KR100856145B1 - Vacuum chamber and vacuum processing apparatus - Google Patents

Abstract

Provided are a vacuum chamber capable of securing strength as a vacuum container while using a divided structure, and a vacuum processing apparatus including the vacuum chamber. The conveyance chamber 20 which is a vacuum chamber here is the main frame body 201 formed in the rectangle, the pair of reinforcement frame bodies 202a and 202b joined to the opposing part of the long side of the said main frame body 201, The top plate 203 detachably joined to the upper surface of the main frame body 201 and a conveying mechanism (not shown) are provided, and the main frame body 201 and the reinforcing frame bodies 202a and 202b are integrally formed with a substrate ( The conveyance space which conveys S) is formed.

Description

VACUUM CHAMBER AND VACUUM PROCESSING APPARATUS}

1 is a perspective view showing an outline of a vacuum processing apparatus according to an embodiment of the present invention;

2 is a horizontal cross-sectional view of the vacuum processing apparatus of FIG.

3 is a view showing an external configuration of a conveyance chamber;

4 is an exploded perspective view of the conveying chamber;

5 is a perspective view of the transport chamber viewed from the bottom face side;

6 is a perspective view of a main portion of the main frame body;

7 is an essential part cross sectional view showing a state in which an L-shaped reinforcement and a connecting reinforcement plate are mounted on a main frame body;

8 is a cross-sectional view of the reinforcing frame body;

※ Explanation of code for main part of drawing ※

1: vacuum processing apparatus 10a, 10b, 10c: process chamber

20: conveyance chamber 30: load lock chamber

31, 32: buffer 50: conveyance mechanism

201: main frame body 202a, 202b: reinforcement frame body

203: top plate 204: bottom plate

205: upper opening 210a, 210b: side opening

211, 212, and 213: conveying opening 214: opening

215: conveyance opening 216: maintenance opening

217: Moon 221: L-shaped reinforcement

222: rib 223: bottom reinforcement

224a, 224b: connecting reinforcement plate

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum chamber and a vacuum processing apparatus, and more particularly, to a vacuum chamber and a vacuum processing apparatus used for processing a substrate to be processed, such as a glass substrate, in a manufacturing process such as a flat panel display (FPD). will be.

In the manufacturing process of the FPD, a rectangular large glass substrate having a length exceeding 2 m in one side is accommodated in a processing chamber, and processing such as etching, ashing, and film formation is performed in a vacuum state. In recent years, the process chamber itself is also enlarged with the enlargement of a glass substrate. In particular, in the vacuum chamber which performs a process in a vacuum state with respect to a large glass substrate, it is necessary to ensure rigidity sufficient to withstand atmospheric pressure in the state which vacuumed the inside of metal processing chambers, such as aluminum. For this reason, in the conventional processing chamber of the integrated structure, the chamber wall has to be thickened sufficiently, causing an increase in weight, and processing by a large machine is required, resulting in an increase in manufacturing cost.

In addition, when the processing chamber is enlarged in excess of a predetermined size, there are also problems such as legal restrictions on its transportation and an increase in expenses. It is also conceivable to reduce the weight by using a thin board for the constituent members of the vacuum chamber, but in this case, it is difficult to maintain rigidity that can withstand the vacuum.

Therefore, as a conventional example of the vacuum chamber, in order to be able to easily change the shape and size even after the vacuum chamber is installed, the frame-shaped main body formed in a polygonal shape and the side surface detachably joined to the side surface thereof. There is proposed a vacuum chamber configured to be divided into a frame, a top plate, and a bottom plate (for example, Patent Document 1).

[Patent Document 1] Japanese Unexamined Patent Application Publication No. 2004-335743 (Fig. 2, etc.)

In the case of the vacuum chamber of the divided structure of the said patent document 1, since it has a big opening part in the upper surface, the intensity | strength around an opening part is insufficient, and rigidity as a vacuum chamber is difficult to ensure. However, Patent Document 1 does not consider at all about securing rigidity as a vacuum chamber.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a vacuum chamber capable of securing strength as a vacuum container while adopting a divided structure, and a vacuum processing apparatus including the vacuum chamber.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, the 1st viewpoint of this invention is formed in a polygonal shape, has a bottom plate which forms a bottom part, and the main frame body which opened the upper surface which opposes the said bottom plate, and the said main frame body oppose. At least one pair of reinforcing frames respectively joined to the side portions to be joined, and a top plate detachably joined to an upper portion of the main frame body, wherein the main frame body and the reinforcing frame body are joined together to integrally receive a substrate to be processed. It provides a vacuum chamber characterized in that to form a space.

Moreover, the 2nd viewpoint of this invention is formed in a polygonal shape, has a bottom plate which comprises a bottom part, and joins to the main frame body which opened the upper surface opposing the said bottom plate, and the side part which opposes the said main frame body, respectively. And at least one pair of reinforcing frame bodies, and a top plate detachably joined to an upper portion of the main frame body, wherein the vacuum chamber is provided with a vacuum strength by joining the main frame body and the reinforcing frame body. To provide.

According to the first and second aspects, by joining the reinforcing frame body with the main frame body, it becomes possible to improve the vacuum strength of the main frame body having an opening on the upper surface and hardly maintaining rigidity. That is, since the reinforcing frame body is joined to the side of the main frame body and functions as a reinforcing member, the vacuum chamber can have sufficient vacuum strength as a whole.

In said 1st viewpoint and a 2nd viewpoint, a side opening is formed in the side part of the said main frame body, and the side part of the said reinforcement frame body, respectively, and the inside of the said main frame body and the said reinforcement frame body via the said side opening. It is preferable to form a space in which the inside of each other communicates and accommodates the substrate to be processed.

Moreover, it is preferable to arrange | position an external reinforcement member on the outer wall surface of the said reinforcement frame body. Thus, since it is comprised so that rigidity may be arrange | positioned on the outer wall surface of a reinforcement frame body and maintains rigidity, it becomes possible to make thickness of the board | plate material which comprises a reinforcement frame body thin, and to reduce weight.

Further, as the outer reinforcing member, ribs perpendicular to the outer wall surface are preferably formed in a lattice shape. Moreover, it is preferable to provide the said rib in the outer wall surface of the wall which opposes the upper and lower sides of the said reinforcement frame body.

Moreover, it is preferable to arrange | position an internal reinforcement member on the inner wall surface of the said main frame body. Thus, by arranging the internal reinforcing member on the inner circumferential surface of the main frame body to increase the rigidity, even if the thickness of the plate constituting the main frame body is reduced to reduce the weight, the main frame body in the high vacuum state occurs deviation Can be avoided. Moreover, even if the opening of the upper part of the main frame body is enlarged, it is possible to avoid the occurrence of a deviation in the main frame body in a high vacuum state, so that the maintainability of the conveying apparatus provided in the main frame body can be improved.

Moreover, it is preferable that the said internal reinforcement member is a cross-sectional L-shaped reinforcement member joined to the flange protruding toward the inner side of the opening in the vicinity of the upper end of the main frame body, and the wall surface of the main frame body. In addition, the top plate is preferably bonded to the upper surface of the flange.

Moreover, it is preferable to provide the connecting plate which joins the said main frame body and the said reinforcement frame body. In this case, it is preferable that the said connecting plate joins the upper end of the said main frame body, and the upper end of the said reinforcement frame body.

Moreover, it is preferable to arrange | position a bottom part reinforcement member on the outer wall surface of the said bottom plate. As a result, even if the plate thickness of the bottom plate of the main frame body is made thin, the required rigidity can be ensured and the weight of the entire vacuum chamber can be reduced.

Moreover, it is preferable that the said vacuum chamber is a conveyance chamber provided with the conveying apparatus which conveys the to-be-processed board | substrate in a vacuum state inside. In this case, it is preferable to form opening and carrying openings for carrying in and carrying out the substrate to be processed on the pair of side walls facing the main frame body. Moreover, it is preferable to form opening and carrying openings for carrying in and carrying out the substrate to be processed on the sidewall of the reinforcing frame body. Moreover, it is preferable to form the opening for maintenance in the side part of the said reinforcement frame body. Moreover, it is preferable that the said to-be-processed substrate is a board | substrate for flat panel displays.

According to a third aspect of the present invention, there is provided a vacuum chamber according to the first or second aspect, and a plurality of vacuum processing chambers connected to the vacuum chamber to perform processing of the substrate to be processed. To provide.

EMBODIMENT OF THE INVENTION Hereinafter, the preferred form of this invention is demonstrated, referring drawings. Here, the multi-chamber type vacuum processing apparatus for performing an etching process with respect to the glass substrate for FPD (henceforth "substrate" S) is demonstrated to an example. Here, examples of the FPD include a liquid crystal monitor (LCD), a light emitting diode display (LED), an electroluminescence (EL) display, a fluorescent fluorescence display (VFD), a plasma display panel (PDP), and the like.

1 is a perspective view showing an overview of a vacuum processing apparatus, and FIG. 2 is a horizontal sectional view showing the inside thereof. In addition, in FIG. 1 and FIG. 2, the detail is abbreviate | omitted. In this vacuum processing apparatus 1, the transfer chamber 20 and the load lock chamber 30 are connected to the center part. Three process chambers 10a, 10b, and 10c are disposed around the transfer chamber 20. Thus, since the vacuum processing apparatus 1 has three process chambers 10a, 10b, and 10c, for example, two process chambers are comprised as an etching process chamber among them, and the remaining one process chamber is used as an ashing process chamber. Alternatively, all three process chambers can be configured as an etching process chamber or an ashing process chamber that performs the same process. The number of process chambers is not limited to three, but may be two or four or more around the transfer chamber 20, for example.

Between the transfer chamber 20 and the load lock chamber 30, between the transfer chamber 20 and each of the process chambers 10a, 10b, and 10c, and in the opening communicating with the load lock chamber 30 and the outside air atmosphere, therebetween Are hermetically sealed and gate valves 22 configured to be openable and closed are respectively interposed.

On the outer side of the load lock chamber 30, two cassette indexers 41 are provided, and cassettes 40 each containing a substrate S are mounted thereon. For example, an unprocessed substrate can be accommodated in one of these cassettes 40, and a processed substrate can be accommodated in the other. These cassettes 40 can be lifted and lowered by the lifting mechanism 42.

A board | substrate conveying means 43 is provided on the support base 44 between these two cassettes 40, and this board | substrate conveying means 43 advances the arms 45 and 46 provided in two upper and lower stages, and these integrally. The base 47 which supports retraction and rotation is provided.

On the arms 45 and 46, four projections 48 supporting the substrate S are formed. The projection 48 is made of an elastic body made of synthetic rubber having a high friction coefficient, and prevents the substrate S from shifting or falling while supporting the substrate.

In the process chambers 10a, 10b, and 10c, the internal space thereof can be maintained in a predetermined reduced pressure atmosphere, and for example, a process such as plasma etching is performed therein. In addition, the basic configuration of the process chambers 10a, 10b, 10c is approximately the same.

The transfer chamber 20 has a divided structure and can be maintained in a predetermined reduced pressure atmosphere like the process chambers 10a, 10b, 10c. In addition, the detailed structure of the conveyance chamber 20 is mentioned later.

The conveyance mechanism 50 is arrange | positioned inside the conveyance chamber 20 as shown in FIG. And by this conveyance mechanism 50, the board | substrate S is conveyed between the load lock chamber 30 and three process chambers 10a, 10b, 10c. The conveyance mechanism 50 is provided in one end of the base 51, and the 1st arm 52 provided in the base 51 so that rotation was possible, and the 2nd arm rotatably provided in the front-end | tip part of the 1st arm 52 are possible. 53 and a fork-shaped substrate support plate 54 which is rotatably installed on the second arm 53 and supports the substrate S, and is driven by a drive device incorporated in the base 51. By driving the 1st arm 52, the 2nd arm 53, and the board | substrate support plate 54, it becomes possible to convey the board | substrate S. FIG. In addition, the base 51 is rotatable while being able to move up and down.

The load lock chamber 30 can be maintained in a predetermined pressure-reduced atmosphere like the process chambers 10a and 10b and the transfer chamber 20, and among them, a pair of buffer racks for supporting the substrate S ( 31, 32) are provided in multiple stages, for example, two stages. In addition, only the uppermost buffer racks 31 and 32 are shown in FIG. Further, in the load lock chamber 30, a positioner (not shown) which performs positioning in the vicinity of the corner portions of the spherical substrate S facing each other is disposed.

Next, with reference to FIGS. 3-8, the conveyance chamber 20 which concerns on this embodiment is demonstrated. FIG. 3 is a perspective view showing the appearance of the transfer chamber 20, FIG. 4 is an exploded perspective view of the transfer chamber 20, and FIG. 5 is a perspective view showing the lower structure of the transfer chamber 20.

The conveying chamber 20 which is a vacuum chamber has a main frame body 201 formed in a rectangular shape in plan view and side view, and a pair of reinforcing frame bodies joined to opposing side surfaces of the long sides of the main frame body 201 ( 202a, 202b, and the top plate 203 detachably joined to the upper surface of the main frame body 201 are provided. That is, the main frame 201 and the reinforcement frame 202a, 202b form the conveyance space which conveys the board | substrate S integrally. In addition, although illustration is abbreviate | omitted in FIGS. 3-5, the conveyance mechanism 50 is arrange | positioned in the conveyance chamber 20. As shown in FIG.

The main frame body 201 is made of metal such as aluminum, stainless steel, or steel material, for example. The main frame body 201 includes a bottom plate 204 which is the bottom of the conveyance chamber 20, long sidewalls 208a and 208b formed perpendicularly to the bottom plate 204, and short sidewalls 206, 207). In addition, the upper opening 205 is formed to face the bottom plate 204, and side openings 210a and 210b are formed in the long sidewalls 208a and 208b joined to the reinforcing frame bodies 202a and 202b. have. The inner space partitioned by the main frame body 201 and the inner space partitioned by the reinforcing frame bodies 202a and 202b communicate with each other via the side openings 210a and 210b to form one conveyance space. .

Moreover, the conveyance openings 211 and 212 for carrying in the board | substrate S from the load lock chamber 30 (refer FIG. 1 and FIG. 2) are located in the side wall 206 of the short side of the main frame body 201 up and down. It is formed in two stages. These conveyance openings 211 and 212 are formed at positions where the substrate S can be loaded and unloaded from the buffer racks 31 and 32 formed in two stages in the load lock chamber 30. Moreover, the board | substrate S is carried in and out from the process chamber 10b which is a vacuum processing chamber in the side wall 207 which opposes the side wall 206 in which the said conveyance opening 211, 212 of the main frame body 201 was provided. The conveyance opening 213 for this purpose is formed.

6 is a perspective view of a main portion of the main frame body 201, and FIG. 7 is a sectional view of the main portion. In the vicinity of the upper end of the main frame body 201, an inner circumferential flange 209 protrudes toward the center of the upper opening 205. The inner circumferential flange 209 is provided perpendicular to each side wall 206, 207, 208a, and 208b of the main frame body 201, thereby increasing the rigidity of each side wall 206, 207, 208a, and 208b.

In addition, the L-shaped reinforcement 221 is distinguished by the partition wall 221a as an internal reinforcement member under the inner circumferential flange 209, and is arranged so that the inner wall surface may be circumferentially circumferentially. The L-shaped reinforcement tool 221 is joined to the lower surface of the inner circumferential flange 209 and each side wall 206, 207, 208a, 208b of the main frame body 201 by welding, for example. In addition, a space is formed between the arranged L-shaped reinforcement tool 221, the lower surface of the inner circumferential flange 209, and the side walls 206, 207, 208a, and 208b of the main frame body 201. This space communicates with the conveyance space in the conveyance chamber 20 by the opening 221b formed in the L-shaped reinforcement port 221.

The L-shaped reinforcement tool 221 is formed by bending a metal plate such as stainless steel or aluminum into an L-shape, for example. Then, by placing the L-shaped reinforcement 221 on the inner wall surface of the main frame body 201, the vacuum frame rigidity is imparted to the main frame body 201, the main frame body 201 is inclined inward by the negative pressure It works to prevent losing. In addition, the shape of the internal reinforcing member can be any shape as long as the rigidity required for the main frame body 201 can be provided without being limited to the L shape.

The bottom plate 204 of the main frame body 201 is formed with an opening 218 for installing the transfer mechanism 50 (see FIG. 2).

On the upper surface of the inner circumferential flange 209 provided in the main frame body 201, a top plate 203 for sealing and closing the upper opening 205 is detachably joined. The top plate 203 is made of metal such as aluminum or stainless steel, for example, and is fixed to the inner circumferential flange 209 by fixing means such as a bolt 231, for example.

The reinforcement frames 202a and 202b are made of metal such as aluminum, stainless steel, or steel material. In each of the reinforcing frame bodies 202a and 202b, an opening 214 is formed in a joining surface to be joined to the main frame body 201. Each opening 214 is formed in a size corresponding to the side openings 210a and 210b respectively formed in the pair of side walls 208a and 208b on the long side of the main frame body 201.

In the side walls 220 and 220 of the reinforcing frame bodies 202a and 202b, conveyance openings 215 and 215 for carrying in and out of the substrate are formed between the process chambers 10a and 10c. Moreover, the conveyance mechanism 50 arrange | positioned in the conveyance chamber 20 in one of a pair of wall formed in all directions so that the side wall 220, 220 of each of the reinforcement frames 202a, 202b may be interposed between them, and to expand there. The maintenance opening 216 for performing maintenance, etc. is provided, and this maintenance opening 216 is comprised by the door 217 so that it can be hermetically sealed.

As shown in the cross-sectional structure in FIG. 8, in the upper and lower outer walls 219 of the respective reinforcing frame bodies 202a and 202b, a plurality of ribs 222 as the outer reinforcing members are formed in a lattice shape, and the upper and lower outer walls 219 are provided. It is placed perpendicular to the wall of the house. The rib 222 is made of metal such as iron, stainless steel, or steel material, for example, to increase the vacuum rigidity of the reinforcing frame bodies 202a and 202b, and to support the reinforcing frame bodies 202a and 202b as the main frame body ( In the state joined to 201), it is arrange | positioned so that rigidity as the whole conveyance chamber 20 may also be improved. The shape of the rib 222 is not limited to the lattice shape, and any shape capable of maintaining the strength of the reinforcing frame bodies 202a and 202b can be used.

In addition, a bottom reinforcing material 223 for reinforcing the bottom plate 204 from the outside is disposed on the bottom plate 204 of the main frame body 201. The bottom reinforcing material 223 is made of steel, such as H steel, for example, and prevents the bottom plate 204 from being pushed into the main frame body 201 by negative pressure to bend in a high vacuum state. do. Thereby, even if the plate | board thickness of the bottom plate 204 of the main frame body 201 is made thin, it becomes possible to ensure the vacuum strength inside.

Bonding of the main frame body 201 and the reinforcement frame bodies 202a and 202b is, for example, as shown in FIG. 7, with the upper ends of the main frame body 201 and the reinforcement frames 202a and 202b on one surface. In a state of being prepared, the connecting reinforcing plates 224a and 224b, which are long plates in the horizontal direction, are brought into contact with each other, and connected and fixed by fixing means such as bolts 232 and 232, for example. The connecting reinforcing plates 224a and 224b are made of a material such as iron, stainless steel or aluminum, for example.

The reinforcing frame bodies 202a and 202b are also joined to the side walls 208a and 208b of the main frame body 201 using fixing means such as bolts 233 and 233, for example. Thus, since the main frame body 201 and the reinforcement frame bodies 202a and 202b are connected, and the reinforcement of the long side direction of the main frame body 201 is performed by the connection reinforcement boards 224a and 224b, it conveys Vacuum resistance of the chamber 20 is ensured.

In the state where the reinforcement frames 202a and 202b are joined to the main frame body 201 from both sides, the side openings 210a and the reinforcement frame 202a of the side wall 208a of the main frame body 201 are formed. The interior of the main frame body 201 and the reinforcement frame via the opening 214 and the side opening 210b in the side wall 208b of the main frame body 201 and the opening 214 of the reinforcing frame body 202b. The interiors of the sieves 202a and 202b communicate with each other to form an integrated substrate transfer space. That is, in the conveyance space in the conventional conveyance chamber, the space near both side parts of a long side direction is replaced by the internal space of the reinforcement frames 202a and 202b. In this way, the substrate conveyance space is formed integrally within the main frame body 201 and the reinforcing frame bodies 202a and 202b, so that the substrate is supported on the substrate support plate 54 of the conveyance mechanism 50 provided therein. Sufficient turning radius (transfer space) can be ensured when carrying a board | substrate conveyance between each process chamber 10a, 10b, 10c, and the load lock chamber 30 in the state which mounted (S).

And the conveyance chamber 20 which the main frame body 201 and the reinforcement frame bodies 202a and 202b joined together was integrated, is arrange | positioned in the center part of the process chamber 10a, 10b, 10c, and the gate valve 22 is closed. Through the process chamber (10a, 10b, 10c) and the load lock chamber 30 via the substrate (S) is connected so as to exchange.

Thus, in this embodiment, the board | substrate S is enlarged by joining each structural part divided into three (main frame body 201 and the reinforcement frame bodies 202a, 202b of both sides), and forming a vacuum chamber. Can be easily coped with.

That is, in the case of the conventional vacuum chamber of the integrated structure, in order to increase the size while maintaining the rigidity required as the vacuum chamber, manufacturing constraints such as requiring a large cutting machine for processing, and transfer by increasing the weight, Although difficult to handle, the divided structure makes it possible to process each part separately, thereby facilitating manufacture, transportation and handling.

In addition, since the main frame body 201 and the reinforcing frame bodies 202a and 202b can be conveyed in three divided states before the conveyance chamber 20 is installed, it will not be subject to legal restrictions.

Further, by joining the reinforcing frame bodies 202a and 202b to the main frame body 201 using the connecting reinforcing plates 224a and 224b, the main frame has a large upper opening 205 on the upper surface and is hard to maintain rigidity. It is possible to improve the vacuum strength of the sieve 20l. That is, since the reinforcing frame bodies 202a and 202b are joined to the side portions in the long side direction of the main frame body 201 to function as reinforcing members, it is possible to obtain sufficient vacuum strength as the entire conveyance chamber 20. .

Further, by arranging the L-shaped reinforcement 221 on the inner circumferential surface of the main frame body 201 to increase rigidity, the main frame body in a high vacuum state can be made thin even if the thickness of the plate forming the main frame body 20l is reduced. It is possible to suppress the deviation of 201).

In addition, a lattice rib 222 is arranged on the outer wall surfaces of the reinforcing frame bodies 202a and 202b to maintain rigidity, and the thickness of the plate constituting the reinforcing frame bodies 202a and 202b is reduced. It is possible to reduce the weight.

Further, as described above, since the plate thickness of the main frame body 201 and the reinforcing frame bodies 202a and 202b can be reduced, processing can be facilitated and weight reduction can be achieved. Compared to vacuum chambers, not only can material costs and processing costs be reduced, but also transportation costs can be reduced.

In addition, this invention is not limited to the said embodiment, A various deformation | transformation is possible. For example, the object to be processed is not limited to the glass substrate for FPD, but may be a semiconductor wafer.

Moreover, in the said embodiment, although the rib 222 was arrange | positioned on the outer wall surface as the reinforcement frame bodies 202a and 202b, the rigidity was raised, but the board thickness of the reinforcement frame itself was formed thick, and the rigidity can also be used. Do.

In addition, in the said embodiment, although the main frame body 20l of the quadrangular shape was demonstrated as an example in plan view, the planar shape of the main frame body 20l is not limited to a tetragon, For example, hexagonal, Polygonal shapes, such as an octagon, may be sufficient. The reinforcing frame is not limited to two, but three or more reinforcing frames can be joined to the main frame.

In addition, although the division structure was applied to the conveyance chamber 20 in the said embodiment, it is not limited to a conveyance chamber, but it is applicable to the process chamber which is a load lock chamber which is a vacuum preliminary chamber, and a vacuum processing chamber, for example. It is possible.

According to the present invention, by forming a vacuum chamber by joining a main frame body and a reinforcement frame body, manufacturing, conveying and handling are particularly easy while maintaining the rigidity required as a vacuum chamber in a simple structure. Maintenance property is also improved, and it becomes possible to plan to enlarge a board | substrate.

  That is, since the plate | board thickness of a main frame body and a reinforcement frame body can be reduced by functioning the reinforcement frame itself as a reinforcement member of a main frame body, processing becomes easy and light weight is attained. Therefore, the manufacturing cost such as material cost, processing cost, etc. can be reduced, as well as transportation cost, as compared with the conventional integrated vacuum chamber.

Claims (18)

A main frame body formed of a polygon, having a bottom plate forming a bottom portion, and having an upper opening with an upper surface opposed to the bottom plate opened; At least one pair of reinforcing frame bodies joined to opposite sides of the main frame body, A top plate detachably joined to an upper portion of the main frame body, In the vicinity of the upper end of the inner wall surface of the main frame body, a flange protruding toward the inner side of the upper opening of the main frame body, and an internal reinforcing member having a cross-sectional L-shape joined to the wall surface of the main frame body, The main frame body and the reinforcing frame body are joined together to form a space for accommodating the substrate to be processed. Vacuum chamber. A main frame body formed of a polygon and having a bottom plate forming a bottom portion, the main frame body having an upper surface opposed to the bottom plate opened; At least one pair of reinforcing frame bodies joined to opposite sides of the main frame body, A top plate detachably joined to an upper portion of the main frame body, External reinforcement consisting of a rib formed in a direction perpendicular to the outer wall of the main frame body side and a rib orthogonal to the rib in a state where the main frame body and the reinforcement frame body are joined to the outer wall surface of the reinforcement frame body. Characterized by having a member Vacuum chamber. The method according to claim 1 or 2, A side opening is formed in each of the side of the main frame body and the side of the reinforcing frame body, and the inside of the main frame body and the inside of the reinforcing frame body communicate with each other through the side opening to accommodate the substrate to be processed. Characterized in that Vacuum chamber. delete delete The method of claim 2, The outer reinforcing member is provided on the outer wall surface of the wall facing the upper and lower sides of the reinforcing frame body, characterized in that Vacuum chamber. delete delete The method of claim 1, The top plate is mounted on the upper surface of the flange and joined Vacuum chamber. The method according to claim 1 or 2, And a connecting plate for joining the main frame body and the reinforcing frame body. Vacuum chamber. The method of claim 10, The connecting plate joins an upper end of the main frame body and an upper end of the reinforcing frame body. Vacuum chamber. The method according to claim 1 or 2, A bottom portion reinforcing member is disposed on the outer wall surface of the bottom plate. Vacuum chamber. The method according to claim 1 or 2, The said vacuum chamber is a conveyance chamber provided with the conveying apparatus which conveys the to-be-processed board | substrate in a vacuum inside the inside, It is characterized by the above-mentioned. Vacuum chamber. The method of claim 13, An opening and carrying opening for carrying in and carrying out the substrate to be processed is formed on a pair of side walls facing the main frame body. Vacuum chamber. The method of claim 13, Opening and carrying openings for carrying in and carrying out the substrate to be processed are formed on sidewalls of the reinforcing frame body; Vacuum chamber. The method according to claim 1 or 2, A maintenance opening is formed in the side wall of the reinforcing frame body. Vacuum chamber. delete The vacuum chamber according to claim 1 or 2, A plurality of vacuum processing chambers connected to the vacuum chamber to perform processing of the substrate to be processed; Vacuum processing unit.

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