KR101050679B1 - 표면 처리 방법, 실리콘 에피텍셜 웨이퍼의 제조 방법 및 실리콘 에피텍셜 웨이퍼 - Google Patents
표면 처리 방법, 실리콘 에피텍셜 웨이퍼의 제조 방법 및 실리콘 에피텍셜 웨이퍼 Download PDFInfo
- Publication number
- KR101050679B1 KR101050679B1 KR1020040034749A KR20040034749A KR101050679B1 KR 101050679 B1 KR101050679 B1 KR 101050679B1 KR 1020040034749 A KR1020040034749 A KR 1020040034749A KR 20040034749 A KR20040034749 A KR 20040034749A KR 101050679 B1 KR101050679 B1 KR 101050679B1
- Authority
- KR
- South Korea
- Prior art keywords
- single crystal
- crystal substrate
- silicon
- silicon single
- oxide film
- Prior art date
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 264
- 239000010703 silicon Substances 0.000 title claims abstract description 264
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 263
- 238000000034 method Methods 0.000 title claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000004381 surface treatment Methods 0.000 title claims description 10
- 239000000758 substrate Substances 0.000 claims abstract description 189
- 239000013078 crystal Substances 0.000 claims abstract description 160
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 140
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 74
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 73
- 230000002093 peripheral effect Effects 0.000 claims abstract description 47
- 239000007788 liquid Substances 0.000 claims abstract description 13
- 238000001947 vapour-phase growth Methods 0.000 claims description 38
- 238000010306 acid treatment Methods 0.000 claims description 36
- 230000007797 corrosion Effects 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 4
- 239000002245 particle Substances 0.000 abstract description 21
- 229960002050 hydrofluoric acid Drugs 0.000 description 62
- 235000012431 wafers Nutrition 0.000 description 41
- 239000007789 gas Substances 0.000 description 21
- 239000012071 phase Substances 0.000 description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 229920005591 polysilicon Polymers 0.000 description 9
- 239000002253 acid Substances 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000012808 vapor phase Substances 0.000 description 3
- 239000007792 gaseous phase Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
Images
Classifications
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04D—ROOF COVERINGS; SKY-LIGHTS; GUTTERS; ROOF-WORKING TOOLS
- E04D11/00—Roof covering, as far as not restricted to features covered by only one of groups E04D1/00 - E04D9/00; Roof covering in ways not provided for by groups E04D1/00 - E04D9/00, e.g. built-up roofs, elevated load-supporting roof coverings
- E04D11/02—Build-up roofs, i.e. consisting of two or more layers bonded together in situ, at least one of the layers being of watertight composition
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04D—ROOF COVERINGS; SKY-LIGHTS; GUTTERS; ROOF-WORKING TOOLS
- E04D13/00—Special arrangements or devices in connection with roof coverings; Protection against birds; Roof drainage ; Sky-lights
- E04D13/17—Ventilation of roof coverings not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Weting (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2003-00143633 | 2003-05-21 | ||
| JP2003143633A JP4066881B2 (ja) | 2003-05-21 | 2003-05-21 | 表面処理方法、シリコンエピタキシャルウェーハの製造方法及びシリコンエピタキシャルウェーハ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20040100937A KR20040100937A (ko) | 2004-12-02 |
| KR101050679B1 true KR101050679B1 (ko) | 2011-07-22 |
Family
ID=33531359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020040034749A KR101050679B1 (ko) | 2003-05-21 | 2004-05-17 | 표면 처리 방법, 실리콘 에피텍셜 웨이퍼의 제조 방법 및 실리콘 에피텍셜 웨이퍼 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4066881B2 (zh) |
| KR (1) | KR101050679B1 (zh) |
| CN (2) | CN100401483C (zh) |
| TW (1) | TW200509224A (zh) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100365889C (zh) * | 2006-05-18 | 2008-01-30 | 中微光电子(潍坊)有限公司 | 一种防止垂直腔面发射半导体激光器在湿法氧化时开裂的方法 |
| CN101311340B (zh) * | 2008-03-19 | 2010-06-02 | 南京国盛电子有限公司 | 硅反外延片的制造方法及其专用设备 |
| WO2010035409A1 (ja) * | 2008-09-26 | 2010-04-01 | 信越半導体株式会社 | シリコンエピタキシャルウェーハの製造方法 |
| JP5141541B2 (ja) * | 2008-12-24 | 2013-02-13 | 株式会社Ｓｕｍｃｏ | エピタキシャルウェーハの製造方法 |
| KR101022567B1 (ko) * | 2009-02-02 | 2011-03-16 | 주식회사 엘지실트론 | 에피택셜 웨이퍼 제조 방법 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04245431A (ja) * | 1991-01-30 | 1992-09-02 | Kyushu Electron Metal Co Ltd | 半導体基板の酸化膜除去方法とその装置 |
| JP2970499B2 (ja) * | 1995-10-30 | 1999-11-02 | 日本電気株式会社 | 半導体装置の製造方法 |
| JP3635200B2 (ja) * | 1998-06-04 | 2005-04-06 | 信越半導体株式会社 | Ｓｏｉウェーハの製造方法 |
| US6444027B1 (en) * | 2000-05-08 | 2002-09-03 | Memc Electronic Materials, Inc. | Modified susceptor for use in chemical vapor deposition process |
| JP3727602B2 (ja) * | 2002-03-11 | 2005-12-14 | 大日本スクリーン製造株式会社 | 基板周縁処理装置および基板周縁処理方法 |
-
2003
- 2003-05-21 JP JP2003143633A patent/JP4066881B2/ja not_active Expired - Fee Related
-
2004
- 2004-05-11 TW TW093113228A patent/TW200509224A/zh unknown
- 2004-05-17 KR KR1020040034749A patent/KR101050679B1/ko active IP Right Grant
- 2004-05-21 CN CNB2004100457066A patent/CN100401483C/zh not_active Expired - Fee Related
- 2004-05-21 CN CN2008100955430A patent/CN101271870B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004349405A (ja) | 2004-12-09 |
| TWI334167B (zh) | 2010-12-01 |
| CN1574247A (zh) | 2005-02-02 |
| TW200509224A (en) | 2005-03-01 |
| KR20040100937A (ko) | 2004-12-02 |
| JP4066881B2 (ja) | 2008-03-26 |
| CN100401483C (zh) | 2008-07-09 |
| CN101271870A (zh) | 2008-09-24 |
| CN101271870B (zh) | 2010-12-08 |
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