KR100997929B1 - 밀봉된 일체식 멤스 스위치 - Google Patents

밀봉된 일체식 멤스 스위치 Download PDF

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Publication number
KR100997929B1
KR100997929B1 KR1020057001977A KR20057001977A KR100997929B1 KR 100997929 B1 KR100997929 B1 KR 100997929B1 KR 1020057001977 A KR1020057001977 A KR 1020057001977A KR 20057001977 A KR20057001977 A KR 20057001977A KR 100997929 B1 KR100997929 B1 KR 100997929B1
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South Korea
Prior art keywords
seesaw
switch
shorting bar
electrical
mems switch
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Expired - Fee Related
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KR1020057001977A
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English (en)
Korean (ko)
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KR20050083613A (ko
Inventor
개리 조셉 파쉬비
티모시 지. 슬레이터
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시베르타 인코퍼레이티드
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/04—Networks or arrays of similar microstructural devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0054—Rocking contacts or actuating members

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
KR1020057001977A 2002-08-03 2003-08-04 밀봉된 일체식 멤스 스위치 Expired - Fee Related KR100997929B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US40131102P 2002-08-03 2002-08-03
US60/401,311 2002-08-03
US41532502P 2002-10-02 2002-10-02
US60/415,325 2002-10-02
US44295803P 2003-01-29 2003-01-29
US60/442,958 2003-01-29

Publications (2)

Publication Number Publication Date
KR20050083613A KR20050083613A (ko) 2005-08-26
KR100997929B1 true KR100997929B1 (ko) 2010-12-02

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KR1020057001977A Expired - Fee Related KR100997929B1 (ko) 2002-08-03 2003-08-04 밀봉된 일체식 멤스 스위치

Country Status (6)

Country Link
US (1) US7123119B2 (enExample)
EP (1) EP1547189A4 (enExample)
JP (1) JP2006515953A (enExample)
KR (1) KR100997929B1 (enExample)
AU (1) AU2003258020A1 (enExample)
WO (1) WO2004013898A2 (enExample)

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US7479685B2 (en) 2006-03-10 2009-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Electronic device on substrate with cavity and mitigated parasitic leakage path
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US8902023B2 (en) 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
JP5398411B2 (ja) * 2009-08-10 2014-01-29 株式会社東芝 マイクロ可動デバイスおよびマイクロ可動デバイスの製造方法
US8193877B2 (en) 2009-11-30 2012-06-05 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Duplexer with negative phase shifting circuit
JP5385117B2 (ja) * 2009-12-17 2014-01-08 富士フイルム株式会社 圧電ｍｅｍｓスイッチの製造方法
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9490771B2 (en) 2012-10-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and frame
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US9490418B2 (en) 2011-03-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer
US9401692B2 (en) 2012-10-29 2016-07-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator having collar structure
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
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US8940586B2 (en) * 2011-11-23 2015-01-27 Taiwan Semiconductor Manufacturing Co., Ltd. Mechanism for MEMS bump side wall angle improvement
US9165723B2 (en) 2012-08-23 2015-10-20 Harris Corporation Switches for use in microelectromechanical and other systems, and processes for making same
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Also Published As

Publication number Publication date
WO2004013898A2 (en) 2004-02-12
KR20050083613A (ko) 2005-08-26
AU2003258020A8 (en) 2004-02-23
WO2004013898A3 (en) 2004-06-10
AU2003258020A1 (en) 2004-02-23
JP2006515953A (ja) 2006-06-08
US7123119B2 (en) 2006-10-17
EP1547189A2 (en) 2005-06-29
US20050206483A1 (en) 2005-09-22
EP1547189A4 (en) 2006-11-08

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