JP6625597B2 - Transfer chamber - Google Patents

Description

  The present invention relates to a transfer chamber used for transferring a glass substrate or the like in a process of manufacturing a liquid crystal panel, an organic EL panel, or the like.

  2. Description of the Related Art A substrate processing apparatus used for manufacturing a semiconductor device or the like is known from Patent Document 1 and the like.

JP-A-2002-64300

  Patent Literature 1 proposes a device that can determine whether an operator is in a chamber (clean space). In the apparatus disclosed in Patent Document 1, the substrate processing apparatus is surrounded by an enclosing apparatus, and the detection of a person entering the enclosing apparatus is used to detect the entry of a person into the enclosing apparatus.

  Meanwhile, as a substrate processing apparatus, there is a substrate processing apparatus in which a plurality of process chambers are arranged in a cluster around a transfer chamber (for example, a vacuum chamber) in which a transfer robot is housed. As a result of the recent increase in the size of the substrate, the transfer chamber has become so large that people can enter and exit the transfer chamber. Actually, when the transfer chamber or the transfer robot is inspected, a person may enter or leave the transfer chamber. In the device of Patent Literature 1, it is possible to detect entry of a person into the surrounding device, but it is not possible to detect whether a person is actually present in the chamber. Further, in a large-sized transfer chamber, since the internal space is also large, a blind spot is generated when the transfer chamber is visually recognized from the upper opening of the chamber. Means for providing a viewing window in the transfer chamber to eliminate this blind spot may be considered. However, providing a viewing window means that the sealing property between the viewing window and the transfer chamber must be ensured, which is not very desirable from the viewpoint of manufacturing and management.

  Therefore, an object of the present invention is to propose a transfer chamber that can detect whether or not a person is actually inside.

In order to achieve the above object, the transfer chamber of the present invention is provided
A transfer chamber having a chamber main part in which a transfer device for transferring a substrate is installed, and a chamber side part forming an internal space together with the chamber main part,
The transfer chamber has an opening at an upper part thereof,
A reflecting member is provided on at least a part of the periphery of the opening.

  According to the above configuration, since the internal space of the transfer chamber can be directly observed by the reflection member, it is possible to surely grasp whether or not there is a person in the internal space.

Further, in the transfer chamber of the present invention,
It is preferable that an image pickup unit is provided at a periphery of the opening so as to face the reflection member and image the internal space.

  According to the above configuration, the system can determine whether or not there is a person in the internal space using the imaging unit.

Further, in the transfer chamber of the present invention,
It is preferable to have a first drive unit that drives the image pickup unit in a tilt drive and / or a pan drive.

  According to the above configuration, a single imaging unit can image a wide range of the internal space. Even when a plurality of image pickup units are used, the entire image can be picked up with a smaller number.

Further, in the transfer chamber of the present invention,
It is preferable to have a second drive unit for tilt driving and / or pan driving of the reflection member.

  According to the above configuration, even if the reflection member has a small reflection area, the internal space of the transfer chamber can be observed in a wide range.

Further, in the transfer chamber of the present invention,
It is preferable to have a third drive unit for moving the imaging unit in at least one of the vertical direction and the horizontal direction.

  According to the above configuration, even with one imaging unit, the internal space of the transfer chamber can be imaged in a wide range. Even when a plurality of imaging units are used, the entire internal space of the transfer chamber can be imaged with a smaller number.

Further, in the transfer chamber of the present invention,
It is preferable to have a transmission unit for transmitting the image of the internal space imaged by the imaging unit as data.

  According to the above configuration, the state of the internal space of the transfer chamber can be confirmed even from a remote location.

Further, in the transfer chamber of the present invention,
It is preferable to have a display unit for receiving and displaying the data transmitted by the transmission unit.

  According to the above configuration, the state of the internal space of the transfer chamber can be confirmed based on data displayed on the display unit even from a remote place, for example.

Further, in the transfer chamber of the present invention,
It is preferable to have an abnormality notification unit that analyzes the image of the internal space to determine the presence or absence of an abnormality in the internal space, and notifies the abnormality when there is an abnormality.

  According to the above configuration, it is also possible to notify that there is an abnormality in the internal space of the transfer chamber using, for example, sound or light.

Further, in the transfer chamber of the present invention,
It is preferable that the reflection member is provided on an upper peripheral edge of the opening.

  When a reflection member is provided in the internal space of the transfer chamber, it is necessary to increase the height of the transfer chamber excessively in order to avoid interference between the transfer device and the reflection member, which increases the volume of the internal space. . By providing the reflection member on the upper peripheral edge of the opening, interference between the transport device and the reflection member can be eliminated, and an increase in the volume of the internal space can be suppressed.

  According to the transfer chamber of the present invention, it is possible to detect whether or not a person is actually inside.

FIG. 2 is a schematic diagram of a substrate processing apparatus including a transfer chamber. It is a perspective view of a transfer chamber. (A) shows a state in which the top plate is removed, and (b) shows a state in which the top plate is fitted. FIG. 2 is a perspective view of a transfer chamber (at the time of maintenance) according to the first embodiment of the present invention. FIG. 4 is a sectional view taken along line IV-IV of the transfer chamber shown in FIG. 3. It is a top view of the transfer chamber concerning a second embodiment. It is a side view of the transfer chamber concerning a second embodiment. It is a top view of the transfer chamber concerning a third embodiment. It is a side view of the transfer chamber concerning a third embodiment. It is a top view of the transfer chamber concerning a 4th embodiment. It is a side view of the transfer chamber concerning a 4th embodiment.

Hereinafter, an example of the transfer chamber according to the present embodiment will be described with reference to the drawings.
Here, a substrate processing apparatus including a transfer chamber will be described first. The substrate processing apparatus described here is a multi-chamber type apparatus for performing an etching process on a glass substrate (hereinafter, simply referred to as “substrate”) P for a flat panel display (FPD). Examples of the FPD include a liquid crystal display (LCD), a light emitting diode (LED) display, an electroluminescence (EL) display, a fluorescent display tube (VFD), a plasma display panel (PDP), and the like.

  FIG. 1 is a schematic diagram of a substrate processing apparatus. As shown in FIG. 1, the substrate processing apparatus 100 has a transfer chamber 1 disposed in the center thereof. Around the transfer chamber 1, a load lock chamber 7, which is a vacuum preparatory chamber, and a plurality of (five in this example) process chambers 8a to 8e, which are vacuum processing chambers, are arranged. The process chambers 8a to 8e can be configured as a film forming chamber, an etching chamber, an ashing chamber, or the like. The transfer chamber 1 of the present embodiment is configured in a shape in which a total of six chambers including the load lock chamber 7 and the process chambers 8a to 8e are arranged around, for example, a substantially hexagonal shape in plan view, and a hexahedral shape as a whole. However, the number of chambers and the overall shape are not limited thereto.

  A gate valve 15 is provided between the transfer chamber 1 and the load lock chamber 7 so as to hermetically seal the space therebetween and to be openable and closable. Gate valves 15 are also provided between the transfer chamber 1 and each of the process chambers 8a to 8e, and also at the openings communicating the load lock chamber 7 with the outside atmosphere.

  Outside the load lock chamber 7, three cassettes 9 accommodating the substrates P are arranged. These cassettes 9 accommodate, for example, unprocessed substrates and processed substrates. A substrate transfer device 90 is arranged between these three cassettes 9. The substrate transfer device 90 has a slide arm on which the substrate P is placed, and a base for supporting the slide arm so as to advance and retract and rotate.

  The transfer chamber 1 includes a chamber main unit 11 in which a transfer device 13 for transferring the substrate P is installed, and a chamber side unit 12 that forms an internal space of the transfer chamber 1 together with the chamber main unit 11. I have. The transfer chamber 1 is configured so that its internal space can be maintained in a predetermined reduced-pressure atmosphere (for example, under a vacuum environment).

  In the transfer chamber 1, the transfer of the substrate P between the load lock chamber 7 and the process chambers 8a to 8e is performed by the transfer device 13 installed in the chamber main section 11. The transport device 13 has a base portion, a lower hand base 13b, and an upper hand base 13d. The base portion is provided at a substantially central portion of the chamber main portion 11 and includes a drive mechanism for moving the transport device 13 up and down, and a driven portion rotatably and vertically movable with respect to the drive mechanism. The driven part is provided with a lower hand base 13b and an upper hand base 13d.

  The driven part includes an actuator, a guide part, and a slider for moving the lower hand base 13b and the upper hand base 13d forward and backward with respect to the driven part. A lower hand base 13b and an upper hand base 13d are fixed to each slider. By driving one of the sliders, the lower hand base 13b or the upper hand base 13d is moved forward and backward. A lower hand 13c and an upper hand 13e (for example, four fork hands in FIG. 1) are provided on the lower hand base 13b and the upper hand base 13d, respectively. The driven part is turned and moved up and down in the internal space of the transfer chamber 1 by driving of the drive mechanism, and the lower hand base 13b or the upper hand base 13d is moved forward and backward to thereby move the load lock chamber 7 and the process chambers 8a to 8e. The transfer of the substrate P is performed in.

  Like the transfer chamber 1, the load lock chamber 7 and the process chambers 8a to 8e are configured so that their internal spaces can be maintained at a predetermined reduced-pressure atmosphere. Inside the process chambers 8a to 8e, processes such as film formation, plasma etching or ashing are performed. The process chambers 8a to 8e are similarly configured.

Next, the transfer chamber 1 will be described in detail with reference to FIGS.
FIG. 2 is a perspective view for explaining the configuration of the transfer chamber 1. 2A shows a state in which the top plate 14 has been removed, and FIG. 2B shows a state in which the top plate 14 has been fitted. As shown in FIGS. 2A and 2B, the chamber main portion 11 of the transfer chamber 1 is a rectangular portion in plan view and side view. Further, the pair of chamber side portions 12a and 12b are substantially trapezoidal portions in plan view. The pair of chamber side portions 12a and 12b are portions for securing a transfer space in which the transfer device 13 can turn, and extend outward from the opposite sides of the long side of the chamber main portion 11, respectively. A top plate 14 for closing an opening 24 to be described later is detachably connected to the upper surface of the chamber main portion 11. FIG. 1 shows the transfer chamber 1 with the top plate 14 removed. The chamber main part 11 and the chamber side parts 12a and 12b shown in FIGS. 2A and 2B are provided integrally. Of course, it goes without saying that three may be provided separately.

  The chamber main section 11 includes a bottom plate 21 that forms the bottom of the transfer chamber 1. The upper part of the chamber main part 11 is an opening part 24 which is opened almost entirely.

  The chamber main section 11 has a transfer opening 26 for transferring the substrate P in and out of the load lock chamber 7 (see FIG. 1). Further, a transfer opening 27 for carrying the substrate P in and out of the process chamber 8c is formed at a position facing the transfer opening 26. Further, an opening 28 for installing the transfer device 13 (see FIG. 1) is formed in the bottom plate 21 of the chamber main portion 11.

  The top plate 14 is fitted into the inner edge of the opening 24 in the chamber main portion 11 by dropping. The top plate 14 is made of the same material as the chamber main unit 11, and is fixed to the inner edge of the opening 24 by a fixing member such as a bolt. The top plate 14 is mounted when the transfer chamber 1 is actually used, that is, when the internal space is maintained in a vacuum environment, and is detached when the internal space of the transfer chamber 1 and the transfer device 13 are maintained.

  The chamber side portions 12a and 12b and the chamber main portion 11 combine the internal space S1 of the chamber main portion 11 and the internal spaces S2a and S2b of each of the chamber side portions 12a and 12b to form one transfer space. You.

  On both side walls 33a and 34a of the chamber side portion 12a, transfer openings 35a and 36a for transferring the substrate P in and out of the process chambers 8a and 8b shown in FIG. 1 are formed. I have. Further, transfer openings 35b and 36b for transferring the substrate P into and out of the process chambers 8d and 8e shown in FIG. 1 are formed in both side walls 33b and 34b of the chamber side portion 12b. Have been. In addition, upper walls 32a and 32b are provided above the chamber side portions 12a and 12b.

(First embodiment)
3 and 4 are views showing the transfer chamber 1A according to the first embodiment. FIG. 3 shows a perspective view of the transfer chamber 1A. FIG. 4 is a sectional view taken along line IV-IV in the transfer chamber 1A of FIG. 3 and 4 show the transport chamber 1A during maintenance, and show a state in which the top plate 14 is removed and the opening 24 is exposed. As shown in FIGS. 3 and 4, the transfer chamber 1 </ b> A includes a mirror 41 (an example of a reflection member) on the periphery of the opening 24 of the chamber main part 11.

  The mirrors 41 (41a, 41b) are provided on the upper peripheral edge of the opening 24 of the chamber main part 11, respectively. When the top plate 14 is attached to the opening 24, the mirror 41 (41 a, 41 b) is provided so as to be located above the top plate 14, that is, to be arranged outside the chamber main portion 11. I have. For example, a safety fence 44 extending upward is provided so as to surround the periphery of the opening 24. The mirror 41 (41 a, 41 b) is provided on a lower frame portion 44 b which is vertically divided into two on the long side of the opening 24 of the safety fence 44. By providing the mirror 41 (41a, 41b) in the lower frame portion 44b of the safety fence 44, a new space for installing the mirror 41 (41a, 41b) becomes unnecessary. Further, by providing the mirror 41 (41a, 41b) on the lower frame portion 44b, the mirror becomes a shield, and the maintenance tool or the like placed on the upper part of the chamber main part 11 and the chamber side parts 12a, 12b may be erroneously operated. As a result, it does not fall into the transfer space. As a result, the transport space is not damaged by falling objects or the like.

  The mirrors 41 (41a, 41b) are provided on the long sides of the opening 24 of the chamber main part 11 with the reflecting surfaces facing each other. The mirror 41 (41a, 41b) is configured to be able to perform tilt drive for moving the direction up and down and pan driving for moving the direction left and right. The mirror driving units 43a and 43b (an example of a second driving unit) for tilt driving and pan driving of each mirror are connected to the mirrors 41 (41a and 41b). The mirror drive units 43a and 43b are configured to be operated by a worker (observer) using a portable information terminal such as a teach pendant, for example.

  In the present embodiment, the case where two mirrors 41 (41a, 41b) having substantially half the length of the long side of the chamber main portion 11 are provided in the lower frame portion 44b is taken as an example, but the present invention is not limited to this. Absent. For example, only one mirror having a length substantially equal to the length of the long side may be provided on the lower frame portion 44b, or three or more mirrors shorter than the length of the long side may be provided on the lower frame portion 44b. Further, a mirror shorter than the length of the long side may be provided on at least a part of the lower frame portion 44b. The shape of the mirror 41 (41a, 41b) may be a flat mirror like a flat plate as in the present embodiment, or may be a concave mirror with a concave reflecting surface side.

  For example, when the observer stands on the upper walls 32a, 32b of the chamber side portions 12a, 12b during maintenance, the observer can directly observe the internal space of the transfer chamber 1A using the mirror 41 (41a, 41b). For example, as shown in FIG. 4, when the observer stands on the upper wall 32a of the chamber side portion 12a, the observer moves to the internal space S2b of the chamber side portion 12b provided on the opposite side across the chamber main portion 11. And the state of the internal space S1 of the chamber main portion 11 can be directly visually recognized. Then, the state of the internal space S2a of the chamber side part 12a provided below the place where the observer stands and the state of the internal space S1 of the chamber main part 11 are confirmed by the image reflected on the mirror 41b. Can be. Therefore, the observer can check the state of the entire internal space of the transfer chamber 1A without moving the observation place, that is, while standing on the upper wall 32a of the chamber side portion 12a. Can be detected.

  Further, according to the transfer chamber 1A of the present embodiment, the observer moves the internal spaces S2a and S2b of the two chamber side parts 12a and 12b and the internal space S1 of the chamber main part 11 almost simultaneously without moving the observation place. It is possible to confirm. At this time, if the observer needs to move the observation place when checking the whole state of the internal space, the operator moves to the area in the internal space once confirmed while the observer is moving. May invade. This causes the worker in the internal space to be overlooked. On the other hand, in the transfer chamber 1A of the present embodiment, since the entire internal space can be checked substantially simultaneously, it is possible to reliably detect whether or not there is a person in the internal space.

  Further, since the direction of the mirror 41 (41a, 41b) can be changed vertically and horizontally, even if the surface area of the mirror 41 is small, the state of the internal space (S1, S2a and S2b) can be easily confirmed in a wide range. It is possible.

  Further, as shown in FIG. 4, not only when the observer stands at a position away from the opening 24 of the chamber main portion 11, but also when, for example, stands near the opening 24, the mirror 41 (41 a , 41b), the overall state of the internal space (S1, S2a and S2b) can be confirmed. In addition, by changing the direction of the mirror 41 (41a, 41b) without being influenced by the height of the observer (height of the eye line position), the state of the entire internal space (S1, S2a, and S2b) is confirmed. be able to.

  By the way, for example, unlike the present embodiment, when the mirror 41 (41a, 41b) is provided in the internal space (S1, S2a, S2b), interference between the transport device 13 and the mirror 41 (41a, 41b) is avoided. Therefore, it is necessary to increase the height of the chamber main part 11 and the chamber side parts 12a and 12b. As a result, the internal space (S1, S2a, and S2b) becomes large. On the other hand, in the transfer chamber 1A, since the mirror 41 (41a, 41b) is provided on the upper peripheral edge of the opening 24, there is no fear of interference between the transfer device 13 and the mirror 41 (41a, 41b). The space (S1, S2a, and S2b) can be suppressed from increasing in size.

In addition, since the transfer chamber 1A can check the entire internal space (S1, S2a, and S2b) by using the mirror 41 (41a, 41b), a viewing window for visually checking the inside of the transfer chamber 1A. Need not be formed in the chamber body. As a result, it is not necessary to ensure the sealing performance of the chamber main body, and a highly airtight transfer chamber 1A can be obtained.
Further, since the mirror 41 (41a, 41b) can be mounted in the lower frame of the safety fence 44, there is no need to perform a hole processing or the like for mounting the mirror 41 (41a, 41b) in the transfer chamber 1A itself. The airtightness of the chamber 1A can be ensured. In addition, when the mirror 41 (41a, 41b) is mounted on the safety fence 44, the mirror 41 (41a, 41b) can be easily mounted, removed, adjusted, and the like without requiring any special tool.

(Second embodiment)
FIG. 5 and FIG. 6 are schematic diagrams showing the transfer chamber 1B according to the second embodiment. FIG. 5 shows a top view of the transfer chamber 1B. FIG. 6 shows a side view of the transfer chamber 1B. The same components as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted as appropriate.
As shown in FIGS. 5 and 6, the transfer chamber 1B includes a camera 51 (an example of an image pickup unit) that picks up an image of the internal space of the transfer chamber 1B.

  The camera 51 is installed on the periphery of the opening 24 so as to face the mirror 41 (41a, 41b). In this embodiment, the camera 51 is installed on the chamber side portion 12a side, and the mirror 41b is installed on the chamber side portion 12b side. On the contrary, the camera 51 is installed on the chamber side portion 12b side, and the chamber 51 is installed. The mirror 41a may be provided on the side part 12a side. Alternatively, both the camera and the mirror may be provided on both the chamber side portion 12a and the chamber side portion 12b. Further, the installation position of the camera 51 is not limited to the peripheral edge of the opening 24, and may be any position on the upper wall 32a of the chamber side portion 12a or on the upper wall 32b of the chamber side portion 12b.

  The camera 51 is configured to be capable of tilt drive (see arrow B in FIG. 6) and pan drive (see arrow C in FIG. 5). The camera 51 is configured to be able to move up and down (see arrow D in FIG. 6). The camera 51 is connected to a camera drive unit 52 (an example of a first drive unit) for tilting, panning, and moving the camera up and down. The camera driving unit 52 is configured so that, for example, an operator can remotely control the camera using a teach pendant or a remote controller. Alternatively, the camera drive unit 52 is programmed in advance with a tilt angle, a pan angle, and the like so that the entire internal space (S1, S2a, and S2b) of the installed transfer chamber 1B can be imaged. 51 is driven.

  As the camera 51, for example, a charge coupled device (CCD) camera, a complementary metal oxide semiconductor (CMOS) camera, or the like is used. The camera drive unit 52 includes a transmission unit 53 that transmits a video of the internal space (S1, S2a, and S2b) captured by the camera 51 as data. The data can be received by a receiving unit such as a mobile terminal such as a teach pendant or a terminal installed in a remote control room. The received data is displayed on a display unit provided in the receiving unit. Note that, as the camera 51, for example, a night vision camera, a thermographic camera, or the like may be used.

  The receiving unit has a determination device (an example of an abnormality notification unit) that analyzes received data and determines whether or not there is an abnormality in the internal space (S1, S2a, and S2b). The determination device analyzes or monitors data captured (measured) by, for example, a night vision camera or a thermographic camera, and determines whether or not a worker remains in the internal space (S1, S2a, and S2b). In addition, the receiving unit has a notification device (an example of an abnormality notification unit) that notifies the determination result of the determination device. When it is determined that there is an abnormality in the determination result of the determination device, the notification device notifies the user by displaying a warning mark on a display unit or outputting a warning sound, for example. The notification device may be provided in the camera drive unit 52. Based on the signal transmitted from the determination device, the camera drive unit 52 notifies the user of an abnormality, for example, by outputting a warning sound or lighting a warning lamp.

  Note that the mirror 41 (41a, 41b) of the present embodiment is also configured to be capable of tilt drive and pan drive similarly to the mirror of the first embodiment.

  According to the transfer chamber 1B having such a configuration, the internal space (S1, S2a, and S2b) of the transfer chamber 1B can be observed using the camera 51, for example, during maintenance. For this reason, even if the observer does not work on the chamber side portions 12a and 12b, the data transmitted from the transmission unit 53 is monitored by the display unit at a location remote from the transfer chamber 1B, for example. The state of the space (S1, S2a and S2b) can be confirmed. This makes it possible to detect whether or not there is a worker in the internal space (S1, S2a, and S2b).

  Further, since the camera 51 can be tilt-driven and pan-driven, a single camera 51 can capture a wide range of the internal space (S1, S2a, and S2b). Further, for example, even when a plurality of cameras are used, the entire internal space (S1, S2a, and S2b) can be imaged with a smaller number.

In addition, since not only the camera 51 but also the mirror 41 (41a, 41b) can be tilt-driven and pan-driven, the state of the internal spaces (S1, S2a and S2b) can be confirmed more reliably, and the internal spaces (S1, S2a) can be confirmed. And whether or not an operator is present in S2b). Further, when there is an abnormality in the internal space (S1, S2a and S2b), the abnormality can be recognized by a warning sound or a warning lamp from the abnormality notification unit, and therefore, whether or not a worker remains in the internal space (S1, S2a and S2b). Can be more reliably detected.
However, unlike the above-described embodiment, only the camera 51 may be configured to be capable of tilt drive and pan drive, and the mirror 41 (41a, 41b) may be fixed to be incapable of tilt drive and pan drive.

(Third embodiment)
FIGS. 7 and 8 are schematic diagrams showing a transfer chamber 1C according to the third embodiment. FIG. 7 shows a top view of the transfer chamber 1C. FIG. 8 shows a side view of the transfer chamber 1C.
As shown in FIGS. 7 and 8, the transfer chamber 1 </ b> C of the third embodiment is different from the transfer chamber 1 </ b> C in that the camera 51 can move in the left-right direction (the direction of the arrow E in FIG. 7) along the periphery of the opening 24. , Is different from the transfer chamber 1B of the second embodiment. Therefore, the same components as those in the second embodiment are denoted by the same reference numerals, and description thereof will be omitted as appropriate.

  In the opening 24, a rail member 61 is installed along the periphery. The camera 51 moves left and right along the rail member 61. The rail member 61 is provided with, for example, a traveling mechanism 62 that sandwiches the rail member 61 from both sides with traveling wheels and drives the traveling wheels with a motor to travel. The camera 51 is mounted on the traveling mechanism 62 and moves together with the traveling mechanism 62. Further, the camera 51 can also be tilt-driven, pan-driven, and moved up and down, similarly to the camera of the second embodiment.

  The camera 51 is connected to a camera drive unit 63 (an example of a third drive unit) for tilting, panning, moving up and down, and moving left and right. The camera driving unit 63 is configured so that, for example, an operator can remotely control the camera using a remote controller or the like. Alternatively, the camera drive unit 63 is programmed in advance with a tilt angle, a pan angle, a vertical and horizontal movement amount, and the like so that the entire internal space (S1, S2a, and S2b) of the transfer chamber 1C can be imaged. The camera 51 is driven according to the following.

  According to the transfer chamber 1C having such a configuration, the state of the internal spaces (S1, S2a, and S2b) of the transfer chamber 1C can be confirmed by moving the camera 51 along the rail member 61, for example, during maintenance. It is possible to detect whether or not a worker exists in the internal spaces (S1, S2a, and S2b). In addition, when a rail installed on the periphery of the opening 24 is adopted as the rail member 61, less dust is generated when the traveling mechanism 62 travels, which is suitable for a substrate processing apparatus in which an etching process, an ashing process, or the like is performed. is there.

(Fourth embodiment)
FIG. 9 and FIG. 10 are schematic diagrams showing a transfer chamber 1D according to the fourth embodiment. FIG. 9 shows a top view of the transfer chamber 1D. FIG. 10 shows a side view of the transfer chamber 1D.
As shown in FIGS. 9 and 10, in the transfer chamber 1 </ b> D of the fourth embodiment, the camera 51 can move all around (see arrows E and F in FIG. 7) along the periphery of the opening 24. This is different from the transfer chamber 1C of the third embodiment in the point. Therefore, the same components as those of the third embodiment are denoted by the same reference numerals, and description thereof will be omitted as appropriate.

  Rail members 61 (61 a to 61 d) are provided along the entire periphery of the opening 24. The camera 51 moves all around the opening 24 along the rail members 61 (61a to 61d). A traveling mechanism 62 on which the camera 51 is mounted is attached to the rail members 61 (61a to 61d), as in the third embodiment. The number of cameras 51 may be singular or plural. Note that the camera 51 can also be tilt-driven, pan-driven, and moved up and down, similarly to the camera of the third embodiment.

In addition, mirrors 41 (41a to 41d) are provided along the entire periphery of the opening 24.
Note that the rail member 61 and the mirror 41 may be provided over a half of the periphery of the opening 24. For example, in FIG. 9, when the rail members 61a and 61b are installed, mirrors 41b and 41d may be provided. Similarly, when the rail members 61c and 61d are installed, the mirrors 41a and 41c may be provided.

  The camera 51 is connected to a camera drive unit 64 (an example of a third drive unit) for causing the camera to perform tilt drive, pan drive, vertical movement, and circumferential movement. The camera drive unit 64 is configured so that, for example, an operator can remotely operate the camera using a remote controller or the like. Alternatively, the tilt angle, the pan angle, the amount of vertical movement, the amount of movement in the circumferential direction, and the like are programmed in advance so that the camera drive unit 64 can image the entire internal space (S1, S2a, and S2b) of the transfer chamber 1D. The camera 51 is driven according to the program.

  In the present embodiment, the linear rail members 61 (61a to 61d) are installed along the rectangular opening 24 in plan view. For example, when the shape of the opening 24 is a round hole or a long hole, May be provided with a curved rail member corresponding to the shape.

  In the case of the transfer chamber 1D having such a configuration, the same effects as those of the transfer chamber 1C of the third embodiment can be obtained.

  In the above-described embodiment, the transfer chamber used in the substrate processing apparatus performing the vacuum processing has been described. However, the present invention may be used in a transfer chamber used under atmospheric pressure.

  Further, the transfer chamber according to the present invention may be applied to a chamber having an integral structure in which a chamber main portion and a chamber side portion are integrally formed, or may be applied to a chamber having a divided structure in which a chamber main portion and a chamber side portion are separated. You may.

  Note that the present invention is not limited to the above-described embodiment, and may be appropriately modified, improved, or the like. In addition, the material, shape, dimension, numerical value, form, number, arrangement location, and the like of each component in the above-described embodiment are arbitrary and are not limited as long as the present invention can be achieved.

1: transfer chamber 7: load lock chamber 8a to 8e: process chamber 11: chamber main unit 12 (12a, 12b): chamber side unit 13: transfer device 14: top plate 24: opening S1, S2a, S2b: internal space 41 (41a to 41d): mirror (an example of a reflection member)
43a, 43b: mirror drive unit (an example of a second drive unit)
51: Camera (an example of an imaging unit)
52: Camera drive unit (an example of a first drive unit)
53: Transmission unit 61 (61a to 61d): Rail member 62: Travel mechanism 63: Camera drive unit (an example of a third drive unit)
64: Camera drive unit (an example of a third drive unit)
100: substrate processing equipment

Claims (9)

A transfer chamber having a chamber main part in which a transfer device for transferring a substrate is installed, and a chamber side part forming an internal space together with the chamber main part,
The transfer chamber has an opening at an upper part thereof,
A transfer chamber, wherein a reflection member is provided on at least a part of a periphery of the opening.   2. The transfer chamber according to claim 1, further comprising: an imaging unit installed on a peripheral edge of the opening to face the reflection member and image the internal space. 3.   The transfer chamber according to claim 2, further comprising a first drive unit that drives the image pickup unit in a tilt drive and / or a pan drive.   The transfer chamber according to claim 1, further comprising a second drive unit that drives the reflection member in a tilt drive and / or a pan drive.   4. The transfer chamber according to claim 2, further comprising a third drive unit configured to move the imaging unit in at least one of a vertical direction and a horizontal direction. 5.   The transfer chamber according to claim 2, further comprising a transmission unit configured to transmit, as data, an image of the internal space captured by the imaging unit.   The transfer chamber according to claim 6, further comprising a display unit configured to receive and display the data transmitted by the transmission unit.   The transfer chamber according to claim 7, further comprising: an abnormality notification unit configured to determine whether or not there is an abnormality in the internal space by analyzing an image of the internal space and to notify the abnormality when an abnormality occurs. The transfer chamber according to claim 1, wherein the reflection member is provided on an upper peripheral edge of the opening.

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