KR100986651B1 - 하전입자선 묘화장치 및 디바이스 제조방법 - Google Patents

하전입자선 묘화장치 및 디바이스 제조방법 Download PDF

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Publication number
KR100986651B1
KR100986651B1 KR1020080081816A KR20080081816A KR100986651B1 KR 100986651 B1 KR100986651 B1 KR 100986651B1 KR 1020080081816 A KR1020080081816 A KR 1020080081816A KR 20080081816 A KR20080081816 A KR 20080081816A KR 100986651 B1 KR100986651 B1 KR 100986651B1
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KR
South Korea
Prior art keywords
charged particle
cylindrical electrode
lens
particle beam
magnetic field
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020080081816A
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English (en)
Korean (ko)
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KR20090024622A (ko
Inventor
스스무 고토
Original Assignee
캐논 가부시끼가이샤
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Publication of KR20090024622A publication Critical patent/KR20090024622A/ko
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3175—Projection methods, i.e. transfer substantially complete pattern to substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/047—Changing particle velocity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/049—Focusing means
    • H01J2237/0492—Lens systems
    • H01J2237/04926—Lens systems combined
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/153—Correcting image defects, e.g. stigmators
    • H01J2237/1538—Space charge (Boersch) effect compensation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Electron Beam Exposure (AREA)
KR1020080081816A 2007-09-04 2008-08-21 하전입자선 묘화장치 및 디바이스 제조방법 Expired - Fee Related KR100986651B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-00229454 2007-09-04
JP2007229454A JP5230148B2 (ja) 2007-09-04 2007-09-04 荷電粒子線描画装置及びデバイス製造方法

Publications (2)

Publication Number Publication Date
KR20090024622A KR20090024622A (ko) 2009-03-09
KR100986651B1 true KR100986651B1 (ko) 2010-10-11

Family

ID=40405919

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080081816A Expired - Fee Related KR100986651B1 (ko) 2007-09-04 2008-08-21 하전입자선 묘화장치 및 디바이스 제조방법

Country Status (4)

Country Link
US (1) US7960703B2 (enExample)
JP (1) JP5230148B2 (enExample)
KR (1) KR100986651B1 (enExample)
TW (1) TWI408508B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5970213B2 (ja) * 2012-03-19 2016-08-17 株式会社ニューフレアテクノロジー マルチ荷電粒子ビーム描画装置及びマルチ荷電粒子ビーム描画方法
JP6013089B2 (ja) * 2012-08-30 2016-10-25 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画方法及び荷電粒子ビーム描画装置
TWI502616B (zh) 2014-08-08 2015-10-01 Nat Univ Tsing Hua 桌上型電子顯微鏡以及其廣域可調式磁透鏡
US9799484B2 (en) * 2014-12-09 2017-10-24 Hermes Microvision, Inc. Charged particle source
JP6480534B1 (ja) * 2017-09-26 2019-03-13 株式会社ニューフレアテクノロジー 荷電粒子ビーム照射装置及び基板の帯電低減方法
JP2019212766A (ja) * 2018-06-05 2019-12-12 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置及び荷電粒子ビーム描画方法
EP4095882A1 (en) 2021-05-25 2022-11-30 IMS Nanofabrication GmbH Pattern data processing for programmable direct-write apparatus
US12500060B2 (en) 2021-07-14 2025-12-16 Ims Nanofabrication Gmbh Electromagnetic lens
US12154756B2 (en) 2021-08-12 2024-11-26 Ims Nanofabrication Gmbh Beam pattern device having beam absorber structure

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030004116A (ko) * 2001-07-02 2003-01-14 칼 짜이스 세미컨덕터 매뉴팩츄어링 테크놀로지즈 악티엔게젤샤프트 대상물의 입자광 이미지용 검사 시스템과 하전입자용편향장치 및 그 작동방법
JP2006221870A (ja) * 2005-02-08 2006-08-24 Ebara Corp 電子線装置

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JPS60201626A (ja) * 1984-03-27 1985-10-12 Canon Inc 位置合わせ装置
JPS61190839A (ja) * 1985-02-19 1986-08-25 Canon Inc 荷電粒子線装置
US4675524A (en) * 1985-03-11 1987-06-23 Siemens Aktiengesellschaft Scanning particle microscope with diminished boersch effect
JPS62183118A (ja) * 1986-02-06 1987-08-11 Canon Inc アライメント装置及び方法
US5146090A (en) * 1990-06-11 1992-09-08 Siemens Aktiengesellschaft Particle beam apparatus having an immersion lens arranged in an intermediate image of the beam
JP3247700B2 (ja) * 1991-03-29 2002-01-21 株式会社日立製作所 走査形投影電子線描画装置および方法
US5770863A (en) * 1995-10-24 1998-06-23 Nikon Corporation Charged particle beam projection apparatus
JPH09129543A (ja) * 1995-11-01 1997-05-16 Nikon Corp 荷電粒子線転写装置
US5929454A (en) * 1996-06-12 1999-07-27 Canon Kabushiki Kaisha Position detection apparatus, electron beam exposure apparatus, and methods associated with them
JP3927620B2 (ja) * 1996-06-12 2007-06-13 キヤノン株式会社 電子ビーム露光方法及びそれを用いたデバイス製造方法
US5912469A (en) * 1996-07-11 1999-06-15 Nikon Corporation Charged-particle-beam microlithography apparatus
US6069363A (en) * 1998-02-26 2000-05-30 International Business Machines Corporation Magnetic-electrostatic symmetric doublet projection lens
JP2000003847A (ja) * 1998-06-15 2000-01-07 Canon Inc 荷電粒子線縮小転写装置及びデバイス製造方法
JP2000173889A (ja) * 1998-12-02 2000-06-23 Canon Inc 電子線露光装置、電子レンズ、ならびにデバイス製造方法
JP2000232052A (ja) * 1999-02-09 2000-08-22 Nikon Corp 荷電粒子線転写露光装置
US6465783B1 (en) * 1999-06-24 2002-10-15 Nikon Corporation High-throughput specimen-inspection apparatus and methods utilizing multiple parallel charged particle beams and an array of multiple secondary-electron-detectors
JP2002343295A (ja) * 2001-05-21 2002-11-29 Canon Inc 電子線露光装置、縮小投影系及びデバイス製造方法
JP4468753B2 (ja) * 2004-06-30 2010-05-26 キヤノン株式会社 荷電粒子線露光装置及び該装置を用いたデバイス製造方法
KR20070116260A (ko) * 2005-03-22 2007-12-07 가부시키가이샤 에바라 세이사꾸쇼 전자선장치
JP4679978B2 (ja) * 2005-06-28 2011-05-11 株式会社日立ハイテクノロジーズ 荷電粒子ビーム応用装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030004116A (ko) * 2001-07-02 2003-01-14 칼 짜이스 세미컨덕터 매뉴팩츄어링 테크놀로지즈 악티엔게젤샤프트 대상물의 입자광 이미지용 검사 시스템과 하전입자용편향장치 및 그 작동방법
JP2006221870A (ja) * 2005-02-08 2006-08-24 Ebara Corp 電子線装置

Also Published As

Publication number Publication date
US7960703B2 (en) 2011-06-14
TWI408508B (zh) 2013-09-11
JP2009064841A (ja) 2009-03-26
KR20090024622A (ko) 2009-03-09
TW200931183A (en) 2009-07-16
JP5230148B2 (ja) 2013-07-10
US20090057571A1 (en) 2009-03-05

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