AU2001257439A1 - Gas cabinet assembly comprising sorbent-based gas storage and delivery system - Google Patents

Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Info

Publication number
AU2001257439A1
AU2001257439A1 AU2001257439A AU5743901A AU2001257439A1 AU 2001257439 A1 AU2001257439 A1 AU 2001257439A1 AU 2001257439 A AU2001257439 A AU 2001257439A AU 5743901 A AU5743901 A AU 5743901A AU 2001257439 A1 AU2001257439 A1 AU 2001257439A1
Authority
AU
Australia
Prior art keywords
sorbent
delivery system
cabinet assembly
gas storage
based gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001257439A
Other languages
English (en)
Inventor
James V Mcmanus
Glenn M Tom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/564,323 external-priority patent/US6406519B1/en
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Publication of AU2001257439A1 publication Critical patent/AU2001257439A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F17C13/045—Automatic change-over switching assembly for bottled gas systems with two (or more) gas containers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/038—Subatmospheric pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
AU2001257439A 2000-05-03 2001-04-27 Gas cabinet assembly comprising sorbent-based gas storage and delivery system Abandoned AU2001257439A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09564323 2000-05-03
US09/564,323 US6406519B1 (en) 1998-03-27 2000-05-03 Gas cabinet assembly comprising sorbent-based gas storage and delivery system
PCT/US2001/013922 WO2001083084A1 (en) 2000-05-03 2001-04-27 Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Publications (1)

Publication Number Publication Date
AU2001257439A1 true AU2001257439A1 (en) 2001-11-12

Family

ID=24254011

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001257439A Abandoned AU2001257439A1 (en) 2000-05-03 2001-04-27 Gas cabinet assembly comprising sorbent-based gas storage and delivery system

Country Status (6)

Country Link
EP (1) EP1284806A4 (zh)
JP (1) JP2003532034A (zh)
KR (1) KR100858077B1 (zh)
CN (1) CN1204954C (zh)
AU (1) AU2001257439A1 (zh)
WO (1) WO2001083084A1 (zh)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6921062B2 (en) 2002-07-23 2005-07-26 Advanced Technology Materials, Inc. Vaporizer delivery ampoule
US7300038B2 (en) * 2002-07-23 2007-11-27 Advanced Technology Materials, Inc. Method and apparatus to help promote contact of gas with vaporized material
US6991671B2 (en) * 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
JP4652785B2 (ja) * 2004-11-29 2011-03-16 株式会社日立国際電気 基板処理装置
KR100675063B1 (ko) * 2005-06-27 2007-01-29 울산화학주식회사 저온액화가스의 충전방법
KR100820377B1 (ko) * 2006-07-07 2008-04-10 김재윤 질소가스충진기
GB2441056A (en) * 2006-08-18 2008-02-20 Nomenca Ltd Gas canister security retention cabinet
US20080241805A1 (en) 2006-08-31 2008-10-02 Q-Track Corporation System and method for simulated dosimetry using a real time locating system
US8499789B2 (en) 2008-05-29 2013-08-06 Tescom Corporation Mobile gas supply system
KR101933225B1 (ko) 2010-01-14 2018-12-27 엔테그리스, 아이엔씨. 환기 가스 관리 시스템 및 공정
US8858819B2 (en) 2010-02-15 2014-10-14 Air Products And Chemicals, Inc. Method for chemical mechanical planarization of a tungsten-containing substrate
TWI525042B (zh) * 2010-09-16 2016-03-11 首威公司 氟化氫供應單元
US9032990B2 (en) * 2011-04-25 2015-05-19 Applied Materials, Inc. Chemical delivery system
US10385452B2 (en) 2012-05-31 2019-08-20 Entegris, Inc. Source reagent-based delivery of fluid with high material flux for batch deposition
JP2014207200A (ja) * 2013-04-16 2014-10-30 東京電力株式会社 ナトリウム−硫黄電池における火災の消火方法
CN103638890B (zh) * 2013-11-19 2016-01-06 全椒南大光电材料有限公司 高纯安全气体源的制备方法
WO2016054363A1 (en) * 2014-10-03 2016-04-07 Entegris, Inc. Pressure-regulated gas supply vessel
WO2016130866A1 (en) * 2015-02-12 2016-08-18 Entegris, Inc. Smart package
US10052623B2 (en) 2015-06-29 2018-08-21 Industrial Technology Research Institute Inorganic material for removing harmful substance from wastewater and method of preparing the same, and method for wastewater treatment
FR3039622B1 (fr) * 2015-07-31 2018-03-02 Air Liquide Electronics Systems Installation de distribution de gaz de travail.
CN107364659B (zh) * 2017-07-31 2023-06-27 浙江巨化装备制造有限公司 一种无水氟化氢的安全储存设备及其制造方法
CN107883184B (zh) * 2017-10-27 2020-02-11 北京空间技术研制试验中心 用于航天器的高压气瓶承载装置
CN108421365A (zh) * 2018-03-19 2018-08-21 杭州正大重工机械有限公司 一种有机废气收集和处理系统
KR102040716B1 (ko) * 2018-07-10 2019-11-06 에이엠티 주식회사 가스통 자동 교체방법
KR102132173B1 (ko) * 2019-01-22 2020-07-10 주식회사 원익홀딩스 가스실린더의 가스공급장치용 캐비닛
EP3950111A4 (en) * 2019-03-27 2022-11-30 Eneos Corporation HYDROGEN GAS SUPPLIERS AND HYDROGEN GAS SUPPLY PROCESSES
US11527380B2 (en) 2020-04-01 2022-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Ion implanter toxic gas delivery system
KR102229474B1 (ko) * 2020-08-31 2021-03-17 서갑수 가스 공급 조절 박스
US11493909B1 (en) * 2021-04-16 2022-11-08 Taiwan Semiconductor Manufacturing Company Ltd. Method for detecting environmental parameter in semiconductor fabrication facility
WO2023192762A1 (en) * 2022-03-29 2023-10-05 Praxair Technology, Inc. Method and system for optimized gas delivery with automated redundant pressure regulation safety feature
CN115957717A (zh) * 2022-12-20 2023-04-14 张家港安储科技有限公司 一种单块多孔无机材料吸附剂及其应用
CN116371142B (zh) * 2023-06-01 2023-10-03 中国华能集团清洁能源技术研究院有限公司 烟气低温吸附再生系统和吸附剂加热输送装置
CN116624753B (zh) * 2023-06-16 2023-11-07 福建德尔科技股份有限公司 一种三氟化氯充装方法及系统

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56158126A (en) * 1980-05-12 1981-12-05 Taikisha Ltd Adsorber-desorber
US4378982A (en) * 1981-08-28 1983-04-05 Greene & Kellogg, Inc. Compact oxygen concentrator
DE3440260C1 (de) * 1984-11-03 1986-04-03 Deutsche Gesellschaft für Wiederaufarbeitung von Kernbrennstoffen mbH, 3000 Hannover Verfahren zur Vorbereitung einer Saugkokille fuer die Aufnahme von verglasten radioaktiven Abfallstoffen nach der Absaugmethode und Vorrichtung zur Durchfuehrung des Verfahrens
JPS6346164A (ja) * 1986-08-13 1988-02-27 株式会社明電舎 インプラント材料の製造方法
US5112367A (en) * 1989-11-20 1992-05-12 Hill Charles C Fluid fractionator
US5213769A (en) * 1991-10-30 1993-05-25 Whitlock Walter H Mixture forming method and apparatus
US5512087A (en) * 1992-05-12 1996-04-30 Newport Petroleum Petroleum vapor control apparatus
FR2695568B1 (fr) * 1992-09-14 1994-10-21 Air Liquide Procédé et installation de séparation de gaz par perméation.
JP2813856B2 (ja) * 1993-11-29 1998-10-22 日本エア・リキード株式会社 シリンダ付ガス供給装置
US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US5704967A (en) * 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
JP3117610B2 (ja) * 1994-12-08 2000-12-18 川崎製鉄株式会社 ジボランガス収納・供給方法およびその設備
US5953682A (en) * 1997-02-14 1999-09-14 Millipore Corporation Automated gas cylinder tracking system
US6199384B1 (en) * 1999-07-09 2001-03-13 American Air Liquide Inc. System and method for controlled delivery of liquefied gases including control aspects

Also Published As

Publication number Publication date
WO2001083084A1 (en) 2001-11-08
EP1284806A1 (en) 2003-02-26
CN1452507A (zh) 2003-10-29
KR100858077B1 (ko) 2008-09-11
KR20030034065A (ko) 2003-05-01
EP1284806A4 (en) 2006-03-15
JP2003532034A (ja) 2003-10-28
CN1204954C (zh) 2005-06-08

Similar Documents

Publication Publication Date Title
AU2001257439A1 (en) Gas cabinet assembly comprising sorbent-based gas storage and delivery system
AU2003229050A1 (en) Sorbent-based gas storage and delivery system
AU2002332580A1 (en) Cell storage and delivery system
AU2001280562A1 (en) Item delivery and retrieval system
AU2001264639A1 (en) Package delivery systems and methods
AU1615199A (en) Mobile delivery and storage system for cryogenic fluids
AU4199699A (en) Sorbent-based gas storage and delivery system for dispensing high-purity gas
AU2002362744A1 (en) Prostatic stent and delivery system
AU6104800A (en) Trusted storage systems and methods
AU2001268459A1 (en) Secure test and test result delivery system
AU4082799A (en) Low concentration gas delivery system utilizing sorbent-based gas storage and delivery system
AU6758800A (en) Pump systems and methods
AU2001229774A1 (en) Home video distribution and storing system
AU2001286547A1 (en) Support and related shelf
AU7583598A (en) High capacity gas storage and dispensing system
AU2214599A (en) Throughflow gas storage and dispensing system
AU7955000A (en) Compressor and refrigeration system
AU6333900A (en) Fuel-cell fuels, methods, and systems
GB9904925D0 (en) Gas delivery system
AU2002347510A1 (en) Multimedia storage and control system
AU2001271610A1 (en) Freezer and plant gas system
GB2347686B (en) Gas delivery system
AU2001273660A1 (en) Multiple insert delivery systems and methods cross reference to related applications
AU2746600A (en) Interactive entertainment systems and methods
AU1690900A (en) Database changing system and program storage medium