KR101112011B1 - 이송 장치 - Google Patents

이송 장치 Download PDF

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Publication number
KR101112011B1
KR101112011B1 KR1020070094306A KR20070094306A KR101112011B1 KR 101112011 B1 KR101112011 B1 KR 101112011B1 KR 1020070094306 A KR1020070094306 A KR 1020070094306A KR 20070094306 A KR20070094306 A KR 20070094306A KR 101112011 B1 KR101112011 B1 KR 101112011B1
Authority
KR
South Korea
Prior art keywords
arm
transfer
conveying
workpiece
conveyance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020070094306A
Other languages
English (en)
Korean (ko)
Other versions
KR20080027144A (ko
Inventor
카즈히로 이시카와
Original Assignee
무라다기카이가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 무라다기카이가부시끼가이샤 filed Critical 무라다기카이가부시끼가이샤
Publication of KR20080027144A publication Critical patent/KR20080027144A/ko
Application granted granted Critical
Publication of KR101112011B1 publication Critical patent/KR101112011B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles

Landscapes

  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1020070094306A 2006-09-21 2007-09-17 이송 장치 Expired - Fee Related KR101112011B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006255208A JP4363432B2 (ja) 2006-09-21 2006-09-21 移載装置
JPJP-P-2006-00255208 2006-09-21

Publications (2)

Publication Number Publication Date
KR20080027144A KR20080027144A (ko) 2008-03-26
KR101112011B1 true KR101112011B1 (ko) 2012-02-24

Family

ID=39248948

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070094306A Expired - Fee Related KR101112011B1 (ko) 2006-09-21 2007-09-17 이송 장치

Country Status (4)

Country Link
JP (1) JP4363432B2 (cg-RX-API-DMAC7.html)
KR (1) KR101112011B1 (cg-RX-API-DMAC7.html)
CN (1) CN101148225B (cg-RX-API-DMAC7.html)
TW (1) TW200819373A (cg-RX-API-DMAC7.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5234328B2 (ja) * 2008-04-11 2013-07-10 株式会社ダイフク 物品収納設備
JP5618190B2 (ja) * 2010-08-05 2014-11-05 村田機械株式会社 供給搬出システム
US9701471B2 (en) * 2012-08-31 2017-07-11 Murata Machinery, Ltd. Transfer device
CN102795442A (zh) * 2012-09-06 2012-11-28 深圳市华星光电技术有限公司 一种自动化物料搬运系统
CN104986558B (zh) * 2015-07-10 2017-03-29 东莞市科隆威自动化设备有限公司 双线印刷机中间交叉移载产品的交叉移载装置
JP6192131B2 (ja) * 2015-12-10 2017-09-06 アイダエンジニアリング株式会社 プレス機械のワーク搬送装置
JP2018062407A (ja) * 2016-10-13 2018-04-19 株式会社ダイフク 移載装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06156632A (ja) * 1992-11-27 1994-06-03 Murata Mach Ltd クレーンの昇降台
JPH11216691A (ja) 1998-02-03 1999-08-10 Hitachi Ltd フロッグレッグ形ロボット並びに処理装置および処理方法
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
JP2003054705A (ja) 2001-08-07 2003-02-26 Nippon Yusoki Co Ltd 自動倉庫システム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100479494B1 (ko) * 2002-09-18 2005-03-30 삼성전자주식회사 기판 반송 로봇

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06156632A (ja) * 1992-11-27 1994-06-03 Murata Mach Ltd クレーンの昇降台
JPH11216691A (ja) 1998-02-03 1999-08-10 Hitachi Ltd フロッグレッグ形ロボット並びに処理装置および処理方法
JP2000042952A (ja) * 1998-07-27 2000-02-15 Hitachi Ltd 搬送装置及び搬送方法
JP2003054705A (ja) 2001-08-07 2003-02-26 Nippon Yusoki Co Ltd 自動倉庫システム

Also Published As

Publication number Publication date
JP2008074549A (ja) 2008-04-03
CN101148225A (zh) 2008-03-26
TWI374108B (cg-RX-API-DMAC7.html) 2012-10-11
CN101148225B (zh) 2012-12-12
JP4363432B2 (ja) 2009-11-11
TW200819373A (en) 2008-05-01
KR20080027144A (ko) 2008-03-26

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