KR101162390B1 - 유체 유량 제어 시스템 및 방법 - Google Patents

유체 유량 제어 시스템 및 방법 Download PDF

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Publication number
KR101162390B1
KR101162390B1 KR1020067015651A KR20067015651A KR101162390B1 KR 101162390 B1 KR101162390 B1 KR 101162390B1 KR 1020067015651 A KR1020067015651 A KR 1020067015651A KR 20067015651 A KR20067015651 A KR 20067015651A KR 101162390 B1 KR101162390 B1 KR 101162390B1
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KR
South Korea
Prior art keywords
fluid
valve
control signal
rate
closing
Prior art date
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Expired - Lifetime
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KR1020067015651A
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English (en)
Korean (ko)
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KR20060127122A (ko
Inventor
마크 라베르디에르
로버트 에프 맥룰린
Original Assignee
엔테그리스, 아이엔씨.
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Application filed by 엔테그리스, 아이엔씨. filed Critical 엔테그리스, 아이엔씨.
Publication of KR20060127122A publication Critical patent/KR20060127122A/ko
Application granted granted Critical
Publication of KR101162390B1 publication Critical patent/KR101162390B1/ko
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0971—Speed responsive valve control
    • Y10T137/0989—Acceleration responsive valve control

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Coating Apparatus (AREA)
KR1020067015651A 2004-02-13 2005-02-07 유체 유량 제어 시스템 및 방법 Expired - Lifetime KR101162390B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/779,009 US7107128B2 (en) 2004-02-13 2004-02-13 System for controlling fluid flow
US10/779,009 2004-02-13
PCT/US2005/003709 WO2005079235A2 (en) 2004-02-13 2005-02-07 System and method of controlling fluid flow

Publications (2)

Publication Number Publication Date
KR20060127122A KR20060127122A (ko) 2006-12-11
KR101162390B1 true KR101162390B1 (ko) 2012-07-04

Family

ID=34838286

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067015651A Expired - Lifetime KR101162390B1 (ko) 2004-02-13 2005-02-07 유체 유량 제어 시스템 및 방법

Country Status (8)

Country Link
US (3) US7107128B2 (enExample)
EP (1) EP1725921A2 (enExample)
JP (2) JP4729504B2 (enExample)
KR (1) KR101162390B1 (enExample)
CN (1) CN101160585A (enExample)
SG (1) SG135178A1 (enExample)
TW (1) TWI399628B (enExample)
WO (1) WO2005079235A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10699918B2 (en) 2016-04-29 2020-06-30 Semes Co., Ltd. Chemical supply unit and apparatus for treating a substrate

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FR2837945B1 (fr) * 2002-03-28 2005-04-08 Celec Conception Electronique Gamme de produits configurables a l'installation, outil de configuration et procede de configuration de tels produits
US7107128B2 (en) * 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow
US20080221822A1 (en) * 2004-08-13 2008-09-11 Marc Laverdiere System and Method for Calibration of a Flow Device
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
CN101356488B (zh) * 2005-12-02 2012-05-16 恩特格里公司 与泵控制器对接的i/o系统、方法和设备
US7517469B2 (en) * 2006-04-28 2009-04-14 Sokudo Co., Ltd. Method and system to measure flow velocity and volume
US8265794B2 (en) * 2007-10-01 2012-09-11 Westlock Controls Corporation Knowledge based valve control method
WO2009064864A1 (en) * 2007-11-13 2009-05-22 Rockwell Automation Technologies, Inc. Industrial controller using shared memory multicore architecture
DE102009032547A1 (de) * 2009-07-10 2011-01-13 Krones Ag Verfahren zur automatisierten Steuerung eines Rohrleitungsnetzes
CN103026478B (zh) * 2010-06-18 2015-08-19 恩特格里斯公司 用于毛细管辅助的流动控制的终点确定
DE102010039296B4 (de) * 2010-08-13 2020-06-10 Robert Bosch Gmbh Vorrichtung und Verfahren zur Erzeugung eines Steuersignals
WO2012109320A1 (en) * 2011-02-08 2012-08-16 The University Of Utah Research Foundation System and method for dispensing a minimum quantity of cutting fluid
US9506785B2 (en) 2013-03-15 2016-11-29 Rain Bird Corporation Remote flow rate measuring
WO2016040514A1 (en) 2014-09-09 2016-03-17 Proteus Industries Inc. Systems and methods for coolant drawback
JP6415418B2 (ja) * 2015-11-27 2018-10-31 株式会社アドヴィックス 流体制御弁装置
US10634538B2 (en) 2016-07-13 2020-04-28 Rain Bird Corporation Flow sensor
US10719089B2 (en) * 2017-05-18 2020-07-21 Fisher Controls International Llc Apparatus and methods to characterize fluid control valves
US10473494B2 (en) 2017-10-24 2019-11-12 Rain Bird Corporation Flow sensor
SG11202100619PA (en) 2018-08-29 2021-02-25 Mks Instr Ozonated water delivery system and method of use
US11662242B2 (en) 2018-12-31 2023-05-30 Rain Bird Corporation Flow sensor gauge
US11415230B2 (en) * 2020-03-31 2022-08-16 Applied Material, Inc. Slit valve pneumatic control
KR20220121306A (ko) * 2021-02-24 2022-09-01 삼성디스플레이 주식회사 커버 윈도우, 커버 윈도우의 제조방법, 및 표시 장치
US12443208B2 (en) 2023-02-08 2025-10-14 Rain Bird Corporation Control zone devices, systems and methods

Family Cites Families (11)

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JPH10274016A (ja) * 1997-03-28 1998-10-13 Fuji Heavy Ind Ltd 電磁式動弁制御装置
JPH1133471A (ja) * 1997-07-23 1999-02-09 Tokyo Electron Ltd 塗布装置
JP3997535B2 (ja) * 1998-08-31 2007-10-24 Ｓｍｃ株式会社 サックバックバルブ
JP3493322B2 (ja) * 1998-09-25 2004-02-03 Ｓｍｃ株式会社 液だれ防止方法およびシステム
ID29539A (id) * 1999-01-20 2001-09-06 Mykrolis Corp Pengontrol aliran
US20010035512A1 (en) * 2000-04-07 2001-11-01 Messer Jeffrey M. Environmentally friendly electro-pneumatic positioner
AU2002254405A1 (en) * 2001-03-29 2002-10-15 Applied Precision, Llc Precision controlled fast valve
TW483047B (en) * 2001-04-20 2002-04-11 Winbond Electronics Corp Liquid spraying method capable of preventing residual liquid drops
AU2003261152A1 (en) * 2002-07-11 2004-02-02 Sturman Industries, Inc. Hydraulic valve actuation methods and apparatus
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
US7107128B2 (en) * 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10699918B2 (en) 2016-04-29 2020-06-30 Semes Co., Ltd. Chemical supply unit and apparatus for treating a substrate

Also Published As

Publication number Publication date
JP2011071564A (ja) 2011-04-07
WO2005079235A2 (en) 2005-09-01
KR20060127122A (ko) 2006-12-11
JP5314059B2 (ja) 2013-10-16
US20080071425A1 (en) 2008-03-20
SG135178A1 (en) 2007-09-28
US20050182525A1 (en) 2005-08-18
US7107128B2 (en) 2006-09-12
CN101160585A (zh) 2008-04-09
EP1725921A2 (en) 2006-11-29
US7317971B2 (en) 2008-01-08
JP2007525837A (ja) 2007-09-06
WO2005079235A3 (en) 2007-04-05
TW200540591A (en) 2005-12-16
TWI399628B (zh) 2013-06-21
US20060276935A1 (en) 2006-12-07
JP4729504B2 (ja) 2011-07-20
US8082066B2 (en) 2011-12-20

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