CN101101863B

CN101101863B - Apparatus for manufacturing flat-panel display

Info

Publication number: CN101101863B
Application number: CN2007101384511A
Authority: CN
Inventors: 李荣钟; 崔浚泳; 曹生贤; 尹炳五; 金敬勋; 郑洪基
Original assignee: ADP Engineering Co Ltd
Current assignee: ADP Engineering Co Ltd
Priority date: 2004-02-25
Filing date: 2005-02-25
Publication date: 2012-01-11
Anticipated expiration: 2025-02-25
Also published as: CN100539012C; CN101101863A; CN100521081C; CN101101865A; CN100498881C; CN101089921A; KR20050086265A; CN101089922A; CN101101864A; CN100550086C

Abstract

An flat-panel display (FPD) manufacturing apparatus which has a configuration capable of easily processing large-size substrates while achieving easy manufacturing, transporting, operating, and repair processes.

Description

Be used to make the equipment of flat-panel monitor

The application is that No. 200510008749.1, that submitted on February 25th, 2005 are called dividing an application of " equipment that is used to make flat-panel monitor " Chinese invention patent application.

Technical field

The present invention relates to a kind of equipment that is used to make flat-panel monitor, more specifically, relate to a kind of flat panel display manufacturing apparatus, it has the setting that is suitable for carrying out the required process that is used for large-size substrate.

Background technology

With reference to figure 1, show general flat-panel monitor (FPD) manufacturing equipment, it is used to make FPD, like LCD and plasm display panel (PDP).As shown in fig. 1, the FPD manufacturing equipment of being represented by label 1 comprises load lock chamber 100, feed chamber 200 and process chamber 300, and they are connected in series.Family of power and influence G is arranged between the adjacent chamber independently to keep the vacuum environment in each chamber.

Load lock chamber 100 be connected to outside station to receive the substrate that will in the FPD manufacturing equipment, handle so that mounting substrate, perhaps discharge the substrate in the FPD manufacturing equipment, handled fully so that unload carried base board.Load lock chamber 100 switches between vacuum state and atmospheric condition repeatedly, thereby load lock chamber 100 optionally is communicated with outside station.Loading mould 102 is arranged in the load lock chamber 100 to load the one or more substrates of loading on the mould 102.

Calibrator 106 is arranged on and loads mould 102 on every side to proofread and correct in the position of loading the substrate S that loads on the mould 102, and is as shown in fig. 1.Calibrator 106 is through promote to come at the sidepiece that loads the substrate S that loads on the mould 102 position of correction substrate S diagonally.Exhaust apparatus (not shown) and gas supply device (not shown) also are installed in the load lock chamber 100 so that the environment of load lock chamber 100 changes between vacuum state and atmospheric condition.

Feed chamber 200 is connected between load lock chamber 100 and the process chamber 300.Feed chamber 200 have be arranged on feed chamber 200 inner present automaton 202, thereby feed chamber 200 is used between load lock chamber 100 and process chamber 300, presenting substrate, so that the load/unload substrate as center-aisle.Feed chamber 200 maintains vacuum environment, thereby makes process chamber 300 maintain vacuum environment.

Process chamber 300 is equipped with: load mould 302, be used at process chamber 300 mounting substrates; And the processing unit (not shown), be used for the substrate that loads at process chamber 300 is carried out required processing.For example, carry out etching process under the vacuum environment in building on process chamber 300.

This FPD manufacturing equipment can be a group type, and wherein a plurality of process chambers 300 are connected to single feed chamber 200, as shown in Figure 2.In the case, feed chamber 200 can have circle or polygonal shape so that a plurality of process chamber 300 is provided with around feed chamber 200.

Simultaneously, the FPD manufacturing equipment of exploitation comprises the vacuum chamber with very big size recently, and for example 3m or bigger width have 2m or bigger large-size substrate thereby handle.For this reason, the process that such vacuum chamber is transported to its infield from its manufacturing location, have problems.In other words, consider Korea S and other national road conditions, the vacuum chamber of this 3m of having or bigger width can not be transported by the land route.

In addition, under the situation that this large scale vacuum chamber is made with monomeric form, be necessary to use the large scale processing unit (plant) to come machined metallic material to form the shell of vacuum chamber.In addition, the course of processing also is difficult.

And when being necessary to repair the structure that is installed in internal vacuum chamber when eliminating the variety of issue that between the vacuum chamber on-stream period, produces, the top of vacuum chamber must be opened.Yet, be under the situation about making at vacuum chamber with monomeric form, the top that is difficult to open vacuum chamber.In addition, need many manual works.For this reason, can not easily repair vacuum chamber.

Because the size of chamber increases, the floor space of vacuum chamber also increases greatly in the broom closet.Therefore, being necessary to provide a kind of can effectively handle large-size substrate and not increase the FPD manufacturing equipment of floor space.

Summary of the invention

Therefore, the purpose of this invention is to provide a kind of FPD manufacturing equipment, it can easily handle large-size substrate, realizes being easy to manufacturing, transportation, operation and repair procedures simultaneously.

According to an aspect, the invention provides a kind of separable vacuum chamber of flat panel display manufacturing apparatus, comprising: top board, it forms the top of said chamber; Base plate, the bottom that it is faced top board and forms said chamber; Peripheral wallboard; It is coupled in top board and base plate respectively to limit enclosure space at the place, top and bottom; This periphery wallboard has the extension in the end that it is connected to base plate, and extend to form the step on the base plate along the peripheral direction of said chamber in said chamber interior this extension; Covering assemblies, it is arranged on the base plate to extend so that covering assemblies covers the extension of peripheral wallboard along the peripheral direction of said chamber in said chamber interior; And black box, its be inserted between extension and the covering assemblies and between base plate and the covering assemblies so that said enclosure space is shielded with the outside of said chamber mutually.

According to another aspect, the invention provides a kind of separable vacuum chamber of flat panel display manufacturing apparatus, comprising: top board, it forms the top of said chamber; Base plate, the bottom that it is faced top board and forms said chamber; Peripheral wallboard; It is coupled in top board and base plate respectively to limit enclosure space at the place, top and bottom; This periphery wallboard has the extension in the end that it is connected to top board, and extend to form the step on the top board along the peripheral direction of said chamber in said chamber interior this extension; Covering assemblies, it is arranged on the top board to extend so that covering assemblies covers the extension of peripheral wallboard along the peripheral direction of said chamber in said chamber interior; And black box, its be inserted between extension and the covering assemblies and between top board and the covering assemblies so that said enclosure space is shielded with the outside of said chamber mutually.

According to another aspect; The invention provides a kind of separable vacuum chamber that in the process of making flat-panel monitor, uses; Comprise: the chamber shell, it is divided at least two parts, and wherein vacuum chamber is through chamber shell part is assembled and formed with waiting to be arranged on element in the vacuum chamber.

According to another aspect, the invention provides a kind of flat panel display manufacturing apparatus, comprise a plurality of chambers, each all is suitable for carrying out the required process that is used for substrate, and wherein at least one chamber comprises: the chamber shell with path that the shell top forms in the chamber; The top covers, and its top that is installed on the chamber shell is with the said path of opening/closing, and has and pass on the thickness direction that covers at the top that the top covers and one or more openings of forming; One or more auxiliary coverings, each all is installed on the top and covers with the associated openings in the one or more openings of opening/closing; And one or more black boies, each be inserted in all that the top covers and the relevant covering of said one or more auxiliary coverings between with provide the top to cover and relevant auxiliary the covering between sealing effectiveness.

According to another aspect, the invention provides a kind of flat panel display manufacturing apparatus, it comprises load lock chamber, feed chamber and process chamber, is used to make flat-panel monitor, wherein load lock chamber comprises: the vacuum chamber shell, can set up vacuum therein; Opening, it passes the peripheral wall of vacuum chamber shell and forms to allow substrate to be loaded into the neutralization of vacuum chamber shell through opening so that with substrate and unload carried base board from the vacuum chamber shell; The family of power and influence, it is suitable for the opening/closing opening; And end effector pockets; Its diapire at the vacuum chamber shell forms presents the end effector of automaton to hold the substrate that is installed in the load lock outside respectively, and each end effector pockets all has desired depth and vertically moves in the actuator pockets endways with an end effector that allows to be correlated with.

According to another aspect; The invention provides a kind of method that is used at the load lock chamber mounting substrate; May further comprise the steps: A) open the opening of load lock chamber, and when the end effector that will present automaton is inserted in the end effector pockets of load lock chamber, substrate is inserted in the load lock chamber through using substrate to present automaton; B) end effector of presenting automaton in the reduction end effector pockets, mounting substrate in load lock chamber thus; C) move horizontally and present automaton, withdraw from from load lock chamber thus and present automaton; And D) closes opening, and in load lock chamber, set up vacuum environment.

According to another aspect; The invention provides a kind of flat panel display manufacturing apparatus; It comprises load lock chamber, feed chamber and process chamber; Wherein feed chamber comprises: present automaton, it comprises and is arranged on presenting arm and being coupled to the driver of presenting the arm lower end and being positioned at feed chamber bottom of feed chamber bottom; Vertical driver, it is arranged on below the feed chamber and is suitable for rising to the level of door with presenting automaton; The driver path, its side that is formed at feed chamber is to allow driver through the driver path; And door, it is installed on feed chamber with opening/closing driver path.

According to another aspect; The invention provides a kind of flat panel display manufacturing apparatus; Comprise the electric field generation systems, handle gas supply system and gas extraction system; They are arranged in the vacuum chamber so that the substrate that loads in the vacuum chamber is carried out required process, and wherein vacuum chamber comprises: the chamber body, and it forms the sidewall of vacuum chamber; The top covers, and it is coupled to body top, chamber to form the roof of vacuum chamber; And the bottom covers; It is coupled to body bottom, chamber to form the diapire of vacuum chamber; Wherein the chamber body has commissura at its lower end; The lower end level of this commissura body from the chamber is inwardly outstanding to engage to cover with the bottom, and its middle and lower part covers its peripheral edge place and has the engagement groove that shape matches with commissura.According to another aspect, the invention provides a kind of method that is used to repair flat panel display manufacturing apparatus, may further comprise the steps: A) body separates the top covering from the chamber through feeding means; B) body separates the bottom covering from the chamber through feeding means, and the bottom covering is placed on the work mould; C) repairing the bottom covers; D) through feeding means the chamber body is coupled in the bottom covering; And E) through feeding means the chamber body is coupled in the top covering.

In addition, according to one embodiment of present invention, load lock chamber comprises that further at least two are loaded moulds, and it is arranged in the vacuum chamber shell simultaneously spaced apart vertically each other with mounting substrate on said loading mould respectively.

Description of drawings

Read combine following detailed description that accompanying drawing provides after, above purpose of the present invention and other characteristics and advantage will become more obvious, in the accompanying drawings:

Fig. 1 is the sketch map that the layout of general FPD manufacturing equipment is shown;

Fig. 2 is the sketch map that the layout of another general FPD manufacturing equipment is shown;

Fig. 3 is the front view that illustrates according to the separable vacuum chamber of first embodiment of the invention;

Fig. 4 a and 4b are the zoomed-in views of the part " A " that corresponds respectively to Fig. 3;

Fig. 5 illustrates the front view that is included in according to the structure of the stacked chamber in the FPD manufacturing equipment of second embodiment of the invention;

Fig. 6 a is the sketch map that the various projection/groove type connected structures of the stacked chamber that is applied to Fig. 5 are shown respectively to 6d;

Fig. 7 is the plane graph that illustrates according to the couple state of the separable vacuum chamber of third embodiment of the invention;

Fig. 8 is the plane graph that illustrates according to the decomposing state of the separable vacuum chamber of third embodiment of the invention;

Fig. 9 is the front view that illustrates according to the structure of the coupled surface of the vacuum chamber of third embodiment of the invention part;

Figure 10 is the stereogram that illustrates according to the structure of the coupled surface of the vacuum chamber of third embodiment of the invention part;

Figure 11 is schematically illustrated to being included in the plane graph that covers and assist the couple state that covers according to the top of the feed chamber in the FPD manufacturing equipment of fourth embodiment of the invention;

Figure 12 is the view in transverse section corresponding to Fig. 3;

Figure 13 illustrates to be arranged on top covering and the auxiliary exploded perspective view that covers that is included in according to the place, top of the feed chamber in the FPD manufacturing equipment of fourth embodiment of the invention;

Figure 14 is the view in transverse section that illustrates according to the structure of the load lock chamber of fifth embodiment of the invention;

Figure 15 is the longitdinal cross-section diagram that illustrates according to the structure of the load lock chamber of fifth embodiment of the invention;

Figure 16 illustrates the flow chart that is used in the method for the load lock chamber mounting substrate of accordinging to fifth embodiment of the invention;

Figure 17 a and 17b illustrate respectively to be used for presenting the sectional view of the process of automaton from being included in according to the feed chamber unloading of the FPD manufacturing equipment of sixth embodiment of the invention;

Figure 18 is the plane graph that the feed chamber of Figure 17 a and 17b is shown;

Figure 19 illustrates to present automaton from being included in the front view of the state that is unloaded according to the feed chamber the FPD manufacturing equipment of sixth embodiment of the invention;

Figure 20 is the exploded perspective view that illustrates according to the structure of the vacuum chamber of seventh embodiment of the invention;

Figure 21 illustrates the sketch map that is used to assemble and repair the process that the bottom covers according to seventh embodiment of the invention;

Figure 22 illustrates the flow chart that is used to make and assemble according to the method for the vacuum chamber of seventh embodiment of the invention; And

Figure 23 illustrates the flow chart that is used to repair according to the method for the vacuum chamber of seventh embodiment of the invention.

Embodiment

Below will example embodiment of the present invention be described with reference to accompanying drawing.In the following description, with Fig. 1 and 2 in the element corresponding elements will be denoted by the same reference numerals respectively.

First embodiment

Fig. 3 illustrates the front view that is included in according to the separable vacuum chamber in the FPD manufacturing equipment of first embodiment of the invention.Fig. 4 a and 4b are the zoomed-in views of the part " A " that corresponds respectively to Fig. 3.Although shown vacuum chamber applicable to any one of load lock chamber, feed chamber and process chamber, is convenient the description, below describes and only to combine vacuum chamber is applied to the situation of load lock chamber and provides.

As shown in Figure 3, with the separable vacuum chamber according to present embodiment that label 100 is represented, it comprises: top board 110 and base plate 120, and top board 110 faces with each other with the top and the bottom of difference delimit chamber 100 with base plate 120; And peripheral wallboard 130, it is coupled in top board 110 and base plate 120 respectively at the place, top and bottom.The top and bottom that have extension 135 to be formed at peripheral wallboard 130 are located and 100 inside form the step on top board 110 and the base plate 120 respectively, shown in Fig. 3,4a and 4b thus along top board 110 and base plate 120 extensions in the chamber.Although be respectively arranged with two extensions 135 at the two ends of peripheral wall plate 130, shown in situation under, also can be only form single extension 135 at an end of peripheral wall plate 130.

Like this, an end or the every end of each extension 135 along the inner surface of vacuum chamber 100 from peripheral wallboard 130 extends with formation and is positioned at top board 110, base plate 120 or top board and

base plate

110 and 120 both steps, shown in Fig. 4 a.Each extension 135 all has three surfaces, promptly contacts outer surface or contact surface 135a, inner surface 135b and the end surfaces 135c of top board 110 or base plate 120.

For the inside with chamber 100 shields mutually with the outside of chamber 100 and thus the inside of chamber 100 maintained vacuum state effectively, be separately positioned on top board 110, base plate 120 or top board and

base plate

110 and 120 both step place black boies 140, as shown in Figure 3.Covering assemblies 150 also is set at top board 110, base plate 120 or top board and

base plate

110 and 120 both step places respectively covers extension 135 to be inserted at each black box 140 under the situation between a relevant step and the relevant covering assemblies 150.Each covering assemblies 150 all with the surface contact that limits relevant step, promptly the surface portion of relevant extension 135, be formed with extension 135 peripheral wallboard 130 surface portion and contact the top board of extension 135 and the surface portion of

base plate

110 or 120.

Each covering assemblies 150 all makes the exposure of the plasma gas that exists in relevant 140 pairs of chambers 100 of a black box minimum, and protects relevant black box 140 thus.Preferably, each covering assemblies 150 all contacts with relevant top board 110 or base plate 120 with peripheral wallboard 130 when covering relevant black box 140.Be coupled at covering assemblies 150 under the situation of base plate 120, this coupling can realize through the weight of using covering assemblies 150 simply, shown in Fig. 4 a.Yet preferably the coupling of covering assemblies 150 to base plate 120 is used and is realized to obtain higher bonding force such as the fastening assembly of screw or bolt.On the other hand, be coupled at covering assemblies 150 under the situation of top board 110, as shown in Figure 3, this coupling must be used and realize such as the fastening assembly of screw or bolt, separates from top board 110 owing to the weight of covering assemblies 150 to prevent covering assemblies 150.

Shown in Fig. 3 and 4a, each black box 140 all can comprise O shape circle, and it typically can be used in the general vacuum chamber.According to illustrated embodiment of the present invention, each black box 140 all comprises pair of O shape circle 140a, and it is separately positioned on the relevant extension 135 and the top board 110 or the base plate 120 at 135 places, extension are set.

The O shape circle 140a of each black box 140 can be whole independently of one another or each other.Under the situation of Fig. 4 a, the O shape of each black box 140 circle 140a is separately positioned on the relevant extension 135 and near the part the end surfaces 135c that is positioned at extension 135 of top board 110 or base plate 120, the while is independently of one another.On the other hand; Under the situation of Fig. 4 b; Each black box 140 all comprises pair of O shape circle 140b, and it is separately positioned near the part the end surfaces 135c that is positioned at extension 135 of relevant extension 135 and top board 110 or base plate 120, be simultaneously integral body each other.Comprise in use under the situation of black box 140, might more efficiently chamber 100 be maintained vacuum state with the integrally-built O shape circle 140b shown in Fig. 4 b.

Although each black box 140 all be described to comprise the inner surface 135b that is separately positioned on relevant extension 135 go up with the top board 110 of 135 placements, extension or base plate 120 on independently of one another simultaneously or enclose 140a or 140b for whole pair of O shape each other; Shown in Fig. 4 a or 4b; If be necessary; Black box 140 can have such structure; Wherein, the O shape circle 140a or the 140b that are suitable for being arranged on extension 135 are not arranged on the inner surface 135 of extension 135, and are arranged on the end surfaces 135c of extension 135.

In order to make separable vacuum chamber 100, the base plate 120 that constitutes 100 bottoms, chamber at first is installed in required place.Describe for simplifying, below description will only be combined in the assembling process that a side of 100 is carried out in the chamber under situation of using each black box 140 that all has separation O shape coil structures and provide.Afterwards, an O shape circle 140a with a black box (lower seal assembly) 140 is placed on the base plate 120.In order on base plate 120, O shape circle 140a to be in place, preferably, form the seat of the part that is suitable for holding O shape circle 140a in the part of the base plate 120 that will place O shape circle 140a.

After being placed on O shape circle 140a on the base plate 120, peripheral wallboard 130 is installed on the base plate 120 so that the outer surface 135a in the extension, bottom 135 that the lower end of peripheral wall plate 130 forms touches base plate 120, shown in Fig. 4 a.As a result, on base plate 120, form lower step.Owing to there is O shape circle not to be inserted between the rear surface of base plate 120 and peripheral wallboard 130, opposite with regular situation, there is no need to form the seat of a part that is suitable for holding O shape circle at the rear surface place of the peripheral wallboard 130 of contact base plate 120.

After being installed in peripheral wallboard 130 on the base plate 120, another O shape circle 140a of lower seal assembly 140 is placed on the inner surface 135b of extension, bottom 135 of the lower end that is formed on peripheral wallboard 130, shown in Fig. 4 a.In order on extension, bottom 135, another O shape circle 140a to be in place, the inner surface 135b in extension, bottom 135 forms and is suitable for holding the seat that another O shape is enclosed the part of 140a.Therefore, another O shape circle 140a is placed on the seat at the inner surface 135b place that is formed at extension, bottom 135.

Afterwards; A covering assemblies 150 (bottom covering assemblies) is arranged on lower step; Make: cover at bottom covering assemblies 150 under the condition of O shape circle 140 of the lower seal assembly 140 on the inner surface 135b of the upper surface that is placed on base plate 120 respectively and extension, bottom 135, bottom covering assemblies 150 touches peripheral wallboard 130 and base plate 120.The lower surface of bottom covering assemblies 150 has given shape, thereby makes lower surface touch the extension 135 that forms lower step, and engages with extension 135 thus.The lower surface of bottom covering assemblies 150 also is formed with seat partly to hold the O shape circle 140a on O shape circle 140a and the upper surface that is arranged on base plate 120 on the inner surface 135b that is arranged on extension 135 respectively.Afterwards, bottom covering assemblies 150 is by means of being fastened to base plate 120 such as the fastening assembly of bolt or screw, thereby bottom covering assemblies 150 is coupled to base plate 120 securely, and prevents that thus bottom covering assemblies 150 from moving, and protection O shape circle 140a.

Like this, be completed into the substructure of chamber 100 according to above-mentioned assembling process.Through using the assembling process identical, form the superstructure of chamber 100 then with above-mentioned assembling process.In other words, can carry out assembling process by following order: top board 110 is placed on the peripheral wallboard 130, top seal assembly 140 is set, top covering assemblies 150 then is coupled.

Second embodiment

According to present embodiment, at least one of load lock chamber, feed chamber and the process chamber of formation FPD manufacturing equipment has vertical stacked cell structure, and vertical stacked cell structure comprises at least two sub-chambers, and each all uses various projection/groove type structures and intercouples.According to present embodiment, a kind of like this FPD manufacturing equipment might be provided, it can be realized optimal spatial efficient and realize that thus cost reduces the increase with productivity ratio, obtains the required rigidity of stacked chamber simultaneously.Therefore, present embodiment meets nearest requirement, i.e. exploitation can make that large scale FPD represents simultaneously that productivity ratio increases and not owing to increase the FPD manufacturing equipment of the erection space increase that FPD manufacturing equipment size causes.

Although according to the stacked chamber of present embodiment any one applicable to load lock chamber, feed chamber and process chamber, be convenient the description, below describe and will only combine stacked chamber is applied to the situation of process chamber and provides.

Fig. 5 illustrates the front view that is included in according to the structure of the stacked chamber in the FPD manufacturing equipment of second embodiment of the invention.

As shown in Figure 5, the process chamber 300 that is included in the FPD manufacturing equipment comprises at least two vertical stacked seed cells.In an example shown, process chamber 300 comprises two vertical stacked seed cells 310 and 320.In order to make FPD, the FPD manufacturing equipment generally includes load lock chamber, feed chamber and process chamber.Consider and handle and space efficiency that the chamber of FPD manufacturing equipment can have stacked structure.In other words, constitute, two in three chambers of FPD manufacturing equipment or all can have stacked structure.

Simultaneously, in the FPD manufacturing equipment, it is the longest that the processing substrate time that in process chamber, is spent was compared with the processing substrate time that in all the other chambers, is spent.And process chamber is carried out a large amount of functions.For this reason, preferably process chamber comprises the raising of the vertical stacked seed cell of some with realization processing substrate efficient.

For example, process chamber can comprise two vertical stacked seed cells.In this example; Load lock chamber and feed chamber are actuated to externally be discharged in the substrate of handling fully in the sub-processes chamber and in this sub-process chamber, load another pending substrate, simultaneously another substrate in another sub-process chamber are carried out a certain processing.Like this, can in two sub-processes chambers, carry out processing effectively to substrate.

The quantity of vertical stacked seed cell can be two or more.Under the situation of using two sub-chambers, they can carry out identical functions or different functions respectively.

In an example shown, the process chamber 300 of FPD manufacturing equipment comprises two vertical

stacked seed cells

310 and 320, and it intercouples through using the projection/groove type connected structure that 310 and 320 contact portion 330 places form in the seed cell respectively.With do not use respectively the projection/groove type connected structure that forms at contact portion 330 places and realize that the situation of

seed cell

310 and 320 coupling compares; Under the situation of

intercouple seed cell

310 and 320, its advantage is that the total height of process chamber 300 reduces using respectively at the projection/groove type connected structure of contact portion 330 places of

seed cell

310 and 320 formation.

In addition, do not using respectively the projection/groove type connected structure that forms at contact portion 330 places to realize that

seed cell

310 and 320 can relative to each other move under the situation of coupling of seed cell 310 and 320.Certainly, can prevent such moving through contact portion by means of soldering coupling seed cell 310 and 320.Yet, in the case, when needs are replaced one of seed cell with a new seed cell, be difficult to make the seed cell separated from one another.Yet; Stating projection/groove type connected structure in the use intercouples under the contact portion situation of

seed cell

310 and 320; Might be coupled securely seed

cell

310 and 320 and do not have its any moves, and when needs are replaced one of seed cell with new seed cell, can easily separate

seed cell

310 and 320.

Fig. 6 a is the sketch map that various projection/groove type connected structures are shown respectively to 6d, and 310 and 320 contact portion 330 places form with

seed cell

310 and 320 total heights of optimization process chamber 300 also of being coupled securely said structure in the seed cell.

Fig. 6 a illustrates rectangular protrusions/fluted body connected structure, and Fig. 6 b illustrates right-angled triangle projection/groove type connected structure, and Fig. 6 c illustrates half-circle projection/fluted body connected structure, and Fig. 6 d illustrates polygon projection/groove type connected structure.According to such projection/groove type connected structure,

seed cell

310 and 320 contact portion 330 be joint securely each other, relative to each other moves preventing thereby

seed cell

310 and 320 is coupled each other securely.On the other hand, when needs make

seed cell

310 and 320 when separated from one another, can easily realize this separation through simply seed cell, top 320 vertically being moved away seed cell, bottom 310.

Projection/groove type connected structure can have different shape with easy coupling that realizes

seed cell

310 and 320 and the total height that reduces chamber 300.Preferably, the projection of projection/groove type connected structure and groove can have the shape of from rectangular shape, right-angle triangle, semicircular in shape and polygonal shape, selecting.

As stated, the

seed cell

310 and 320 that has the chamber 300 of above-mentioned vertical stacked structure can carry out identical functions or carry out different functions respectively.Therefore, might realize the space efficiency optimized, and realize the raising of productivity ratio thus, and obtain the treatment effeciency that improves.

As stated, might realize the raising of treatment effeciency through in the load lock chamber, feed chamber and the process chamber that constitute the FPD manufacturing equipment at least by vertical two stacked sub-chambers at least one.And the seed cell is engaged with each other through the projection/groove type connected structure that use is partly located to form in the corresponding contact of seed cell, so the seed cell has fastness and easy separation property.Process chamber has the total height that reduces, the space efficiency that is optimized thus.

The 3rd embodiment

According to present embodiment, provide to have separable structure to realize being easy to the vacuum chamber of manufacturing, transportation and repair procedures, it is used to make FPD.For separable structure, vacuum chamber comprises the chamber shell, and it is divided at least two parts.Like this, separable vacuum chamber forms through the element of shell part in chamber in being arranged on vacuum chamber assembled.

Although according to the separable vacuum chamber of present embodiment any one applicable to load lock chamber, feed chamber and process chamber, be convenient the description, below describe and will only combine separable vacuum chamber is applied to the example of feed chamber and provides.

Preferably, the separable vacuum chamber of accordinging to present embodiment is applied to feed chamber 200, and it is used between load lock chamber 100 and process chamber 300, presenting substrate, as shown in Figure 7.Feed chamber 200 need be than load lock chamber and the wide wideer inner space, inner space of process chamber, allowing to be arranged on the element free movement in the feed chamber 200, as allows to present the automaton free movement.As a result, to handle the problem that possibly run under the situation of large-size substrate at needs even more serious for feed chamber 200.For example, although the size of feed chamber 200 must fully increase in the case, still can not transport feed chamber with this size.In order to address this is that, it is desirable under feed chamber is divided into the condition of a plurality of chambers part, transport feed chamber.For this reason, preferably mainly will be applied to feed chamber according to the separable cell structure of present embodiment.

Also preferably, when from the top view of separable vacuum chamber 200, separable vacuum chamber 200 has circular configuration, as shown in Figure 7.In order a plurality of process chambers to be arranged on around the feed chamber, to compare with rectangular shape or such as the polygonal shape of hexagonal shape, it is desirable that feed chamber has round-shaped.Have under the round-shaped situation in feed chamber, might freely form the process chamber of requirement.Like this, according to the present invention, preferably, separable vacuum chamber 200 shape of cross sections parallel to the ground have round-shaped.

Also preferably separable vacuum chamber 200 is divided into three part A, B and C, as shown in Figure 8.In the case, also preferably chamber part B and C have crown shape, and said crown central angle with 90 ° ± 10 ° faces with each other simultaneously.Therefore in the case, the arc length of each chamber part B or C is similar to the width of mid portion A.

As shown in Figure 9, form black box pockets 212 at the coupled surface place of each chamber part.Clamper 211 also extends radially outwardly with the adjacent part of the chamber part that is coupled securely from each coupled end of each chamber part.

Each black box pockets 212 all has desired depth, and extends along the coupled surface of associated chamber part.Having a black box 213 to be inserted under the condition between adjacent chamber's black box pockets 212 partly, the adjacent part of chamber part intercouples.

If through be inserted at each black box 213 be formed at adjacent chamber part mutually in the face of the above-mentioned chamber of coupling part under the condition between the black box pockets 212 at coupled surface place forms the situation of vacuum chamber, might prevent surrounding air along coupled surface get into vacuum chamber and prevent in the vacuum chamber existing gas from vacuum chamber to external leakage.Like this, black box 213 works with the sealed vacuum chamber.

Preferably, each black box 213 all extends along the coupled surface of associated chamber part continuously, and is processed by elastomeric material, makes that black box 213 is slightly flexibly compressed by the chamber part when the chamber part intercouples.

Clamper 211 works to be firmly fastened to the chamber part of vacuum chamber.Especially, only be held the elastic compression slightly that device 211 just can be realized black box 213 when fastening when the chamber of vacuum chamber part.Like this, the coupled surface of adjacent chamber's part can the sealing fully through the function of clamper 211.

As shown in Figure 10, each clamper 211 is all radially outward outstanding from the associated side end of associated chamber part.Pass each clamper 211 and form a plurality of even isolated clamping holes 214.In other words, each clamper 211 all extends radially outwardly so that clamper 211 forms the extensional surface of the relevant coupled surface that is connected to the associated chamber part from the associated side end of associated chamber part.Each clamper 211 all has desired thickness.The clamping hole 214 of each clamper 211 runs through the thickness of clamper 211 and extends, and is evenly spaced apart each other along clamper 211 simultaneously.Each clamping hole 214 all within it the surface be formed with box thread, it is suitable for and grip bolt 215 screw thread couple mutually.

Shown in Fig. 7 or 8, when the adjacent part in the part of chamber will intercouple, the clamping hole 214 of grip bolt 215 and adjacent chamber part is screw thread couple mutually, and chamber part thus securely is coupled.

The 4th embodiment

Present embodiment provides a kind of like this FPD manufacturing equipment, and at least one vacuum chamber that is included in therein in the FPD manufacturing equipment comprises that the top with separate structure covers, and promptly comprises detachable auxiliary the covering, thereby realizes the easy transportation to vacuum chamber.

Although according to the vacuum chamber of present embodiment any one applicable to load lock chamber, feed chamber and process chamber, be convenient the description, below describe and will only combine vacuum chamber is applied to the situation of feed chamber and provides.

Shown in Figure 11 and 12; The feed chamber 200 that accordings to the FPD manufacturing equipment of present embodiment comprises presents automaton path 232; Outwards move from the inside of feed chamber 200 with the automaton 220 of presenting that allows to be arranged in the feed chamber 200 at its top that is formed on feed chamber 200, is used for repairing or replacing and present automaton 220.Feed chamber 200 comprises that also the top covers 240 and presents automaton path 232 with opening and closing.

As shown in Figure 13, the top covers 240 and has the circular slab structure, and it has the cut-away portions at its opposite side.The top covers 240 and has a plurality of openings 244, and the reinforcement edge 242 that covering 240 projects upwards from the top around opening 244.In tops covering 240 of each opening 244 inside, a black box O is being set, the sealing assembly can be an O shape circle.

Preferably, the top covers 240 and has two or three openings 244, and each opening 244 all has rectangular shape.Certainly, can use other quantity and shaped aperture 244.In top covering 240, seat 246 is set in relevant edge 242 inside of strengthening around each opening 244.Auxiliary cover 248 at an O shape circle, promptly black box O insert present 246 and auxiliary following of the condition that covers between 248 be placed on each on 246 to produce the sealing effectiveness between seat 246 and the auxiliary covering 248.Line connecting ring 250 is fixed in top covering 240 and covers 248 with auxiliary; To use line that top covering 240 is connected together heavy-duty machine with auxiliary covering 248; This crane is installed on the ceiling of the broom closet of FPD manufacturing equipment installation place, thereby top covering 240 and auxiliary covering 248 can be moved by crane.Preferably, line connecting ring 250 is fixed in the respective corners of top covering 240, corresponding opposite side and each auxiliary 248 the corresponding opposite side that covers that each strengthens edge 242.Each all has the horizontal stiffener assembly (not shown) of the length identical with the width of each opening 244, can cover 240 places at the top and be provided with along the required side of associated openings 244, covers 240 owing to the heat that is applied in is on it twisted to prevent the top.

The top covers 240 and can be processed obtaining required rigidity and required durability by stainless steel, and prevents that thus the top from covering 240 and producing excessive strain.

Each auxiliary covering 248 all can have the rectangular parallelepiped protrusion part box structure.In the case, each auxiliary cover 240 rectangular parallelepiped protrusion part box structure all upwardly-openable to reduce auxiliary 240 the weight that covers.As stated, a pair of line connecting ring 250 is fixed in each auxiliary upper end of 248 that covers respectively at the opposite side place of assisting covering 248, so that auxiliary covering 248 can be moved by crane.Each assists covering 248 all made of aluminum so that auxiliary covering 248 has the weight that reduces.

As shown in Figure 12, presenting automaton 220 comprises and presents arm 224.Present automaton 220 and also comprise that driver 222 is to supply actuating force to presenting arm 224.Although not shown, to present automaton 220 and further comprise automatic casing and end effector, pending substrate is located above that.Remove from feed chamber 200 when needs and to present automaton 220 so that maintenance and repair when presenting automaton 220; It is to carry out presenting presenting under arm 224 and driver 222 condition separated from one another of automaton 220 that automaton 220 is presented in dismounting, and this is because feed chamber 200 has limited height.

The top covers 240 and has large scale, and has big weight thus, and this is because feed chamber 200 has large scale to present large-size substrate.Therefore, top covering 240 must be divided into several sections and arrive these parts with the distribution of weight with top covering 240, and the crane that makes top covering 240 can be suitable for mobile limited weight thus moves.For this reason, the top covering 240 according to present embodiment has the above-mentioned separate structure that comprises a plurality of auxiliary coverings 248.

Be described as being applied to feed chamber 200 although will cover 240 the structure that demarcates according to the top of present embodiment; This structure is also applicable to process chamber, and it can be for example plasma processing apparatus, chemical vapor deposition (CVD) device, etcher or asher (asher).

When needs move top on the top that is installed in the feed chamber 200 in the FPD manufacturing equipment according to present embodiment when covering 240, constitute auxiliary covering 248 that the top covers 240 separate structure and all be connected under the condition that is included in the suspension hook in the crane and move successively at each auxiliary line connecting ring 250 of 248 of covering by the crane that is installed on broom closet.

Afterwards, cover 248 and cover 240 from the top and separate and top with the weight that reduces covers 240,, move to required place by crane each auxiliary covering under the condition of suspension hook that 248 line connecting ring 250 all is connected to crane according to auxiliary.Presenting automaton 220 then outwards moves so that maintenance and repair from feed chamber 200.After accomplishing maintenance and repair, present automaton 220 according to being placed on once more in the feed chamber 200 with the process in sequence opposite with said process.

When being necessary to present automaton 220 or other large scale internal structure when carrying out maintenance and repair to being arranged in the feed chamber 200, separable top covers 240.On the other hand, when being necessary feed chamber 200 carried out simple-to-maintain and repair, separable auxiliary covering 248.

Like this; According to present embodiment; The top covers 240 to have and comprises that a plurality of detachable auxiliary separate structures of 248 of covering cover 248 the top is covered 240 distribution of weight to auxiliary, and makes thus and can have the crane of limited capability and the top is covered 240 easily separate from large scale feed chamber 200 through use.Separating auxiliary the covering after 248, the weight of top covering 240 reduces accordingly, therefore might move the top through crane and cover 240, and can not apply any overload to crane.

The 5th embodiment

Present embodiment provides a kind of load lock chamber, the reducing of the time that reduces to be spent with the load/unload substrate that it has simple structure and has represented manufacturing cost thus.

As shown in Figure 14, the load lock chamber 100 according to present embodiment comprises chamber shell 140, opening (not shown), family of power and influence's (not shown) and end effector pockets 150.

Chamber shell 140 limits a chamber therein, and vacuum can be set up in this chamber.Because load lock chamber is set up atmospheric condition and vacuum state repeatedly and alternately, load lock chamber 100 comprises aspirator, is used for setting up the vacuum state of load lock chamber, and ventilation unit, is used for setting up the atmospheric condition of load lock chamber.

The opposing sidewalls of shell 140 forms two openings in the chamber, and said opening is faced with each other.Adjacent with feed chamber 200 and an opening that the side-walls chamber shell 140 that is provided with forms is loaded into carried base board is unloaded in feed chamber 200 neutralizations from feed chamber 200 path with acting on substrate.On the other hand, another opening that forms at the opposing sidewalls place with act on substrate be loaded into from the outside of load lock chamber 100 load lock chamber 100 neutralizations from load lock chamber 100 with the path of substrate unloading to the outside of load lock chamber 100.Each opening is is all opened and closed by the family of power and influence.The family of power and influence has a kind of like this structure, and it can prevent between the family of power and influence and opening, forming the gap under the closed condition of opening, is in sealing state thereby keep said chamber.

Each end effector pockets 150 all limits a path, the associated ends actuator E that presents automaton along this path movement to get into load lock chamber 100.Actuator E is housed inside in the corresponding end effector pockets 150 and is thus lifted to simultaneously under the condition of height that substrate do not touch chamber shell 140 diapires endways, and the end effector E that presents automaton that has loaded substrate on it gets into load lock chamber 100.For this reason, each end effector pockets 150 all is formed on the diapire of chamber shell 140 with the form with the groove that can allow the desired depth that end effector E vertically moves in the actuator pockets 150 endways.Therefore, each end effector E can vertically move under the state in being housed inside associated ends actuator pockets 150.When moving down under the state of end effector E at bearing substrate, substrate be placed on chamber shell 140 diapire so that substrate separate with end effector E.In this case, end effector E outwards withdraws.

Preferably, substrate protection assembly 160 is arranged on the diapire of chamber shell 140, as shown in Figure 14 to the location of this diapire in the substrate contacts that is placed on the diapire.Directly touch at substrate under the situation of diapire of chamber shell 140, substrate can be damaged, and this is because the diapire of chamber shell 140 has the hardness higher than substrate.Therefore, the substrate protection assembly of being processed by the material that does not cause substrate damage is arranged on the diapire of chamber shell 140.

Preferably, in substrate-guided 170 load lock chambers 100 that also are arranged on according to present embodiment.Substrate-guided 170 work will be at the substrate of the loading of the exact position in the load lock chamber 100 with guiding.According to present embodiment, substrate-guided 170 along the chamber diapire of shell 140 the edge and be provided with.Substrate-guided 170 have the structure to the core inclination of load lock chamber 100.Therefore, when mounting substrate in load lock chamber 100, substrate moves to the exact position in the load lock chamber 100 when substrate edges slides along substrate-guided 170.As shown in Figure 15, substrate-guided 170 have at the open rectangular shape of a side and pass in and out load lock chamber 100 to allow end effector E through opening side.In other words, substrate-guided 170 have the U-shaped structure, and it has opening to allow end effector through substrate-guided 170 in a side.

Preferably, at least one loading mould 180 also is arranged in the load lock chamber 100 according to present embodiment, as shown in Figure 14.Loading mould 180 works with mounting substrate S above that.At least two are loaded mould 180 and can be arranged in the load lock chamber 100 to load at least two substrates simultaneously.A plurality of evenly spaced substrate supporting assemblies 182 are arranged on each and load on mould 180 so that substrate supporting assembly 182 projects upwards from loading mould 180.Substrate supporting assembly 182 is processed to prevent substrate supporting assembly 182 damaged substrates by the material with hardness lower than substrate.Substrate supporting assembly 182 has enough length, vertically moves under being inserted into the state that is defined in the relevant gap of loading between

mould

180 and 182 substrate supported of substrate supporting assembly to allow end effector E.

Another substrate-guided 170 is configured to proofread and correct load the substrate executing location of loading on mould 180 at each.As shown in Figure 14, this substrate-guided 170 be arranged on relevant load mould 180 around, and have incline structure, it has the lower end that extends to the level lower than the upper end of each supporting component 182.Certainly, the calibrator of separation can be arranged in the load lock chamber 100 to be aligned in a plurality of substrates that load on the corresponding loading mould 180 simultaneously.

Below will describe according to present embodiment and be used for method at the load lock chamber mounting substrate with reference to Figure 16.

At first, execution is incorporated into the step S110 in the load lock chamber 100 with substrate S.At step S110, a family of power and influence is actuated to open an opening of load lock chamber 100.Afterwards, use the substrates that are arranged on load lock chamber 100 outsides to present automaton, pass the opening of opening substrate is incorporated in the load lock chamber 100.At this moment, the substrate end effector E that presents automaton is inserted in the end effector pockets at the diapire place that is formed at load lock chamber 100.

Subsequently, the step S120 that carries out at load lock chamber 100 mounting substrate S.At step S120, substrate is presented automaton and is actuated to move down the end effector E in the associated end actuator pockets 212, is placed on the diapire of load lock chamber 100 up to the substrate S on the end effector E.Like this, substrate S is loaded in the load lock chamber 100 fully.

Afterwards, execution is withdrawed from the step S130 that substrate is presented automaton from load lock chamber 100.At step S130, substrate is presented automaton and is moved horizontally, and shifts out fully from load lock chamber 100 up to end effector E.

Next, execution is aligned in the step S140 of the substrate S of loading in the load lock chamber 100 with accurate location substrate S.Under the situation of use substrate-guided 170; Step S140 and step S120 carry out simultaneously; This is because when on the diapire that is loaded in load lock chamber 100 at substrate loading step S120 substrate S; Substrate S is along substrate-guided 170 slips, and this guides along the edge setting of the diapire of load lock chamber 100, and moves to the exact position thus.Certainly, under the situation of using the calibrator that separates, substrate calibration steps S140 is independent of substrate loading step S120 and carries out.

At last, carry out the step S150 that in load lock chamber 100, sets up vacuum environment.At step S150, the family of power and influence is actuated to close the opening of opening.Vacuum pump is actuated to discharge existing gas in the load lock chamber 100 then.

Simultaneously, when needs loaded a plurality of substrate in load lock chamber 100, repeated execution of steps S110, S120 and S130 were loaded in the load lock chamber 100 up to all substrates.Afterwards, execution in step S140 and S150.

The 6th embodiment

Present embodiment provides a kind of feed chamber, and it has can allow to present the structure of automaton through a sidewall of feed chamber.

In comprising the FPD manufacturing equipment of a plurality of chambers, work substrate is loaded in the selected chamber according to the feed chamber of present embodiment, for example load lock chamber or process chamber, and unload carried base board from selected chamber.Shown in Figure 17 a and 17b, the feed chamber 200 that disposes according to present embodiment is provided with the path and the family of power and influence who is used for the opening/closing path respectively at its opposing sidewalls place.And the top covers 240 and is installed on the feed chamber 200.The driver of presenting automaton 220 222 that is suitable for presenting substrate is seated in the diapire of feed chamber 200 in the top, and the diapire place that is passed in feed chamber 200 simultaneously forms that Open Side Down extends.Be inserted in such as the black box O of O shape circle between the contact surface of upper end of diapire and driver 222 of feed chamber 200.

As stated, present automaton 220 mainly comprise automatic casing, be installed on the upper end of automatic casing and in the predetermined length scope the folding driver 222 of presenting arm 224, being installed on the lower end of automatic casing, with and on will place the end effector E of substrate.Remove from feed chamber 200 when needs and to present automaton 220 so that when presenting automaton 220 and carry out maintenance and repair; The removal of presenting automaton 220 is to carry out presenting presenting under arm 224 and driver 222 condition separated from one another of automaton 220, and this is because feed chamber 200 has limited height.

The sidewall that driver path 266 is arranged on feed chamber 200 with the driver 222 that allows to present automaton 220 through driver path 266 in case in feed chamber 200 installation of driver 222 with separate driver 222 from feed chamber 200.Door 264 also is arranged on the sidewall of feed chamber 200 to allow when needs carry out maintenance and repair to presenting automaton 220, presenting automaton 220 from feed chamber 200 removals.Door 264 can hingedly be installed on the sidewall of the feed chamber 200 that is formed with driver path 266 rotationally.

Extension with certain thickness extends internally from the inner surface of driver path 266, so that black box O can be installed between the back marginal surface of driver path 266 and door 264, and the sealing effectiveness between driver path 266 and the door 284 is provided thus.

And, be inserted in the black box O between the contact surface of upper end of diapire and driver 222 of feed chamber 200, the sealing effectiveness between feed chamber 200 and the driver 222 is provided.Vertically driver 270 also is arranged on below the driver 222 of presenting automaton 220.When feed chamber 200 is removed drivers 222, vertically driver 270 works so that driver 222 is moved upwards up to selected level, and prevents during removing driver 222, to damage black box O thus.When being loaded into driver 222 in the feed chamber 200, vertically driver 270 also is moved down into original position with driver 222.

Preferably, vertically driver 270 comprises cylinder.

As shown in Figure 18, feed chamber 200 has comprised directing assembly 272, and it is arranged on driver path 266 and presents between the driver 222 of automaton 220.Each directing assembly 272 all has the form of guide rail.Aid in guide assembly 273 respectively can the hinged outer end that is installed on directing assembly 272 rotationally, thus make aid in guide assembly 273 according to its hinged rotating operation through 266 extensions of driver path and withdrawal.Sliding panel 274 is slidably disposed on the slide assemblies 272.Aid in guide assembly 273 can be slidably mounted on directing assembly 272 respectively, thereby makes aid in guide assembly 273 through 266 extensions of driver path and withdrawal.

When removing when presenting the driver 222 of automaton 220 from feed chamber 200, driver 222 at first is raised to be placed on then and is slidably mounted in directing assembly 272 upper sliding plates 274.The hinged then rotation of aid in guide assembly 273 so that they stretch out from feed chamber 200.Under this condition, sliding panel 274 moves along directing assembly 272 and aid in guide assembly 273 then, as shown in Figure 19.Like this, driver 222 can easily be removed from feed chamber 200.Driver 222 also is loaded in the feed chamber 200 can the basis process opposite with said process and easily realize.Under the normal condition, aid in guide assembly 273 maintains folded state.Only in the time will removing the driver 222 of presenting automaton 220, aid in guide assembly 273 launches according to its hinged rotating operation.

The conveyer (not shown) can be arranged on the rear portion of the driver of presenting automaton 220 222 in the feed chamber 200 so that driver 222 is sent to sliding panel 274.

Below will describe and be used for to present automaton 220 according to present embodiment and be loaded into the process that feed chamber 200 neutralization is presented automaton 220 from feed chamber 200 unloadings at the FPD manufacturing equipment with reference to Figure 17 a, 17b and 18.When presenting automaton 220 so that when presenting the maintenance and repair of automaton 220, at first discharge the vacuum state of feed chamber 200 from feed chamber 200 unloading.Afterwards, door 264 hinged rotations are to open driver path 266.

Use crane to cover 240 then from feed chamber 200 removal tops.Subsequently, manually separate from driver 222 and to present arm 224, use crane that it is moved to the outside of feed chamber 100 then.

Afterwards; Being arranged on the vertical drivers 270 that contacts with driver 222 simultaneously below the driver 222 is actuated to driver 222 is moved upwards up to such level: can have no at this horizontal driver 222 and pass through driver path 266 intrusively, prevent simultaneously to damage and be suitable for providing the diapire of feed chamber 100 and the black box O of the sealing effectiveness between the driver 222.

Next, driver 222 is sent to sliding panel 274 through conveyer.Be slidably mounted on directing assembly 272 respectively so that under the situation of aid in guide assembly 273 through 266 extensions of driver path and withdrawal at aid in guide assembly 273; Conveyer is the 200 outside slip aid in guide assemblies 273 along directing assembly 272 from feed chamber also, as shown in Figure 19.As a result, driver 222 is removed from feed chamber 200.

Under this condition, can carry out maintenance and repair with driver 222 to the arm 224 of presenting of presenting automaton 220.After maintenance and repair, once more driver 222 is loaded in the feed chamber 200 according to the process opposite with said process.

Like this, be to present automaton 220 and can come loading and unloading under the condition that driver path 266 that side-walls of feed chamber 200 forms opened by door 264 through driver path 266.Therefore, even, also might realize loading and unloading to driver 222 because feed chamber 200 size increases make is defined under the situation that the space between feed chamber 200 and the broom closet reduces.

The 7th embodiment

Present embodiment provides a kind of vacuum chamber that comprises separable diapire, to realize easy mounting to the structure that will be arranged on the vacuum chamber bottom, and to the easy functional test of said structure, and to the easy maintenance and repair of said structure; And a kind of repair method that is used for said structure is provided.

Preferably, be applied to the process chamber 300 of FPD manufacturing equipment according to the vacuum chamber of present embodiment.According to present embodiment, as shown in Figure 20, vacuum chamber 300 comprises three independent parts of making, and promptly chamber body 330, top covering 340 and base plate cover 350.

As shown in Figure 20, chamber body 330 has the rectangular box structure that comprises four sidewalls.Chamber body 330 forms the sidewall sections of vacuum chamber 300, and limits the overall appearance of vacuum chamber 300.Chamber body 330 is provided with opening 332 to allow substrate through opening 332 in required part; Unload carried base board so that substrate is loaded into vacuum chamber 300 neutralization from vacuum chamber 300, and be provided with observation panel 334 with allow the operator to observe to use plasma processing substrate process of in vacuum chamber, carrying out and the result who in the processing substrate process, represents.

The top covers 340 and is coupled to the upper end while of chamber body 330 and the last end in contact of chamber body 330, forms the top wall portion of vacuum chamber 300 thus, as shown in Figure 20.Upper electrode is arranged on the top with the processing gas supply system and covers 340 places.The corresponding coupled surface place of covering 340 and chamber body 330 forms the black box pockets at the top.Black box O is inserted between the black box pockets.Black box O provide the top cover 340 and the coupled surface of chamber body 330 between sealing effectiveness so that can in vacuum chamber 300, set up vacuum.At least two black boies can be set to obtain the enhanced seal effect.

As shown in Figure 20, the bottom covers 350 and is coupled to the lower end while of chamber body 330 and the following end in contact of chamber body 330, forms the bottom wall portion of vacuum chamber 300 thus.The bottom covers 350 and is formed with various holes, for example be used for lower electrode drive hole 352, be used for inner vertically shuttle pin drive hole 354, be used for the drive hole 356 and the vacuum pump connecting hole 358 of outside vertically reciprocating motion rod.These holes correspond respectively to and will cover the position that the 350 various elements that extend are set up through the bottom.In other words, the driving shaft of lower electrode driver module passes 352 extensions of lower electrode drive hole.Be suitable for making near the vertical reciprocating motion module in the reciprocating vertically inside of the vertical shuttle pin in inside of lower electrode to pass inner vertically shuttle pin drive hole 354.Outside reciprocating motion rod driver module is through outside vertically shuttle pin drive hole 356.

As shown in Figure 20, the lower end of commissura 336 body 330 along the chamber and bottom cover the outstanding Len req of interior side-wall surface of zone body 330 from the chamber of 350 couplings.The bottom covers 350 and engages with commissura 336 in the chamber body 330 at its peripheral edge, so that chamber body 330 is coupled in bottom covering 350.

Preferably, the bottom covers 350 and is provided with engagement groove 359 at its peripheral edge, and it has the stairstepping that cooperates with commissura 336.Because engagement groove 359 has the shape that cooperates with commissura 336, when chamber body 330 is coupled in bottom covering 250, between the composition surface of commissura 336 and engagement groove 359, do not form the gap.Particularly, the composition surface of commissura 336 and engagement groove 359 has stairstepping, and the plasma that therefore in vacuum chamber 300, produces can not easily leak from vacuum chamber 300 between composition surface, and this is because plasma has linearity.More preferably, the horizontal surface of each composition surface part forms at a slant.In the case, when chamber body 330 was coupled in bottom covering 350, bottom covering 350 can be positioned the exact position and need not any position correction.

Preferably, the black box pockets forms at the composition surface place of commissura 336 and engagement groove 359 respectively, as shown in Figure 20.Black box O is assemblied between the black box pockets.Black box O provide the bottom cover 350 and the coupled surface of chamber body 330 between sealing effectiveness so that can in vacuum chamber 300, set up vacuum.At least two black boies can be set to obtain the enhanced seal effect.

Preferably, the upper surface of the peripheral edge of covering 350 covering 50 in the bottom forms a plurality of feeding means coupling apertures 357 along the bottom, as shown in Figure 20.Be coupled to chamber body 330 or from the chamber when body 330 separates when will the bottom being covered 350, feeding means coupling aperture 357 works so that feeding means, and for example lifting function is easily operated and promoted the bottom and cover 350.Each bottom cover coupling aperture 357 all have box thread with carry out screw thread couple being connected to the male thread that forms on the feed lines end of crane.Therefore, the bottom covers 350 can be connected to crane securely, therefore might use crane easily to rise the bottom and cover 350.

According to present embodiment, coupling stops that module 355 preferably is arranged on the bottom and covers 350 places.Coupling stops that module 355 is assembled in the corresponding feeding means coupling aperture 357, with inaccessible feeding means coupling aperture 357 after accomplishing bottom covering assembling or repair procedures.In the processing substrate process of feeding means coupling aperture 357, maintain under the situation of open mode at ensuing use plasma; Various particles can be deposited in the feeding means coupling aperture 357, perhaps because plasma can produce electric arc at feeding means coupling aperture 357.Preferably, coupling stops that module 355 is assembled in the corresponding feeding means coupling aperture 357 so that each coupling stops that the upper end of module 355 and bottom cover 350 flush.

To the method that be used to make and assemble vacuum chamber according to present embodiment be described with reference to Figure 22 now.

At first, execution in step S210 is to make vacuum chamber 300, and it comprises that chamber body 330, top covering 340 and bottom cover 350.At step S210, the manufacturing of vacuum chamber 300 be through the independent chamber body 330 of making the sidewall sections that forms vacuum chamber 300, the top that forms the top wall portion of vacuum chamber 300 cover 340 and the bottom that forms the bottom wall portion of vacuum chamber 300 cover 350 and realize.

Next, execution is installed in the step S220 on the main frame (not shown) with chamber body 330.At step S220, chamber body 330 at first is placed on the main frame, is fixed in main frame then.Especially, use feeding means to promote chamber body 330, place it in then on the part of main frame, this part is corresponding to the position of chamber body 330 with the main frame coupling.Afterwards, conditioning chamber body 330 on main frame the position so that chamber body 330 accurately locate.After chamber body 330 was positioned the exact position on the main frame, chamber body 330 was firmly fixed at main frame so that chamber body 330 can not move.

Afterwards, carry out the step S230 that is installed in the structure in top covering and the bottom covering 340 and 350.At step S230, the bottom covers 350 and at first is positioned on the work mould, and its bottom interval with chamber body 330 of this work mould is opened a long distance, thereby permission structure installation process is easily carried out.Therefore under this condition, might easily carry out and be used to install process such as the structure of lower electrode driver module, inner vertically shuttle pin driver module, outside vertically reciprocating motion rod driver module and vacuum chamber.And, might easily carry out functional test to each structure, this is because the broad space that carries out functional test can be provided.

Subsequently, carry out the step S240 that uses feeding means bottom covering 350 to be coupled to chamber body 330.At step S240, structure installation and structure function are tested completed bottom covering 350 and are coupled to chamber body 330.According to present embodiment, step S240 carries out through using following method: the bottom is covered 350 be promoted to chamber body 330 tops; The bottom is covered 350 to be reduced in the chamber body 330; And the bottom is covered 350 be coupled to chamber body 330.Preferably, step S240 may further comprise the steps: a) bottom is covered 350 and be promoted to the level higher than chamber body 330; B) bottom is covered 350 and move to and make the bottom cover 350 to be positioned at the position of chamber body 330 or more just, and the bottom is covered 350 be reduced in the chamber body 330 so that bottom covering 350 and be installed on chamber body 330.And preferably, step S240 further may further comprise the steps: c) bottom is covered 350 and be fixed firmly to chamber body 330.When bottom covering 350 is coupled to chamber body 330 according to said method, cover the weight of the structure on 350 owing to bottom covering 350 with bottom being installed in, the coupling of bottom covering 350 becomes firm.Yet, more preferably consider to be installed in the driven fact of big part that the bottom covers the structure on 350, further carry out fixing step and be coupled to chamber body 330 more firmly so that the bottom is covered 350.

At last, carry out the step S250 that uses feeding means top covering 340 to be coupled to chamber body 330.At step S250, the top covering 340 that desired structure has been installed on it is coupled to the upper end of chamber body 330.Step S250 carries out in the following manner: the top is covered 340 be promoted to the chamber body more than 330, reduce top covering 340 so that top covering 340 is positioned on the chamber body 330, and chamber body 330 is coupled in top covering 340 securely.

Like this, accomplished assembling according to the vacuum chamber 300 of present embodiment.

Below will the method that be used to repair vacuum chamber according to present embodiment be described with reference to Figure 23.

At first, carry out the step S310 that separates top covering 340.At step S310, the top override open device that use comprises in the substrate board treatment that uses plasma or the feeding means of separation cover 340 body 330 separation from the chamber with the top, thereby open the top wall portion of vacuum chamber 300.

Next, carry out the step S320 that separates bottom covering 350 and bottom covering 350 is placed on the work mould.At step S320, feeding means at first covers 350 feeding means coupling aperture 357 couplings with the bottom.Under this condition, feeding means promotes bottom covering 350 and the bottom is covered 350 and is fed to the place that the work mould is positioned at, and then the bottom is covered 350 and is placed on the work mould.Like this, the operator can cover 350 and carry out the repairing processing to the bottom on the work mould.The work mould is configured to: the bottom is covered 350 maintain the level of opening sizable vertical distance with ground separation, thereby make the state processing of place under repair easily down in the space of operator below the work of entering mould.

Carry out then and repair bottom covering 350 and be installed in the step S330 that the bottom covers the structure on 350.At step S330, the parts that said structure will be repaired are carried out the repairing processing.

Afterwards, carry out the step S340 that bottom covering 350 is coupled to chamber body 330.At step S340, the original position that the bottom covering 350 of using feeding means to repair fully moves in the chamber body 330.This step is carried out to cover the opposite order of separating step S320 with the bottom.

At last, carry out the step S350 that top covering 340 is coupled to chamber body 330.Step S350 carries out to cover the opposite order of separating step S310 with the top.

Like this, the top covers and bottom covering 340 and 350 is located in its corresponding original position, has therefore accomplished the repairing of against vacuum chamber 300 and has handled.

According to the above embodiment of the present invention, various advantages and effect have been obtained.

In other words, according to first embodiment, a black box is set so that said chamber is maintained vacuum state on the extension at every end place of the peripheral wallboard that is formed on the chamber, and a covering assemblies is set on black box to cover black box.Therefore, favourable part is that increase the useful life of black box.

When needs were replaced black box with New Parent, this replacement can not separate the peripheral wallboard, top board and the base plate that constitute said chamber and realize through only separating covering assemblies.Therefore, might easily realize maintenance and repair for said chamber.

According to second embodiment, at least one in load lock chamber, feed chamber and the process chamber of formation FPD manufacturing equipment has vertical stacked cell structure, and said vertical stacked cell structure comprises at least two sub-chambers.Therefore, the raising treatment effeciency is arranged, and increase the advantage of productivity ratio thus.In other words, comprise at process chamber under the situation of two sub-chambers that the effect that is had is to carry out two identical processes or two different processes simultaneously.

And the coupling between the seed cell realizes through using projection/groove type structure.Therefore, might make the total height of chamber minimum, and the increase of seed cell's bonding force, and obtain the space efficiency optimized thus.

Because the seed cell intercouples through using projection/groove type structure, favourable part is the seed cell that might be coupled securely, and can easily make the seed cell separated from one another.

According to the 3rd embodiment, vacuum chamber is not made with monomeric form, but make with the form of a plurality of chambers part that can be assembled to form vacuum chamber.Therefore, favourable part is and might large-sized vacuum chamber that has of making easily be transported to the infield.In other words, making with monomeric form under the situation of this large scale vacuum chamber, can not use vehicle to come vacuum transport chamber.Yet, make under the situation of vacuum chamber in form with a plurality of chambers part, might easily realize transportation through transporting said chamber part to vacuum chamber, to compare with vacuum chamber, each of said chamber part all has the width that reduces.Certainly, after it is transported to the infield, be completed into vacuum chamber through assembling said chamber part.And it is no problem setting up vacuum environment in the vacuum chamber after assembling.

In addition, under the situation that the vacuum chamber with 3m or bigger width is made with monomeric form, be necessary the large scale metallic object is carried out machining to form vacuum chamber.For this reason, the machining device that is suitable for metallic object is carried out machining also must have large scale.The machining process also is difficult.Yet, eliminated such problem according to the present invention.

In addition, the advantage of easy maintenance and repair is arranged, this is because can under the condition that only a part of said chamber part is separated from vacuum chamber, carry out the maintenance and repair process of the damage internal structure of vacuum chamber.

According to the 4th embodiment; The top covering that is arranged on the vacuum chamber has the separate structures that comprise one or more detachable auxiliary coverings; Distribution of weight separate the process that the top covers from vacuum chamber, the top is covered covers to auxiliary, passes through vacuum chamber and present automaton in loading or unloading so that maintenance and repair allow to present automaton when presenting automaton.Separating the process of top covering from vacuum chamber, auxiliary covering is covered individually from the top by crane and separates.Therefore, the separation of top covering and assembling can realize in the weight range that crane is allowed.Like this, the separation of top covering and assembling can easily realize.

According to the 5th embodiment, there is no need in load lock chamber, to be provided with to promote and sell and calibrator.Therefore, the advantage that reduces with manufacturing cost simple in structure is arranged.And the process that substrate is loaded in the load lock chamber is simple.Therefore, the time that mounting substrate spent reduces, thereby total processing substrate time is reduced.

According to the 6th embodiment, present automaton so that assembling, maintenance or repairing are presented in the process of automaton in loading or unloading, the driver of presenting automaton can come loading or unloading through the driver path that is arranged on feed chamber one side place.Therefore, might not use crane and realize loading and unloading driver.As a result, the time that is spent of loading or unloading driver reduces.

And; Unloading to driver is under the state that is promoted to desired level by vertical driver, to carry out; Said vertical driver is arranged on presents below the automaton level that moves to the driver path with the driver that will present automaton, prevents simultaneously to damage to be suitable for the black box that feed chamber is provided and presents the sealing effectiveness between the automaton.To the unloading of presenting the automaton driver with load and also can easily realize through directing assembly and aid in guide assembly, said aid in guide assembly can hinged rotation or is slidably mounted on directing assembly so that the aid in guide assembly extends through the driver path and withdraws.

According to the 7th embodiment, as shown in Figure 21, work mould J has enough height l so that the operator can carry out repair procedures under the state in the space below the work of the entering mould J.Therefore, the operator can cover in the bottom to be placed on and easily carry out under the condition on the work mould J for the assembling process that will be installed in the structure that the bottom covers with for the repair procedures of the structure of being installed.Like this, might eliminate the difficulty that runs in execution architecture assembling process and the bottom covering repair procedures under apart from the short regular situation of the height on ground at main frame fully.Because the operator can cover repair procedures in execution architecture assembling process and bottom under the erectility, execution architecture assembling process and the bottom covering time that repair procedures spent reduce greatly.In addition, favourable part is might prevent the term of execution of process, to meet accident.

Claims

1. flat panel display manufacturing apparatus, it comprises load lock chamber, feed chamber and process chamber, is used to make flat-panel monitor, wherein load lock chamber comprises:

One vacuum chamber shell can be set up vacuum therein;

One opening, its peripheral wall through the vacuum chamber shell form to allow substrate to be used for that through opening substrate is loaded into the load lock chamber neutralization and unload carried base board from load lock chamber;

One family of power and influence, it is suitable for opening and closing opening; And

The end effector pockets; Its diapire place at the vacuum chamber shell forms and presents the end effector of automaton to hold the substrate that is installed in the load lock outside respectively, and each end effector pockets all has desired depth and vertically moves in the actuator pockets endways to allow a relevant end effector.

2. flat panel display manufacturing apparatus as claimed in claim 1, wherein load lock chamber further comprises:

One is substrate-guided, and it is along the edge setting of the diapire of vacuum chamber shell, and this is substrate-guided to have structure that the core to the vacuum chamber shell tilts.

3. according to claim 1 or claim 2 flat panel display manufacturing apparatus, wherein load lock chamber further comprises:

At least two are loaded moulds, and it is arranged in the vacuum chamber shell simultaneously spaced apart vertically each other with mounting substrate on said loading mould respectively; And

Be arranged on each and load a plurality of even spacer substrate supporting assembly on mould, each substrate supporting assembly all has a length and loads mould and vertically mobile down by the state in the gap between the substrate supporting assembly institute substrate supported to allow end effector being inserted into to be defined in.

4. according to claim 1 or claim 2 flat panel display manufacturing apparatus, wherein load lock chamber further comprises:

Substrate protection assembly, it is arranged on the diapire of vacuum chamber shell to the location of this diapire in the substrate contacts that is placed on the diapire, and this substrate protection assembly is processed by the low material of hardness ratio substrate.

5. flat panel display manufacturing apparatus as claimed in claim 2, wherein substrate-guided have a U-shaped structure, and this U-shaped structure has opening to allow end effector through substrate-guided in the one of which side.

6. flat panel display manufacturing apparatus as claimed in claim 3, wherein, the length of each the substrate supporting assembly in said a plurality of substrate supporting assemblies defines the height that is formed at the gap between said loading mould and the counterpart substrate.

7. flat panel display manufacturing apparatus as claimed in claim 1, wherein, said chamber shell comprises:

Define the top board at the top of said vacuum chamber shell;

Define the base plate of the bottom of said vacuum chamber shell;

Two peripheral wallboards are between said top board and the said base plate at the relative peripheral side of said top board and said base plate and extend, and wherein, each in said two peripheral wallboards comprises:

Peripheral sidewall,

Last extension extends internally to the inside of said vacuum chamber shell from the upper end of said peripheral sidewall, makes that the following inner surface of said position of going up the extension and said top board is adjacent, and

Extend below part, extend internally to the inside of said vacuum chamber shell, make that the upper inner surface of said position that extends below part and said base plate is adjacent from the lower end of said peripheral sidewall;

Last covering assemblies is positioned on each under the extension and said top board above the adjacent part of inner surface;

Following covering assemblies is positioned at each above the adjacent part that extends below part and said base plate upper inner surface; And

Black box, said top board and said between the covering assemblies, and said base plate and said down between the covering assemblies.

8. flat panel display manufacturing apparatus as claimed in claim 1; Wherein, Said at least one chamber comprises at least two vertical stacked seed cells; Wherein, projection and groove that each all another series of contact surface between said at least two vertical stacked seed cells alternately forms, said projection and groove can be meshing with each other so that said two vertical stacked seed cell couplings at least.