KR100891243B1 - 엑시머 램프 장치 - Google Patents

엑시머 램프 장치 Download PDF

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Publication number
KR100891243B1
KR100891243B1 KR1020050090876A KR20050090876A KR100891243B1 KR 100891243 B1 KR100891243 B1 KR 100891243B1 KR 1020050090876 A KR1020050090876 A KR 1020050090876A KR 20050090876 A KR20050090876 A KR 20050090876A KR 100891243 B1 KR100891243 B1 KR 100891243B1
Authority
KR
South Korea
Prior art keywords
lamp
pressure
excimer
excimer lamp
end region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020050090876A
Other languages
English (en)
Korean (ko)
Other versions
KR20060056846A (ko
Inventor
겐이치 히로세
Original Assignee
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 우시오덴키 가부시키가이샤 filed Critical 우시오덴키 가부시키가이샤
Publication of KR20060056846A publication Critical patent/KR20060056846A/ko
Application granted granted Critical
Publication of KR100891243B1 publication Critical patent/KR100891243B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/015—Disinfection, sterilisation or deodorisation of air using gaseous or vaporous substances, e.g. ozone
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/28—Means for producing, introducing, or replenishing gas or vapour during operation of the lamp
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
    • A61L2209/10—Apparatus features
    • A61L2209/12—Lighting means
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
    • A61L2209/20—Method-related aspects
    • A61L2209/21—Use of chemical compounds for treating air or the like
    • A61L2209/212—Use of ozone, e.g. generated by UV radiation or electrical discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Physical Water Treatments (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
KR1020050090876A 2004-11-22 2005-09-29 엑시머 램프 장치 Expired - Fee Related KR100891243B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004337552A JP4453527B2 (ja) 2004-11-22 2004-11-22 エキシマランプ装置
JPJP-P-2004-00337552 2004-11-22

Publications (2)

Publication Number Publication Date
KR20060056846A KR20060056846A (ko) 2006-05-25
KR100891243B1 true KR100891243B1 (ko) 2009-04-01

Family

ID=36627246

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050090876A Expired - Fee Related KR100891243B1 (ko) 2004-11-22 2005-09-29 엑시머 램프 장치

Country Status (4)

Country Link
JP (1) JP4453527B2 (enExample)
KR (1) KR100891243B1 (enExample)
CN (1) CN100561662C (enExample)
TW (1) TW200618034A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5146061B2 (ja) * 2008-04-10 2013-02-20 ウシオ電機株式会社 エキシマランプおよびこれを備えたランプユニット
JP5233551B2 (ja) * 2008-09-27 2013-07-10 ウシオ電機株式会社 エキシマランプ装置
JP6301796B2 (ja) * 2014-09-24 2018-03-28 日本電子株式会社 有機化合物除去装置
JP7003431B2 (ja) * 2017-04-06 2022-01-20 ウシオ電機株式会社 光照射装置
JP6984206B2 (ja) * 2017-07-19 2021-12-17 ウシオ電機株式会社 光照射装置
JP6896919B1 (ja) * 2020-08-03 2021-06-30 株式会社クォークテクノロジー 殺菌ランプ
JP7721886B2 (ja) * 2020-11-11 2025-08-13 ウシオ電機株式会社 紫外線処理装置および紫外線処理方法
CN113367268A (zh) * 2021-03-18 2021-09-10 郑州圣华药物食品技术开发有限公司 用氙准分子光源激发产生臭氧脉动消毒洗涤食品柜
IT202200014443A1 (it) * 2022-07-08 2024-01-08 Amen Enamuna Lampada con sistema di sanificazione integrato.

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010066924A (ko) * 1999-12-28 2001-07-11 나카무라 마사루 엑시머 조사 장치
KR20030040037A (ko) * 2001-11-13 2003-05-22 우시오덴키 가부시키가이샤 유전체 배리어 방전 램프에 의한 처리 장치, 및 처리 방법
KR20040100998A (ko) * 2003-05-19 2004-12-02 우시오덴키 가부시키가이샤 엑시머 램프 발광 장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010066924A (ko) * 1999-12-28 2001-07-11 나카무라 마사루 엑시머 조사 장치
KR20030040037A (ko) * 2001-11-13 2003-05-22 우시오덴키 가부시키가이샤 유전체 배리어 방전 램프에 의한 처리 장치, 및 처리 방법
KR20040100998A (ko) * 2003-05-19 2004-12-02 우시오덴키 가부시키가이샤 엑시머 램프 발광 장치

Also Published As

Publication number Publication date
JP2006147928A (ja) 2006-06-08
CN100561662C (zh) 2009-11-18
KR20060056846A (ko) 2006-05-25
TW200618034A (en) 2006-06-01
CN1783421A (zh) 2006-06-07
JP4453527B2 (ja) 2010-04-21
TWI365478B (enExample) 2012-06-01

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