recovery member 990 includes a housing 992 and a recovery cylinder 994. The housing 992 is disposed at the lower part of the bus 922 and provides a space for accommodating the collection cylinder 994. The recovery cylinder 994 is separated and inserted by sliding in the space of the housing 992 and recovers the liquid crystal discharged from the bus 922. The recovered liquid crystal can be reused.

  FIG. 10 is a view schematically showing an embodiment of the head cleaning unit 1000.

  As shown in FIGS. 9 and 10, the head cleaning unit 1000 proceeds with a purging process and a suction process. The purging step is a step of ejecting a part of the liquid crystal accommodated in the heads 400a, 400b, 400c at a high pressure. The suction process is a process of sucking and removing liquid crystals remaining on the nozzle surfaces of the heads 400a, 400b, and 400c after the purging process.

  The head cleaning unit 1000 sucks the liquid crystal remaining on the nozzle surfaces of the heads 400 a, 400 b, and 400 c and flows it into the bus 922. The head cleaning unit 1000 and the first nozzle inspection member 920 of the nozzle inspection unit 900 can use one bus 922 in common or individually. The bus 922 can store liquid crystals discharged during the purging process of the heads 400a, 400b, and 400c, and is discharged when checking whether or not the nozzles of the heads 400a, 400b, and 400c can be discharged, that is, whether nozzles are clogged. Liquid crystal can be accommodated.

  The head cleaning unit 1000 includes a suction nozzle 1100, a gas injection unit 1200, and a support member 1300. The support member 1300 supports the suction nozzle 1100 and the gas injection unit 1200.

  The suction nozzle 1100 is arranged along the moving direction of the heads 400a, 400b, 400c. A suction line for sucking the chemical liquid remaining on the nozzle surfaces of the heads 400a, 400b, and 400c is provided at the central portion of the suction nozzle 1100, and at the end portions of the suction lines, the heads 400a, 400b, and 400c are provided. A suction hole 1114 is formed so as to face the nozzle surface. The suction nozzle 1100 is provided separately from the nozzle surfaces of the heads 400a, 400b, and 400c. The suction nozzle 1100 inhales and cleans the liquid crystal remaining on the nozzle surface along the nozzle surfaces of the heads 400a, 400b, and 400c.

  The gas ejection unit 1200 ejects gas toward the liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, and 400c, thereby pushing the remaining liquid crystal to the suction nozzle 1100, and the suction nozzle 1100 easily sucks the remaining chemical. Let it be removed.

  The gas injection unit 1200 includes an injection nozzle 1210, a horizontal driving member 1220, an elevating member 1230, and a pressure adjusting unit 1240.

  The injection nozzle 1210 is arranged in a row with the suction nozzle 1100. The ejection nozzle 1210 is formed to head toward the heads 400a, 400b, and 400c positioned above the ejection nozzle 1210 in order to eject gas toward the liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, and 400c. It has a discharge port 1214.

  At least one injection nozzle 1210 is provided. The spray nozzle 1210 can be variously arranged around the suction nozzle 1100. The ejection nozzle 1210 is arranged so that the ejection port 1214 of the ejection nozzle 1210 faces the heads 400a, 400b, and 400c positioned above the suction nozzle 1100. When a plurality of injection nozzles 1210 are provided, all of the plurality of injection nozzles 1210 may be arranged before and after the suction nozzle 1100 and may be arranged to face each other with the suction nozzle 1100 interposed therebetween.

  The horizontal driving member 1220 moves the injection nozzle 1210 in the horizontal direction in order to adjust the interval between the suction nozzle 1100 and the injection nozzle 1210 or the interval between the plurality of injection nozzles 1210. This is because it corresponds to the amount of liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, and 400c.

  For example, when a large amount of liquid crystal remains on the nozzle surfaces of the heads 400a, 400b, and 400c, the gas is ejected by narrowing the interval between the ejection nozzle 1210 and the suction nozzle 1100, and the nozzles of the heads 400a, 400b, and 400c. When a small amount of liquid crystal remains on the surface, the gap between the spray nozzle 1210 and the suction nozzle 1100 is widened to eject gas.

  The horizontal driving member 1220 includes a guide member 1222, a slider 1224, and a horizontal driver 1226. The guide member 1222 extends in the second direction II on the upper surface of the support member 1300. The slider 1224 includes a horizontal driver 1226 such as a linear motor. The slider 122 is driven by a horizontal driver 1226 and is linearly moved in the second direction 2 along the guide member 1222.

  The horizontal driving member 1220 may be coupled to independently drive the plurality of spray nozzles 1210, or may be coupled to simultaneously drive the plurality of spray nozzles 1210 horizontally.

  The elevating member 1230 linearly moves the injection nozzle 1210 in the vertical direction. The elevating member 1230 adjusts the height of the discharge port 1214 of the injection nozzle 1210. That is, when gas is ejected toward the liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, and 400c, the ejection nozzle 1210 is moved up and down, so that the ejection nozzles 1210 with respect to the nozzle surfaces of the heads 400a, 400b, and 400c. The relative height is changed.

  The elevating member 1230 includes a moving shaft 1232 and an elevating driver 1234. Moving shafts 1232 that are moved up and down by an elevating driver 1234 are fixedly coupled to the outer wall of the injection nozzle 1210. The height of the injection nozzle 1210 is independently adjusted by the elevating member 1230.

  The elevating member 1230 can adjust the height of the end portion of the ejection nozzle 1210 in accordance with changes in the amount and size of the liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, and 400c.

  The pressure adjusting unit 1240 changes the injection pressure of the discharge port 1214 of the injection nozzle 1210. The pressure adjusting means 1240 is respectively coupled to the injection nozzle 1210 and adjusts the injection pressure of the discharge port 1214. The remaining amount of liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, and 400c is measured, the pressure value is set so as to correspond to the change in the remaining amount of liquid crystal, and adjusted so that the ejection nozzles 1210 have different ejection pressures. To do.

  In order to push out relatively large liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, and 400c in the direction of the suction nozzle 1100, a large pressure is required when the distance between the nozzle surfaces of the heads 400a, 400b, and 400c and the ejection nozzle 1210 is large. A value is set, gas is injected, and the fine liquid crystal is pushed out toward the suction nozzle 1100. When the distance between the nozzle surfaces of the heads 400a, 400b, and 400c and the ejection nozzle 1210 is small, a relatively small pressure value is set.

  FIG. 11 is a drawing schematically showing another embodiment of the head cleaning unit 1000.

  FIG. 12 is a view schematically showing a part of the head cleaning unit 1000 of FIG.

  According to one embodiment, as shown in FIGS. 11 and 12, the injection nozzle 1210 includes a first injection nozzle 1210a and a second injection nozzle 1210b. The first injection nozzle 1210a and the second injection nozzle 1210b are adjacent to the suction nozzle 1100 and are arranged in a line in the moving direction of the heads 400a, 400b, 400c. The first injection nozzle 1210a and the second injection nozzle 1210b are coupled to one horizontal driving member 1220 and are driven horizontally at the same time. The elevating member 1230 and the pressure adjusting unit 1240 are individually coupled to the first injection nozzle 1210a and the second injection nozzle 1210b and are independently operated. The liquid crystal remaining on the nozzle surfaces of the heads 400 a, 400 b, and 400 c, the distance between the suction nozzle 1100 and the ejection nozzle 1210, the distance between each ejection nozzle 1210 and the ejection opening 1214 of each ejection nozzle 1210. The pressure is adjusted. Since the height of the discharge port 1214a and the injection pressure of the first injection nozzle 1210a can be adjusted to be different from the height of the discharge port 1214b of the second injection nozzle 1210b and the injection pressure, it is injected by the first injection nozzle 1210a. When the liquid remaining in the heads 400a, 400b, and 400c is not pushed out in the direction of the suction nozzle 1100 by the gas, the second injection nozzle 1210b has a higher discharge port 1214b and a higher injection pressure than the first injection nozzle 1210a. In addition, the fine residual liquid crystal can be pushed out toward the suction nozzle 1100.

  As another embodiment, the first injection nozzle 1210a and the second injection nozzle 1210b are arranged in a line in the moving direction of the heads 400a, 400b, and 400c in front of the suction nozzle 1100, and are individually horizontally aligned. The driving member 1220 may be coupled to be independently driven horizontally. At this time, the elevating member 1230 and the pressure adjusting unit 1240 are individually coupled to the first injection nozzle 1210a and the second injection nozzle 1210b and are independently operated. Further, according to the liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, 400c, the interval between the suction nozzle 1100 and the injection nozzles 1210a, 1210b, and the interval between the discharge ports 1214a, 1214b of the respective injection nozzles 1210a, 1210b, The injection pressures of the discharge ports 1214a and 1214b of the respective injection nozzles 1210a and 1210b can be adjusted. Further, the interval between the first injection nozzle 1210a and the second injection nozzle 1210b is also increased by the first horizontal drive member 1220a of the first injection nozzle 1210a and the second horizontal drive member 1220b of the second injection nozzle 1210b that are independently driven. It can be adjusted according to the liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, 400c.

  FIG. 13 is a drawing schematically showing another embodiment of the head cleaning unit 1000.

  FIG. 14 is an enlarged sectional view showing a part of the head cleaning unit 1000 of FIG.

  According to another embodiment, as illustrated in FIGS. 13 and 14, the injection nozzle 1210 includes a first injection nozzle 1210a and a second injection nozzle 1210b. The first injection nozzle 1210a and the second injection nozzle 1210b are arranged in a row with the suction nozzle 1100 interposed therebetween. Further, the first spray nozzle 1210a and the second spray nozzle 1210b are individually coupled to the horizontal driving members 1220a and 1220b and independently driven horizontally. The elevating members 1230a, 1230b and the pressure adjusting means 1240a, 1240b are individually coupled to the first injection nozzle 1210a and the second injection nozzle 1210b and are operated independently. Depending on the liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, 400c, the distance between the suction nozzle 1100 and the ejection nozzles 1210a, 1210b, the distance between the ejection ports 1214a, 1214b of the respective ejection nozzles 1210a, 1210b, and each ejection The ejection pressure of the discharge ports 1214a and 1214b of the nozzles 1210a and 1210b can be adjusted. In addition, when the liquid ejected by the first ejection nozzle 1210a does not push out all the liquid crystal remaining in the heads 400a, 400b, and 400c in the direction of the suction nozzle 1100, it is opposite to the first ejection nozzle 1210a on the basis of the suction nozzle 1100. Fine residual liquid crystal can be pushed out in the direction of the suction nozzle 1100 by the height of the discharge port 1214b provided higher than the first injection nozzle 1210a and the suction pressure of the second injection nozzle 1210b arranged in the direction.

  FIG. 15 is an enlarged cross-sectional view showing another embodiment for a part of the head cleaning unit 1000.

  The injection nozzle 1210 includes a first injection nozzle 1210a and a second injection nozzle 1210b. The first injection nozzle 1210a and the second injection nozzle 1210b are arranged in a line in the moving direction of the heads 400a, 400b, and 400c behind the suction nozzle 1100. The first injection nozzle 1210a and the second injection nozzle 1210b are individually coupled to the horizontal driving member 1220 and independently driven horizontally, or the first injection nozzle 1210a and the second injection nozzle 1210b are one. Coupled to the horizontal driving member 1220 and simultaneously driven horizontally. The elevating member 1230 and the pressure adjusting means 1240 are individually coupled to the first injection nozzle 1210a and the second injection nozzle 1210b and are operated independently. Depending on the liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, 400c, the spacing between the suction nozzle 1100 and the ejection nozzles 1210a, 1210b, the spacing between the ejection ports 1214a, 1214b of the respective ejection nozzles 1210a, 1210b, and The injection pressures of the discharge ports 1214a and 1214b of the injection nozzles 1210a and 1210b are adjusted.

  Thus, by adjusting the interval between the injection nozzle 1210 and the suction nozzle 1100 or the interval between the injection nozzles 1210a and 1210b and the injection pressure and height of the injection nozzles 1210a and 1210b, the heads 400a, 400b and 400c The fine liquid crystal remaining on the nozzle surfaces of the heads 400a, 400b, and 400c can be quickly and completely removed during the cleaning process.

  In the embodiment, the head cleaning unit 1000 includes a plurality of injection nozzles 1210 including a first injection nozzle 1210a and a second injection nozzle 1210b. However, the number of injection nozzles 1210 may be one.

  In the above-described embodiment, the head cleaning unit 1000 is provided so that the nozzle surfaces of the heads 400a, 400b, and 400c are cleaned while the heads 400a, 400b, and 400c move, but the head cleaning unit 1000 side moves. However, you may provide so that the nozzle surface of head 400a, 400b, 400c may be wash | cleaned.

  In the above-described embodiment, the horizontal drive member 1220 is provided so as to include the guide member 1222, the slider 1224, and the horizontal driver 1226. However, other devices that can be driven horizontally such as a rack and a pinion gear or a chain gear are provided. A horizontal driving member 1220 may be provided by the driving means.

  In the embodiment, the head cleaning unit 1000 is provided so as to clean the nozzle surfaces of the heads 400a, 400b, and 400c. However, the present invention is not limited to this, and any cleaning unit that cleans the nozzles from which the processing liquid is discharged may be used. A similar configuration applies.

  The above description is merely illustrative of the technical idea of the present invention, and various modifications and variations can be made by those skilled in the art without departing from the essential characteristics of the present invention. In other words, the disclosed embodiments do not limit the technical idea of the present invention, but are for explanation, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention is construed by the claims, and all technical ideas within the equivalent scope are included in the scope of the right of the present invention.

B base 100 substrate support unit 200 gentry 300 gentry moving unit 400 head 500 head moving unit 600 liquid crystal supply unit 700 head control unit 800 liquid crystal discharge amount measuring unit 900 nozzle inspection unit 1000 head cleaning unit 1100 suction nozzle 1200 gas jet unit 1300 support member 1210 Injection nozzle 1220 Horizontal drive member 1230 Lifting member 1240 Pressure adjusting means

Claims (14)

In an inkjet processing liquid discharge device,
Base and
A substrate support unit installed on the base and on which the substrate is placed;
Gentry, which is disposed on the upper part of the movement path of the substrate support unit, and is coupled with a head for discharging a chemical solution in an inkjet manner on the substrate;
A head cleaning unit installed on the base and cleaning the nozzle surface of the head,
The head cleaning unit has a suction nozzle having a suction hole formed toward the head;
And a gas jetting unit provided with one or a plurality of jetting nozzles each having a jetting port formed so as to face a head positioned above the suction nozzle. The processing liquid discharge apparatus according to claim 1, further comprising a horizontal drive member that moves the spray nozzle in a horizontal direction. The horizontal drive member is
A guide member coupled to the upper surface of the base;
A slider that moves linearly along the guide member;
The processing liquid discharge apparatus according to claim 2, further comprising a horizontal driver that drives the slider. A plurality of the injection nozzles are provided,
The processing liquid discharge apparatus according to claim 2, wherein the horizontal driving member is coupled to each of the ejection nozzles and independently driven. A plurality of the injection nozzles are provided,
The processing liquid discharge apparatus according to claim 1, wherein heights of terminal ends of the discharge ports of the spray nozzles are different from each other. A plurality of the injection nozzles are provided,
5. The lifting device according to claim 1, further comprising a lifting member coupled to each of the spray nozzles to independently adjust a height of a terminal end of the discharge nozzle of the spray nozzle. The processing liquid discharge apparatus as described. A plurality of the injection nozzles are provided,
7. The pressure control device according to claim 1, further comprising pressure adjusting means coupled to each of the spray nozzles in order to independently control a spray pressure of the discharge port of the spray nozzle. Treatment liquid discharge device. In the cleaning unit that cleans the nozzle of the processing liquid,
A suction nozzle having a suction hole formed to face upward;
A gas injection unit provided with at least one injection nozzle having an ejection port formed to face a head positioned above the suction nozzle,
The spray nozzle is
Comprising a first injection nozzle and a second injection nozzle;
The first injection nozzle and the second injection nozzle are arranged in a row with the suction nozzle,
A cleaning unit, wherein a height of a terminal end of the discharge port of the first spray nozzle is different from a height of a terminal end of the discharge port of the second spray nozzle. The cleaning unit according to claim 8, further comprising a horizontal driving member that moves the first injection nozzle and the second injection nozzle in a horizontal direction. A first horizontal driving member for moving the first injection nozzle in the horizontal direction; and a second horizontal driving member for moving the second injection nozzle in the horizontal direction, wherein the first horizontal driving member and the second horizontal driving are included. The cleaning unit according to claim 9, wherein the members are independently controlled. The first elevating member for adjusting the height of the discharge port of the first injection nozzle and the second elevating member for adjusting the height of the discharge port of the second injection nozzle are further included, the first elevating member and the second The cleaning unit according to any one of claims 8 to 10, wherein the elevating member is controlled independently. And further comprising a first pressure adjusting means for adjusting an injection pressure of the discharge port of the first injection nozzle and a second pressure adjusting means for adjusting an injection pressure of the discharge port of the second injection nozzle, The cleaning unit according to any one of claims 8 to 10, wherein the second pressure adjusting means is controlled independently. In the cleaning method of the processing liquid discharge device,
Among the plurality of spray nozzles, a spray nozzle that is close to the suction nozzle sprays gas toward the liquid crystal remaining in the nozzle of the processing liquid and pushes the liquid crystal in the direction of the suction nozzle. A cleaning method comprising: injecting a gas again toward the liquid crystal in which an injection nozzle that is far from the suction nozzle remains to push the liquid crystal in the direction of the suction nozzle and sucking the liquid into the suction nozzle for cleaning. Among the plurality of spray nozzles, the height of the discharge nozzle of the spray nozzle that is close to the suction nozzle is lower than the height of the discharge nozzle of the spray nozzle that is far from the suction nozzle among the plurality of spray nozzles. The cleaning method according to claim 13.

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