KR100998781B1 - 광학식 센서 장치 - Google Patents

광학식 센서 장치 Download PDF

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Publication number
KR100998781B1
KR100998781B1 KR1020090004375A KR20090004375A KR100998781B1 KR 100998781 B1 KR100998781 B1 KR 100998781B1 KR 1020090004375 A KR1020090004375 A KR 1020090004375A KR 20090004375 A KR20090004375 A KR 20090004375A KR 100998781 B1 KR100998781 B1 KR 100998781B1
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KR
South Korea
Prior art keywords
light
light receiving
foreign material
optical sensor
received
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020090004375A
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English (en)
Korean (ko)
Other versions
KR20090098666A (ko
Inventor
히데유키 무라이
코스케 스기야마
코이치 에카와
타카시 카메이
Original Assignee
오므론 가부시키가이샤
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Publication date
Application filed by 오므론 가부시키가이샤 filed Critical 오므론 가부시키가이샤
Publication of KR20090098666A publication Critical patent/KR20090098666A/ko
Application granted granted Critical
Publication of KR100998781B1 publication Critical patent/KR100998781B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
KR1020090004375A 2008-03-14 2009-01-20 광학식 센서 장치 Expired - Fee Related KR100998781B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2008-065180 2008-03-14
JP2008065180 2008-03-14

Publications (2)

Publication Number Publication Date
KR20090098666A KR20090098666A (ko) 2009-09-17
KR100998781B1 true KR100998781B1 (ko) 2010-12-06

Family

ID=41306294

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090004375A Expired - Fee Related KR100998781B1 (ko) 2008-03-14 2009-01-20 광학식 센서 장치

Country Status (2)

Country Link
JP (1) JP5446316B2 (enExample)
KR (1) KR100998781B1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5601984B2 (ja) * 2010-11-16 2014-10-08 東洋鋼鈑株式会社 多孔板表面検査方法及び多孔板表面検査装置
JP5702990B2 (ja) * 2010-11-16 2015-04-15 東洋鋼鈑株式会社 板材検査方法及び板材検査装置
JP5927010B2 (ja) 2012-04-09 2016-05-25 株式会社日立ハイテクノロジーズ 検査装置
JP7181828B2 (ja) * 2019-03-29 2022-12-01 古野電気株式会社 分析装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351441A (ja) 2005-06-17 2006-12-28 Omron Corp 光学式センサ装置
KR100775086B1 (ko) 2006-06-02 2007-11-08 주식회사 케이씨텍 이물질 감지 장치 및 방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4616120B2 (ja) * 2005-08-08 2011-01-19 株式会社日立ハイテクノロジーズ 画像処理装置及び検査装置
JP4648880B2 (ja) * 2006-07-31 2011-03-09 パナソニック電工Ｓｕｎｘ株式会社 異物検出装置
JP4700574B2 (ja) * 2006-07-31 2011-06-15 パナソニック電工Ｓｕｎｘ株式会社 異物検出装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351441A (ja) 2005-06-17 2006-12-28 Omron Corp 光学式センサ装置
KR100775086B1 (ko) 2006-06-02 2007-11-08 주식회사 케이씨텍 이물질 감지 장치 및 방법

Also Published As

Publication number Publication date
JP5446316B2 (ja) 2014-03-19
KR20090098666A (ko) 2009-09-17
JP2009244256A (ja) 2009-10-22

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