KR101060712B1 - Substrate inspection device and process equipment having same - Google Patents

Abstract

The present invention provides a substrate inspection apparatus. The apparatus for inspecting a substrate may include a substrate transfer part configured to transfer a substrate along a transfer path, and an edge of the substrate to be transported to inspect for cracks and particles at the edge of the substrate and to detect cracks and particles on the substrate. Can be distinguished. In the case where the crack or particles are present, the inspection unit for carrying out the substrate to another transfer path. In addition, the present invention also provides a process facility having the above-mentioned substrate inspection apparatus, whereby the quality inspection of the substrate can be performed and the input or the discharge into the process chamber or the following series of processes can be determined according to the result of the quality inspection.

Description

Substrate inspection apparatus and process equipment having the same {WAFER TESTING APPARATUS AND PROCESSING EQUIPMENT HAVING THE SAME}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a process facility, wherein a substrate inspection apparatus capable of performing a quality inspection of a substrate put into a series of processes and determining the introduction or removal of the substrate into a process chamber or the next series of processes according to a result of the quality inspection; It relates to a process facility having this.

Typically, a thin film transistor liquid crystal display device is largely composed of a lower glass substrate on which a thin film transistor is formed, an upper glass substrate on which a color filter is formed, and a liquid crystal injected between the lower glass substrate and the upper glass substrate.

In the glass substrate for forming the thin film transistor and the color filter, breakage occurs at the edge of the substrate when a series of processes are performed. As a result, the glass substrate having the broken edge or the like is being transferred to the next process or is transferred to the process chamber. If it is introduced, there is a problem of breaking in a chamber or in a predetermined space for the next process.

In the related art, there is a problem in that a recovery time for recovering this is longer than a predetermined time.

In addition, conventionally, vision inspection was performed to inspect the state of the substrate.

In the case of observing a breakage, for example, a crack, in the edge of the glass substrate using only such a vision inspection, an overdetection that detects a foreign substance such as particles on the substrate that may be removed by cleaning in the next cleaning process is performed. There is a problem that occurs.

In addition, when glass fragments or particles are generated on the surface of the glass substrate from the outside or inside to be seated on the upper surface of the substrate, the glass fragments may damage the equipment used in subsequent processes.

Therefore, conventionally, there is a problem in that the operation time of the equipment is increased for the same reason as described above, and the cost for the maintenance of the process equipment is increased.

Accordingly, conventionally, before the glass substrate is put into a process chamber and a process using plasma such as deposition, etching, or sputtering is performed, the overall quality inspection of the glass substrate is performed.

However, inspection of conventional glass substrate surfaces is carried out using a vision method. This is a problem that can not accurately distinguish between the crack and the particle, there is a problem that you need to use a number of non-dedicated camera as a method of inspecting the metal, glass pieces on the surface of the glass substrate.

Therefore, in the related art, since the crack and the particle on the substrate are not distinguished, there is a problem in that accurate observation is not made, such as detecting a particle that can be sufficiently cleaned by cleaning.

Accordingly, in recent years, before or after entering a process chamber in which a series of processes are performed, or before entering the next process, cracks and particles are present on the upper surface of the glass substrate and the edges of the glass substrate, and the presence of cracks and particles can be distinguished. There is a demand for developing technologies that can be accessed from various angles.

The present invention has been made to solve the above problems, an object of the present invention is to examine the quality (with or without cracks and particles) of the substrate that is put into a series of processes according to the quality inspection results of the substrate process chamber or the next process It is to provide a substrate inspection apparatus and process equipment having the same that can determine the input or export to.

Another object of the present invention is to place the improved integrator near the edge of the substrate, irradiate a laser having straightness to the edge of the substrate, and detect the light quantity value of the laser beam that has passed through the substrate through the integrator. The present invention provides a substrate inspection apparatus capable of easily inspecting a state and a process facility having the same.

It is still another object of the present invention to provide a substrate inspection apparatus capable of inspecting a quality state of a substrate or an upper surface of the substrate by irradiating a line beam toward the substrate or the upper surface of the substrate along the longitudinal direction of the substrate, and a process facility having the same. Is in.

In one aspect, the substrate inspection apparatus of the present invention is a substrate transfer unit for transferring the substrate along the transfer path, and disposed near the edge of the substrate to be transferred, the presence and absence of cracks and particles at the edge of the substrate and It includes a checker for distinguishing particles.

The inspection unit includes a first inspection unit and a second inspection unit, wherein the first inspection unit is disposed at an edge bottom of the substrate to irradiate a laser, and a first laser generator disposed on an edge of the substrate, the substrate being disposed on the substrate. A first inspection module which detects and discriminates cracks and particles at the edge of the substrate by detecting a light quantity value of the laser emitted to the corresponding side by injecting a laser beam passing through the edge of the substrate; and an imaging module for imaging the edge of the substrate. And a second laser generator disposed on the side of the substrate to be transferred and irradiating a laser along a longitudinal direction of the substrate, and connected to the second laser generator to position the irradiation position of the laser at a predetermined position. And a second inspection module for detecting a laser beam scattered on the substrate, and a lifting cylinder configured to lift and lower the pressure. It is preferably a.

Preferably, the first laser generator is disposed at an edge bottom of the substrate, and the first inspection module is disposed above the edge of the substrate so as to be positioned opposite the first laser generator.

Preferably, the first laser generator is disposed above the edge of the substrate, and the first inspection module is disposed at the bottom edge of the substrate such that the first inspection module is positioned opposite the first laser generator.

In addition, a convex spherical portion is formed on the edge side surface of the substrate, the first laser generator for irradiating a laser to the spherical portion, and the amount of light emitted from the laser beam passing through the spherical portion of the substrate to the corresponding side. The first inspection module which detects a value and determines and distinguishes cracks and particles from the spherical portion of the substrate is configured as a pair, and the pair of first laser generators are separated from each other by a predetermined distance and an edge of the substrate. Are arranged to cross at a boundary, and the pair of first inspection modules are spaced apart from each other by a predetermined distance to be disposed at a position corresponding to the pair of first laser generators, and arranged to cross at an edge of the substrate. Do.

The inspection unit includes a transfer device, wherein the transfer device is electrically connected to the first inspection module and the second inspection module so that there is a crack at an edge of the substrate or a laser is detected by the second inspection module. It is desirable to ring or unload an alarm to take the substrate out to another transfer path.

The first inspection module may include a light incidence part and a light output part provided on a side corresponding to the light incidence part, and positioned between the light incidence part and the light incidence part and incident and scattered from the light incidence part. A body having a diffused light emitting part to which light is diffused out and which forms an internal space, a first light detecting unit which is provided in the diffused light emitting part and detects a light quantity value of the scattered light that is diffused out, and the light emitting part A second light detector configured to detect a light quantity value of light incident from the light incident part and exited to the light emitter, and electrically connected to the first light detector and the second light detector to the detected light amount value; An integrated body having a monitoring module for determining and distinguishing the presence of cracks and particles, wherein the imaging module is disposed on one side of the substrate to the substrate It is preferable to have a light source for providing illumination, and a camera disposed on the other side with respect to the substrate to image the outer surface of the substrate.

The first inspection module may be an optical system including a lens disposed near the substrate and focusing the laser, and a photodiode disposed near the lens and detecting a light quantity value of the laser.

In addition, the body preferably forms a cylindrical shape.

In addition, the second inspection module is disposed on the substrate, it is preferably composed of a plurality of photo diodes.

In addition, the second inspection module has a light incidence portion and a light output portion provided on a side corresponding to the light incidence portion, positioned between the light incidence portion and the light output portion, and incident and scattered from the light incidence portion. A body having a diffused light emitting part to which light is diffused out and which forms an internal space, a first light detecting unit which is provided in the diffused light emitting part and detects a light quantity value of the scattered light that is diffused out, and the light emitting part A second light detector configured to detect a light quantity value of light incident from the light incident part and exited to the light emitter, and electrically connected to the first light detector and the second light detector to the detected light amount value; It is preferable that it is an integral body provided with the monitoring module which distinguishes and distinguishes the presence of the said crack and particle.

The inner space may include a first space having a predetermined length and parallel to each other, and a second space provided on both sides of the first space to form a hemispherical shape and communicate with the first space. The second space may be in communication with the light incident part and the light exiting part.

In addition, the light incident portion and the light exit portion is formed of a hole having a predetermined length, are formed of the same length with each other, form a linear along the longitudinal direction of the body, the diffuse light emitting portion is composed of a plurality of through holes and the body It is preferably formed to form a non-linear along the longitudinal direction of.

The body may include a detachable body fitted into the internal space, wherein the detachable body has a predetermined length and is parallel to each other, and is provided on both sides of the third space to form a hemispherical shape and the third space. It is preferably made of a fourth space in communication with each other, the third space and the fourth space is provided with an auxiliary light incident portion and the auxiliary light emitting portion so as to communicate with the light incident portion and the light output portion.

In addition, the first light detector and the second light detector are preferably composed of photodiodes.

In addition, the monitoring module is installed in the body and electrically connected to the first light detector and the second light detector, whether the light quantity value of the detected light is included in the range of the predetermined reference light quantity value, A controller configured to determine whether or not the light quantity value of the scattered light is within a predetermined reference scattered light quantity value and determine whether cracks and particles are present, and to be electrically connected to the controller while being installed in the body. In addition to displaying the light quantity value of the detected light, the light quantity value of the scattered light, and the preset reference light quantity value range and the reference scattered light quantity value range, the light quantity value of the detected light is included in the preset reference light quantity value range. And whether or not the light quantity value of the scattered light is within a range of a predetermined reference scattered light quantity value. And a display unit, wherein the reference light quantity value range includes a first reference light quantity value range for distinguishing the crack and a second reference light quantity value range for distinguishing the particle, and the crack is distinguished in the reference scattered light quantity value range. It is preferable that the first reference scattered light quantity value range and the second reference scattered light quantity value range for distinguishing the particles.

In another aspect, the process equipment having the substrate inspection apparatus of the present invention is a chamber for forming a transfer path of the substrate therein, and a substrate transfer unit disposed in the vicinity of the chamber to transfer the substrate along the transfer path to the chamber; And an inspection unit disposed near the edge of the substrate to be transported and inspecting the presence of cracks and particles at the edge of the substrate, and separating the cracks and particles to carry out the substrate to another transport path.

The inspection unit includes a first inspection unit and a second inspection unit, wherein the first inspection unit is disposed at an edge bottom of the substrate and irradiates a laser with a first laser generator, and is disposed on an edge of the substrate and disposed on the substrate. A first inspection module which detects and discriminates cracks and particles at the edge of the substrate by detecting a light quantity value of the laser emitted to the corresponding side by injecting a laser beam passing through the edge of the substrate; And a second laser generator disposed on a side of the substrate to be transferred, the second inspection unit being irradiated along the longitudinal direction of the substrate, and connected to the second laser generator to set a position at which the laser is irradiated. A second inspection module for detecting a lift cylinder which lifts and lowers a position, and a laser disposed on the substrate and scattered from the substrate; It is preferably a.

The first laser generator may be disposed at an edge bottom of the substrate, and the first inspection module may be disposed above the edge of the substrate so as to be positioned opposite to the first laser generator.

Preferably, the first laser generator is disposed above the edge of the substrate, and the first inspection module is disposed at the bottom edge of the substrate such that the first inspection module is positioned opposite the first laser generator.

In addition, a convex spherical portion is formed on the edge side surface of the substrate, the first laser generator for irradiating a laser to the spherical portion, and the amount of light emitted from the laser beam passing through the spherical portion of the substrate to the corresponding side. The first inspection module which detects a value and determines and distinguishes cracks and particles from the spherical portion of the substrate is configured as a pair, and the pair of first laser generators are separated from each other by a predetermined distance and an edge of the substrate. Are arranged to cross at a boundary, and the pair of first inspection modules are spaced apart from each other by a predetermined distance to be disposed at a position corresponding to the pair of first laser generators, and arranged to cross at an edge of the substrate. Do.

The inspection unit includes a transfer device, wherein the transfer device is electrically connected to the first inspection module and the second inspection module so that there is a crack at an edge of the substrate or a laser is detected by the second inspection module. It is preferable to carry out the said board | substrate to another conveyance path | route.

The first inspection module may include a light incidence part and a light output part provided on a side corresponding to the light incidence part, and positioned between the light incidence part and the light incidence part and incident and scattered from the light incidence part. A body having a diffused light emitting part to which light is diffused out and which forms an internal space, a first light detecting unit which is provided in the diffused light emitting part and detects a light quantity value of the scattered light that is diffused out, and the light emitting part A second light detector configured to detect a light quantity value of light incident from the light incident part and exited to the light emitter, and electrically connected to the first light detector and the second light detector to the detected light amount value; An integrated body having a monitoring module for determining and distinguishing the presence of cracks and particles, wherein the imaging module is disposed on one side of the substrate to the substrate It is preferable to have a light source for providing illumination, and a camera disposed on the other side with respect to the substrate to image the outer surface of the substrate.

The first inspection module may be an optical system including a lens disposed near the substrate and focusing the laser, and a photo diode disposed near the lens and detecting a light quantity value of the laser.

In addition, the body preferably forms a cylindrical shape.

In addition, the second inspection module is disposed on the substrate, it is preferably composed of a plurality of photo diodes.

In addition, the second inspection module has a light incidence portion and a light output portion provided on a side corresponding to the light incidence portion, positioned between the light incidence portion and the light output portion, and incident and scattered from the light incidence portion. A body having a diffused light emitting part to which light is diffused out and which forms an internal space, a first light detecting unit which is provided in the diffused light emitting part and detects a light quantity value of the scattered light that is diffused out, and the light emitting part A second light detector configured to detect a light quantity value of light incident from the light incident part and exited to the light emitter, and electrically connected to the first light detector and the second light detector to the detected light amount value; It is preferable that it is an integral body provided with the monitoring module which distinguishes and distinguishes the presence of the said crack and particle.

The inner space may include a first space having a predetermined length and parallel to each other, and a second space provided on both sides of the first space to form a hemispherical shape and communicate with the first space. Preferably, the second space is in communication with the light incident part and the light exit part.

In addition, the light incident portion and the light exit portion is formed of a hole having a predetermined length, are formed of the same length with each other, form a linear along the longitudinal direction of the body, the diffuse light emitting portion is composed of a plurality of through holes and the body It is preferably formed to form a non-linear along the longitudinal direction of.

The body may include a detachable body fitted into the internal space, wherein the detachable body has a predetermined length and is parallel to each other, and is provided on both sides of the third space to form a hemispherical shape and the third space. It is preferably made of a fourth space in communication with each other, the third space and the fourth space is provided with an auxiliary light incident portion and the auxiliary light emitting portion so as to communicate with the light incident portion and the light output portion.

In addition, the first light detector and the second light detector are preferably composed of photodiodes.

In addition, the monitoring module is installed in the body and electrically connected to the first light detector and the second light detector, whether the light quantity value of the detected light is included in the range of the predetermined reference light quantity value, A controller configured to determine whether or not the light quantity value of the scattered light is within a predetermined reference scattered light quantity value and determine whether cracks and particles are present, and to be electrically connected to the controller while being installed in the body. In addition to displaying the light quantity value of the detected light, the light quantity value of the scattered light, and the preset reference light quantity value range and the reference scattered light quantity value range, the light quantity value of the detected light is included in the preset reference light quantity value range. And whether or not the light quantity value of the scattered light is within a range of a predetermined reference scattered light quantity value. And a display unit, wherein the reference light quantity value range includes a first reference light quantity value range for distinguishing the crack and a second reference light quantity value range for distinguishing the particle, and the crack is distinguished in the reference scattered light quantity value range. It is preferable that the first reference scattered light quantity value range and the second reference scattered light quantity value range for distinguishing the particles.

The present invention has the effect of determining the input or export of the substrate to the process chamber or the next process according to the quality inspection results by inspecting the quality of the substrate (with or without cracks and particles, input) in a series of processes.

In addition, the present invention is to place the improved integrating body near the edge of the substrate, and to irradiate the laser having a straightness to the edge of the substrate and to detect the light quantity value of the laser passing through the substrate through the integrating body edge state of the substrate It has an effect that can be easily inspected.

In addition, the present invention has the effect of inspecting the quality of the inside of the substrate or the upper surface of the substrate by irradiating the line beam toward the substrate or the upper surface of the substrate along the longitudinal direction of the substrate.

Hereinafter, with reference to the accompanying drawings, it will be described a substrate inspection apparatus and a process equipment having the same.

1A is a view showing an example of a process facility having a substrate inspection device of the present invention.

The substrate inspection apparatus A of the present invention is disposed in the vicinity of an edge of the substrate transfer part 500 and the substrate 10 to be transferred, and the substrate transfer part 500 along the transfer path a. It is composed of an inspection unit 600 for inspecting the presence of cracks and particles at the edge of, and to carry out the substrate 10 to another transfer path (c) in the presence of the cracks or particles.

The board | substrate inspection apparatus A comprised in this way is arrange | positioned in the vicinity of the process chamber PC in which a series of process as shown in FIG. 1A is performed. The substrate 10 may be introduced into the process chamber PC along the transfer path a.

1B is a view showing another example of a process facility having a substrate inspection device of the present invention.

The substrate inspection apparatus A configured as described above is arranged near the carrier 20 loaded after or before a series of processes as shown in FIG. 1B is performed. The substrate 10 may be introduced into the carrier 20 along the transfer path a.

2 is a view showing another example of a process facility having a substrate inspection device of the present invention.

Referring to FIG. 2, a transfer chamber TC is disposed at a central portion, and a plurality of process chambers PC1, PC2, PC3, and PC4 are disposed at a plurality of outer periphery positions of the transfer chamber TC. The process chambers PC1, PC2, PC3, and PC4 and the transfer chamber TC communicate with each other by a gate valve GV.

In addition, a transfer robot RB may be disposed in the transfer chamber TC to sequentially insert and unload the substrate 10, such as a glass substrate, into the plurality of process chambers C1, PC2, PC3, and PC4. Is installed.

In addition, the transfer chamber TC is connected to at least one load lock chamber LLC1 and LLC2. The load lock chambers LLC1 and LLC2 provide a space in which the substrate 10 to be transferred is waited before being transferred to the transfer chamber TC.

The load lock chambers LLC1 and LLC2 are connected to communicate with the substrate inspection apparatus A of the present invention. In the substrate inspection apparatus A, a transfer path a for transferring the substrate 10 to the load lock chambers LLC and LLC2 is formed.

Therefore, the substrate 10 may be introduced into the load lock chambers LLC1 and LLC2 along the transfer path a. In addition, on one side of the substrate inspection device A, another transfer path c is formed, in which the substrate is carried out to a predetermined position.

3 is a view showing an arrangement of the inspection unit of the substrate inspection apparatus of the present invention and an example of a conveyor type substrate transfer apparatus. 4A and 4B are views showing the configuration of the substrate inspection apparatus of the present invention.

Next, the configuration of the substrate inspection apparatus of the present invention shown in FIGS. 1A, 1B, and 2 will be described with reference to FIGS. 3 to 4B.

Referring to FIG. 4A, the substrate inspection apparatus A may move the substrate 10 along the transfer path a to the process chamber PC and the carrier 20 of FIGS. 1A and 1B or the load lock chamber of FIG. 2. It is disposed in the vicinity of the substrate transfer unit 500 and the substrate 10 to be transferred to (LLC1, LLC2), and inspects the presence of cracks and particles in the substrate 10, and distinguishes the cracks and particles If there is a crack, it has an inspection unit 600 for carrying out the substrate to another transfer path a.

3 and 4A, the substrate transfer part 500 shows an example of a conveyor type.

The substrate transfer part 500 may include a conveyor 511 on which the substrate 10 is seated and transported, and rollers 512 for moving the conveyor 511 along the transfer path a.

Of course, the substrate transfer part 500 may adopt another apparatus for transferring the substrate 10 along the transfer path a.

The inspection unit 600 according to the present invention may preferably include a first inspection unit 610 and a second inspection unit 620.

In addition, the inspection unit 600 may be configured of each of the first inspection unit 610 and the second inspection unit 620.

The inspection unit 600 may include a transfer device 640. Here, the transfer device 640 may be a series of transfer equipment such as a robot arm or a gripper that can pick up the substrate 10 and take it out along another transfer path c.

Next, the configuration of the inspection unit 600 will be described in detail.

The first inspection unit 610 is disposed near the edge of the substrate 10 as shown in FIG. 3. The second inspection unit 620 is located at the side and the top of the transfer path a of the substrate 10.

4A is a view showing an example of a substrate inspection apparatus of the present invention. 4B is a view showing another arrangement of the integrating body of FIG. 4A.

First, referring to FIG. 4A, the first inspection unit 610 may include a first inspection module and an imaging module 612.

The first inspection module is disposed at an edge bottom of the substrate 10 to irradiate a laser with a first laser generator 611, and is disposed on an edge of the substrate 10 to pass through an edge of the substrate 10. One laser is incident and a light quantity value of the laser emitted to the side corresponding to the incident position is detected to determine whether cracks and particles are present at the edge of the substrate 10 and to distinguish cracks and particles.

The imaging module 612 is disposed above or below the substrate 10 to provide illumination to one surface of the substrate 10, and one surface of the substrate 10 illuminated by the light source 612a. It may be configured as a camera 612b for photographing.

Preferably, the light source 612a is disposed at the bottom of the substrate 10, and the camera 612b is disposed on the substrate 10.

In addition, referring to FIG. 4B, the first laser generator 611 may be disposed above the edge of the substrate 10, and the first inspection module may be disposed below the edge of the substrate 10.

Here, the first inspection module shown in FIGS. 4A and 4B is a cylindrical integrator. In addition, the first inspection module may be a spherical integrating sphere.

The integrator is disposed at an edge bottom of the substrate 10 to inject a laser beam passing through the edge of the substrate 10, and detects a light quantity value of the laser emitted to a side corresponding to the incident position. It is possible to determine the presence of cracks and particles at the edge of) and to distinguish cracks and particles.

The configuration of the integrating body and integrating sphere will be described below.

5A is a view showing another example of the substrate inspection apparatus of the present invention. 5B is a view illustrating another arrangement of the optical system of FIG. 5A.

5A and 5B, the first inspection module according to the present invention is disposed in the vicinity of the condenser lens 710 for condensing a laser and the condenser lens 710 so as to be located on the condensed path. It may also be an optical system 700 composed of a photodiode 720 for detecting the light amount value of the laser.

The first inspection module may be disposed on the top of the substrate 10 as shown in FIG. 5A, or may be disposed on the bottom of the substrate 10 as shown in FIG. 5B.

6 is a view illustrating a second inspection unit of FIG. 4A. FIG. 7 is a bottom view illustrating the photodiode of FIG. 6. 8 is a bottom view showing a photodiode structure according to the present invention. 9 is a view illustrating an operation of a second inspection unit of FIG. 6.

Referring to FIG. 6, the second inspection unit 620 is disposed at the side of the substrate 10 to be transferred and irradiates a laser along a longitudinal direction of the substrate 10. A lifting cylinder 622 connected to the second laser generator 621 to lift and lower the irradiation position of the laser to a predetermined position, and a laser beam disposed on the substrate 10 to detect the laser scattered from the substrate 10. It consists of two inspection modules.

The second inspection module may be a photodiode structure 623.

6 and 8, the photodiode structure 623 may include a support rod 623a forming a predetermined length along a direction crossing the moving direction of the substrate 10 and the support rod 623a. It is composed of a plurality of photo diodes 623b disposed at the bottom.

The photodiodes 623b have a circular shape and are arranged in a zigzag shape with each other. The voids between the photodiodes 623b may be removed.

The transfer device 640 is a gripper positioned on the side of the substrate 10, and is electrically connected to the integrator and the photodiode structure 623 to have cracks or particles at the edge of the substrate 10. When the laser is detected in the photodiode structure 623, the substrate 10 may be powered from the outside to be taken out to a predetermined position along another transfer path c.

In addition, the second inspection module may use the above-mentioned integrator capable of detecting a laser scattered by cracks or particles in the substrate 10.

The first and second inspection units 610 and 620 and the transfer device 640 are electrically connected to the main controller 650.

Next, the configuration of the integrating body adopted as the first inspection module of the first inspection unit 610 and the second inspection module of the second inspection unit 620 will be described in detail.

10 is a perspective view showing an integral body according to the present invention. FIG. 11 is a cross-sectional view taken along the line II ′ of FIG. 10. 12 is a cross-sectional view illustrating another example of an internal space of the integrator of FIG. 10. FIG. 13 is a block diagram illustrating the monitoring module of FIG. 10.

An example of the improved integrated body of the present invention will be described.

Referring to FIG. 10, the integrator of the present invention includes a body 100 and a first light detector 300.

The body 100 has a light incident part 110 through which light, such as a laser, is incident, and a light exit part 120 provided at a side corresponding to the light incident part 110, and the light incident part 110 is provided. And a diffused light emitter 130 positioned between the light emitter 120 and diffused and emitted by the light incident part 110 and scattered therein, and an inner space is formed.

The light incident part 110 and the light output part 120 are formed as holes having a predetermined length along the length direction of the body 100.

The body 100 has a cylindrical shape. The internal space of the body 100 is exposed to the outside through the light incident part 110.

Here, the shape of the inner space of the body 100 may form a cylindrical shape as shown in FIG. 10, and as shown in FIG. 11, a cylindrical first space S1 and the first space S1. It may be made of a hemispherical second space (S2) located on both sides of the. The first space S1 and the second space S2 communicate with each other.

The diffuse light detector 130 may be formed of a plurality of through holes that are nonlinear along the longitudinal direction of the body 100, and may have a circular or elliptic shape. Of course, it may be formed in a polygonal shape. The diffused light detector 130 communicates with an internal space of the body 100. Therefore, the diffused light detector 130 is a component in which light incident through the light incident part 110 is scattered in the internal space of the body 100 is emitted.

The first light detector 300 according to the present invention is provided in the diffuse light emitter 130, is incident from the light incident part 110, is scattered in the body 100, and the diffuse light emitter 120 is provided. The light quantity value of the light emitted by () is detected.

The first light detector 300 is electrically connected to the monitoring module 400.

Referring to FIG. 13, the monitoring module 400 includes a controller 410 electrically connected to the first light detector 300, and an indicator 420 electrically connected to the controller 410.

The controller 410 is installed in the body 100 and electrically connected to the light detector 200 to determine whether the detected light amount value is within a preset reference light amount value range.

Here, the reference light quantity value range includes a first reference light quantity value range for distinguishing cracks and a second reference light quantity value range for distinguishing particles.

In addition, the indicator 420 is installed on the body 100 and is electrically connected to the controller 410 and visually displays a range of a reference light amount value in which the detected light amount value is preset, and the detected light amount It is possible to visually display whether or not the value is within the range of the preset reference light quantity value.

14 is a perspective view showing another example of the integrating body of the present invention. FIG. 15 is a cross-sectional view illustrating an integrated body of FIG. 14. FIG. 16 is a block diagram illustrating the monitoring module of FIG. 14.

In addition, referring to FIG. 14, the integrator of the present invention includes a body 100, a first light detector 300, and a second light detector 200.

Here, the first light detector 300 is the same as above, and the second light detector 200 is incident to the light incident part 110 and is emitted from the inside of the body 100 to the light emitter 120. The light quantity value of light can be detected.

The first and second light detectors 300 and 200 may be configured as photodiodes. The photodiode has a function of converting light energy into electrical energy. Therefore, the light quantity value of the said light can be detected.

The first light detector 300 and the second light detector 200 are electrically connected to the monitoring module 400.

More specifically, the integrator of FIG. 14 has a light incidence part 110 and a light output part 120 provided on a side corresponding to the light incidence part 110. A body 100 positioned between the light output units 120 and having a diffused light output unit 130 in which light incident and scattered from the light incidence unit 110 is diffused and emitted, and forms an internal space; The third space (S3) is inserted into the inner space of the body 100, has a predetermined length and parallel to each other, and provided on both sides of the third space (S3) to form a hemispherical shape and the third space (S3) And a fourth space S4 communicating with the auxiliary light incident to the third space S3 and the fourth space S4 so as to communicate with the light incident part 110 and the light emitting part 120. A detachable body 150 having a portion 111, an auxiliary light emitting portion 121, and an auxiliary diffused light emitting portion 131, and provided in the light emitting portion 120; The second light detector 200 and the diffused light emitter 130 for detecting a light quantity value of the light incident from the incident part 110 and exited to the light emitter 120 are provided in the diffused light scattering part. It has a 1st light detection part 300 which detects the light quantity value of the light which becomes.

Here, the first light detector 300 and the second light detector 200 are composed of photodiodes. The second light detector 200 is substantially the same as that of FIG. 9, and in the case of the first light detector 300, the photodiode is inserted into the diffused light emitter 130 formed of a circular or elliptical through hole. Is installed.

Referring to FIG. 16, the first and second light detectors 300 and 200 are electrically connected to the monitoring module 400.

The monitoring module 400 further includes a selector 430 for selectively switching and selecting the first and second light detectors 300 and 200.

Accordingly, the first and second light detectors 300 and 200 are electrically connected to the selector 430, the selector 430 is electrically connected to the controller 410, and the controller 410 is connected to the indicator 420. Electrically connected.

The controller 410 and the indicator 420 are installed on the outer circumference of the body 100.

Meanwhile, referring to FIG. 15, the detachable body 150 has a predetermined length and is provided in both sides of the third space S3 and parallel to each other, and is formed on both sides of the third space S3 to form a hemispherical shape. And a fourth space S4 communicating with S3, so that the third space S3 and the fourth space S4 communicate with the light incident part 110 and the light exiting part 120. The auxiliary light incident part 111 and the auxiliary light exit part 121 are comprised.

Here, the cap body 101 of the cap shape is configured to be screw-coupled to one end side of the body 100 on one end side of the body 100.

The inner space of the body 100 and the cap body 101 forms a cylindrical shape.

In addition, a guide protrusion (not shown) may be formed on an inner wall of the body 100, and a guide hole (not shown) may be formed on the outer circumference of the detachable body 150 to slide into the guide protrusion. .

17 is a cross-sectional view showing still another example of the integrating body of the present invention.

On the other hand, the above-mentioned integrating body has a cylindrical shape having a body 100 having a predetermined length of a cylindrical shape.

In addition, the integrating body adopted as the first inspection module of the first inspection unit 610 may use a sphere-shaped integrating sphere as shown in FIG. 16.

The integrating sphere has a spherical body 102 in which an inner space is formed, a light incident part 110 'formed at one side of the body, and the body 102 at a side corresponding to the light incident part 110'. A light emitting part 120 'formed at the other side of the light emitting part 120 and a diffused light emitting part formed on the body 102 so as to be positioned between the light incident part 110' and the light emitting part 120 ' 130 ').

In addition, as described above, the diffused light emitter 130 ′ may be provided with a first light detector 300, and may be provided in each of the light incident part 110 ′ and the diffused light emitter 130 ′. The two light detector 200 and the first light detector 300 may be installed at the same time.

In addition, the first light detector 300 and the second light detector 200 may be electrically connected to the controller 410 as illustrated in FIGS. 12 and 15. The controller 410 is electrically connected to the main controller 650.

Next, the operation of the process equipment having the substrate inspection apparatus having the above configuration will be described.

The substrate 10 shown in FIGS. 1A to 2 is conveyed into the substrate inspection apparatus A along the conveying path a by a conveying apparatus 500 such as a roller.

3 to 4B, the substrate 10 transported along the transfer path a is cracked and particles on the edges of the substrate 10 and the top and inside of the substrate 10 by the inspection unit 600. In addition to checking for existence, you can distinguish between cracks and particles. In addition, the state of the outer surface of the substrate 10 can be visually confirmed.

First, a process of inspecting an edge portion of the substrate 10 by the first inspection unit 610 will be described.

Referring to FIG. 4A, the transfer apparatus 640 may transfer the substrate 10 to a predetermined position.

Subsequently, the first laser generator 611 irradiates the laser from the bottom of the substrate 10 toward the top. In the case of FIG. 4B, the first laser generator 611 irradiates the laser from the bottom of the substrate 10 toward the bottom.

The laser beam passing through the substrate 10 flows into the light incident part 110 of the integrator.

That is, the laser is introduced by forming a movement path to the internal space of the body 100 through the light incident portion 110.

The light along the movement path reaches the light output part 120 disposed on the corresponding side of the light incident part 110.

Therefore, the first light detector 300 and the second light detector 200 including a plurality of photodiodes arranged side by side in the light emitter 120 may detect the light quantity value of the light. The first light detector 300 and the second light detector 200 transmit to the controller 410.

The controller 410 determines whether the detected light amount value is within a range of a predetermined reference light amount value.

Accordingly, the controller 410 determines that cracks or particles are present in the substrate 10 when the light quantity value is detected.

In addition, the controller 410 determines that there is a crack in the case where the detected light quantity value is included in the reference light quantity value range, particularly in the first reference light quantity value range, and the particle is included in the second reference light quantity value. It is determined that there is a transmission to the main controller 650.

In addition, the electrical signal is transmitted to the display unit 410 to visually display a range of the reference light quantity value for which the detected light quantity value is preset, and the detected light quantity value is included in the range of the preset reference light quantity value. Can be visually displayed.

Therefore, whether the light amount value incident through the light incident part 110 through the indicator 420 and detected by the light detector 200 in the light output part 120 is within the range of the reference light amount value is visible. Can be easily recognized.

Meanwhile, when the light incident from the light incident part 110 is scattered in the internal space of the body 100, the scattered light is emitted through the diffused light emitting part 130 disposed in the body 100.

At this time, the light scattered in the interior of the body 100 may be reflected through the inner wall of the hemispherical second space (S2) to thereby guide easily into the diffused light output unit 130.

In addition, the imaging module 612 may image an upper surface of the substrate 10.

That is, the light source 612a provides illumination of constant illuminance at the bottom of the substrate 10. Then, the camera 612b disposed above the substrate 10 captures the upper surface of the substrate 10 to which the illumination is provided, and transmits the captured image information to the main controller 650.

Therefore, the main controller 650 may store image information for visually confirming the state of the upper surface of the substrate 10.

On the other hand, when the other integrating body of the first inspection unit 610 will be described its operation.

The laser beam incident and moved from the light incident part 110 is detected by the second light detector 200 installed in the light output part 120.

In addition, the amount of light diffused and scattered in the internal space of the body 100 or the internal space of the detachable body 150 is detected by the first light detector 300 installed in the diffused light output unit 130. .

In this case, at least one of the second light detector 200 or the first light detector 300 may be electrically connected to the controller 410 by the selector 430.

If both the second light detector 200 and the first light detector 300 are connected to the controller 410, the second light detector 200 may determine the detected light quantity value and the first light detector 300. May transmit the light quantity value of the scattered light to the controller 410.

Subsequently, the controller 410 determines whether the detected light amount value is within a range of a predetermined reference light amount value, and determines whether the light amount value of the scattered light is within a range of the reference scattered light amount value. do.

In addition, the controller 410 determines that there is a crack when the light quantity value detected by the scattering is included in the reference scattering light quantity value range, particularly in the second reference scattering light quantity value range, and the range of the second reference scattering light quantity value If it is included in, it can be determined that there is a particle.

The controller 410 visually displays a range of the detected light quantity value and a predetermined reference light quantity value, and a range of the light quantity value of the scattered light and the reference scattered light quantity value, and the detected light quantity value is preset. It is displayed visually whether it is contained in the range of the reference light quantity value to be included, and whether the light quantity value of the scattered light is contained in the range of the reference scattered light quantity value.

Therefore, when the light quantity value detected by the second light detector 200 is out of the range of the reference light quantity value, or when the scattered light quantity value is out of the range of the reference scattering light quantity value, cracks or particles are formed at the edge of the substrate 10. Can be considered to exist. Here, the method of distinguishing the crack and the particle is mentioned above and will be omitted below.

Therefore, whether the light amount value incident on the light incident part 110 through the indicator 420 and detected by the light detector 200 in the light output part 120 is within the range of the reference light amount value, and Whether or not the light amount value of the scattered light is within the range of the reference scattered light amount value can be visually easily recognized.

As mentioned above, in the case where cracks or particles are present on the substrate 10, the controller 410 transmits an electrical signal to the main controller 650 and uses the transfer device 640 to transfer the substrate 10. It can be taken out and taken out to the outside along the other transport path (c) as shown in Figures 1a to 2.

Conversely, the controller 410 does not have cracks or particles at the edge of the substrate 10 when the detected light amount value is included in the reference light amount value range, or when the scattered light amount value is included in the range of the reference scattered light amount value. Since the substrate 10 is not disposed, the substrate 10 is introduced into the process chamber PC of FIG. 1A and the cassette 20 of FIG. 1B or the load lock chambers LLC1 and LLC2 of FIG. 2 along the transfer path a and then transferred. Into the chamber TC and the plurality of process chambers PC1,..., PC4, a series of processes are performed.

Next, the operation of the second inspection unit 620 according to the present invention.

4A and 4B, the main controller 650 sends a signal to the driver 660, and the driver 660 adjusts the lifting position of the lifting cylinder 622 to set the position of the second laser generator 621. Variably.

The setting position is a position at which the laser beam, which is a line beam radiated from the second laser generator 621, passes along the upper surface of the substrate 10 or along the longitudinal direction of the substrate 10.

In the case of FIG. 7, in the former case, a laser which is a second inspection module positioned above the substrate 10 by being diffused and reflected by particles existing on the upper surface of the substrate 10 is positioned on the substrate 10. It is shown that a certain amount of light amount value is detected by the diode structure 623.

Thus, in this case, the photodiodes 623b of the photodiode structure 623 send an electrical signal to the main controller 650, which drives the transfer device 640 to drive the substrate 10. ) Is taken out along the other transfer path (c).

In addition, in the case of FIG. 9, in the latter case, a laser penetrating along the longitudinal direction of the substrate 10 is diffused and reflected by foreign matter formed inside the substrate 10 and positioned above the substrate 10. It is shown that a certain amount of light quantity value is detected by the photodiode 623b.

Thus, in this case, the photodiode 623b sends an electrical signal to the main controller 650, which drives the transfer device 640 to drive the substrate 10 to another transfer path c. Export to outside by following.

In addition, in the case where the second inspection module uses the cylindrical integrator, the light scattered from the substrate 10 may be applied to the light emitter 120 and the diffuse light emitter 130 of the integrator. When detected by the first and second light detectors 300 and 200, the controller 410 may determine that cracks and particles are present in the substrate 10, and may transport the substrate 10 to the outside as described above.

Here, the method of distinguishing the crack and the particles is the same as mentioned above.

Next, another example of the substrate inspection apparatus of the present invention will be described with reference to FIGS. 18 and 19.

FIG. 19 is a diagram illustrating the substrate inspection apparatus of FIG. 18. 20 is a view showing still another example of the substrate inspection device of the present invention.

As shown in FIG. 18, the edge side portion of the substrate 10 subjected to edge inspection according to the present invention may have a spherical portion ED formed to be convex to the outside.

In this case, as shown in FIG. 19, the first laser generator 611 and the first inspection module according to the present invention may each be configured as a pair.

That is, the light amount value of the laser emitted to the corresponding side by injecting the laser passing through the first laser generator 611 and the spherical surface ED of the substrate 10 to the spherical portion ED The first inspection module that detects and determines and distinguishes cracks and particles from the spherical portion ED of the substrate 10 may be configured as a pair.

The pair of first laser generators 611 are disposed to be spaced apart from each other by a predetermined distance and intersect the edge of the substrate 10 at a boundary, and the pair of first inspection modules are connected to the pair of first lasers. The substrate 611 is disposed to be spaced apart from each other by a predetermined distance so as to be disposed at a position corresponding to the generator 611 and intersects an edge of the substrate 10.

Accordingly, the spherical portion ED provided at the edge of the substrate 10 to be moved may be inspected twice.

In detail, when the substrate 10 is moved to a predetermined position, the first laser generator 611 positioned on the right side in FIG. 19 irradiates a laser toward the spherical portion ED from the upper portion of the substrate 10, The laser passing through the unit ED is received by the first inspection module located at the bottom of the substrate 10.

In addition, the first inspection module detects the laser light quantity value received and determines and distinguishes cracks and particles from the spherical surface ED. Since the method of determining the presence of the cracks and particles is the same as described above, a description thereof will be omitted. Here, the first inspection module may be an integral body described above.

Subsequently, as the substrate 10 which is primarily edge-tested is further moved, the first laser generator 611 positioned at the left side of FIG. 19 irradiates a laser toward the spherical portion ED from the bottom of the substrate 10. The laser beam passing through the spherical portion ED is received by the first inspection module positioned above the substrate 10.

In addition, the first inspection module detects the laser light quantity value received and determines and distinguishes cracks and particles from the spherical surface ED.

Therefore, the spherical portion ED formed at the edge of the substrate 10 may be determined to have cracks and particles by a pair of first inspection modules twice.

Next, another example of the substrate inspection apparatus of the present invention will be described with reference to FIGS. 20 and 21.

20 is a view showing still another example of the substrate inspection device of the present invention. 21 is a view showing the substrate inspection apparatus of FIG.

As shown in FIG. 20, the edge side portion of the substrate 10 subjected to edge inspection according to the present invention may have a spherical portion ED formed to be convex to the outside.

In this case, as shown in FIG. 21, the first laser generator 611 and the first inspection module according to the present invention may be configured in pairs, respectively.

Here, the arrangement of the first laser generator 611 and the first inspection module 700 constituted by the pair is substantially the same as the example described with reference to FIGS. 18 and 19.

However, the first inspection module 611 includes an optical system including a lens 710 for condensing the laser and a photodiode 720 disposed near the lens 710 to detect a light quantity value of the laser. 700).

Therefore, as described above, the spherical portion ED formed at the edge of the substrate 10 may be determined whether cracks and particles are present by a pair of first inspection modules twice.

Accordingly, cracks and particles that may be generated in the spherical portion ED formed at the edge of the substrate 10 may be detected more accurately by two inspections.

22 is a view showing still another example of the substrate inspection device of the present invention. FIG. 23 is a view illustrating slits disposed around the substrate of FIG. 22.

Referring to FIG. 22, a convex spherical surface ED is formed on an edge side surface of the substrate 10.

The first laser generator 611 is arranged to be parallel to the substrate 10 (referred to as an O-axis) at the edge side of the substrate 10. Therefore, the first laser generator 611 irradiates the laser to the spherical portion ED.

The first inspection module 700 is composed of a pair.

The pair of first inspection modules 700 are disposed on the upper and lower portions of the substrate 10 so as to be inclined at an angle with the irradiation path a of the laser irradiated to the spherical portion ED. Here, the laser irradiation path (a) is along the 0 axis.

Accordingly, the laser irradiated from the first laser generator 611 along the 0 axis is irradiated to the spherical portion ED provided at the edge of the substrate 10, and the irradiated laser is irradiated on the upper and lower portions of the substrate 10. Detected by the first inspection module 700, respectively disposed in the.

Here, the first inspection module 611 is an optical system composed of a lens 710 for condensing the laser, and a photodiode 720 disposed in the vicinity of the lens 710 to detect the light quantity value of the laser ( 700).

Therefore, as described above, the degree of processing of the upper and lower spherical portions ED formed on the edge of the substrate 10 may be determined while the laser is received by the first inspection modules 700.

That is, when the degree of processing of the spherical portion ED of the substrate 10 is poor, the determination of the degree of processing is important because the substrate 10 is easily broken.

In addition, an opening 810 is formed on the irradiation path a of the laser formed between the edge of the substrate 10 and the first laser generator 611 to adjust the irradiation area LA of the laser. Slit 800 is further disposed.

Therefore, when the laser spreads from the first laser generator 611, the irradiation area LA of the laser may be adjusted by the opening area LAt formed in the slit 800. The opening area LAt may be determined according to the size of the opening 810.

1A is a view showing an example of a process facility having a substrate inspection device of the present invention.

1B is a view showing another example of a process facility having a substrate inspection device of the present invention.

2 is a view showing another example of a process facility having a substrate inspection device of the present invention.

3 is a plan view showing an arrangement state of an inspection unit of the substrate inspection apparatus of the present invention and an example of a conveyor type substrate transfer apparatus.

4A is a view showing an example of a substrate inspection apparatus of the present invention.

4B is a view showing another arrangement of the integrating body of FIG. 4A.

5A is a view showing another example of the substrate inspection apparatus of the present invention.

5B is a view illustrating another arrangement of the optical system of FIG. 5A.

6 is a view illustrating a second inspection unit of FIG. 4A.

FIG. 7 is a diagram illustrating an operation of a second inspection unit of FIG. 6.

8 is a bottom view showing a photodiode structure according to the present invention.

9 is another view illustrating the operation of the second inspection unit of FIG. 6.

10 is a perspective view showing an integral body according to the present invention.

FIG. 11 is a cross-sectional view taken along the line II ′ of FIG. 10.

12 is a cross-sectional view illustrating another example of an internal space of the integrator of FIG. 10.

FIG. 13 is a block diagram illustrating the monitoring module of FIG. 10.

14 is a perspective view showing another example of the integrating body of the present invention.

FIG. 15 is a cross-sectional view illustrating an integrated body of FIG. 14. FIG.

16 is a block diagram illustrating the monitoring module of FIG. 14.

17 is a cross-sectional view showing still another example of the integrating body of the present invention.

18 is a view showing still another example of the substrate inspection device of the present invention.

FIG. 19 is a diagram illustrating the substrate inspection apparatus of FIG. 18.

20 is a view showing still another example of the substrate inspection device of the present invention.

21 is a view showing the substrate inspection apparatus of FIG.

22 is a view showing still another example of the substrate inspection device of the present invention.

FIG. 23 is a view illustrating slits disposed around the substrate of FIG. 22.

** Description of symbols for the main parts of the drawing **

PC: process chamber

A: Substrate Inspection Device

500: substrate transfer part

600: inspection unit

610: first inspection unit

611: first laser generator

100: integral

620: second inspection unit

621: second laser generator

622 lifting cylinder

623: photodiode structure

Claims (34)

A substrate transfer unit transferring the substrate along a transfer path; And And an inspection unit disposed near an edge of the substrate to be transferred and inspecting the presence of cracks and particles at the edge of the substrate and distinguishing cracks and particles. The method of claim 1, The inspection unit is provided with a first inspection unit and a second inspection unit, The first inspection unit is disposed on one side of the edge of the substrate to irradiate a laser, and the amount of light of the laser disposed on the other side of the substrate to enter the laser passing through the edge of the substrate and emitted to the corresponding side A first inspection module which detects a value and determines and distinguishes cracks and particles from the edges of the substrate, and an imaging module for imaging the outer surface of the substrate, The second inspection unit is disposed on the side of the substrate to be transferred and the second laser generator for irradiating a laser along the longitudinal direction of the substrate, and the second laser generator is connected to the lifting and lowering to raise the laser irradiation position to a predetermined position And a second inspection module arranged above the substrate and detecting a laser scattered from the substrate. 3. The method of claim 2, The first laser generator is disposed at an edge bottom of the substrate, And the first inspection module is disposed above an edge of the substrate such that the first inspection module is positioned opposite the first laser generator. 3. The method of claim 2, The first laser generator is disposed above an edge of the substrate, And the first inspection module is disposed at an edge bottom of the substrate to be positioned opposite the first laser generator. 3. The method of claim 2, On the edge side surface of the substrate is formed a convex spherical shape, Determining the presence or absence of cracks and particles in the spherical portion of the substrate by detecting the light amount value of the first laser generator for irradiating the laser to the spherical portion and the laser beam emitted to the corresponding side by entering the laser passing through the spherical portion of the substrate And distinguishing the first inspection module comprises a pair, The pair of first laser generators are arranged to be spaced apart from each other and to cross the edge of the substrate, And the pair of first inspection modules are arranged to be spaced apart from each other by a predetermined distance so as to be disposed at a position corresponding to the pair of first laser generators and to cross at an edge of the substrate. 3. The method of claim 2, The inspection unit is provided with a transfer device, The transfer device is electrically connected with the first inspection module and the second inspection module to transport the substrate to another transfer path when there is a crack at the edge of the substrate or when a laser is detected at the second inspection module. Substrate inspection apparatus characterized by the above-mentioned. 3. The method of claim 2, The first inspection module has a light incidence part and a light output part provided on a side corresponding to the light incidence part, and the light is located between the light incidence part and the light output part and is incident and scattered from the light incidence part. It is provided with a diffused light output unit to be diffused out, the body forming an internal space, the first light detector for detecting the light amount value of the scattered light is provided in the diffused light output unit, the light output unit A second light detector configured to detect a light amount value of the light incident from the light incident part and exited to the light output part, and electrically connected to the first light detector and the second light detector to detect the light amount value And a monitoring module for determining and determining the presence or absence of particles, The imaging module includes a light source disposed on one side of the substrate to provide illumination to the substrate, and a camera disposed on the other side of the substrate to capture an outer surface of the substrate. . 3. The method of claim 2, The first inspection module is an optical system including a lens disposed in the vicinity of the substrate to condense the laser, and a photodiode disposed in the vicinity of the lens to detect the light quantity value of the laser. . The method of claim 7, wherein Substrate inspection apparatus, characterized in that the body forms a cylindrical shape. 3. The method of claim 2, The second inspection module is disposed on the substrate, the substrate inspection apparatus, characterized in that composed of a plurality of photodiodes. 3. The method of claim 2, The second inspection module has a light incidence portion and a light output portion provided on a side corresponding to the light incidence portion, and the light is located between the light incidence portion and the light output portion and is incident and scattered from the light incidence portion. It is provided with a diffused light output unit to be diffused out, the body forming an internal space, the first light detector for detecting the light amount value of the scattered light is provided in the diffused light output unit, the light output unit A second light detector configured to detect a light amount value of the light incident from the light incident part and exited to the light output part, and electrically connected to the first light detector and the second light detector to detect the light amount value And an integrating body having a monitoring module for determining and distinguishing the presence or absence of particles. The method of claim 7, wherein The internal space has a first space having a predetermined length and parallel to each other, and a second space provided on both sides of the first space to form a hemispherical shape and communicate with the first space, And the first space and the second space communicate with the light incident part and the light exiting part. The method of claim 7, wherein The light incident part and the light exit part are formed of holes having a predetermined length, are formed in the same length with each other, and form a linear along the longitudinal direction of the body, The diffused light emitting portion is composed of a plurality of through holes and the substrate inspection apparatus, characterized in that formed in a non-linear along the longitudinal direction of the body. The method of claim 7, wherein The body has a removable body fitted in the inner space, The detachable body includes a third space having a predetermined length and parallel to each other, and a fourth space provided on both sides of the third space to form a hemispherical shape and communicate with the third space. 4. A substrate inspection apparatus, comprising: an auxiliary light incident portion and an auxiliary light emitting portion such that four spaces communicate with the light incident portion and the light emitting portion. The method of claim 7, wherein And the first light detector and the second light detector are formed of photodiodes. The method according to claim 7 or 11, wherein The monitoring module, Installed in the body and electrically connected to the first light detector and the second light detector, whether the light quantity value of the detected light is within a predetermined reference light quantity value, and the light quantity value of the scattered light A controller for judging whether or not it is within a range of the predetermined reference scattered light quantity value, and determining and distinguishing cracks and particles; Installed on the body and electrically connected to the controller, the light quantity value of the detected light and the light quantity value of the scattered light, and a preset reference light quantity value range and a reference scattering light quantity value range are displayed, as well as the A display unit which visually displays whether the light quantity value is within a range of a predetermined reference light quantity value and whether the light quantity value of the scattered light is within a range of a predetermined reference scattering light quantity value, The reference light quantity value range includes a first reference light quantity value range for distinguishing the crack and a second reference light quantity value range for distinguishing the particle, The reference scattering light quantity value range includes a first reference scattering light quantity value range for distinguishing the crack and a second reference scattering light quantity value range for distinguishing the particle. A chamber defining a transfer path of the substrate therein; A substrate transfer part disposed in the vicinity of the chamber to transfer the substrate to the chamber along the transfer path; And A substrate inspection apparatus disposed near an edge of the substrate to be transported, the inspection unit configured to inspect the presence of cracks and particles at the edge of the substrate, and to separate the cracks and particles and to carry the substrate out to another transport path Process equipment having. The method of claim 17, The inspection unit is provided with a first inspection unit and a second inspection unit, The first inspection unit is disposed on one side of the edge of the substrate to irradiate a laser, and the amount of light of the laser disposed on the other side of the substrate to enter the laser passing through the edge of the substrate and emitted to the corresponding side A first inspection module which detects a value and determines and distinguishes cracks and particles from the edges of the substrate, and an imaging module for imaging the outer surface of the substrate, The second inspection unit is disposed on the side of the substrate to be transferred and the second laser generator for irradiating a laser along the longitudinal direction of the substrate, and the second laser generator is connected to the lifting and lowering to raise the laser irradiation position to a predetermined position And a cylinder and a second inspection module disposed above the substrate and detecting a laser scattered from the substrate. The method of claim 18, The first laser generator is disposed at an edge bottom of the substrate, And the first inspection module is disposed above an edge of the substrate such that the first inspection module is positioned opposite the first laser generator. The method of claim 18, The first laser generator is disposed above an edge of the substrate, And the first inspection module is disposed at an edge bottom of the substrate to be positioned opposite the first laser generator. The method of claim 18, On the edge side surface of the substrate is formed a convex spherical shape, Determining the presence or absence of cracks and particles in the spherical portion of the substrate by detecting the light amount value of the first laser generator for irradiating the laser to the spherical portion and the laser beam emitted to the corresponding side by entering the laser passing through the spherical portion of the substrate And distinguishing the first inspection module comprises a pair, The pair of first laser generators are arranged to be spaced apart from each other and to cross the edge of the substrate, And the pair of first inspection modules are arranged to be spaced apart from each other by a predetermined distance so as to be disposed at a position corresponding to the pair of first laser generators and to cross the edge of the substrate. The method of claim 18, The inspection unit is provided with a transfer device, The transfer device is electrically connected with the first inspection module and the second inspection module to transport the substrate to another transfer path when there is a crack at the edge of the substrate or when a laser is detected at the second inspection module. Process equipment which has a board | substrate inspection apparatus characterized by the above-mentioned. The method of claim 18, The first inspection module has a light incidence part and a light output part provided on a side corresponding to the light incidence part, and the light is located between the light incidence part and the light output part and is incident and scattered from the light incidence part. It is provided with a diffused light output unit to be diffused out, the body forming an internal space, the first light detector for detecting the light amount value of the scattered light is provided in the diffused light output unit, the light output unit A second light detector configured to detect a light quantity value of the light incident from the light incident portion and exited to the light emitter; And a monitoring module for determining and determining the presence or absence of particles, The imaging module includes a light source disposed on one side of the substrate to provide illumination to the substrate, and a camera disposed on the other side of the substrate to capture an outer surface of the substrate. Process equipment having. The method of claim 18, The first inspection module is an optical system including a lens disposed in the vicinity of the substrate to condense the laser, and a photodiode disposed in the vicinity of the lens to detect the light quantity value of the laser. Process equipment having. 24. The method of claim 23, And said body has a cylindrical shape. The method of claim 18, The second inspection module has a photo support rod having a predetermined length disposed on the substrate so as to cross the moving direction of the substrate and a plurality of photo diodes disposed on the bottom surface of the support rod toward an upper surface of the substrate. Diode structure, And said photodiodes are circular and arranged in a zigzag shape with each other. The method of claim 18, The second inspection module has a light incidence portion and a light output portion provided on a side corresponding to the light incidence portion, and the light is located between the light incidence portion and the light output portion and is incident and scattered from the light incidence portion. It is provided with a diffused light output unit to be diffused out, the body forming an internal space, the first light detector for detecting the light amount value of the scattered light is provided in the diffused light output unit, the light output unit A second light detector configured to detect a light amount value of the light incident from the light incident part and exited to the light output part, and electrically connected to the first light detector and the second light detector to detect the light amount value And an integrating body having a monitoring module for determining and distinguishing the presence or absence of particles. 24. The method of claim 23, The internal space has a first space having a predetermined length and parallel to each other, and a second space provided on both sides of the first space to form a hemispherical shape and communicate with the first space, And said first space and said second space communicate with said light incident portion and said light emitting portion. 24. The method of claim 23, The light incident part and the light exit part are formed of holes having a predetermined length, are formed in the same length with each other, and form a linear along the longitudinal direction of the body, The diffused light emitting portion is a process equipment having a substrate inspection device, characterized in that formed by a plurality of through holes and non-linearly formed along the longitudinal direction of the body. 24. The method of claim 23, The body has a removable body fitted in the inner space, The detachable body includes a third space having a predetermined length and parallel to each other, and a fourth space provided on both sides of the third space to form a hemispherical shape and communicate with the third space. And an auxiliary light incidence part and an auxiliary light exit part such that four spaces communicate with the light incidence part and the light exit part. 24. The method of claim 23, And said first light detector and said second light detector comprise photo diodes. The method of claim 23 or 27, The monitoring module, Installed in the body and electrically connected to the first light detector and the second light detector, whether the light quantity value of the detected light is within a predetermined reference light quantity value, and the light quantity value of the scattered light A controller for judging whether or not it is within a range of the predetermined reference scattered light quantity value, and determining and distinguishing cracks and particles; Installed on the body and electrically connected to the controller, the light quantity value of the detected light and the light quantity value of the scattered light, and a preset reference light quantity value range and a reference scattering light quantity value range are displayed, as well as the A display unit which visually displays whether the light quantity value is within a range of a predetermined reference light quantity value and whether the light quantity value of the scattered light is within a range of a predetermined reference scattering light quantity value, The reference light quantity value range includes a first reference light quantity value range for distinguishing the crack and a second reference light quantity value range for distinguishing the particle, The reference scattering light quantity value range includes a first reference scattering light quantity value range for distinguishing the cracks and a second reference scattering light quantity value range for distinguishing the particles. 3. The method of claim 2, On the edge side surface of the substrate is formed a convex spherical shape, The first laser generator is disposed in parallel with the substrate to irradiate the laser to the spherical portion, The first inspection module is a pair of substrate inspection apparatus, characterized in that disposed in the upper and lower portions of the substrate so as to be inclined at a predetermined angle with the irradiation path of the laser irradiated to the spherical portion. The method of claim 33, And a slit on the irradiation path of the laser formed between the edge of the substrate and the first laser generator is further provided with a slit having an opening for adjusting the irradiation area of the laser.

Images