KR100780312B1 - Inspection Apparatus - Google Patents

Abstract

An inspection apparatus according to the present invention is to provide an inspection apparatus 1 for reducing space and improving work efficiency. The inspection apparatus 1 is inserted during the processing of the liquid crystal panel 7, and is provided on the conveyor line of the processing process to probe the liquid crystal panel 7, and the prober on the conveyor line. The carrying-in mechanism 3 which carries in the prober 4 the liquid crystal panel 7 guided to (4), and the liquid crystal panel 7 which test | inspected in the said prober 4 are complete | finished are said A carrying out mechanism 5 for carrying out onto the conveyor line is provided. A backlight 43 for irradiating the housing 41, the work table 42 accommodated in the housing 41, and the liquid crystal panel 7 placed thereon, and the liquid crystal panel 7 placed on the work table 42. ), A probe unit 45 for testing the liquid crystal panel 7, and a screen 46 mounted on the housing 41 so as to be recognized from the outside and projecting an image of the liquid crystal panel 7. .

Inspection device, liquid crystal panel, prober, conveyor line

Description

 Inspection Device {Inspection Apparatus}

1 is a front view showing a test apparatus according to an embodiment of the present invention.

2 is a perspective view showing an inspection apparatus according to an embodiment of the present invention.

3 is a plan view showing a test apparatus according to an embodiment of the present invention.

4 is a front view showing a carrying in mechanism and a prober of the inspection apparatus according to the embodiment of the present invention.

5 is a perspective view showing a carrying-in mechanism of the inspection apparatus according to the embodiment of the present invention.

6 is a perspective view showing a panel clamp and a panel lifter of the inspection apparatus according to the embodiment of the present invention.

Fig. 7 is a schematic side view showing a prober of the inspection apparatus according to the embodiment of the present invention.

* Description of Major Symbols in Drawings *

1: Inspection device 2: Import side conveyor

2A: roller 2B: axis of rotation

2C: Roller Guide 3: Loading Mechanism

4: prober (4) 5: carrying out mechanism

6: Carrying side conveyor 7: Liquid crystal panel

8: Panel clamp 8A: X panel clamp

8B: Y panel clamp part 9: panel lifter

12: base plate 13: guide rail

14: slider 15: cylinder

16: clamp piece 20: base plate

21: guide rail 22: slider

23: clamp piece 24: frame

26: base plate 27: guide member

28: drive motor 29: prop

30: pad 32: frame

33: guide rod 34: guide plate

37: adsorption part 38: conveying arm

41: housing 42: worktable

43: backlight 44: Z stage

45: probe unit 46: screen

47: optical system 48: polarizing plate

49: mirror 50: shutter

Field of invention

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus for visually confirming and performing inspection target plates such as liquid crystal panels.

Background of the Invention

In the past, when testing a test target plate such as a liquid crystal panel, the test target plate was illuminated by illumination, and energized by a prober, and the inspector visually confirmed the screen. In this case, however, there are problems such as a heavy burden on the examiner's eyes and a certain amount of skill required to reduce mistakes in the inspection, so that the inspection surface is projected on the screen and inspected on the screen. Has been proposed. As an example of this, the inspection apparatus of Unexamined-Japanese-Patent No. 11-52317 and Unexamined-Japanese-Patent No. 2003-270608 is mentioned.

However, the conventional inspection apparatus is installed in the vicinity of the conveyor line as a single device, and once the inspection target plate conveyed on the conveyor line is taken out from the conveyor line and inspected, and returned to the original conveyor line after the inspection ends.

Thus, when the inspection apparatus is arranged in the vicinity of the conveyor line, a space for the inspection apparatus is required, and a space for installing a moving mechanism for moving the inspection object plate between the conveyor line and the inspection apparatus is also required. For this reason, there exists a problem that the scale and volume of an apparatus become large.

In addition, there is a problem that the work efficiency is deteriorated when the inspection plate is moved between the conveyor line and the inspection device by a moving mechanism.

The present invention has been made in view of the above-described problems, and an object thereof is to provide an inspection apparatus aiming at saving space and improving work efficiency.

The above and other objects of the present invention can be achieved by the present invention described below.

The present invention is to provide an inspection apparatus aimed at saving space and improving work efficiency. More specifically, the inspection apparatus is inserted in the middle of the processing process of the inspection object plate, a prober installed on the conveyor line of the treatment process to inspect the inspection object plate, and the inspection table guided on the conveyor line to the prober. A carrying-in mechanism for carrying the upper plate into the prober, and a carrying-out mechanism for carrying out the inspection target plate completed by the prober onto the conveyor line on the post-process side; A worktable housed in the housing, on which the inspection object plate is placed, light for irradiating the inspection object plate placed on the work table, a probe unit for testing the inspection object plate, and external to the housing A screen installed so as to be able to recognize from the screen and projecting an image of the inspection target plate irradiated by the light. Characterized in that provided.

Accordingly, the inspection object plate transferred on the conveyor line of the processing step can be inspected on the conveyor line, and transferred to the conveyor line as it is.

On the carry-in side of the prober, a clamp is disposed on the conveyor line so as to be protruding and lifts the clamp to position and support the inspected plate conveyed on the conveyor line, and the inspected plate supported by the clamp upwards. It is preferable to have a lifter for delivering to the loading mechanism.

As a result, it is possible to accurately carry the inspection object plate positioned by the clamp and lifted upward by the lifter into the prober.

In addition, the housing of the prober is preferably provided with a shutter on the carry-in side and the carry-out side thereof.

Accordingly, the shutter is closed when the shutter is closed, so that a clear image can be projected on the screen.

EMBODIMENT OF THE INVENTION Hereinafter, the inspection apparatus which concerns on embodiment of this invention is demonstrated, referring an accompanying drawing.

1 is a front view showing the inspection apparatus according to the present embodiment, FIG. 2 is a perspective view showing the inspection apparatus according to the present embodiment, FIG. 3 is a plan view showing the inspection apparatus according to the present embodiment, and FIG. 5 is a perspective view showing a carrying mechanism and a prober of the inspection apparatus according to the present invention, FIG. 5 is a perspective view showing a carrying mechanism of the inspection apparatus according to the present embodiment, and FIG. 6 is a perspective view showing a panel clamp and a panel lifter of the inspection apparatus according to the present embodiment. 7 is a schematic side view showing a prober of the inspection apparatus according to the present embodiment. In addition, it demonstrates here taking a liquid crystal panel as an example to test | inspection plate.

The inspection apparatus 1 which concerns on this embodiment is an apparatus which is inserted in the middle of the manufacturing process of a liquid crystal panel, and performs the lighting test of a liquid crystal panel, as shown to FIG. This inspection apparatus 1 is mounted between the cell process of a liquid crystal panel and a module process, for example, The liquid crystal panel which completed the cell process which was a previous process is light-tested by the inspection apparatus 1, and after (Iii) transferred to the module process,

The inspection apparatus 1 is mainly comprised by the carry-in conveyor 2, the carry-in mechanism 3, the prober 4, the carry-out mechanism 5, and the carry-out conveyor 6. As shown in FIG.

The carry-in side conveyor 2 is a conveyor for guiding the liquid crystal panel 7 conveyed in the previous process to the carrying inlet of the prober 4. This carry-in conveyor 2 consists of a roller conveyor. The carrying-in conveyor 2 is specifically comprised by the roller 2A, the rotating shaft 2B which supports this roller 2A rotatably, and the roller guide 2C which supports both ends of this rotating shaft 2B. . In addition, it is also preferable that the roller 2A can rotate freely, and it is also preferable that the roller 2A be rotated by the drive motor by being connected to a drive motor (not shown).

In this carrying-in conveyor 2, as shown to FIG. 5 and FIG. 6, the panel clamp 8 and the panel lifter 9 are provided. These panel clamps 8 and the panel lifter 9 are positioned on the conveyor line to which the liquid crystal panel 7 is conveyed, and are inserted into the carry-in conveyor 2 so that they can be projected out.

The panel clamp 8 is a mechanism for positioning and supporting the liquid crystal panel 7 guided to the carry-in conveyor 2. The panel clamp 8 is composed of an X panel clamp portion 8A and a Y panel clamp portion 8B. The X panel clamp portion 8A is provided in the X direction (the direction along the conveyor line. The direction in which the liquid crystal panel 7 is conveyed) and is a mechanism for adjusting the position of the liquid crystal panel 7 in the X direction. The X panel clamp 8A is composed of a base plate 12, a guide rail 13, a slider 14, a cylinder 15, a clamp piece 16, and a moving mechanism (not shown). The base plate 12 is a plate material fixed to the carrying-in side conveyor 2 side and supporting the guide rail 13. The guide rail 13 is a rail for slidably supporting the two sliders 14. The guide rail 13 is integrally fixed to the base plate 12 and is installed along the X-axis direction. The slider 14 is provided to be slidable to the guide rail 13. Two sliders 14 are provided to face each other and are guided to the guide rails 13 so as to be spaced apart from each other. The cylinder 15 is a mechanism for moving the clamp piece 16 up and down. The cylinder 15 is fixed integrally to the slider 14 in a state in which the stretching direction is vertically directed. The cylinder 15 is configured to expand and contract by electric or hydraulic pressure. Thereby, the cylinder 15 is formed so that the clamp piece 16 may be settled out from the conveyance surface (surface in which the liquid crystal panel 7 to be conveyed is located) of the carrying-in conveyor 2. This cylinder 15 is usually contracted and put into a standby state, and is extended when positioning the liquid crystal panel 7 which has been conveyed to the carrying-in conveyor 2 to the set position so that the clamp piece 16 is moved from the conveying surface. It is formed to extend. The clamp piece 16 is a member for directly positioning the liquid crystal panel 7 in direct contact with the liquid crystal panel. This clamp piece 16 is comprised by arranging two elastic synthetic cylindrical resins.

The Y panel clamp portion 8B is arranged in the Y direction and is a mechanism for adjusting the position of the liquid crystal panel 7 in the Y direction. The Y panel clamp portion 8B is composed of a base plate 20, a guide rail 21, a slider 22, a clamp piece 23, and a moving mechanism (not shown). The base plate 20 is a plate material fixed to the carrying-in side conveyor 2 side to support the guide rail 21. The guide rail 21 is a rail for slidably supporting the two sliders 22. The guide rail 21 is integrally fixed to the base plate 20 and is disposed along the Y axis direction. The slider 22 is provided to be slidable to the guide rail 21. Two sliders 22 are installed to face each other, and are guided by the guide rails 21 to be spaced apart from each other. Each slider 22 is supported by a moving mechanism not shown and is formed to be spaced close to each other. The clamping piece 23 is a member for directly contacting the liquid crystal panel 7 to position the liquid crystal panel 7. The clamp piece 23 is configured by arranging two elastic synthetic cylindrical resins. Each clamp piece 23 is provided at the front end of the frame 24 formed substantially in a U shape. The height of the frame 24 is set to a height at which the clamping piece 23 extends upward from the carrying surface to contact the edge of the liquid crystal panel 7. Each clamp piece 23 is placed in the standby state, which is usually located at the outermost side in the width direction of the carry-in conveyor 2 by the moving mechanism, and the liquid crystal panel 7 is positioned with the X panel clamp portion 8A. When controlled to approach each other. As a result, the liquid crystal panel 7 is precisely positioned in the XY direction in conjunction with the X panel clamp portion 8A. The liquid crystal panel 7 accurately positioned by the X panel clamp portion 8A and the Y panel clamp portion 8B is transferred to the panel lifter 9. In addition, the panel clamp 8 may be provided with the sensor which detects the position of the liquid crystal panel 7 as needed. The sensor detects that the liquid crystal panel 7 is in a position where positioning is possible with the X panel clamp portion 8A and the Y panel clamp portion 8B, and then activates the panel clamp 8.

The panel lifter 9 is a device for lifting and supporting the liquid crystal panel 7 positioned and supported by the panel clamp 8 to the carrying-in mechanism 3. The panel lifter 9 is composed of a base plate 26, a guide member 27, a drive motor 28, a strut 29, and a pad 30. The base plate 26 is a plate for supporting the entire panel lifter 9. The base plate 26 is fixed to the frame 32 of the carry-in conveyor 2. The guide member 27 is slidably supported by the base plate 26 and is a member that moves in the vertical direction. The guide member 27 is comprised from the four guide rods 33 slidably supported by the base plate 26, and the guide plate 34 which supports each guide rod 33 integrally. The drive motor 28 is a motor for moving the guide member 27 up and down. The drive motor 28 is connected to the guide member 27 through a ball screw, etc., and is formed to move the guide member 27 up and down by the rotation of the drive motor 28. The struts 29 are members for supporting the pads 30, and four are provided in the guide plates 34 of the guide members 27. The pad 30 is a member for supporting the liquid crystal panel 7 in contact with the bottom surface of the liquid crystal panel 7. The pad 30 is made of synthetic resin having elasticity and is formed in an inverted cone shape.

As shown in Figs. 1 to 4, the carrying in mechanism 3 is a mechanism for carrying the liquid crystal panel 7 into the prober 4. The carrying-in mechanism 3 is comprised from the adsorption | suction part 37, the conveyance arm 38, and a moving mechanism (not shown). The adsorption part 37 is a part which adsorb | sucks on the surface of the liquid crystal panel 7, and supports the liquid crystal panel 7. As shown in FIG. The conveyance arm 38 is a member for supporting the liquid crystal panel 7 through the adsorption portion 37 of the distal end thereof and for transporting it into the prober 4. The conveyance arm 38 extends in the horizontal direction and is formed so that the liquid crystal panel 7 can be inserted to the center part of the prober 4. The moving mechanism is a mechanism for supporting the transfer arm 38 and inserting the liquid crystal panel 7 supported by the transfer arm 38 to the center portion of the prober 4. The moving mechanism is provided with the apparatus (not shown) which moves the conveyance arm 38 in a horizontal direction.

The prober 4 is a device for inspecting the lighting of the liquid crystal panel 7. The prober 4 is arranged on the conveyor line of the manufacturing process of the liquid crystal panel 7. As shown in Figs. 1 and 7, the prober 4 includes a housing 41, a work table 42, a backlight 43, a Z stage 44, a probe unit 45, a screen 46, and an optical system. 47, a polarizing plate 48, a mirror 49, and a shutter 50.

The housing 41 is a member for constituting the outline of the prober 4. The inside of the housing 41 is shielded and formed into a dark room, in which the image of the inspection target surface of the liquid crystal panel 7 is projected on the screen 46 efficiently.

The work table 42 is a member on which the liquid crystal panel 7 for lighting inspection is placed. The worktable 42 is disposed above the conveyor line in the housing 41. Thereby, unnecessary operation | movement at the time of conveyance of the liquid crystal panel 7 which arises by arrange | positioning the worktable 42 in the position off on the said conveyor line is suppressed.

The backlight 43 is a light source for irradiating the liquid crystal panel 7 from the rear side thereof and projecting an image of the liquid crystal panel 7 onto the screen 46. The backlight 43 is installed between the work table 42 and the Z stage 44 to irradiate the liquid crystal panel 7 placed on the work table 42 from the rear side thereof.

The Z stage 44 is a device for supporting the work table 42 and moving it in the vertical direction. The Z stage 44 raises the work table 42 to accommodate the liquid crystal panel 7 which is supported by the transfer arm 38 and moved up to the top of the Z stage 44. In addition, the Z stage 44 moves and adjusts the worktable 42 up and down when the probe needle (not shown) of the probe unit 45 is brought into contact with the liquid crystal panel 7 placed on the worktable 42.

The probe unit 45 is a member for performing a lighting test of the liquid crystal panel 7. The probe unit 45 is provided with a probe needle (not shown) at its tip, and the probe needle contacts the terminal portion (not shown) of the liquid crystal panel 7 to perform a lighting test.

The screen 46 is a member for projecting an image of the surface of the liquid crystal panel 7. This screen 46 is transmissive, and is formed to enlarge and reduce the image of the surface of the liquid crystal panel 7 which is being tested by illuminating the backlight 43 with the backlight 43 and projecting it clearly. The screen 46 is installed on the wall 41 orthogonal to the conveyor line in the housing 41 so as to be recognized from the outside. Thereby, it is formed so that the image of the surface of the liquid crystal panel 7 which is performing the lighting test similarly to a projection television can be enlarged and reduced and projected clearly.

The optical system 47 is a member for narrowing the focus on the screen 46 and is composed of one or a plurality of lenses. It is formed so that the image of the surface of the liquid crystal panel 7 which is performing the lighting test by this optical system 47 is enlarged on the screen 46 and projected clearly.

The polarizing plate 48 is a member for polarizing the video light from the liquid crystal panel 7. This polarizing plate 48 is provided in place of the polarizing plate originally inserted into the liquid crystal panel 7. That is, since the liquid crystal panel 7 performs the lighting test while the polarizing plate is not inserted in the middle of the manufacturing process, the polarizing plate 48 is placed on the light source side of the optical system 47 instead of the polarizing plate inserted into the liquid crystal panel 7. It is installed at the bottom.

The mirror 49 is a mirror for reflecting the image light from the liquid crystal panel 7 toward the screen 46.

The shutter 50 is a member for opening and closing when the liquid crystal panel 7 enters and exits the housing 41. Inside the housing 41 is a dark room for projecting a clear image on the screen 46, and a shutter 50 is provided on each of the carrying in side and the carrying out side to shield the entrance and exit of the liquid crystal panel 7.

The discharging mechanism 5 is a mechanism for discharging the liquid crystal panel 7 whose inspection is completed by the prober 4 onto the conveyor line on the post-process side. This carrying out mechanism 5 has the same structure as the carrying in mechanism 3 mentioned above.

The carrying-out conveyor 6 is an apparatus for receiving the liquid crystal panel 7 from the carrying out mechanism 5 and sending it to a post process. This carry-out conveyor 6 has the same structure as the carry-in conveyor 2. The carry-out conveyor 6 is provided with a panel clamp 8 and a panel lifter 9 having the same configuration as the panel clamp 8 and the panel lifter 9 of the carry-in conveyor 2.

Each said device is connected to the control part (not shown). This control unit has a built-in control program for controlling the operations described later.

The inspection apparatus 1 configured as described above operates as follows.

The liquid crystal panel 7 transferred from the previous process flows into the carry-in conveyor 2 of the inspection apparatus 1, and is guided to the carry-in conveyor 2 to the carry-in port of the prober 4. Subsequently, the X-panel clamp part 8A of the panel clamp 8 is operated, each clamp piece 16 is raised, and the position of the X direction is determined by picking up and fixing the liquid crystal panel 7 before and after X direction. At the same time, the Y panel clamp portion 8B also operates to determine the position in the Y direction. As a result, the liquid crystal panel 7 is accurately positioned in the XY direction.

Next, the clamp pieces 16 and 23 of the X panel clamp part 8A and the Y panel clamp part 8B are slightly opened, and the panel lifter 9 is operated to raise the guide member 27. Accordingly, the pad 30 contacts the lower surface of the liquid crystal panel 7 to lift the liquid crystal panel 7. The liquid crystal panel 7 lifted by the panel lifter 9 is in contact with the adsorption part 37 of the loading mechanism 3, and is adsorbed and supported by this adsorption part 37. Subsequently, the upstream shutter 50 is opened so that the transfer arm 38 of the loading mechanism 3 horizontally moves in the conveyor line direction to insert the liquid crystal panel 7 into the housing 41 of the prober 4. . Specifically, it moves to just above the work table 42 in the housing 41, and the work table 42 is raised in the Z stage 44 so that the liquid crystal panel 7 is placed on the work table 42. Then, the loading mechanism 3 is taken out of the housing 41 and the shutter 50 is closed.

Subsequently, the Z stage 44 is raised so that each probe needle of the probe unit 45 contacts each electrode of the liquid crystal panel 7. The backlight 43 is turned on at the same time as the liquid crystal panel 7 is energized. Accordingly, the image of the surface of the liquid crystal panel 7 is focused by the optical system 47 through the polarizing plate 48, reflected by the mirror 49, and magnified and projected clearly on the screen 46. The inspector checks while viewing this screen 46.

When the inspection of the liquid crystal panel 7 is finished, the downstream shutter 50 is opened, the transfer arm 38 of the discharging mechanism 5 is inserted into the housing 41, and the suction part 37 is provided with the worktable. Is moved to just above 42. Subsequently, the work table 42 is raised, and thus the liquid crystal panel 7 on the work table 42 is brought into contact with the adsorption part 37 to be adsorbed and supported by the adsorption part 37, and the housing 41 is supported. Is discharged to the outside. The liquid crystal panel 7 carried out to the outside is placed on the carrying-out conveyor 6 and transferred to the downstream conveyor line.

The present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit thereof.

The inspection device 1 according to the present invention has the following effects by operating as described above. Since the prober 4 of the inspection apparatus 1 is installed on the conveyor line of the manufacturing process of the liquid crystal channel 7, a special space for the inspection apparatus 1 becomes unnecessary, thereby achieving a space saving. can do.

In addition, since the liquid crystal panel 7 transferred on the conveyor line is inspected on the conveyor line, the liquid crystal panel 7 is transferred on the conveyor line as it is, thus eliminating unnecessary work and improving work efficiency.

The prober 4 has a housing 41, a work table 42, a backlight 43, a Z stage 44, a probe unit 45, a screen 46, an optical system 47, a polarizer 48, and a mirror. 49, the shutter 50 is provided, and since the liquid crystal panel 7 is accurately positioned and conveyed on the conveyor line, unnecessary work is eliminated and work efficiency can be improved.

In addition, when the inside of the housing 41 is formed as a dark room by the housing 41 and the shutter 50 and is enlarged on the screen 46 by the optical system 47 or the like (when the liquid crystal panel 7 is larger than the screen 46, It is possible to improve the inspection accuracy because it is to project the reduced (clear) image.

There is no unnecessary work because the carrying mechanism 3 picks up the liquid crystal panel 7 positioned by the panel clamp 8 and lifted upward from the panel lifter 9 and can be carried in the prober 4 accurately. Can improve the working efficiency.

Simple modifications and variations of the present invention can be readily used by those skilled in the art, and all such variations or modifications can be considered to be included within the scope of the present invention.

Claims (3)

Inspector inserted into the inspection process of the plate, A prober installed on the conveyor line of the processing step to inspect the inspection target plate, an import mechanism for carrying the inspection target plate guided on the conveyor line to the prober into the prober, and an inspection at the prober. A carrying-out mechanism for discharging the finished inspection target plate onto the conveyor line on the post-process side; A probe unit configured to test the inspection target plate, a work table on which the prober is formed, and a work table in which the inspection object plate is placed, the inspection object plate placed on the work table, and the inspection object plate; And a screen installed in the housing so as to be recognized from the outside and projecting an image of the inspection target plate irradiated with the light. A clamp for positioning and supporting the inspection target plate transported on the conveyor line on the carrying-in side of the prober, and lifting the inspection target plate supported by the clamp upward; Inspection device comprising a lifter for transmitting to. The inspection apparatus according to claim 1, wherein the housing of the prober is provided with shutters on the carrying in and the carrying out sides thereof. delete

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