KR101157361B1 - 방사선 두께 측정계 - Google Patents

방사선 두께 측정계 Download PDF

Info

Publication number
KR101157361B1
KR101157361B1 KR1020100089012A KR20100089012A KR101157361B1 KR 101157361 B1 KR101157361 B1 KR 101157361B1 KR 1020100089012 A KR1020100089012 A KR 1020100089012A KR 20100089012 A KR20100089012 A KR 20100089012A KR 101157361 B1 KR101157361 B1 KR 101157361B1
Authority
KR
South Korea
Prior art keywords
detector
radiation
thickness
sub
measured object
Prior art date
Application number
KR1020100089012A
Other languages
English (en)
Korean (ko)
Other versions
KR20110028245A (ko
Inventor
사토시 오바라
Original Assignee
가부시끼가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시끼가이샤 도시바 filed Critical 가부시끼가이샤 도시바
Publication of KR20110028245A publication Critical patent/KR20110028245A/ko
Application granted granted Critical
Publication of KR101157361B1 publication Critical patent/KR101157361B1/ko

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
KR1020100089012A 2009-09-11 2010-09-10 방사선 두께 측정계 KR101157361B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009210545A JP2011059000A (ja) 2009-09-11 2009-09-11 放射線厚さ計
JPJP-P-2009-210545 2009-09-11

Publications (2)

Publication Number Publication Date
KR20110028245A KR20110028245A (ko) 2011-03-17
KR101157361B1 true KR101157361B1 (ko) 2012-06-15

Family

ID=43705870

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100089012A KR101157361B1 (ko) 2009-09-11 2010-09-10 방사선 두께 측정계

Country Status (5)

Country Link
JP (1) JP2011059000A (zh)
KR (1) KR101157361B1 (zh)
CN (1) CN102022987B (zh)
DE (1) DE102010044900A1 (zh)
TW (1) TWI439664B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5847674B2 (ja) * 2012-09-10 2016-01-27 株式会社東芝 Ｘ線厚さ計
TWI588446B (zh) * 2013-03-14 2017-06-21 Tokyo Electron Ltd X-ray non-destructive inspection device
DE102013017289B4 (de) 2013-10-17 2016-09-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Durchführen einer Dickenmessung an bandförmigen Materialien und an Stückgütern
DE102013017288B4 (de) 2013-10-17 2019-05-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Justieren eines Paars mittels elektromagnetischer Strahlung messender Messköpfe
CN105032953B (zh) * 2015-08-19 2017-04-26 山西太钢不锈钢股份有限公司 γ射线测厚仪样板快速标定方法
CN107702667B (zh) * 2017-10-26 2019-12-17 武钢新日铁（武汉）镀锡板有限公司 一种新型x射线测厚仪材质补偿系统的建立方法
JP7298577B2 (ja) * 2020-10-01 2023-06-27 Ｊｆｅスチール株式会社 板厚算出方法、板厚制御方法、板材の製造方法、板厚算出装置および板厚制御装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR890014990A (ko) * 1988-03-15 1989-10-28 시끼모리야 광학식 측정장치
KR890016362A (ko) * 1988-04-26 1989-11-28 시끼 모리야 막두께 측정방법
KR900003749B1 (ko) * 1986-04-29 1990-05-31 미쓰비시 전기 주식회사 막(膜) 두께의 측정방법 및 장치
KR19990037641A (ko) * 1995-08-16 1999-05-25 베. 마우스; 베. 디트리히 자동차 배기 가스의 탄화 수소를 환원시키기 위한 촉매 변환 장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN87104380B (zh) * 1987-06-25 1988-10-05 清华大学 一种射线测厚方法和射线数字厚度计
CN87207427U (zh) * 1987-07-07 1988-04-20 厦门大学 薄膜厚度测量装置
JP3940327B2 (ja) * 2002-07-03 2007-07-04 新日本製鐵株式会社 金属板の厚さ計測方法
JP5013730B2 (ja) 2006-03-29 2012-08-29 Ｊｆｅスチール株式会社 厚さ計測方法及び厚さ計測装置
JP4983366B2 (ja) * 2007-04-17 2012-07-25 横河電機株式会社 シート物理量測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR900003749B1 (ko) * 1986-04-29 1990-05-31 미쓰비시 전기 주식회사 막(膜) 두께의 측정방법 및 장치
KR890014990A (ko) * 1988-03-15 1989-10-28 시끼모리야 광학식 측정장치
KR890016362A (ko) * 1988-04-26 1989-11-28 시끼 모리야 막두께 측정방법
KR19990037641A (ko) * 1995-08-16 1999-05-25 베. 마우스; 베. 디트리히 자동차 배기 가스의 탄화 수소를 환원시키기 위한 촉매 변환 장치

Also Published As

Publication number Publication date
JP2011059000A (ja) 2011-03-24
CN102022987A (zh) 2011-04-20
DE102010044900A1 (de) 2011-04-07
CN102022987B (zh) 2012-09-05
KR20110028245A (ko) 2011-03-17
TWI439664B (zh) 2014-06-01
TW201139983A (en) 2011-11-16

Similar Documents

Publication Publication Date Title
KR101157361B1 (ko) 방사선 두께 측정계
EP1039262B1 (en) Sheet thickness and swell measurement method and apparatus therefor
CA2672679C (en) Method and apparatus for thickness measurement
US10054555B2 (en) X-ray transmission inspection apparatus and inspection method using the same
WO2013099870A1 (ja) 厚さ計測システム及び厚さ計測方法
AU2017209372B2 (en) Inspection apparatus for conveyor belt
JP5030699B2 (ja) 厚さ計測装置の調整方法及びその装置
US10598616B2 (en) X-ray reflectometer
JP6492389B1 (ja) Ｘ線回折測定装置
CN109483048A (zh) 用于在激光加工工件时求取间距修正值的方法和相应的激光加工机
JP2020094874A (ja) Ｘ線回折測定装置
KR100923550B1 (ko) 강판의 에지부 트래킹을 통한 두께 및 폭측정장치
JPH01314907A (ja) 厚み測定方法に於けるゼロ点補正方法及びその装置
EP2418457A1 (en) System and method with automatic adjustment function for measuring the thickness of substrates
JP2013042114A (ja) 描画装置、及び、物品の製造方法
KR20190075564A (ko) 에지부 두께 측정 장치 및 방법
JP5478426B2 (ja) 計測または検査装置およびそれを用いた計測または検査方法
KR102142780B1 (ko) 측정 시스템 및 측정 방법
JP2006112956A (ja) Ｘ線透過法を用いたシートの測定装置および測定方法
KR930011245B1 (ko) 음극선관의 패널과 새도우마스크의 고정방법 및 장치
CN117125573A (zh) 一种电梯井道部件安装校准装置及方法
JP2008003060A (ja) 厚さプロファイル測定装置、及び厚さプロファイルの測定方法
JPH02259516A (ja) 面の真直度測定装置
JPH04116409A (ja) 自動板厚測定装置
JPH04116410A (ja) 自動板厚測定装置

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20150430

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20160509

Year of fee payment: 5

LAPS Lapse due to unpaid annual fee