KR101026571B1 - 기체 연소 장치 - Google Patents

기체 연소 장치 Download PDF

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Publication number
KR101026571B1
KR101026571B1 KR1020077025396A KR20077025396A KR101026571B1 KR 101026571 B1 KR101026571 B1 KR 101026571B1 KR 1020077025396 A KR1020077025396 A KR 1020077025396A KR 20077025396 A KR20077025396 A KR 20077025396A KR 101026571 B1 KR101026571 B1 KR 101026571B1
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KR
South Korea
Prior art keywords
combustion
hydrogen
exhaust gas
gas
chamber
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KR1020077025396A
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English (en)
Korean (ko)
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KR20080009274A (ko
Inventor
다렌 멘니
니콜라스 벤자민 존스
Original Assignee
에드워즈 리미티드
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C2900/00—Special features of, or arrangements for combustion apparatus using fluid fuels or solid fuels suspended in air; Combustion processes therefor
    • F23C2900/9901—Combustion process using hydrogen, hydrogen peroxide water or brown gas as fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane

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  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Incineration Of Waste (AREA)
  • Regulation And Control Of Combustion (AREA)
  • Gas Separation By Absorption (AREA)
KR1020077025396A 2005-05-05 2006-04-28 기체 연소 장치 Expired - Lifetime KR101026571B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0509163.2 2005-05-05
GBGB0509163.2A GB0509163D0 (en) 2005-05-05 2005-05-05 Gas combustion apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020117001707A Division KR101060340B1 (ko) 2005-05-05 2006-04-28 기체 연소 장치

Publications (2)

Publication Number Publication Date
KR20080009274A KR20080009274A (ko) 2008-01-28
KR101026571B1 true KR101026571B1 (ko) 2011-03-31

Family

ID=34685116

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020077025396A Expired - Lifetime KR101026571B1 (ko) 2005-05-05 2006-04-28 기체 연소 장치
KR1020117001707A Expired - Lifetime KR101060340B1 (ko) 2005-05-05 2006-04-28 기체 연소 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020117001707A Expired - Lifetime KR101060340B1 (ko) 2005-05-05 2006-04-28 기체 연소 장치

Country Status (10)

Country Link
US (1) US8647111B2 (https=)
EP (1) EP1877701B1 (https=)
JP (1) JP4700729B2 (https=)
KR (2) KR101026571B1 (https=)
CN (1) CN101171455B (https=)
AT (1) ATE523736T1 (https=)
ES (1) ES2368000T3 (https=)
GB (1) GB0509163D0 (https=)
TW (1) TWI391611B (https=)
WO (1) WO2006117531A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140051103A (ko) * 2011-08-19 2014-04-30 다이요 닛산 가부시키가이샤 연소 제해 장치

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0521944D0 (en) 2005-10-27 2005-12-07 Boc Group Plc Method of treating gas
GB0613044D0 (en) * 2006-06-30 2006-08-09 Boc Group Plc Gas combustion apparatus
CN101952933A (zh) * 2008-02-18 2011-01-19 应用材料公司 由对排出物进行有效消减的减排系统采用的供应燃料的设备和方法
EP2326878A2 (en) * 2008-09-26 2011-06-01 Air Products and Chemicals, Inc. Combustion system with precombustor for recycled flue gas
GB0902234D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Method of treating an exhaust gas stream
GB0902221D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Pilot
GB2477277B (en) * 2010-01-27 2012-02-01 Rifat Al Chalabi Improvements in thermal oxidisers
JP2012255420A (ja) * 2011-06-10 2012-12-27 Nippon Shokubai Co Ltd ガスタービンシステム
WO2013018576A1 (ja) * 2011-07-29 2013-02-07 エドワーズ株式会社 排ガス燃焼装置
JP2013063384A (ja) * 2011-09-16 2013-04-11 Taiyo Nippon Sanso Corp 排ガス処理方法および排ガス処理装置
CN104254489B (zh) * 2011-10-18 2017-09-15 国际壳牌研究有限公司 合成气的生产
JP6174316B2 (ja) * 2012-12-27 2017-08-02 エドワーズ株式会社 除害装置
JP5785979B2 (ja) * 2013-04-24 2015-09-30 大陽日酸株式会社 排ガス処理装置
GB2544552A (en) 2015-11-20 2017-05-24 Siemens Ag A gas turbine system
KR101839847B1 (ko) * 2017-08-25 2018-03-19 단국대학교 산학협력단 유증기 연소처리장치
GB2579197B (en) * 2018-11-22 2021-06-09 Edwards Ltd Abatement method
DE102019117331B4 (de) * 2019-06-27 2024-07-04 Das Environmental Expert Gmbh Brenner zur Erzeugung einer Flamme für die Verbrennung von Prozessgas und Abgasbehandlungsvorrichtung mit einem Brenner
GB2588775A (en) 2019-11-05 2021-05-12 Edwards Ltd Optimising operating conditions in an abatement apparatus
JP7037697B1 (ja) 2021-09-29 2022-03-16 三菱重工パワーインダストリー株式会社 燃焼設備
CN115899726B (zh) * 2023-02-10 2024-01-19 北京中科富海低温科技有限公司 氢气燃烧池的氢气点燃装置及氢气燃烧系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0195214A (ja) * 1987-10-06 1989-04-13 Toyo Sanso Kk 特殊材料ガスの燃焼方法
JPH109551A (ja) * 1996-06-19 1998-01-16 Osaka Oxygen Ind Ltd 排ガス燃焼方法及びその装置
JP2005003331A (ja) 2003-06-16 2005-01-06 Japan Pionics Co Ltd 有害ガスの燃焼式除害装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3508868A (en) * 1965-07-03 1970-04-28 Mitsui Toatsu Chemicals Method of treating exhaust gases containing sulfur dioxide
US4113838A (en) * 1976-12-30 1978-09-12 Mitsubishi Chemical Industries, Ltd. Method of treating combustion exhaust gas containing nitrogen oxides
US4555389A (en) * 1984-04-27 1985-11-26 Toyo Sanso Co., Ltd. Method of and apparatus for burning exhaust gases containing gaseous silane
JPS6387519A (ja) * 1986-09-29 1988-04-18 Mitsubishi Jushi Eng Kk 半導体製造装置の排ガス燃焼方法
FR2612606B1 (fr) * 1987-03-18 1990-09-14 Air Liquide Procede et dispositif de destruction d'effluents gazeux toxiques
JPS649551A (en) 1987-07-02 1989-01-12 Tokyo Electric Co Ltd Memory controller
JPH0277433A (ja) 1988-09-14 1990-03-16 Nissan Motor Co Ltd 硬質保護膜を有する着色樹脂成形体
JPH0344993Y2 (https=) * 1988-11-21 1991-09-24
US4988287A (en) * 1989-06-20 1991-01-29 Phillips Petroleum Company Combustion apparatus and method
JP3486022B2 (ja) * 1995-10-16 2004-01-13 ジャパン・エア・ガシズ株式会社 排ガス処理装置
JPH10110926A (ja) * 1996-08-14 1998-04-28 Nippon Sanso Kk 燃焼式除害装置
JPH10141648A (ja) * 1996-11-08 1998-05-29 Toshiba Mach Co Ltd ガス窒化排ガス処理方法およびその装置
GB0026697D0 (en) 2000-11-01 2000-12-20 Boc Group Plc Removal of noxious substances from gas streams
DE10128414A1 (de) * 2001-06-12 2002-12-19 Daimler Chrysler Ag Abgasreinigungsanlage mit Reduktionsmittelversorgung
JP3924150B2 (ja) * 2001-10-26 2007-06-06 三菱重工業株式会社 ガス燃焼処理方法およびその装置
JP2004012049A (ja) * 2002-06-07 2004-01-15 Nippon Sanso Corp 除害装置
JP2004112049A (ja) 2002-09-13 2004-04-08 Fujitsu Ltd 通信端末装置及びサーバ装置
JP2004207025A (ja) * 2002-12-25 2004-07-22 Nissan Motor Co Ltd 触媒燃焼器および燃料電池システム
US7736599B2 (en) * 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US7682574B2 (en) * 2004-11-18 2010-03-23 Applied Materials, Inc. Safety, monitoring and control features for thermal abatement reactor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0195214A (ja) * 1987-10-06 1989-04-13 Toyo Sanso Kk 特殊材料ガスの燃焼方法
JPH109551A (ja) * 1996-06-19 1998-01-16 Osaka Oxygen Ind Ltd 排ガス燃焼方法及びその装置
JP3490843B2 (ja) 1996-06-19 2004-01-26 日本エドワーズ株式会社 排ガス燃焼方法及びその装置
JP2005003331A (ja) 2003-06-16 2005-01-06 Japan Pionics Co Ltd 有害ガスの燃焼式除害装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140051103A (ko) * 2011-08-19 2014-04-30 다이요 닛산 가부시키가이샤 연소 제해 장치
KR101887248B1 (ko) * 2011-08-19 2018-08-09 다이요 닛산 가부시키가이샤 연소 제해 장치

Also Published As

Publication number Publication date
GB0509163D0 (en) 2005-06-15
JP2008540990A (ja) 2008-11-20
JP4700729B2 (ja) 2011-06-15
EP1877701A1 (en) 2008-01-16
US20090064909A1 (en) 2009-03-12
CN101171455A (zh) 2008-04-30
EP1877701B1 (en) 2011-09-07
TW200706807A (en) 2007-02-16
WO2006117531A1 (en) 2006-11-09
TWI391611B (zh) 2013-04-01
KR20110036065A (ko) 2011-04-06
CN101171455B (zh) 2012-05-09
KR101060340B1 (ko) 2011-08-29
ATE523736T1 (de) 2011-09-15
ES2368000T3 (es) 2011-11-11
KR20080009274A (ko) 2008-01-28
US8647111B2 (en) 2014-02-11

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