AU2003258020A1 - Sealed integral mems switch - Google Patents

Sealed integral mems switch

Info

Publication number
AU2003258020A1
AU2003258020A1 AU2003258020A AU2003258020A AU2003258020A1 AU 2003258020 A1 AU2003258020 A1 AU 2003258020A1 AU 2003258020 A AU2003258020 A AU 2003258020A AU 2003258020 A AU2003258020 A AU 2003258020A AU 2003258020 A1 AU2003258020 A1 AU 2003258020A1
Authority
AU
Australia
Prior art keywords
mems switch
sealed integral
integral mems
sealed
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003258020A
Other languages
English (en)
Other versions
AU2003258020A8 (en
Inventor
Gary Joseph Pashby
Timothy G. Slater
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siverta Inc
Original Assignee
Siverta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siverta Inc filed Critical Siverta Inc
Publication of AU2003258020A8 publication Critical patent/AU2003258020A8/xx
Publication of AU2003258020A1 publication Critical patent/AU2003258020A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/04—Networks or arrays of similar microstructural devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0054—Rocking contacts or actuating members

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
AU2003258020A 2002-08-03 2003-08-04 Sealed integral mems switch Abandoned AU2003258020A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US40131102P 2002-08-03 2002-08-03
US60/401,311 2002-08-03
US41532502P 2002-10-02 2002-10-02
US60/415,325 2002-10-02
US44295803P 2003-01-29 2003-01-29
US60/442,958 2003-01-29
PCT/US2003/024255 WO2004013898A2 (en) 2002-08-03 2003-08-04 Sealed integral mems switch

Publications (2)

Publication Number Publication Date
AU2003258020A8 AU2003258020A8 (en) 2004-02-23
AU2003258020A1 true AU2003258020A1 (en) 2004-02-23

Family

ID=31499336

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003258020A Abandoned AU2003258020A1 (en) 2002-08-03 2003-08-04 Sealed integral mems switch

Country Status (6)

Country Link
US (1) US7123119B2 (enExample)
EP (1) EP1547189A4 (enExample)
JP (1) JP2006515953A (enExample)
KR (1) KR100997929B1 (enExample)
AU (1) AU2003258020A1 (enExample)
WO (1) WO2004013898A2 (enExample)

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US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9490771B2 (en) 2012-10-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and frame
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US9490418B2 (en) 2011-03-29 2016-11-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer
US9401692B2 (en) 2012-10-29 2016-07-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator having collar structure
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
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US8940586B2 (en) * 2011-11-23 2015-01-27 Taiwan Semiconductor Manufacturing Co., Ltd. Mechanism for MEMS bump side wall angle improvement
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US9203133B2 (en) 2012-10-18 2015-12-01 Harris Corporation Directional couplers with variable frequency response
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Also Published As

Publication number Publication date
WO2004013898A2 (en) 2004-02-12
KR20050083613A (ko) 2005-08-26
AU2003258020A8 (en) 2004-02-23
WO2004013898A3 (en) 2004-06-10
KR100997929B1 (ko) 2010-12-02
JP2006515953A (ja) 2006-06-08
US7123119B2 (en) 2006-10-17
EP1547189A2 (en) 2005-06-29
US20050206483A1 (en) 2005-09-22
EP1547189A4 (en) 2006-11-08

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase