KR100786620B1 - 기판 검사 장치 - Google Patents

기판 검사 장치 Download PDF

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Publication number
KR100786620B1
KR100786620B1 KR1020060041924A KR20060041924A KR100786620B1 KR 100786620 B1 KR100786620 B1 KR 100786620B1 KR 1020060041924 A KR1020060041924 A KR 1020060041924A KR 20060041924 A KR20060041924 A KR 20060041924A KR 100786620 B1 KR100786620 B1 KR 100786620B1
Authority
KR
South Korea
Prior art keywords
illumination light
substrate
stage
scattering plate
fixing
Prior art date
Application number
KR1020060041924A
Other languages
English (en)
Korean (ko)
Other versions
KR20060117220A (ko
Inventor
슈야 조가사키
Original Assignee
올림푸스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 올림푸스 가부시키가이샤 filed Critical 올림푸스 가부시키가이샤
Publication of KR20060117220A publication Critical patent/KR20060117220A/ko
Application granted granted Critical
Publication of KR100786620B1 publication Critical patent/KR100786620B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR1020060041924A 2005-05-12 2006-05-10 기판 검사 장치 KR100786620B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005139515 2005-05-12
JPJP-P-2005-00139515 2005-05-12

Publications (2)

Publication Number Publication Date
KR20060117220A KR20060117220A (ko) 2006-11-16
KR100786620B1 true KR100786620B1 (ko) 2007-12-21

Family

ID=37389784

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060041924A KR100786620B1 (ko) 2005-05-12 2006-05-10 기판 검사 장치

Country Status (3)

Country Link
KR (1) KR100786620B1 (zh)
CN (1) CN100428001C (zh)
TW (1) TWI307929B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100912401B1 (ko) * 2008-01-29 2009-08-14 주식회사 쓰리비 시스템 광학필름 검사장치
JP5559644B2 (ja) * 2010-09-03 2014-07-23 株式会社トプコン 検査装置
JP2012073036A (ja) * 2010-09-27 2012-04-12 Hitachi High-Technologies Corp ガラス基板欠陥検査装置及びガラス基板欠陥検査方法
CN102759531A (zh) * 2012-07-25 2012-10-31 深圳市华星光电技术有限公司 自动光学检测装置
JP6199585B2 (ja) * 2013-03-21 2017-09-20 住友化学株式会社 レーザー光照射装置及び光学部材貼合体の製造装置
KR102606278B1 (ko) * 2016-03-25 2023-11-27 삼성디스플레이 주식회사 표시 장치의 제조장치
CN107489688A (zh) * 2016-06-13 2017-12-19 睿励科学仪器（上海）有限公司 具有水平调整功能的吸盘装置以及安装方法
KR20190036007A (ko) * 2017-09-26 2019-04-04 삼성전자주식회사 그립 장치 및 이를 포함하는 기판 검사 시스템

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000111483A (ja) * 1998-10-02 2000-04-21 Dainippon Printing Co Ltd 周期性パターンの検査方法及び装置
KR20020038488A (ko) * 2000-11-17 2002-05-23 바스러 아게 디스플레이의 제조작업시 평면유리를 위한 검사시스템

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000193604A (ja) * 1998-12-25 2000-07-14 Takano Co Ltd 基板用自動検査装置
JP2002181714A (ja) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd 薄板検査装置
JP4276867B2 (ja) * 2003-03-18 2009-06-10 オリンパス株式会社 基板ホルダ及びこれを備えた表面検査装置
JP4310622B2 (ja) * 2003-04-11 2009-08-12 株式会社日立ハイテクノロジーズ 基板の表面検査方法及び検査装置
KR100506702B1 (ko) * 2003-05-06 2005-08-09 주식회사 디이엔티 기판 검사장치
JP4426276B2 (ja) * 2003-10-06 2010-03-03 住友重機械工業株式会社 搬送装置、塗布システム、及び検査システム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000111483A (ja) * 1998-10-02 2000-04-21 Dainippon Printing Co Ltd 周期性パターンの検査方法及び装置
KR20020038488A (ko) * 2000-11-17 2002-05-23 바스러 아게 디스플레이의 제조작업시 평면유리를 위한 검사시스템

Also Published As

Publication number Publication date
TW200644143A (en) 2006-12-16
CN100428001C (zh) 2008-10-22
TWI307929B (en) 2009-03-21
CN1862319A (zh) 2006-11-15
KR20060117220A (ko) 2006-11-16

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