KR100922145B1 - 전자부품 시험장치 - Google Patents

전자부품 시험장치 Download PDF

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Publication number
KR100922145B1
KR100922145B1 KR1020077025767A KR20077025767A KR100922145B1 KR 100922145 B1 KR100922145 B1 KR 100922145B1 KR 1020077025767 A KR1020077025767 A KR 1020077025767A KR 20077025767 A KR20077025767 A KR 20077025767A KR 100922145 B1 KR100922145 B1 KR 100922145B1
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KR
South Korea
Prior art keywords
test
under test
electronic component
electronic
electronic components
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Expired - Fee Related
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KR1020077025767A
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English (en)
Korean (ko)
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KR20080004579A (ko
Inventor
카쓰히코 스즈끼
시게끼 카네꼬
히로끼 이케다
Original Assignee
가부시키가이샤 아드반테스트
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Application filed by 가부시키가이샤 아드반테스트 filed Critical 가부시키가이샤 아드반테스트
Publication of KR20080004579A publication Critical patent/KR20080004579A/ko
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Publication of KR100922145B1 publication Critical patent/KR100922145B1/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020077025767A 2005-07-13 2006-07-13 전자부품 시험장치 Expired - Fee Related KR100922145B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2005/012947 WO2007007406A1 (ja) 2005-07-13 2005-07-13 電子部品試験装置
WOPCT/JP2005/012947 2005-07-13

Publications (2)

Publication Number Publication Date
KR20080004579A KR20080004579A (ko) 2008-01-09
KR100922145B1 true KR100922145B1 (ko) 2009-10-19

Family

ID=37636814

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077025767A Expired - Fee Related KR100922145B1 (ko) 2005-07-13 2006-07-13 전자부품 시험장치

Country Status (5)

Country Link
US (1) US7859286B2 (enExample)
KR (1) KR100922145B1 (enExample)
CN (1) CN101176007A (enExample)
TW (1) TW200720675A (enExample)
WO (2) WO2007007406A1 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101235285B1 (ko) 2012-11-15 2013-02-21 유호전기공업주식회사 3차원 패턴을 이용한 부분방전 검출장치의 시험 방법
KR20180010480A (ko) 2016-07-21 2018-01-31 세메스 주식회사 반도체 소자 테스트 방법
KR20180012032A (ko) 2016-07-26 2018-02-05 세메스 주식회사 반도체 소자 테스트 장치
KR20180012973A (ko) 2016-07-28 2018-02-07 세메스 주식회사 반도체 소자 테스트 장치
KR20180017594A (ko) 2016-08-10 2018-02-21 세메스 주식회사 반도체 소자 테스트 장치

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100800312B1 (ko) * 2006-01-25 2008-02-04 (주)테크윙 테스트핸들러 및 테스트핸들러의 로딩방법
JP2011197203A (ja) * 2010-03-18 2011-10-06 Renesas Electronics Corp ドライバ及び表示装置
JP4955792B2 (ja) * 2010-04-28 2012-06-20 シャープ株式会社 電子部品動作機能測定装置および電子部品動作機能測定方法
TWI416652B (zh) * 2010-08-20 2013-11-21 Chroma Ate Inc With a single through the shuttle shuttle of the semiconductor components test machine
TWI398654B (zh) * 2011-11-22 2013-06-11 Chroma Ate Inc Semiconductor automation testing machine with temperature control system
JP6094733B2 (ja) * 2012-11-26 2017-03-15 澁谷工業株式会社 物品分類装置
TWI472778B (zh) * 2013-08-30 2015-02-11 Chroma Ate Inc System - level IC test machine automatic retest method and the test machine
CN104670892B (zh) * 2013-11-29 2017-02-08 鸿富锦精密工业（深圳）有限公司 取放料装置
CN104880618B (zh) * 2014-02-28 2019-06-07 惠州市德赛西威汽车电子股份有限公司 一种复合并行测试系统及方法
JP6245445B2 (ja) * 2014-07-07 2017-12-13 Smc株式会社 アクチュエータのタクト計測装置及びセンサ信号検知装置
KR102656451B1 (ko) * 2016-03-18 2024-04-12 (주)테크윙 전자부품 테스트용 핸들러
CN106017727B (zh) * 2016-05-16 2018-11-06 合肥市芯海电子科技有限公司 一种多芯片温度测试及标定系统及方法
KR102270760B1 (ko) * 2019-11-29 2021-06-30 에이엠티 주식회사 미세 피치를 갖는 디바이스의 테스트장치
TWI832311B (zh) 2022-06-30 2024-02-11 美商金士頓數位股份有限公司 用於積體電路裝置的自動化測試系統及自動化測試方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002207062A (ja) 2001-01-09 2002-07-26 Advantest Corp 電子部品試験装置におけるソケットの電気特性相関取得方法、ハンドラ、ハンドラの制御方法および電子部品試験装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001033514A (ja) 1999-07-23 2001-02-09 Advantest Corp 電子部品試験装置用加熱板
JP2001230481A (ja) * 2000-02-21 2001-08-24 Sharp Corp 半導体レーザチップのスクリーニング装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002207062A (ja) 2001-01-09 2002-07-26 Advantest Corp 電子部品試験装置におけるソケットの電気特性相関取得方法、ハンドラ、ハンドラの制御方法および電子部品試験装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101235285B1 (ko) 2012-11-15 2013-02-21 유호전기공업주식회사 3차원 패턴을 이용한 부분방전 검출장치의 시험 방법
KR20180010480A (ko) 2016-07-21 2018-01-31 세메스 주식회사 반도체 소자 테스트 방법
KR20180012032A (ko) 2016-07-26 2018-02-05 세메스 주식회사 반도체 소자 테스트 장치
KR20180012973A (ko) 2016-07-28 2018-02-07 세메스 주식회사 반도체 소자 테스트 장치
KR20180017594A (ko) 2016-08-10 2018-02-21 세메스 주식회사 반도체 소자 테스트 장치

Also Published As

Publication number Publication date
TW200720675A (en) 2007-06-01
TWI303719B (enExample) 2008-12-01
WO2007007406A1 (ja) 2007-01-18
US7859286B2 (en) 2010-12-28
CN101176007A (zh) 2008-05-07
US20090058439A1 (en) 2009-03-05
KR20080004579A (ko) 2008-01-09
WO2007007835A1 (ja) 2007-01-18

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