KR100278115B1 - Liquid crystal panel inspection device - Google Patents

Abstract

The damage to the liquid crystal panel by the conveying means is reduced as much as possible, and the waste of time caused by the movement of the conveying means is reduced.

The inspection apparatus of the liquid crystal panel uses the at least two conveying apparatuses having a pair of one or more holders facing the recesses that receive the edges of the panel as conveying means, and the holders are brought closer to each other in a plane parallel to the liquid crystal panel. By displacing in a direction away from each other, the liquid crystal panel is held and released by the holder. As a result, the contact area between the conveying means and the liquid crystal panel becomes small, the waste of time due to evacuation and movement of the conveying means decreases, and the conveyance of the liquid crystal panel is stabilized.

Description

Liquid crystal panel inspection device

The present invention relates to an apparatus for driving a liquid crystal panel and inspecting whether the liquid crystal panel is satisfactory.

In general, a liquid crystal display panel, that is, an apparatus for inspecting a liquid crystal panel by a human hand, generally includes a water position at which a liquid crystal panel is subjected to a test apparatus and a measurement for the purpose of preventing damage to the inspection probe. The inspection position for the lighting test of the liquid crystal panel is provided separately from the stage, that is, the inspection stage, and the liquid crystal panel is conveyed from the water supply position to the inspection position and vice versa.

As this type of inspection apparatus, a liquid crystal panel is conveyed to a water supply position and an inspection position by a conveying device (see Japanese Patent Application Laid-Open No. 5-334227), and the conveying means functions on the inspection stage itself receiving the liquid crystal panel at the time of lighting inspection. In addition, the inspection stage itself is moved to the water supply position and the inspection position (Japanese Patent Laid-Open No. 9-138256).

However, in the former, the conveying device must be moved to the water supply position and the inspection position for conveyance of the liquid crystal panel, and the conveying device must be largely evacuated to a position where it does not interfere with the lighting inspection during the inspection. Therefore, the moving time of the inspection stage for conveyance and evacuation is wasted. In addition, if the former uses an arm that receives the liquid crystal panel on the receiving surface as a conveying means, the contact area with the arm becomes large, so that scratches can be formed on the liquid crystal panel at the time of the liquid crystal panel between the inspection stage and the arm. There is concern.

On the other hand, since the latter places the liquid crystal panel directly on the inspection stage, it is unlikely that the liquid crystal panel will be damaged when the liquid crystal panel is touched, but the inspection stage itself is moved to the water position and the inspection position for conveyance of the liquid crystal panel. There is still a problem that it must be moved, and therefore, the movement time of the inspection stage itself for conveying the liquid crystal panel is wasted. Moreover, since the conveying means adsorbs the liquid crystal panel to the lower surface thereof, the liquid crystal panel is conveyed in an unstable state.

An object of the present invention is to reduce the damage to the liquid crystal panel by the conveying means as much as possible and to reduce the waste of time due to the movement of the conveying means.

1 is a front view showing an embodiment of the inspection apparatus according to the present invention.

FIG. 2 is a right side view showing an embodiment of a portion of a conveyance mechanism in the inspection apparatus of FIG. 1, showing a portion of the probe unit in cross section.

It is a figure which looked at the conveying apparatus in the inspection apparatus of FIG. 1 from the direction of the 3-3 line | wire in FIG.

4 is a plan view showing an embodiment of a worktable.

FIG. 5 is a front view of the work table shown in FIG. 4. FIG.

6 is a view showing an embodiment of the vicinity of the holder.

FIG. 7 is a diagram for explaining alignment of liquid crystal panels on a work table.

8 is a side view of the conveying apparatus showing the first step of the conveying apparatus.

FIG. 9 is a side view showing a step following FIG. 8 of the transport apparatus. FIG.

10 is a view showing a step following FIG. 9 of the transport apparatus.

FIG. 11 is a view showing a step following FIG. 10 of the transport apparatus. FIG.

12 is a view showing a step following FIG. 11 of the transport apparatus.

It is a figure which shows the step following FIG. 12 of a conveying apparatus.

Fig. 14 is a view for explaining the water supply of the liquid crystal panel between the conveying apparatus and the inspection stage, and showing the first water step.

FIG. 15 is a diagram illustrating a water step following FIG. 14.

FIG. 16 is a view showing a water step following FIG. 15.

FIG. 17 is a diagram illustrating a water step following FIG. 16.

FIG. 18 is a diagram for explaining the relationship between the conveying apparatus and the inspection stage when the liquid crystal panel is led from the conveying apparatus to the inspection stage.

19 is a view showing another embodiment of the conveying apparatus.

20 is a right side view of the conveying apparatus shown in FIG. 19.

FIG. 21 is a plan view illustrating a state in which a second slider approaches the conveyance apparatus illustrated in FIG. 9.

<Explanation of symbols for main parts of drawing>

10: inspection apparatus, 12: liquid crystal panel, 30: support, 40: probe unit

52: water supply stage 54: inspection stage, 56: conveying apparatus, 58: panel receiver

60, 62: cylinder mechanism (drive means for panel receiver), 64: positioning part, 66, 76: notch part

72: work table, 78: edge receiver, 80: backlight unit, 82: stopper

84: pusher mechanism, 86: rotary mechanism, 88: swinging body, 94: rail

96, 98: slider 100: drive mechanism for the slider (first drive means)

102: holder 104: drive mechanism for the holder (second drive means)

110: pulley, 112: endless belt 114: drive source, 122: buffer

132: rail, 134: guide, 136: link, 138: long, 140, 142: shaft

The inspection apparatus of the present invention includes a water stage arranged at a water position of the liquid crystal panel, an inspection stage arranged at an inspection position away from the water stage, and at least two conveying apparatuses for transporting the liquid crystal panel to both stages. . Each conveying apparatus opposes the recessed portion with at least one pair of holders having a movable stage capable of reciprocating between the stages, first driving means for reciprocating the movable stage, and recessed portions for receiving the edges of the liquid crystal panel. And holders arranged at intervals on the movable table in a state, and second driving means for displacing the holders in a direction parallel to and far from each other in a plane parallel to the liquid crystal panel.

The liquid crystal panel is conveyed by moving the holders of the conveying apparatus closer to each other, the opposing edges of which are received in the recesses, being gripped by the conveying apparatus, and the holders of the conveying apparatus being moved away from each other. Freed from Each conveying apparatus conveys a liquid crystal panel in the state which received the opposing edge part of a liquid crystal panel in the recessed part of a holder. As a result, the contact area between the holder and the liquid crystal panel can be reduced, and as a result, damage to the liquid crystal panel at the time of delivery of the liquid crystal panel between the holder and the inspection stage can be prevented, and the liquid crystal panel is vacuum-adsorbed. It can be conveyed in a stable state without doing so.

The water supply of the liquid crystal panel to the inspection apparatus is performed by a human hand or a water machine in the water stage, and the inspection of the liquid crystal panel is performed by a human hand using the naked eye or mechanically using a television camera. The liquid crystal panel with respect to the inspection stage is also carried out by the conveying apparatus.

During the inspection, it is only necessary to move the holders in the direction away from them to save the holders slightly, and it is not necessary to largely evacuate the whole conveying apparatus which has conveyed the liquid crystal panel to the inspection position. For this reason, time waste by retraction of a conveyance means is remarkably small.

The inspection and the water supply of the liquid crystal panel may be performed, for example, by performing the water supply of the liquid crystal panel from one conveying apparatus to the inspection stage, the inspection of the liquid crystal panel, and the water supply of the liquid crystal panel from the inspection stage to the one conveying apparatus. In the process, the inspection of the liquid crystal panel from the other conveying device to the water supply stage, the removal of the liquid crystal panel from the water supply stage, the placement of a new liquid crystal panel to the water supply stage, and the It is possible to carry out by carrying out a liquid crystal panel.

The conveyance of the liquid crystal panel by both conveying apparatuses, for example, conveys the liquid crystal panel to the water supply stage by one conveying apparatus and conveyance of the uninspected liquid crystal panel to the inspection stage by the other conveying apparatus. It can be performed by doing so. For this reason, the time waste by the movement of a conveyance means is remarkably small.

According to the present invention, at least two conveying apparatuses having at least two pairs of holders facing each other for receiving the edges of the liquid crystal panel as a conveying means are used, in which the holders are brought closer to each other in a plane parallel to the liquid crystal panel and away from each other. Since it is made to displace, the contact area of a conveyance means and a liquid crystal panel becomes small, the waste of time according to evacuation and movement of a conveyance means becomes small, and a liquid crystal panel can be conveyed in a stable state without vacuum-sorption. .

The water stage includes a panel receiver for receiving a liquid crystal panel, the inspection stage includes a work table for receiving a liquid crystal panel, and each of the panel receiver and the work table corresponds to each portion corresponding to a pair of opposite edge portions of the liquid crystal panel. As the cutouts formed in the cutout portions, the cutout portions may have cutout portions that receive portions of the holders when they are displaced in the Z direction substantially perpendicular to the liquid crystal panel and when the holders are moved in a direction approaching each other. In this case, since the holder is accepted as a cutout when the liquid crystal panel for each stage is delivered, the liquid crystal panel can be safely transferred between each stage and the holder.

The conveying apparatus is spaced in the Z direction, and the water stage and the inspection stage may have displacement means for displacing the panel receiver and the work table in the Z direction, respectively. In this way, the liquid crystal panel can be easily moved between the holder and each stage by moving the holders in the directions closer to and farther from each other and by displacing the panel receiver and the work table in the Z direction.

The moving table includes a first slider having an opening capable of receiving a panel receiver and a work table as a slider that is moved between both stages by first driving means, and in a direction closer to and farther from each other. A pair of second sliders which are movably disposed and equally extend with the opening interposed therebetween; and an adjustment means for adjusting the position of the second slider relative to the first slider; Can be placed on the slider. In this way, by changing the space | interval of a 2nd slider, it can use for the test | inspection of a liquid crystal panel with a different size.

Each second slider is connected to the first slider by a pair of links, and each link is coupled to one of the first and second sliders by a first axis, and is formed on the link. The second shaft can be engaged with the other side of the first and second sliders by a second axis movably received in the longitudinally extending long hole. In this way, the movement of the second slider in the directions that are closer to each other and farther from each other becomes parallel.

The second drive means includes a receiving member receiving the holder displaceably in the Z direction, a driving mechanism for moving the receiving member to move the holder in a direction closer to each other and away from each other, and between the driving mechanism and the holder. It may be provided with an elastic body disposed to press the holder in a direction away from the drive mechanism. In this way, even when the panel receiver or the worktable is positioned beyond the normal position of the holder when the liquid crystal panel is delivered to each stage, the holder is displaced in response to the pressing force of the elastic body, thereby preventing damage to the liquid crystal panel. do.

The displacement means of the water stage includes two cylinder mechanisms that are stretchable in the Z direction, and have two cylinder mechanisms connected in series so that one cylinder mechanism is displaced in a substantially perpendicular direction to the liquid crystal panel by the expansion and contraction of the other cylinder mechanism. The panel receiver can be assembled to one cylinder.

The panel receiver of the water supply stage has a receiving surface inclined such that one edge side of the two opposite edges of the liquid crystal panel becomes downward and the other edge portion side is upward, the other edge of the liquid crystal panel and It may be provided with a plurality of positioning portions projecting from the receiving surface to receive other opposing edges. In this case, initial alignment of the liquid crystal panel can be performed by bringing the liquid crystal panel into contact with the positioning unit.

1 to 6, the inspection apparatus 10 is used for the lighting inspection by the human hand of the rectangular liquid crystal display body, that is, the liquid crystal panel 12. As shown in FIG. In the example shown in the figure, the liquid crystal panel 12 has the electrode group which consists of a some electrode part in each edge part corresponding to three sides among rectangular sides.

Next, in order to facilitate understanding, in any of the inspection apparatus 10 and the liquid crystal panel 12, the direction (left and right directions) of the long edge of the liquid crystal display panel, that is, the liquid crystal panel 12 is referred to as the X direction. The direction of the short edge of the liquid crystal panel 12 is called Y direction (front and rear direction), and the direction perpendicular to the liquid crystal panel 12 is called Z direction. The axes extending in the X, Y and Z directions are referred to as X, Y and Z axes, respectively.

The inspection apparatus 10 includes a frame, that is, a box 20. The front upper part of the box body 20 becomes the inclined surface part 22. The inclined surface portion 22 has an opening 24 used for the water supply of the liquid crystal panel 12, and an opening 26 used for the inspection of the liquid crystal panel 12. The openings 24 and 26 are larger than the liquid crystal panel 12 and have a spherical shape with rounded right corners, and are spaced in the X direction.

In the box 20, a part corresponding to the opening 24 is a water supply position for performing a water supply of the liquid crystal panel 12 with respect to the inspection apparatus 10, and a part corresponding to the opening 26 is a liquid crystal panel ( It is in the inspection position to check the lighting. The switch panel 28 is arranged in the inclined surface part 22. The switch panel 28 has a plurality of switches for turning on / off each device of the inspection apparatus 10.

The support body 30 which supports various apparatuses is arrange | positioned at the box 20. The support 30 is formed of a base plate 32, a rectangular base 34, and a plurality of struts 36 connecting them. The base 34 is formed of a plate material having a length dimension and a width dimension slightly shorter than that of the base plate 32, and extends the inside of the box 20 in the X direction in parallel with the base plate 32. .

In the example shown in figure, the baseplate 32 is a member which forms the inclined surface part 22 of the box 20, and therefore openings 24 and 26 are formed in the baseplate 32. As shown in FIG. However, the base plate 32 may be formed of a member separate from the member forming the inclined surface portion 22, and the base plate 32 may be combined with the member forming the inclined surface portion 22.

The probe unit 40 is disposed on the base plate 32. The probe unit 40 includes a probe base 42 in the form of a rectangular plate, and a plurality of L-shaped probe blocks 44 assembled to the probe base 42 by at least one screw member.

The probe base 42 has an opening 46 similar to the opening 26, and is coaxially attached to the outside of the base plate 32 by a plurality of screw members. The probe block 44 is divided into three block groups, each of which includes a plurality of probe blocks 44, and is arranged on the edge portion corresponding to the edge portion where the electrode group of the liquid crystal panel 12 is formed. It is.

Each probe block 44 is attached to the outside of the probe base 42 at the other end such that one end reaches the opening 46 through the opening 46. Each probe block 44 supports a plurality of probes 48 at one end thereof. Each probe 48 extends in an angle with respect to the liquid crystal panel 12.

In the probe base 42, a pair of television cameras 50 for positioning are assembled. The television camera 50 is disposed on the probe base 42 so as to photograph the alignment mark formed on the liquid crystal panel 12. The output signal of the television camera 50 is used for precise alignment of the liquid crystal panel 12 with respect to the probe unit 40.

The base 34 is the first and second conveying the water supply stage 52 for water supply of the liquid crystal panel 12, the inspection stage 54 for lighting inspection, and the liquid crystal panel 12 in an inclined state. The conveying apparatus 56 of the support is supported. The water supply stage 52 is arrange | positioned in the water supply position corresponding to the opening 24, and the test | inspection stage 54 is arrange | positioned in the test position corresponding to the opening 26. As shown in FIG.

The water stage 52 includes a flat panel receiver 58 that receives the liquid crystal panel in an inclined state, two cylinder mechanisms 60 and 62 which displace the panel receiver 58 in the Z direction, and the liquid crystal panel 12. ) Is provided with a plurality of positioning portions 64 for positioning the panel receiver 58 with respect to the panel receiver 58.

The panel receiver 58 is a panel receiving surface on which the inclined upper surface is placed on the panel, and has one or more notches 66 on each edge side in the Y direction. In the example shown in figure, one elongate cutout 66 extending along this edge is formed on one edge side in the Y direction, and two cutouts 66 are quadrangular on the other edge side in the Y direction. It is formed by deleting the right corner of. The panel receiver 58 is attached to the rod part of the cylinder mechanism 62 with the panel receiving surface inclined.

The cylinder mechanisms 60 and 62 are fluid pressure cylinder mechanisms such as air cylinders, and are connected in series so as to have the same stretching direction. One cylinder mechanism 60 is attached to the base 34 by the assembly tool 68 in the cylinder part so that the expansion-contraction direction may become Z direction. The other cylinder mechanism 62 is connected to the rod part of the cylinder mechanism 60 by the assembly tool 70 in the cylinder part so that the expansion-contraction direction may become Z direction.

The positioning unit 64 is formed on the receiving surface of the panel receiver 58. In the example shown in the figure, two positioning portions 64 are formed at one edge portion in the Y direction, and one positioning portion 64 is formed at the other edge portion in the Y direction. Each positioning portion 64 is formed in a crank shape on the inside thereof, and thus has an end portion receiving the liquid crystal panel 12 therein.

The two positioning portions 64 of one edge portion in the Y direction are spaced in the X direction with the cutout portions 66 of the corresponding one edge portion interposed therebetween, and adjacent to the liquid crystal panel 12. The two edge portions are bent in an L shape so as to contact each other. The positioning portion 64 of the other edge portion in the Y direction is formed in the center of the other edge portion between the cutout portions 66 of the other edge portion.

The inspection stage 54 includes an X stage for moving the liquid crystal panel 12 in the left and right directions (X directions), a Y stage for moving the liquid crystal panel 12 in an inclined vertical direction (Y direction), and a liquid crystal panel ( A Z stage for moving the panel 12 in a direction perpendicular to the panel (Z direction), a θ stage for rotating the liquid crystal panel 12 at an angle around the Z direction at a right angle to the panel, and the liquid crystal panel 12 A wick table 72 is provided.

The Y stage, the Z stage, the θ stage, and the work table 72 are supported to be movable on the X stage, the Y stage, the Z stage, and the θ stage, respectively, and move in the same manner according to the movement of the corresponding stage.

The inspection stage 54 tilts the worktable 72 to the base 34 and the liquid crystal panel 12 to the worktable 72 so that the work table 72 is on the opening 24 side and the X stage is on the base 34 side. It is assembled so that it can move to the base 34 in the X stage 30 so that it may be received in a photographic state.

The work table 72 is in the form of a rectangular parallelepiped box opened to the base plate 32 side to receive and support the liquid crystal panel 12. The inclined upward surface of the four edge portions forming the inner space of the work table 72 is a rectangular inclined panel receiving surface that receives the liquid crystal panel 12 in an inclined state.

The work table 72 has a groove 74 that is open on the panel receiving surface at three edge portions, and has a pair of cutout portions 76 at each edge portion in the Y direction, and further includes a liquid crystal panel 12. ) Has a pair of edge receivers 78 on one edge portion in the Y-direction to prevent the slide from slipping off from the worktable 72. In the work table 72, a backlight unit 80 is accommodated so as to illuminate the liquid crystal panel 12 from the back side (see Figs. 4 and 6 and Figs. 14 to 17).

The groove 74 is formed in a portion corresponding to the edge portion where the electrode group of the liquid crystal panel 12 is formed, and the work table 72 acts as a vacuum chuck to vacuum-adsorb the rear surface of the liquid crystal panel 12. It is connected to the vacuum source which is not shown in figure. The pair of notches 76 which are paired are spaced apart in the Y direction, and are open to the front and back sides and the side of the work table 72. The cutout 76 of the worktable 72 is formed at a position corresponding to the cutout 66 of the panel receiver 58.

The edge receiver 78 is attached to the edge part of the lower side of the panel receiving surface by a plurality of screw members, and is spaced in the X direction. For this reason, in the liquid crystal panel 12 placed on the worktable 72, even if the panel receiving surface of the worktable 72 is inclined, the lower edge contacts the edge receiver 78, and accordingly, the worktable 72 Falling from) is prevented.

The work table 72 further has a pair of stoppers 82 for positioning the liquid crystal panel 12 with respect to the work table 72 at one edge portion in the X direction and the upper edge portion, respectively. The paired stoppers 82 are attached to the corresponding edge portions of the panel receiving face by a screw member and spaced apart in the direction of the corresponding edge portions.

The work table 72 further has a pusher mechanism 84 for pressing the liquid crystal panel 12 against the stopper 82 at the other edge portion in the X direction and the lower edge portion in the Y direction. In the illustrated example, two pusher mechanisms 84 are arranged at intervals in the X direction at the center of the lower edge portion, and one pusher mechanism 84 is disposed at the center of the other edge portion in the X direction. have.

Each pusher mechanism 84 includes a reversible rotating mechanism 86 supported by the inspection stage 54 and an axis line extending in the vertical direction (Z direction) to the liquid crystal panel 12 by the rotating mechanism. And a swinging body 88 which is rotated angularly around and presses the liquid crystal panel 12.

Each rotary mechanism 86 is supported by the worktable 72 so that the output rotation shaft may extend in a Z direction. As each rotary mechanism 86, a rotary cylinder mechanism, a rotary solenoid mechanism, an electric motor, or the like can be used.

Each oscillator 88 protrudes slightly in the Z direction from an arm 88a attached to the output rotation shaft of the rotary mechanism 86 at one end and a panel receiving surface of the worktable 72 at the other end of the arm. It can be comprised by the pin 88b attached in the state to do.

Each pusher mechanism 84 is rotated by a predetermined angle in one direction, the rotation mechanism 86 is rotated a predetermined angle in one direction, pressing the liquid crystal panel 12 to the corresponding stopper 82, When the rotation mechanism 86 reverses the predetermined angle, the swinging body 88 reverses the predetermined angle, thereby releasing the pressing of the liquid crystal panel 12 to the corresponding stopper 82.

The base 34 supports a pair of long and thin support plates 90 for the both conveying apparatuses 56. Both supporting plates 90 are spaced apart in the Y direction with both stages 52 and 54 interposed therebetween, and the width direction becomes the Z direction and the base plate 90 extends in parallel in the X direction from the water supply position to the inspection position ( 34) is assembled.

On the upper part of each support plate 90, a pair of elongate rail bases 92 are attached at intervals in the Z direction. All the rail bases 92 extend in parallel in the X direction. Each rail base 92 is provided with a rail 94 extending in the X direction. The pair of rails 94 far from the base 34 is used to receive the first conveying device 56 away from the base 34, and the pair of rails 94 close to the base 34 are supported by the base ( It is used to receive the second conveying apparatus 56 close to 34).

As shown in FIGS. 8-16, each conveying apparatus 56 is a U-shaped 1st slider 96 which has an opening which can receive the panel receiver 58 and the worktable 72, and A pair of elongated second sliders 98 supported at intervals in the Y direction at one slider 96, a first drive mechanism 100 for reciprocating the first sliders 96, A plurality of holders 102 disposed at intervals in the X direction on each of the second sliders 98, and a plurality of second holders for displacing the holders 102 in the Y direction in a plane parallel to the liquid crystal panel 12; The drive mechanism 104 is provided.

The first slider 96 is supported by the plurality of guides 106 so as to be movable in the X direction, and the stages 52 and 54 by the first driving mechanism 100. Reciprocate the liver. The second slider 98 extends in parallel in the X direction with the water stage 52 and the inspection stage 54 interposed therebetween. Both sliders 96 and 98 work together with the guide 106 as a moving table. However, the second slider 98 may be omitted, and the holder 102 may be disposed on the first slider 96.

Each of the first drive mechanisms 100 is wound around a pair of pulleys 110 and both pulleys 110 that are rotatably disposed around the Z axis at both ends of one rail base 92. An endless belt 112 and a drive source 114 for rotating one pulley 110 are provided, and the endless belt 112 is connected to the first slider 96.

Each drive mechanism 100 moves the 1st slider 96 from a water supply position to a test | inspection position by the electrostatic discharge of the drive source 114, and reverses the drive source 114, and the 1st slider ( Move 96) from the test position to the water position. The timing belt can be used as the endless belt 112, in which case the timing pulley is used as the pulley 110.

As shown in Fig. 6, each holder 102 has a recess for receiving an edge of the liquid crystal panel, and the recess 102 has a recess facing the inside by a corresponding second drive mechanism 104. It is supported by the slider 98 of 2. Each holder 102 is held at a position corresponding to the cutouts 66 and 76 of the panel receiver 58 and the work table 72. The holder 102 disposed on one second slider 98 and the holder 102 disposed on the second slider 98 oppose the recessed portion.

In the illustrated example, each of the second drive mechanisms 104 includes a fluid pressure cylinder mechanism such as an air cylinder as a drive source, and is mounted to the second slider 98 in the cylinder portion, and is also a holder. 102 is attached to the rod part 104b by an assembly tool.

As shown in FIG. 6, the assembly tool extends in the Z direction from the assembly block 116 attached to the rod portion 104b of the second drive mechanism 104 and the block 116 in the Z direction, thereby extending the holder 102. A shaft 118 that is displaceably displaced in the direction, and an elastic body 120 disposed between the block 116 and the holder 102 to press the holder 102 in a direction away from the rod portion 104b.

The shaft 118 has a flange portion at the end opposite to the block 116 that prevents the holder 102 from falling off. The elastic body 120 is the compression coil spring arrange | positioned at the shaft 118 in the example shown in figure, but may be another elastic body, such as rubber | gum. Each holder 102 is provided with a cushioning material 122 on the inner side of the U-shape for preventing the liquid crystal panel 12 from being damaged.

Next, with reference to FIGS. 8-15, the operation | movement of the water supply stage 52 and the conveying apparatus 56 is demonstrated.

At the time of waiting, as shown in FIG. 8, for example, each conveying apparatus 56 is moved to the water supply position, and the holder 102 obstructs the water supply of the liquid crystal panel 12 with respect to the panel receiver 58. FIG. Retreat to the position not to. The water supply stage 52 extends both the cylinder mechanisms 60 and moves the panel receiver 58 in the Z direction of the holder 102 of the first conveying apparatus 56 (on the high side) far from the base 34. It is displaced to a position corresponding to the position (height position) of.

In the liquid crystal panel 12 to be inspected, the water stage 52 and the conveying apparatus 56 are disposed in the panel receiver 58 of the water stage 52 by a human hand in the above state. At this time, the liquid crystal panel 12 is positioned with respect to the panel receiver 58 by being fitted in the space formed by the positioning unit 64.

Subsequently, the first conveying apparatus 56 is operated to move the holder 102 inward (in a direction toward each other) by the second driving mechanism 104. Accordingly, as shown in FIG. 9, the liquid crystal panel 12 receives the recessed portion of the holder 102 of the first conveying device 56 in the edge portion in the Y direction. At this time, since each part 102 is received in the notch 66 of the panel receiver 58, the holder 102 receives the edge part of the liquid crystal panel 12 safely and reliably.

Next, as shown in FIG. 10, the cylinder mechanism 62 is contracted so that the panel receiver 58 is positioned at the holder 102 of the second conveying device 56 close to the base 34 (on the lower side). Is lowered along the Z axis. Thereby, the liquid crystal panel 12 is guided to the 1st conveyance apparatus 56, and is hold | maintained in the state inclined to the conveyance apparatus 56. As shown in FIG.

Subsequently, the first conveying apparatus 56 is moved toward the inspection position by the corresponding drive mechanism 100. Thereby, as shown in FIG. 11, the 2nd conveying apparatus 56 remains in a water supply position. Moreover, the liquid crystal panel 12 is conveyed in the state which made the lower edge contact the inner surface of the recessed part of the lower holder 102. As shown in FIG. As a result, the liquid crystal panel 12 is maintained in a state of receiving initial alignment.

In the uninspected liquid crystal panel conveyed to the inspection position by the first conveying apparatus 56, as described later, the work table 72 of the inspection stage 54 is raised along the Z axis line, When the holder 102 of the conveying apparatus 56 is retracted to a position which does not interfere with the lighting inspection of the liquid crystal panel, the holder 102 of the conveying apparatus 56 is guided from the first conveying apparatus 56 to the inspection stage 54 to receive the illuminating inspection. The liquid crystal panel after the inspection is received by the holder 12 of the first conveying apparatus 56.

While the uninspected liquid crystal panel is conveyed to the inspection position by the first conveying device 56 and the liquid crystal panel is undergoing lighting inspection, the new liquid crystal panel 12 of the uninspected liquid crystal stage is shown in FIG. Placed in the panel receiver 58 of 52, the holder 102 of the second conveying device 56 is advanced as shown in FIG. 12, and then the cylinder mechanism 60 is contracted as shown in FIG. do. Thereby, the new liquid crystal panel 12 is taken in by the 2nd conveyance apparatus 56 as shown in FIG.

Subsequently, the inspected liquid crystal panel is returned to the water supply position by the first conveying apparatus 56, and a new liquid crystal panel is conveyed to the inspecting position by the second conveying apparatus 56.

When the inspected liquid crystal panel is returned to the water supply position, the panel receiver 58 is first raised along the Z axis to the height position of the holder 102 of the first transport apparatus 56 by both cylinder mechanisms 60 and 62. Subsequently, the holder 102 of the first conveying apparatus 56 is retracted to a position which does not disturb the number of liquid crystal panels with respect to the panel receiver 58. Accordingly, the inspected liquid crystal panel is led to the panel receiver 58.

Subsequently, the inspected liquid crystal panel on the panel receiver 58 is removed from the panel receiver 58, and a new liquid crystal panel that is not inspected is placed in the panel receiver 58. The liquid crystal panel at this time is also performed by human hands.

The liquid crystal panel conveyed to the test | inspection position by the 2nd conveying apparatus 56 is guided to the test | inspection stage 54 similarly to the above, receives a light test, and returns to a 2nd conveying apparatus 56 after that. .

Subsequently, the conveyance of the inspection completed liquid crystal panel by one conveyance apparatus and the conveyance of the uninspected liquid crystal panel by the other conveyance apparatus are repeated synchronously, and lighting test of a liquid crystal panel is performed in the meantime.

As described above, the conveyance of the liquid crystal panel to the water supply stage by the one conveying device and the conveyance of the uninspected liquid crystal panel to the inspection stage by the other conveying device are performed in parallel to the movement of the conveying device. Significantly less time wasted. The arrangement of the untested liquid crystal panel to the panel receiver 58 and the removal of the inspected liquid crystal panel from the panel receiver 58 may be mechanically performed.

Next, with reference to FIGS. 14-17, the number of liquid crystal panels between the inspection stage 54 and the conveying apparatus 56 is demonstrated.

In the state where the conveying apparatus 56 is moved to the inspection position, the uninspected liquid crystal panel 12 is, as shown in FIG. 14, the height position of the work table 72 in the Z direction by the conveying apparatus 56. It is kept more upward.

In the above state, as shown in FIG. 15, the work table 72 of the inspection stage 54 until the panel receiving surface of the work table 72 is at the height position of the holder 102 in the Z direction. It rises along Z-axis by Z stage, and vacuum-absorbs the liquid crystal panel 12. FIG.

Next, as shown in FIG. 16, the holder 102 of the conveying apparatus 56 is retracted to the position which does not prevent lighting inspection. Accordingly, the liquid crystal panel 12 is completely led to the work table 72.

Subsequently, the alignment mark formed on the liquid crystal panel 12 is photographed by the alignment television camera 50, and the work table 72 checks the stage so that the alignment mark becomes a predetermined coordinate position based on the output signal. Displaced by each stage of 54. As a result, precise alignment of the liquid crystal panel 12 with respect to the probe unit 40 is performed.

Then, as shown in FIG. 17, the work table 72 is further raised along the Z axis by the Z stage of the inspection stage 54, whereby the electrode portion of the liquid crystal panel 12 probes the probe unit 40. It is pressed by 48.

Subsequently, the backlight unit 80 is energized while the backlight unit 80 is turned on. Accordingly, since the liquid crystal panel 12 is turned on in a predetermined pattern, it is determined by confirming whether the liquid crystal panel 12 is good or not in the lighting state. The government of the lighting state is confirmed by looking at the eyes of an operator.

When the lighting test is finished, the work table 72 is lowered along the Z axis line until the panel receiving surface of the work table 72 is at the height position of the holder 102 in the Z direction, and the holder 102 is advanced. The liquid crystal panel is opened from vacuum suction of the work table, and then the work table is further lowered along the Z axis. Accordingly, the liquid crystal panel 12 is taken in by the holder 102.

As described above, when the work table 72 and the holder 102 are moved relatively, a part of each holder 102 is received by the cutout portion 76 formed in the work table 72, so that the work table ( The relative movement between the holder 72 and the holder 102 is not disturbed, and the number of liquid crystal panels between both is reliably performed.

Next, with reference to FIGS. 7 and 18, the alignment of the liquid crystal panel 12 on the work table 72 by the pusher mechanism 84, and the liquid crystal panel from the holder 102 to the work table 72. The water supply of (12) will be described in detail.

First, as shown in FIG. 18A, the worktable 72 is held in a state where the liquid crystal panel 12 is held above the height position of the worktable 72 in the Z direction by the holder 102. It rises until it comes in contact with this liquid crystal panel 12.

Next, as shown in FIG. 18A, each pusher mechanism 84 operates to displace the liquid crystal panel 12 toward the stopper 82. That is, the liquid crystal panel 12 is moved from the position shown by the solid line in FIG. 7 to the position shown by the dashed-dotted line in the figure, and two adjacent edges of the liquid crystal panel 12 are in contact with the stopper 82.

As a result of the above, when the liquid crystal panel is transferred from the panel receiver 58 of the water supply stage 54 to the holder 102, when the liquid crystal panel is transferred by the transfer device 56, and the work table 72 from the holder 102. Even when the position of the liquid crystal panel is slightly displaced at the time of delivery of the liquid crystal panel, the liquid crystal panel 12 is aligned so that the alignment mark enters the field of view of the alignment television camera 50.

Subsequently, the worktable 72 is further raised along the Z axis as shown in Fig. 18C. As a result, the liquid crystal panel 12 is received by the work table 72.

Subsequently, as shown in FIG. 18D, the work table 72 is raised to a position where the holder 102 is raised to resist the force of the elastic body 120, and the liquid crystal panel 12 is in the state. It is vacuum-adsorbed to the table 72. Accordingly, the liquid crystal panel 12 is vacuum-adsorbed to the work table 72 while being pressed against the work table 72, so that the liquid crystal panel 12 is reliably supported by the work table 72.

Then, as shown in Fig. 18E, the worktable 72 is lowered slightly along the Z axis line, and as shown in Fig. 18F, the holder 102 retreats to a position where the lighting inspection is not disturbed. do.

When guiding the inspected liquid crystal panel from the work table 72 to the holder 102, the operation opposite to the above is performed in the order of Figs. 18 (F), (C), (B) and (A). In this case, when the pusher mechanism 84 returns to its original state, the liquid crystal panel is displaced with respect to the worktable 72 and the holder 102 due to the inclination of the upper surface of the worktable 72. The panel contacts its lower edge to the inner side of the recess of the lower holder 102.

The holder 102 is advanced or retracted in contact with the liquid crystal panel 12. However, at this time, the buffer member 122 disposed in the recessed portion of each holder 102 prevents scratches from being formed in the liquid crystal panel 12.

Then, the second slider 98 is supported on the first slider 96 so as to be movable in a direction (Y direction) closer to each other and farther from each other, and the holder 102 is mounted on the second slider 98. In addition, the second slider 98 may be moved close to each other by a driving mechanism and synchronized in a direction away from each other, thereby holding and releasing the liquid crystal panel by the holder. May be adjusted according to the size of the liquid crystal panel to be inspected.

The pusher mechanism 84 continues to operate until the lighting inspection of the liquid crystal panel is finished even at an early stage. Therefore, the liquid crystal panel 12 is pressed by the stopper 82. For this reason, even if the ratio of the area of the adsorption surface by the groove | channel 74 with respect to the size of a liquid crystal panel is small, a liquid crystal panel can be kept stable and a large liquid crystal panel can be examined correctly. In addition, when the liquid crystal panel is pressed against the probe unit, displacement of the liquid crystal panel due to the pressing force, unbalance force, and the like acting on the liquid crystal panel is prevented.

In the conveying apparatus 130 shown to FIGS. 19-21, the 2nd slider 98 is arrange | positioned so that the 1st slider 96 can move closer to each other, and to move away from each other. The upper surface of the first slider 96 is provided with a rail 132 extending in the Y direction, and the second slider 98 has a plurality of guides received by the rail 132 so as to be movable in the longitudinal direction thereof. 134 is formed.

The second slider 98 is supported by the rails 132 and the guide 134 in the cantilever shape of the first slider 96. For this reason, each 2nd slider 98 is further connected to the 1st slider 96 by the link 136 in each of two places spaced in the X direction.

Each link 136 has a long hole 138 extending in the longitudinal direction of the link. Each link 136 is coupled to a second slider 98 by a first shaft 140 and a second shaft 142 movably received in the longitudinal direction by the long hole 138. It is coupled to the first slider 96 by the.

When both the second sliders 98 are farthest away, as shown in FIG. 19, each link 136 extends in the X direction, and the second axis 142 is the first axis 140. Is approaching the most.

However, as the second slider 98 is approached gradually, the link 136 may gradually change its position relative to the long hole 138 such that the second axis 142 is gradually away from the first axis 140. As shown in FIG. 21, the angle is in the X direction.

For this reason, the conveying apparatus 130 can adjust the space | interval of the 2nd slider 98 according to the magnitude | size of the liquid crystal panel 12 to test | inspect. The position of the second slider 98 with respect to the first slider 96 can be releasably held by the plurality of screw members 144. Each screw member 144 is screwed with the 2nd slider 98, and the tip is made to contact the rail 132. As shown in FIG.

Instead of coupling each link 136 to the second slider 98 by the first axis 140 and to the first slider 96 by the second axis 142, The first shaft 140 may be coupled to the first slider 96 and the second shaft 142 may be coupled to the second slider 98.

The present invention is not limited to the embodiment described above. For example, the present invention uses not only a visual inspection apparatus for inspecting the liquid crystal panel by looking at the eyes of an operator but also a suitable imaging means such as a television camera. The present invention can also be applied to an automatic inspection device that checks by a computer based on the output signal. Instead of the cylinder mechanism as the drive mechanism, a plunger mechanism using a solenoid may be used.

The present invention can also be applied not only to a device for inspecting a liquid crystal panel in an inclined state, but also to a device for inspecting a liquid crystal panel in a horizontal or vertical state. The present invention can also be applied to a liquid crystal panel of the present invention. Furthermore, the present invention can also be applied to an apparatus for inspecting a liquid crystal panel using electrodes provided on one side of a polygon.

According to the present invention, at least two conveying apparatuses having at least two pairs of holders facing each other for receiving the edges of the liquid crystal panel as a conveying means are used, in which the holders are brought closer to each other in a plane parallel to the liquid crystal panel and away from each other. Since it is made to displace, the contact area of a conveyance means and a liquid crystal panel becomes small, the waste of time according to evacuation and movement of a conveyance means becomes small, and a liquid crystal panel can be conveyed in a stable state without vacuum-sorption. .

Claims (6)

A water stage arranged at a water position of the liquid crystal panel, An inspection stage arranged at an inspection position away from the water supply stage, At least two conveying apparatuses for conveying the liquid crystal panel with respect to both stages, Each conveying apparatus comprises at least one pair of holders having a movable table capable of reciprocating between both stages, first driving means for reciprocating the movable platform, and recesses for receiving edges of the liquid crystal panel. An inspection of the liquid crystal panel, comprising: holders arranged at intervals on the movable table with the main parts facing each other, and second driving means for displacing the holders in a direction parallel to and far from each other in a plane parallel to the liquid crystal panel; Device. The liquid crystal panel according to claim 1, wherein the water supply stage includes a panel receiver receiving the liquid crystal panel, the inspection stage includes a work table receiving the liquid crystal panel, and each of the panel receiver and the work table faces the liquid crystal panel. Cutouts formed in respective portions corresponding to the pair of edge portions, each having a cutout portion which receives a portion of the holder when they are displaced in a direction substantially perpendicular to the liquid crystal panel and when the holders are moved in a direction approaching each other; , Inspection device. 3. The conveying apparatus according to claim 2, wherein the conveying apparatus is spaced in a direction substantially perpendicular to the liquid crystal panel, and the water stage and the inspection stage respectively include displacement means for displacing the panel receiver and the work table in a direction substantially perpendicular to the liquid crystal panel. Eggplant, inspection device. The said movable stand is an opening which can receive the said panel receiver and the said work table as a slider which moves between the said stages by the said 1st drive means. The branch has a first slider, a pair of second sliders arranged to be movable in a direction closer to and farther from each other, and extending in a balanced manner with the opening interposed therebetween, and the first slider. And adjusting means for adjusting the position of the second slider relative to the holder, wherein the holder is disposed on the second slider. 5. The method of claim 4, wherein each second slider is coupled to the first slider by a pair of links, each link coupled to one of the first and second sliders by a first axis. And, at the same time, coupled to the other side of the first and second sliders by a second axis formed in the link and movably received in the long hole extending in the longitudinal direction of the link. 4. The method of claim 2 or 3, wherein the second driving means comprises: a receiving member receiving the holder so as to be displaceable in a direction substantially perpendicular to the liquid crystal panel, and the holder so as to move the holder closer to each other and away from each other. And a drive mechanism for moving the receiving member, and an elastic body disposed between the drive mechanism and the holder to press the holder in a direction away from the drive mechanism.