KR101049872B1 - 부상 반송 장치 - Google Patents

부상 반송 장치 Download PDF

Info

Publication number
KR101049872B1
KR101049872B1 KR1020090050391A KR20090050391A KR101049872B1 KR 101049872 B1 KR101049872 B1 KR 101049872B1 KR 1020090050391 A KR1020090050391 A KR 1020090050391A KR 20090050391 A KR20090050391 A KR 20090050391A KR 101049872 B1 KR101049872 B1 KR 101049872B1
Authority
KR
South Korea
Prior art keywords
floating
conveying
support roller
vertex
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020090050391A
Other languages
English (en)
Korean (ko)
Other versions
KR20090127818A (ko
Inventor
겐스케 히라타
Original Assignee
가부시키가이샤 아이에이치아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 아이에이치아이 filed Critical 가부시키가이샤 아이에이치아이
Publication of KR20090127818A publication Critical patent/KR20090127818A/ko
Application granted granted Critical
Publication of KR101049872B1 publication Critical patent/KR101049872B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Catching Or Destruction (AREA)
  • Soil Working Implements (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
KR1020090050391A 2008-06-09 2009-06-08 부상 반송 장치 Active KR101049872B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2008-150957 2008-06-09
JP2008150957A JP5422925B2 (ja) 2008-06-09 2008-06-09 浮上搬送装置

Publications (2)

Publication Number Publication Date
KR20090127818A KR20090127818A (ko) 2009-12-14
KR101049872B1 true KR101049872B1 (ko) 2011-07-15

Family

ID=41541200

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090050391A Active KR101049872B1 (ko) 2008-06-09 2009-06-08 부상 반송 장치

Country Status (4)

Country Link
JP (1) JP5422925B2 (enrdf_load_stackoverflow)
KR (1) KR101049872B1 (enrdf_load_stackoverflow)
CN (2) CN102673939B (enrdf_load_stackoverflow)
TW (1) TW201010921A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5604940B2 (ja) * 2010-03-31 2014-10-15 株式会社Ｉｈｉ 浮上搬送装置
CN103159028B (zh) * 2011-12-09 2017-05-03 株式会社妙德 悬浮输送单元
WO2025015614A1 (en) * 2023-07-20 2025-01-23 Kateeva Inc. Substrate loading and staging without lift pins

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
KR20040054533A (ko) * 2002-12-18 2004-06-25 마루야스 키카이 카부시키가이샤 롤러 컨베이어
KR100818208B1 (ko) * 2005-11-14 2008-04-01 가부시키가이샤 아이에이치아이 부상 장치 및 반송 장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4626205B2 (ja) * 2004-07-28 2011-02-02 シンフォニアテクノロジー株式会社 基板の受渡し方法、及びその装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
JP4780984B2 (ja) * 2005-03-18 2011-09-28 オリンパス株式会社 基板搬送装置
JP4529794B2 (ja) * 2005-05-19 2010-08-25 シンフォニアテクノロジー株式会社 気体浮上搬送装置
JP4842748B2 (ja) * 2006-09-22 2011-12-21 オリンパス株式会社 基板搬送システム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
KR20010066884A (ko) * 1999-06-28 2001-07-11 추후제출 부상 반송 장치
KR20040054533A (ko) * 2002-12-18 2004-06-25 마루야스 키카이 카부시키가이샤 롤러 컨베이어
KR100818208B1 (ko) * 2005-11-14 2008-04-01 가부시키가이샤 아이에이치아이 부상 장치 및 반송 장치

Also Published As

Publication number Publication date
TW201010921A (en) 2010-03-16
JP5422925B2 (ja) 2014-02-19
CN102673939B (zh) 2015-11-04
CN102673939A (zh) 2012-09-19
CN101633442A (zh) 2010-01-27
TWI378066B (enrdf_load_stackoverflow) 2012-12-01
JP2009292643A (ja) 2009-12-17
KR20090127818A (ko) 2009-12-14

Similar Documents

Publication Publication Date Title
JP6032348B2 (ja) 搬送装置
TW201024192A (en) Gas-ejecting bearings for transport of glass sheets
KR101141122B1 (ko) 부상 반송 장치 및 부상 반송 장치를 포함하는 처리 시스템
KR101049872B1 (ko) 부상 반송 장치
KR20100040904A (ko) 방향 전환 장치 및 방향 전환 장치를 포함하는 부상 반송 시스템
KR101135000B1 (ko) 부상 반송 장치
KR20100018613A (ko) 부상 장치 및 부상 반송 장치
WO2013161375A1 (ja) 搬送装置
KR20100054857A (ko) 부상 장치 및 부상 반송 장치
KR101214888B1 (ko) 부상 반송 장치
KR101144878B1 (ko) 부상 장치 및 부상 반송 장치
KR100865702B1 (ko) 에어롤러 및 이를 이용한 컨베이어
KR101610215B1 (ko) 반송 장치
KR20120005263U (ko) 부상 장치 및 부상 반송 장치
KR100573925B1 (ko) 공압 컨베이어의 가감속도 조절방법 및 이를 이용한 공압컨베이어
KR20040105325A (ko) 판상부재의 반송장치
JP2005162491A (ja) 板材搬送方法および板材搬送装置

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20090608

PA0201 Request for examination
PG1501 Laying open of application
E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20110621

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20110711

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20110711

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20140626

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20140626

Start annual number: 4

End annual number: 4

FPAY Annual fee payment

Payment date: 20150618

Year of fee payment: 5

PR1001 Payment of annual fee

Payment date: 20150618

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20160616

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20160616

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20170616

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20170616

Start annual number: 7

End annual number: 7

FPAY Annual fee payment

Payment date: 20190617

Year of fee payment: 9

PR1001 Payment of annual fee

Payment date: 20190617

Start annual number: 9

End annual number: 9

PR1001 Payment of annual fee

Payment date: 20200618

Start annual number: 10

End annual number: 10

PR1001 Payment of annual fee

Payment date: 20210617

Start annual number: 11

End annual number: 11

PR1001 Payment of annual fee

Payment date: 20220615

Start annual number: 12

End annual number: 12