KR102162197B1 - Transfer chamber - Google Patents

Abstract

(Task) Provide a transfer chamber that can detect whether there are actually people inside.
(Solving means) a transfer chamber having a chamber main part 11 in which a transfer device for transferring a substrate is installed, and chamber side parts 12a and 12b forming an inner space together with the chamber main part 11 ( As 1A), the conveyance chamber 1A has an opening 24 at its upper part, and reflective members 41 (41a, 41b) are provided on at least a part of an edge of the opening 24.

Description

Transfer chamber {TRANSFER CHAMBER}

The present invention relates to a conveyance chamber used for conveyance of a glass substrate or the like in a manufacturing process of a liquid crystal panel or an organic EL panel.

A substrate processing apparatus used for manufacturing a semiconductor device or the like is known from Patent Document 1 and the like.

Japanese Unexamined Patent Publication No. 2002-64300

Patent Document 1 proposes a device capable of grasping whether or not an operator is in a chamber (clean space). In the apparatus of Patent Document 1, a substrate processing apparatus is enclosed by an enveloping device, and a detection device that detects the person's entry into the enclosure is used. Access is being detected.

However, as a substrate processing apparatus, there is one in which a plurality of process chambers are arranged in a cluster shape around a transfer chamber (eg, a vacuum chamber) in which a transfer robot is accommodated. As a result of the recent increase in the size of the substrate, the transfer chamber has been enlarged to the extent that humans can enter and exit the inside thereof. In fact, in the case of inspection of the transfer chamber or the transfer robot, there are cases where a person enters and exits the transfer chamber. In the apparatus of Patent Literature 1, although a person's entry into the enclosure can be detected, it cannot be detected whether or not there is actually a person in the chamber. In addition, in a large-sized conveyance chamber, since the internal space is also large, a dead angle occurs when visually recognized from the opening in the upper part of the chamber. In order to eliminate this dead angle, a means of forming an observation window in the conveying chamber is considered. However, to form the observation window, it is necessary to secure the sealing property between the observation window and the conveying chamber, which is not so desirable from the viewpoint of manufacturing and management.

From there, an object of the present invention is to propose a transfer chamber capable of detecting whether or not there are actually people inside.

In order to achieve the above object, the transport chamber of the present invention,

A transfer chamber having a chamber main part in which a transfer device for transferring a substrate is installed therein, and a chamber side part forming an inner space together with the chamber main part,

The conveyance chamber has an opening in its upper part, and a reflective member is installed at least in part of an edge of the opening.

According to the above configuration, since the inner space of the conveyance chamber can be directly observed by the reflective member, it is possible to reliably grasp whether or not there are people in the inner space.

In addition, in the conveyance chamber of the present invention,

It is preferable to include a photographing unit installed at the edge of the opening to face the reflective member and photographing the inner space.

According to the above configuration, it is possible to determine on the system whether or not there are people in the interior space by using the photographing unit.

In addition, in the conveyance chamber of the present invention,

It is preferable to include a first driving unit for tilting and/or pan driving the photographing unit.

According to the above configuration, a wide range of the internal space can be photographed by one photographing unit. Even in the case of using a plurality of photographing units, the whole can be photographed with fewer units.

In addition, in the conveyance chamber of the present invention,

It is preferable to provide a second driving unit for tilting and/or pan driving the reflective member.

According to the above configuration, even a reflective member having a small reflective area can observe the inner space of the transport chamber in a wide range.

In addition, in the conveyance chamber of the present invention,

It is preferable to include a third driving unit for moving the photographing unit in at least one of the vertical and horizontal directions.

According to the above configuration, even one photographing unit can photograph the inner space of the transport chamber in a wide range. Even in the case of using a plurality of photographing units, the entire inner space of the transport chamber can be photographed with a smaller number of photographing units.

In addition, in the conveyance chamber of the present invention,

It is preferable to include a transmission unit that transmits the image of the internal space photographed by the photographing unit as data.

According to the above configuration, it is possible to check the condition of the inner space of the transfer chamber even from a remote location.

In addition, in the conveyance chamber of the present invention,

It is preferable to include a display unit for receiving and displaying the data transmitted by the transmitting unit.

According to the above configuration, it is possible to check the state of the inner space of the conveyance chamber based on data displayed on the display unit, for example from a remote location.

In addition, in the conveyance chamber of the present invention,

It is preferable to include an abnormality notification unit that analyzes the image of the internal space to determine the presence or absence of an abnormality in the internal space, and notifies the abnormality when there is an abnormality.

According to the above configuration, it is also possible to notify that there is an abnormality in the inner space of the conveyance chamber, for example, using sound or light.

In addition, in the conveyance chamber of the present invention,

It is preferable that the reflective member is provided at an upper edge of the opening.

In the case of installing the reflective member in the inner space of the conveying chamber, the height of the conveying chamber needs to be very high in order to avoid interference between the conveying device and the reflecting member, and the volume of the inner space increases. By providing the reflective member at the upper edge of the opening, interference between the conveying device and the reflective member can be eliminated, and an increase in the volume of the internal space can be suppressed.

According to the conveyance chamber of the present invention, it is possible to detect whether there is actually a person inside.

1 is a schematic diagram of a substrate processing apparatus including a transfer chamber.
2 is a perspective view of the conveying chamber, where (a) shows a state in which the upper plate is removed, and (b) shows a state in which the upper plate is coupled.
Fig. 3 is a perspective view of a transfer chamber (in maintenance) according to the first embodiment of the present invention.
Fig. 4 is a cross-sectional view taken along line IV-IV of the transfer chamber shown in Fig. 3;
5 is a plan view of a conveying chamber according to a second embodiment.
6 is a side view of a transfer chamber according to a second embodiment.
Fig. 7 is a plan view of a transfer chamber according to a third embodiment.
Fig. 8 is a side view of a conveying chamber according to a third embodiment.
9 is a plan view of a conveying chamber according to a fourth embodiment.
Fig. 10 is a side view of a transfer chamber according to a fourth embodiment.

Hereinafter, an example of the conveyance chamber according to the present embodiment will be described with reference to the drawings.

Here, first, a description will be given of a substrate processing apparatus including a transfer chamber. The substrate processing apparatus described herein is a multi-chamber type apparatus for etching a glass substrate (hereinafter, simply referred to as a “substrate”) for a flat panel display (FPD). to be. Examples of the FD include a liquid crystal display (LCD), a light-emitting diode (LED) display, an ElectroLuminescence (EL) display, a fluorescent display tube (VFD), and a plasma display panel (PDP).

1 is a schematic diagram of a substrate processing apparatus. As shown in Fig. 1, in the substrate processing apparatus 100, a transfer chamber 1 is disposed in a central portion thereof. Around the conveyance chamber 1, a load lock chamber 7 serving as a vacuum preparatory chamber, and a plurality of process chambers (five in this example) serving as a vacuum processing chamber ( 8a to 8e) are arranged. The process chambers 8a to 8e can be configured with a film forming chamber, an etching chamber, an ashing chamber, or the like. In addition, the conveyance chamber 1 of this example has a shape in which a total of six chambers of the load lock chamber 7 and the process chambers 8a to 8e are arranged around, for example, a substantially hexagonal shape when viewed in plan, Although it is composed of a hexahedral shape as a whole, the number of arrangements and the overall shape of the yarn are not limited to this.

A gate valve 15 is provided between the transfer chamber 1 and the load lock chamber 7 so as to airtightly seal and open/close the space therebetween. Further, a gate valve 15 is also provided between the transfer chamber 1 and each of the process chambers 8a to 8e, and also at the openings that allow the load lock chamber 7 and the outer atmosphere to pass through.

On the outside of the load lock chamber 7 are arranged three cassettes 9 for accommodating a substrate. In these cassettes 9, for example, an untreated substrate or a substrate that has been processed is accommodated. A substrate transfer device 90 is disposed between the three cassettes 9. The substrate conveying apparatus 90 includes a slide arm portion for loading a substrate, and a base portion for supporting the slide arm portion to escape and rotate.

The transfer chamber 1 includes a chamber main part 11 in which a transfer device 13 for transferring a substrate is installed, and a chamber forming an inner space of the transfer chamber 1 together with the chamber main part 11 A side part 12 is provided. The conveyance chamber 1 is configured to be able to maintain its internal space in a predetermined reduced pressure atmosphere (for example, a vacuum environment).

In the transfer chamber 1, a substrate is transferred between the load lock chamber 7 and the process chambers 8a to 8e by a transfer device 13 provided in the chamber main part 11. The conveyance device 13 is provided with a base portion, a lower hand base 13b, and an upper hand base 13d. The base portion is provided at a substantially central portion of the chamber main portion 11 and includes a drive mechanism portion for elevating and turning the conveying device 13, and a driven portion provided to swing and elevate relative to the drive mechanism portion. In this driven portion, a lower hand base 13b and an upper hand base 13d are provided.

The driven portion includes an actuator, a guide portion, and a slider for moving the lower hand base 13b and the upper hand base 13d forward and backward with respect to the driven portion. To each slider, a lower hand base 13b and an upper hand base 13d are fixed. By driving either of the sliders, the lower hand base 13b or the upper hand base 13d moves forward and backward. The lower hand base 13b and the upper hand base 13d are provided with a lower hand 13c and an upper hand 13e (for example, four fork hands in Fig. 1), respectively. Driven by the drive mechanism unit, the driven part is rotated and raised in the inner space of the conveyance chamber 1, and the lower hand base 13b or the upper hand base 13d is moved forward and backward to move the load lock chamber 7 and the process chamber 8a. The substrate is transferred between ∼ 8 e).

Like the transfer chamber 1, the load lock chamber 7 and the process chambers 8a to 8e are configured to maintain respective internal spaces in a predetermined reduced pressure atmosphere. In the inside of the process chambers 8a to 8e, for example, a film formation, plasma etching, or ashing is performed. The process chambers 8a to 8e are configured similarly.

Next, the transfer chamber 1 will be described in detail with reference to Figs.

2 is a perspective view for explaining the configuration of the transfer chamber 1. Fig. 2(a) shows a state in which the top plate 14 is peeled off, and Fig. 2(b) shows a state in which the top plate 14 is attached. As shown in Figs. 2A and 2B, the chamber main portion 11 of the conveying chamber 1 is a rectangular portion in plan view and side view. In addition, the pair of chamber side portions 12a and 12b are substantially trapezoidal in plan view. The pair of chamber side portions 12a, 12b is a portion for securing a space for conveyance in which the conveying device 13 can turn, and is a side portion opposite to the long side of the chamber main portion 11 Each extends outward from And, to the upper surface of the chamber main part 11, the upper plate 14 which closes the opening part 24 which will be described later is joined so that it may attach and detach. Here, FIG. 1 shows the conveyance chamber 1 in the state where the upper plate 14 was removed. In addition, the chamber main portion 11 and the chamber side portions 12a and 12b shown in Figs. 2A and 2B are integrally formed. Of course, it goes without saying that three may be formed as separate bodies.

The chamber main portion 11 is provided with a bottom plate 21 constituting the bottom portion of the conveyance chamber 1. The upper part of the chamber main part 11 is an opening 24 with almost the entire surface open.

In the chamber main portion 11, an opening 26 for conveyance for carrying in and out of a substrate is formed between the load lock chamber 7 (see Fig. 1). Further, a transfer opening 27 for carrying a substrate into and out of the process chamber 8c is formed at a position opposite to the transfer opening 26. Further, in the bottom plate 21 of the chamber main part 11, an opening 28 for installing the conveying device 13 (see Fig. 1) is formed.

The upper plate 14 is pushed into the inner edge of the opening 24 in the chamber main part 11 and coupled. The upper plate 14 is made of the same constituent material as the chamber main part 11, and is fixed to the inner edge of the opening 24 by a fixing member such as a bolt. The upper plate 14 is mounted when the transfer chamber 1 is actually used, that is, when the internal space is kept under a vacuum environment, and is detached when performing maintenance of the internal space of the transfer chamber 1 and the transfer device 13, etc. .

The inner space (S1) of the chamber main part 11 and the inner spaces (S2a, S2b) of each chamber side part (12a, 12b) are combined by the chamber side parts (12a, 12b) and the chamber main part (11). A space for conveying of is formed.

In both side walls 33a and 34a of the chamber side portion 12a, openings 35a and 36a for conveyance are formed between the space for conveyance and the process chambers 8a and 8b shown in FIG. have. Further, on both side walls 33b and 34b of the chamber side portion 12b, openings 35b and 36b for conveyance are formed between the conveying space and the process chambers 8d and 8e shown in FIG. Has been. In addition, upper walls 32a and 32b are formed above the chamber side portions 12a and 12b.

(First embodiment)

3 and 4 are diagrams showing a transfer chamber 1A according to the first embodiment. 3 shows a perspective view of the conveyance chamber 1A. FIG. 4 is a cross-sectional view taken along line IV-IV in the conveyance chamber 1A of FIG. 3. In Figs. 3 and 4, the conveyance chamber 1A during maintenance is shown, and the upper plate 14 is removed and the opening 24 is exposed. As shown in Figs. 3 and 4, the conveyance chamber 1A is provided with a mirror 41 (an example of a reflective member) at the edge of the opening 24 of the chamber main portion 11.

The mirrors 41 (41a, 4lb) are provided on the upper edge of the opening 24 of the chamber main part 11, respectively. When the top plate 14 is mounted on the opening 24, the mirrors 41 (41a, 4lb) are installed so as to be positioned above the top plate 14, that is, to be disposed outside the chamber main part 11 . For example, a safety fence 44 extending upward is provided so as to surround the periphery of the opening 24. The mirrors 41 (41a, 4lb) are provided in the lower frame portion 44b divided into two vertically on the long side of the opening 24 in the safety fence 44. By installing the mirrors 41 (41a, 4lb) on the lower frame portion (44b) of the safety fence (44), a new space for installing the mirrors (41) (41a, 4lb) becomes unnecessary. In addition, by installing the mirrors 41 (41a, 4lb) on the lower frame portion 44b, the mirror becomes a shield, and is placed on top of the chamber main part 11 and the chamber side parts 12a, 12b. Tools for maintenance and the like do not accidentally fall into the transport space. As a result, damage to the transport space due to falling objects or the like disappears.

The mirrors 41 (41a, 4lb) are respectively provided on the long side of the opening 24 of the chamber main part 11 while facing the reflective surface. The mirrors 41 (41a, 4lb) are configured to perform a tilt drive that moves in the vertical direction and a pan drive that moves in the left and right directions. Mirror driving units 43a and 43b (an example of a second driving unit) for tilting and pan driving each mirror are connected to the mirrors 41 (41a, 4lb). The mirror driving units 43a and 43b are configured such that, for example, an operator (observer) can operate using a portable information terminal such as a teach pendant.

In this form, an example was taken where two mirrors 41 (41a, 4lb) approximately half the length of the long side of the chamber main part 11 were installed in the lower frame part 44b, but limited to this. It is not. For example, only one mirror having a length substantially the same as the length of the long side may be provided on the lower frame portion 44b, and three or more mirrors may be provided on the lower frame portion 44b that are shorter than the length of the long side. Further, a mirror shorter than the length of the long side may be provided only on at least a part of the lower frame portion 44b. In addition, the shape of the mirrors 41 (41a, 4lb) may be a flat mirror like this form, or may be a concave mirror in which the reflective surface side enters.

For example, when the observer stands on the upper walls 32a, 32b of the chamber side portions 12a, 12b during maintenance, the observer uses the mirrors 41, 41a, 4lb to determine the transfer chamber 1A. You can directly observe the inner space of ). For example, as shown in Fig. 4, the observer stands on the upper wall 32a of the chamber side portion 12a, and the observer, the chamber side portion 12b provided on the opposite side with the chamber main portion 11 interposed therebetween. The state of the inner space S2b of) and the state of the inner space S1 of the chamber main part 11 can be directly visually recognized. In addition, the state of the inner space (S2a) of the chamber side portion (12a) installed below the observer's position and the state of the inner space (S1) of the chamber main portion (11) are reflected on the mirror (4lb). Can be confirmed by Therefore, the observer can check the state of the entire inner space of the transfer chamber 1A without moving the observation place, that is, while standing on the upper wall 32a of the chamber side portion 12a. It can detect whether there is no.

In addition, according to the conveyance chamber 1A of this embodiment, the observer does not move the observation place, and the inner spaces S2a and S2b of the two chamber side portions 12a and 12b and the inner space of the chamber main portion 11 (S1) can be confirmed at approximately the same time. At this time, when checking the state of the entire interior space, if the observer needs to move the observation place, there is a fear that the operator may move and enter the area within the checked interior space while the observer is moving. This causes the worker in the interior space to be unable to see and pass over. On the other hand, in the conveyance chamber 1A of this embodiment, since the entire internal space can be checked approximately at the same time, it is possible to reliably detect whether there are people in the internal space.

In addition, since the direction of the mirrors 41 (41a, 4lb) can be changed up, down, left and right, for example, even if the surface area of the mirror 41 is small, the state of the internal spaces (S1, S2a, S2b) can be widely and easily checked. have.

In addition, as shown in Fig. 4, not only when the observer is standing at a position away from the opening 24 of the chamber main section 11, but also when standing close to the opening 24, for example, the mirror 41 ( 41a, 4lb), it is possible to check the overall state of the internal spaces S1, S2a, S2b by changing the direction of the upper, lower, left, and right. In addition, by changing the direction of the mirrors 41 (41a, 4lb) without being influenced by the observer's height (eye height), the overall state of the inner spaces (S1, S2a, S2b) can be checked.

However, unlike this form, for example, in the case of installing the mirrors 41 (41a, 4lb) in the inner spaces (S1, S2a, S2b), the conveying device 13 and the mirrors 41 (41a, 4lb) In order to avoid interference with, it is necessary to increase the height of the chamber main portion 11 and the chamber side portions 12a and 12b. As a result, the internal spaces S1, S2a, S2b increase in size. On the other hand, in the conveyance chamber 1A, since the mirrors 41 (41a, 4lb) are installed at the upper edge of the opening 24, there is a concern of interference between the conveyance device 13 and the mirrors 41 (41a, 4lb). In the absence of this, it is possible to suppress an increase in the internal spaces S1, S2a, and S2b.

In addition, since the transfer chamber 1A can check the entire state of the internal spaces S1, S2a, S2b by using the mirrors 41 (41a, 4lb), observation to visually recognize the inside of the transfer chamber 1A There is no need to form a window in the chamber body. As a result, it is not necessary to ensure the sealing property of the chamber main body, and the conveying chamber 1A with high airtightness can be obtained.

In addition, since the mirrors 41 (41a, 4lb) can be attached to the lower frame of the safety fence (44), holes are made to attach the mirrors (41) (41a, 4lb) to the transport chamber (1A) itself. There is no need to do so, and the airtightness of the conveyance chamber 1A can be ensured. In addition, when attaching the mirrors 41 (41a, 4lb) to the safety fence 44, it is possible to facilitate the attachment, detachment, and adjustment of the mirrors 41 (41a, 4lb) without requiring special tools.

(Second Embodiment)

5 and 6 are schematic diagrams showing a transfer chamber 1B according to a second embodiment. 5 shows a plan view of the conveying chamber 1B. 6 shows a side view of the conveying chamber 1B. Here, the same reference numerals are used for the same configurations as those of the first embodiment, and description thereof is appropriately omitted.

As shown in Figs. 5 and 6, the transfer chamber 1B is provided with a camera 51 (an example of a photographing unit) for photographing the inner space of the transfer chamber 1B.

The camera 51 is installed at the edge of the opening 24 to face the mirrors 41 (41a, 4lb). In this embodiment, the camera 51 is provided on the side of the chamber side 12a and the mirror 4lb is provided on the side of the chamber side 12b. On the contrary, the camera 51 is provided on the side of the chamber side 12b. ) May be provided, and the mirror 41 a may be provided on the side of the chamber side 12a. Alternatively, both a camera and a mirror may be provided on both the chamber side portion 12a side and the chamber side portion 12b side, respectively. In addition, the installation position of the camera 51 is not limited to the edge of the opening 24, and may be either on the upper wall 32a of the chamber side portion 12a or on the upper wall 32b of the chamber side portion 12b. .

The camera 51 is configured to be capable of tilt driving (see arrow B in Fig. 6) and pan driving (see arrow C in Fig. 5). Further, the camera 51 is configured to be able to move upward (see arrow D in Fig. 6). The camera 51 is connected to a camera drive unit 52 (an example of a first drive unit) for tilting, panning, and vertically moving the camera. The camera drive unit 52 is configured so that, for example, an operator can perform remote operation using a teach pendant or a remote control. Alternatively, the camera driving unit 52 is pre-programmed with a tilt angle, a pan angle, etc., so that the entire internal space (S1, S2a, S2b) of the installed transport chamber 1B can be photographed. Accordingly, the camera 51 is driven.

As the camera 51, a charge coupled device (CCD) camera, a Complementary Metal Oxide Semiconductor (CMOS) camera, or the like is used, for example. The camera driving unit 52 includes a transmission unit 53 that transmits, as data, images of the internal spaces S1, S2a, S2b photographed by the camera 51. The data can be received by a receiving unit such as a mobile terminal such as a teach pendant or a terminal installed in a remote management room. The received data is displayed as an image on a display unit installed in the receiving unit. Moreover, as the camera 51, for example, a dark vision camera, a thermography camera, or the like may be used.

The receiving unit is provided with a determination device (an example of an abnormality notification unit) that analyzes the received data and determines the presence or absence of an abnormality in the internal spaces S1, S2a, S2b. The determination device analyzes or monitors data photographed (measured) by, for example, a dark vision camera or a thermography camera, and determines whether or not an operator remains in the internal spaces S1, S2a, S2b. Further, the receiving unit includes a notification device (an example of an abnormality notification unit) for notifying the determination result of the determination device. The notification device notifies that when it is determined that there is an abnormality in the determination result of the determination device, for example, by displaying a warning mark on the display unit or by outputting a warning sound. Further, the notification device may be provided in the camera drive unit 52. When there is an abnormality based on a signal transmitted from the determination device, the camera driving unit 52 notifies the fact, for example, by outputting a warning sound or lighting a warning lamp.

Further, the mirrors 41 (41a, 4lb) of this embodiment are also configured to be capable of tilt driving and pan driving, similar to the mirror of the first embodiment.

According to the transport chamber 1B having such a configuration, for example, during maintenance, the internal spaces S1, S2a, S2b of the transport chamber 1B can be observed using the camera 51. For this reason, even if the observer does not work on the chamber side portions 12a, 12b, for example, at a place away from the conveyance chamber 1B, the data transmitted from the transmission unit 53 is monitored by the display unit and The state of the spaces S1, S2a, and S2b can be checked. Accordingly, it is possible to detect whether or not there is a worker in the internal spaces S1, S2a, S2b.

In addition, since the camera 51 can be tilted and pan driven, a wide range of the internal spaces S1, S2a, and S2b can be captured with one camera 51. In addition, even when a plurality of cameras are used, the entire internal spaces S1, S2a, and S2b can be photographed with a smaller number of cameras.

In addition, the camera 51 as well as the mirrors 41 (41a, 4lb) can be tilted and pan driven, so that the state of the internal spaces (S1, S2a, S2b) can be checked more reliably, It is possible to detect whether there are workers in the spaces S1, S2a, S2b. In addition, if there is an abnormality in the internal spaces (S1, S2a, S2b), it can be recognized by the warning sound or warning lamp from the abnormality notification unit. It can be detected reliably.

In addition, unlike the above-described form, only the camera 51 may be configured to be tilted and pan driven, and the mirrors 41, 41a and 4lb may be fixed so as not to be tilted and pan driven.

(Third embodiment)

7 and 8 are schematic diagrams showing a transfer chamber 1C according to the third embodiment. 7 shows a plan view of the conveying chamber 1C. 8 shows a side view of the conveyance chamber 1C.

As shown in Figs. 7 and 8, in the transfer chamber 1C of the third embodiment, the camera 51 moves along the edge of the opening 24 in the left-right direction (in the direction of arrow E in Fig. 7). It is different from the transfer chamber 1B of the second embodiment in that it is possible. Therefore, the same reference numerals are attached to the same configurations as those of the second embodiment, and description thereof is appropriately omitted.

In the opening 24, a rail member 61 is provided along the edge. The camera 51 moves along the rail member 61 in the left and right directions. To the rail member 61, for example, a traveling mechanism 62 that surrounds the rail member 61 from both sides with traveling wheels and drives the traveling wheels with a motor to run is attached. The camera 51 is mounted on the traveling mechanism 62 and moves together with the traveling mechanism 62. In addition, the camera 51 is capable of tilting, panning, and vertical movement, similar to the camera of the second embodiment.

The camera 51 is connected to a camera driving unit 63 (an example of a third driving unit) for tilt driving, pan driving, upright movement and horizontal movement of the camera. The camera driving unit 63 is configured so that, for example, an operator can operate remotely using a remote control or the like. Alternatively, the camera driving unit 63 is programmed in advance with a tilt angle, a pan angle, and an amount of movement of the vertical, left and right, etc. so that the entire inner space (S1, S2a, S2b) of the transport chamber 1C can be photographed. The camera 51 is driven accordingly.

According to the transfer chamber 1C having such a configuration, for example, during maintenance, by moving the camera 51 along the rail member 61, the inner spaces S1, S2a, S2b of the transfer chamber 1C are The status can be checked, and it is possible to detect whether there is a worker in the internal spaces (S1, S2a, S2b). In addition, when a rail installed at the edge of the opening 24 is used as the rail member 61, the generation of dust when the traveling mechanism 62 is driven is small, and thus the substrate processing apparatus in which an etching treatment or ashing treatment is performed. It is preferable to

(Fourth embodiment)

9 and 10 are schematic diagrams showing a transfer chamber 1D according to the fourth embodiment. 9 shows a plan view of the conveying chamber 1D. Fig. 10 shows a side view of the conveying chamber 1D.

As shown in Figs. 9 and 10, in the transfer chamber 1D of the fourth embodiment, the camera 51 extends the entire circumference (see arrows E and F in Fig. 7) along the edge of the opening 24. It is different from the transfer chamber 1C of the third embodiment in that it can be moved. Therefore, the same reference numerals are attached to the same configurations as those of the third embodiment, and description thereof is appropriately omitted.

At the edge of the opening 24, rail members 61 (61a to 61d) are provided over the entire circumference. The camera 51 moves around the entire periphery of the opening 24 along the rail members 61 (61a to 61d). A traveling mechanism 62 on which the camera 51 is mounted is attached to the rail members 61 (61a to 61d), similarly to the third embodiment. The number of cameras 51 may be singular or plural. In addition, the camera 51 is capable of tilting, panning, and vertical movement, similar to the camera of the third embodiment.

Further, at the edge of the opening 24, mirrors 41 (41a to 41d) are provided over the entire circumference.

In addition, the rail member 61 and the mirror 41 may be provided over a length of about half the circumference of the edge of the opening 24. For example, in Fig. 9, when the rail member 61a and the rail member 6lb are provided, the mirror 4lb and the mirror 41d may be provided. Similarly, when the rail member 61c and the rail member 61d are provided, the mirror 41a and the mirror 41c may be provided.

The camera 51 is connected to a camera driving unit 64 (an example of a third driving unit) for tilt driving, pan driving, vertical movement and circumferential movement with respect to the camera. The camera drive unit 64 is configured so that, for example, an operator can operate it remotely using a remote control or the like. Alternatively, the camera driving unit 64 may pre-program the tilt angle, the pan angle, the vertical movement amount and the circumferential movement amount so that the entire inner space (S1, S2a, S2b) of the transfer chamber 1D can be photographed. And drives the camera 51 according to the program.

Further, in this embodiment, straight rail members 61 (61a to 61d) are provided along the rectangular openings 24 in plan view. For example, the openings 24 have round holes. However, in the case of a long hole, a curved rail member may be provided corresponding to the shape.

Even in the case of the transfer chamber 1D having such a configuration, the same effect as the transfer chamber 1C of the third embodiment can be obtained.

In the above-described embodiment, a transfer chamber used for a substrate processing apparatus for performing vacuum processing has been described, but the present invention may be used for a transfer chamber used under atmospheric pressure.

Further, the conveyance chamber according to the present invention may be applied to a chamber having an integral structure in which a chamber main portion and a chamber side portion are integrated, or may be applied to a chamber having a divided structure in which the chamber main portion and the chamber side portion are separate.

In addition, the present invention is not limited to the above-described embodiment, and can be appropriately modified and improved. In addition, the material, shape, dimension, numerical value, shape, number, arrangement location, etc. of each component in the above-described embodiment are arbitrary as long as the present invention can be achieved, and are not specifically limited.

1: transfer chamber 7: load lock chamber
8a to 8e: process chamber 11: chamber main part
12(12a,12b): chamber side part 13: conveying device
14: top plate 24: opening
S1, S2a, S2b: internal space
41(41a-41d): Mirror (example of reflective member)
43a, 43b: mirror driving unit (an example of a second driving unit)
51: camera (an example of a photographing unit)
52: camera driving unit (an example of the first driving unit)
53: transmission unit 61 (61a to 61d): rail member
62: driving mechanism
63: camera driving unit (example of a third driving unit)
64: camera driving unit (example of a third driving unit)
100: substrate processing device

Claims (9)

A transfer chamber having a chamber main part in which a transfer device for transferring a substrate is installed, and a chamber side part forming an inner space together with the chamber main part,
The conveying chamber has an opening thereon,
A conveyance chamber provided with a reflective member outside the chamber main part and at least a part of an edge of the opening.
The method of claim 1,
A transport chamber provided at an edge of the opening to face the reflective member and having a photographing unit for photographing the inner space.
The method of claim 2,
A transport chamber comprising a first driving unit for tilting and/or pan driving the photographing unit.
The method of claim 1,
A conveyance chamber comprising a second driving unit for tilting and/or pan driving the reflective member.
The method according to claim 2 or 3,
A transport chamber having a third driving unit for moving the photographing unit in at least one of an up-down direction and a left-right direction.
The method of claim 2,
A transport chamber comprising a transmission unit that transmits an image of the inner space photographed by the photographing unit as data.
The method of claim 6,
And a display unit for receiving and displaying the data transmitted by the transmitting unit.
The method of claim 7,
A transport chamber comprising an abnormality notification unit that analyzes the image of the internal space to determine the presence or absence of an abnormality in the internal space, and notifies an abnormality when there is an abnormality.
The method of claim 1,
The reflective member is a transport chamber installed at an upper edge of the opening.

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