KR101008224B1 - 실리콘 온 인슐레이터 웨이퍼를 이용한 고전압 씨모스소자 및 그 제조방법 - Google Patents
실리콘 온 인슐레이터 웨이퍼를 이용한 고전압 씨모스소자 및 그 제조방법 Download PDFInfo
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- KR101008224B1 KR101008224B1 KR1020030067553A KR20030067553A KR101008224B1 KR 101008224 B1 KR101008224 B1 KR 101008224B1 KR 1020030067553 A KR1020030067553 A KR 1020030067553A KR 20030067553 A KR20030067553 A KR 20030067553A KR 101008224 B1 KR101008224 B1 KR 101008224B1
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- Prior art keywords
- silicon
- gate
- forming
- wafer
- high voltage
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 78
- 239000010703 silicon Substances 0.000 title claims abstract description 77
- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000012212 insulator Substances 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 85
- 238000005530 etching Methods 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 230000005012 migration Effects 0.000 claims abstract description 7
- 238000013508 migration Methods 0.000 claims abstract description 7
- 238000000137 annealing Methods 0.000 claims abstract 2
- 238000002955 isolation Methods 0.000 abstract description 8
- 230000003647 oxidation Effects 0.000 abstract description 3
- 238000007254 oxidation reaction Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 52
- 235000012431 wafers Nutrition 0.000 description 19
- 238000010438 heat treatment Methods 0.000 description 10
- 230000015556 catabolic process Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Element Separation (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (8)
- 실리콘 웨이퍼 상에 산화막층을 형성하는 단계와,상기 산화막층 상에 실리콘 기판을 형성하는 단계와,상기 실리콘 기판을 식각하여 실리콘층 패턴을 형성하는 단계와,상기 실리콘층 패턴에 고온 H2 열처리(high temperatured H2 anneal; HTHA)를 실시하여 상기 실리콘층 패턴의 모서리부에 위치하는 실리콘 원자들이 모서리부 외측의 상기 실리콘층 패턴 부분으로 이동(migration)하게 하여 상기 실리콘층 패턴의 모서리부 형상을 굴곡진 라운드(round) 형태로 변형하는 단계와,상기 실리콘층 패턴 상에 게이트 산화막을 형성하는 단계와,상기 게이트 산화막 상에 게이트 폴리를 형성하는 단계를 포함하는 것을 특징으로 하는 실리콘 온 인슐레이터(silicon on insulator; SOI) 웨이퍼를 이용한 고전압 씨모스 소자의 제조방법.
- 삭제
- 제 1항에 있어서, 상기 HTHA 공정은 900 ℃ 내지 1,000 ℃ 정도의 범위에서 60초 실시하는 것을 특징으로 하는 실리콘 온 인슐레이터 웨이퍼를 이용한 고전압 씨모스 소자의 제조방법.
- 제 1항에 있어서,상기 HTHA 공정은 370 Torr 내지 390 Torr 범위의 압력으로 수행되는 것을 특징으로 하는 실리콘 온 인슐레이터 웨이퍼를 이용한 고전압 씨모스 소자의 제조방법.
- 실리콘 웨이퍼 상에 형성된 산화막층과,상기 산화막층 상에 형성되고, 모서리부가 굴곡진 라운드(round) 형상인 실리콘층 패턴;상기 실리콘층 패턴 상에 형성된 게이트 산화막과,상기 게이트 산화막 상에 형성된 게이트 폴리를 포함하는 것을 특징으로 하는 실리콘 온 인슐레이터(silicon on insulator; SOI) 웨이퍼를 이용한 고전압 씨모스 소자.
- 삭제
- 삭제
- 삭제
Priority Applications (1)
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KR1020030067553A KR101008224B1 (ko) | 2003-09-29 | 2003-09-29 | 실리콘 온 인슐레이터 웨이퍼를 이용한 고전압 씨모스소자 및 그 제조방법 |
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KR1020030067553A KR101008224B1 (ko) | 2003-09-29 | 2003-09-29 | 실리콘 온 인슐레이터 웨이퍼를 이용한 고전압 씨모스소자 및 그 제조방법 |
Publications (2)
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KR20050031295A KR20050031295A (ko) | 2005-04-06 |
KR101008224B1 true KR101008224B1 (ko) | 2011-01-17 |
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Families Citing this family (1)
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KR100891227B1 (ko) * | 2007-10-25 | 2009-04-01 | 주식회사 동부하이텍 | 반도체 소자의 제조 방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19980048091A (ko) * | 1996-12-17 | 1998-09-15 | 문정환 | 반도체소자의 소자격리구조 형성방법 |
KR19990027225A (ko) * | 1997-09-29 | 1999-04-15 | 신현준 | 단결정 선구조의 soi 웨이퍼 및 그 제조방법 |
JPH11354760A (ja) | 1998-06-04 | 1999-12-24 | Shin Etsu Handotai Co Ltd | Soiウェーハの製造方法及びsoiウェーハ |
JP2001338975A (ja) | 2000-05-30 | 2001-12-07 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
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- 2003-09-29 KR KR1020030067553A patent/KR101008224B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19980048091A (ko) * | 1996-12-17 | 1998-09-15 | 문정환 | 반도체소자의 소자격리구조 형성방법 |
KR19990027225A (ko) * | 1997-09-29 | 1999-04-15 | 신현준 | 단결정 선구조의 soi 웨이퍼 및 그 제조방법 |
JPH11354760A (ja) | 1998-06-04 | 1999-12-24 | Shin Etsu Handotai Co Ltd | Soiウェーハの製造方法及びsoiウェーハ |
JP2001338975A (ja) | 2000-05-30 | 2001-12-07 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
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