KR100893991B1 - 약액 공급장치 - Google Patents

약액 공급장치 Download PDF

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Publication number
KR100893991B1
KR100893991B1 KR1020070090441A KR20070090441A KR100893991B1 KR 100893991 B1 KR100893991 B1 KR 100893991B1 KR 1020070090441 A KR1020070090441 A KR 1020070090441A KR 20070090441 A KR20070090441 A KR 20070090441A KR 100893991 B1 KR100893991 B1 KR 100893991B1
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KR
South Korea
Prior art keywords
seal
piston
chemical liquid
cylinder
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
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KR1020070090441A
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English (en)
Korean (ko)
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KR20080045605A (ko
Inventor
타케오 야지마
Original Assignee
코가네이 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 코가네이 코포레이션 filed Critical 코가네이 코포레이션
Publication of KR20080045605A publication Critical patent/KR20080045605A/ko
Application granted granted Critical
Publication of KR100893991B1 publication Critical patent/KR100893991B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/067—Pumps having fluid drive the fluid being actuated directly by a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/107—Pumps having fluid drive the fluid being actuated directly by a piston
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
KR1020070090441A 2006-11-20 2007-09-06 약액 공급장치 Active KR100893991B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006312621A JP4547368B2 (ja) 2006-11-20 2006-11-20 薬液供給装置
JPJP-P-2006-00312621 2006-11-20

Publications (2)

Publication Number Publication Date
KR20080045605A KR20080045605A (ko) 2008-05-23
KR100893991B1 true KR100893991B1 (ko) 2009-04-20

Family

ID=39415639

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070090441A Active KR100893991B1 (ko) 2006-11-20 2007-09-06 약액 공급장치

Country Status (5)

Country Link
US (1) US7871250B2 (https=)
JP (1) JP4547368B2 (https=)
KR (1) KR100893991B1 (https=)
CN (1) CN100549418C (https=)
TW (1) TWI348520B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230023550A (ko) 2021-08-10 2023-02-17 (주)홍성팜스토리 약품 정량 공급장치

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4585563B2 (ja) 2007-12-03 2010-11-24 株式会社コガネイ 薬液供給装置およびポンプ組立体
EP2531729B1 (en) * 2010-02-02 2020-03-04 Dajustco Ip Holdings Inc. Diaphragm pump with hydraulic fluid control system
JP5114527B2 (ja) * 2010-04-20 2013-01-09 株式会社コガネイ 液体供給装置
JP5434781B2 (ja) * 2010-04-28 2014-03-05 東京エレクトロン株式会社 処理液供給機構
JP5438611B2 (ja) 2010-07-09 2014-03-12 株式会社コガネイ 薬液供給装置
JP5475700B2 (ja) * 2011-02-03 2014-04-16 株式会社コガネイ 液体供給方法および装置
KR102122226B1 (ko) * 2013-08-26 2020-06-12 엘지디스플레이 주식회사 약액 공급 장치 및 이를 포함하는 슬릿 코터
JP6225080B2 (ja) 2014-07-17 2017-11-01 株式会社コガネイ 逆止弁および逆止弁を備えた液体供給装置
JP6438784B2 (ja) * 2015-02-03 2018-12-19 東京応化工業株式会社 ポンプおよび塗布装置
JP6780959B2 (ja) * 2016-06-10 2020-11-04 日本ピラー工業株式会社 ベローズポンプ装置
JP6719323B2 (ja) * 2016-08-03 2020-07-08 日本ピラー工業株式会社 往復動ポンプ
JP6174776B1 (ja) * 2016-12-12 2017-08-02 中外炉工業株式会社 塗布液供給装置
JP6956601B2 (ja) 2017-11-10 2021-11-02 東京応化工業株式会社 ポンプ及び塗布装置
US20200384189A1 (en) * 2017-11-29 2020-12-10 Serenno Medical A dual active valve fluid pressure operated positive displacement pump
JP6941570B2 (ja) * 2018-01-19 2021-09-29 日本ピラー工業株式会社 ローリングダイアフラムポンプ
EP3712432B1 (en) * 2019-03-19 2024-07-17 Fast & Fluid Management B.V. Liquid dispenser and method of operating such a dispenser
KR102321443B1 (ko) * 2021-01-28 2021-11-03 박명철 고수명 비접촉식 펌프
US11913301B2 (en) * 2021-04-09 2024-02-27 Schlumberger Technology Corporation Integral bellows for oilfield equipment
JP7808960B2 (ja) * 2021-12-27 2026-01-30 日機装株式会社 封止部材およびサブマージドポンプシステム
LU103099B1 (en) * 2023-04-12 2024-10-14 Stratec Se Pressure monitored piston pump

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030048515A (ko) * 2001-12-12 2003-06-25 가부시키가이샤 고가네이 약액공급장치
JP2003275306A (ja) * 2002-03-26 2003-09-30 Ohtsu Tire & Rubber Co Ltd :The 薬液供給器及び薬液カートリッジ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2951450A (en) * 1956-04-17 1960-09-06 John C Fisher Fluid pump
JPS416418Y1 (https=) 1964-04-13 1966-04-01
US4890851A (en) * 1989-01-19 1990-01-02 Durametallic Corporation Bellows seal with vibration damper
US5085560A (en) * 1990-01-12 1992-02-04 Semitool, Inc. Low contamination blending and metering systems for semiconductor processing
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
GB8909289D0 (en) * 1989-04-24 1989-06-07 Crane John Uk Ltd Mechanical face seals
JPH03149371A (ja) * 1989-11-02 1991-06-25 Nippon Fuiidaa Kogyo Kk ダイヤフラムポンプ
JP3554115B2 (ja) * 1996-08-26 2004-08-18 株式会社コガネイ 薬液供給装置
JP3461725B2 (ja) 1998-06-26 2003-10-27 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法
JP2002242842A (ja) * 2001-02-19 2002-08-28 Nikkiso Co Ltd ダイアフラムポンプ
JP4197107B2 (ja) 2002-07-18 2008-12-17 大日本印刷株式会社 塗工装置
JP2006144741A (ja) 2004-11-24 2006-06-08 Nikkiso Co Ltd 往復動ポンプ
JP4790311B2 (ja) * 2005-02-28 2011-10-12 株式会社鷺宮製作所 定量送液ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030048515A (ko) * 2001-12-12 2003-06-25 가부시키가이샤 고가네이 약액공급장치
JP2003275306A (ja) * 2002-03-26 2003-09-30 Ohtsu Tire & Rubber Co Ltd :The 薬液供給器及び薬液カートリッジ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230023550A (ko) 2021-08-10 2023-02-17 (주)홍성팜스토리 약품 정량 공급장치

Also Published As

Publication number Publication date
US7871250B2 (en) 2011-01-18
JP2008128059A (ja) 2008-06-05
TWI348520B (en) 2011-09-11
CN100549418C (zh) 2009-10-14
JP4547368B2 (ja) 2010-09-22
TW200823368A (en) 2008-06-01
US20080115662A1 (en) 2008-05-22
CN101187365A (zh) 2008-05-28
KR20080045605A (ko) 2008-05-23

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