KR100858077B1 - 가스 공급 장치, 이온 주입 장치, 가스 시약 공급 방법, 흡탈착 방법 및 반도체 제조 설비 - Google Patents

가스 공급 장치, 이온 주입 장치, 가스 시약 공급 방법, 흡탈착 방법 및 반도체 제조 설비 Download PDF

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Publication number
KR100858077B1
KR100858077B1 KR1020027014732A KR20027014732A KR100858077B1 KR 100858077 B1 KR100858077 B1 KR 100858077B1 KR 1020027014732 A KR1020027014732 A KR 1020027014732A KR 20027014732 A KR20027014732 A KR 20027014732A KR 100858077 B1 KR100858077 B1 KR 100858077B1
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KR
South Korea
Prior art keywords
gas
storage
physical adsorption
adsorption medium
vessel
Prior art date
Application number
KR1020027014732A
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English (en)
Korean (ko)
Other versions
KR20030034065A (ko
Inventor
톰글렌엠
맥매너스제임스브이.
Original Assignee
어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority claimed from US09/564,323 external-priority patent/US6406519B1/en
Application filed by 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 filed Critical 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드
Publication of KR20030034065A publication Critical patent/KR20030034065A/ko
Application granted granted Critical
Publication of KR100858077B1 publication Critical patent/KR100858077B1/ko

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F17C13/045—Automatic change-over switching assembly for bottled gas systems with two (or more) gas containers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/038—Subatmospheric pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
KR1020027014732A 2000-05-03 2001-04-27 가스 공급 장치, 이온 주입 장치, 가스 시약 공급 방법, 흡탈착 방법 및 반도체 제조 설비 KR100858077B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/564,323 2000-05-03
US09/564,323 US6406519B1 (en) 1998-03-27 2000-05-03 Gas cabinet assembly comprising sorbent-based gas storage and delivery system
PCT/US2001/013922 WO2001083084A1 (en) 2000-05-03 2001-04-27 Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Publications (2)

Publication Number Publication Date
KR20030034065A KR20030034065A (ko) 2003-05-01
KR100858077B1 true KR100858077B1 (ko) 2008-09-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020027014732A KR100858077B1 (ko) 2000-05-03 2001-04-27 가스 공급 장치, 이온 주입 장치, 가스 시약 공급 방법, 흡탈착 방법 및 반도체 제조 설비

Country Status (6)

Country Link
EP (1) EP1284806A4 (zh)
JP (1) JP2003532034A (zh)
KR (1) KR100858077B1 (zh)
CN (1) CN1204954C (zh)
AU (1) AU2001257439A1 (zh)
WO (1) WO2001083084A1 (zh)

Cited By (2)

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KR20170063871A (ko) * 2014-10-03 2017-06-08 엔테그리스, 아이엔씨. 압력-조절 가스 공급 용기
KR102132173B1 (ko) * 2019-01-22 2020-07-10 주식회사 원익홀딩스 가스실린더의 가스공급장치용 캐비닛

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KR100675063B1 (ko) * 2005-06-27 2007-01-29 울산화학주식회사 저온액화가스의 충전방법
KR100820377B1 (ko) * 2006-07-07 2008-04-10 김재윤 질소가스충진기
GB2441056A (en) * 2006-08-18 2008-02-20 Nomenca Ltd Gas canister security retention cabinet
US20080241805A1 (en) 2006-08-31 2008-10-02 Q-Track Corporation System and method for simulated dosimetry using a real time locating system
US8499789B2 (en) 2008-05-29 2013-08-06 Tescom Corporation Mobile gas supply system
KR101933225B1 (ko) 2010-01-14 2018-12-27 엔테그리스, 아이엔씨. 환기 가스 관리 시스템 및 공정
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
TWI525042B (zh) * 2010-09-16 2016-03-11 首威公司 氟化氫供應單元
US9032990B2 (en) * 2011-04-25 2015-05-19 Applied Materials, Inc. Chemical delivery system
US10385452B2 (en) 2012-05-31 2019-08-20 Entegris, Inc. Source reagent-based delivery of fluid with high material flux for batch deposition
JP2014207200A (ja) * 2013-04-16 2014-10-30 東京電力株式会社 ナトリウム−硫黄電池における火災の消火方法
CN103638890B (zh) * 2013-11-19 2016-01-06 全椒南大光电材料有限公司 高纯安全气体源的制备方法
WO2016130866A1 (en) * 2015-02-12 2016-08-18 Entegris, Inc. Smart package
US10052623B2 (en) 2015-06-29 2018-08-21 Industrial Technology Research Institute Inorganic material for removing harmful substance from wastewater and method of preparing the same, and method for wastewater treatment
FR3039622B1 (fr) * 2015-07-31 2018-03-02 Air Liquide Electronics Systems Installation de distribution de gaz de travail.
CN107364659B (zh) * 2017-07-31 2023-06-27 浙江巨化装备制造有限公司 一种无水氟化氢的安全储存设备及其制造方法
CN107883184B (zh) * 2017-10-27 2020-02-11 北京空间技术研制试验中心 用于航天器的高压气瓶承载装置
CN108421365A (zh) * 2018-03-19 2018-08-21 杭州正大重工机械有限公司 一种有机废气收集和处理系统
KR102040716B1 (ko) * 2018-07-10 2019-11-06 에이엠티 주식회사 가스통 자동 교체방법
EP3950111A4 (en) * 2019-03-27 2022-11-30 Eneos Corporation HYDROGEN GAS SUPPLIERS AND HYDROGEN GAS SUPPLY PROCESSES
US11527380B2 (en) 2020-04-01 2022-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Ion implanter toxic gas delivery system
KR102229474B1 (ko) * 2020-08-31 2021-03-17 서갑수 가스 공급 조절 박스
US11493909B1 (en) * 2021-04-16 2022-11-08 Taiwan Semiconductor Manufacturing Company Ltd. Method for detecting environmental parameter in semiconductor fabrication facility
WO2023192762A1 (en) * 2022-03-29 2023-10-05 Praxair Technology, Inc. Method and system for optimized gas delivery with automated redundant pressure regulation safety feature
CN115957717A (zh) * 2022-12-20 2023-04-14 张家港安储科技有限公司 一种单块多孔无机材料吸附剂及其应用
CN116371142B (zh) * 2023-06-01 2023-10-03 中国华能集团清洁能源技术研究院有限公司 烟气低温吸附再生系统和吸附剂加热输送装置
CN116624753B (zh) * 2023-06-16 2023-11-07 福建德尔科技股份有限公司 一种三氟化氯充装方法及系统

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US4378982A (en) * 1981-08-28 1983-04-05 Greene & Kellogg, Inc. Compact oxygen concentrator
US5112367A (en) * 1989-11-20 1992-05-12 Hill Charles C Fluid fractionator
US5213769A (en) * 1991-10-30 1993-05-25 Whitlock Walter H Mixture forming method and apparatus
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Publication number Priority date Publication date Assignee Title
KR20170063871A (ko) * 2014-10-03 2017-06-08 엔테그리스, 아이엔씨. 압력-조절 가스 공급 용기
KR102277235B1 (ko) * 2014-10-03 2021-07-13 엔테그리스, 아이엔씨. 압력-조절 가스 공급 용기
KR102132173B1 (ko) * 2019-01-22 2020-07-10 주식회사 원익홀딩스 가스실린더의 가스공급장치용 캐비닛

Also Published As

Publication number Publication date
AU2001257439A1 (en) 2001-11-12
WO2001083084A1 (en) 2001-11-08
EP1284806A1 (en) 2003-02-26
CN1452507A (zh) 2003-10-29
KR20030034065A (ko) 2003-05-01
EP1284806A4 (en) 2006-03-15
JP2003532034A (ja) 2003-10-28
CN1204954C (zh) 2005-06-08

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