KR101839214B1 - Probe card transferring apparatus, probe card transferring method and probe apparatus - Google Patents

Abstract

Provided is a probe card transporting apparatus of a structure which is simple in configuration and capable of saving space and in which interference with other members is less likely to occur. The transport apparatus 50 includes a drive unit 70 having a movable body 70B for slidingly moving the first plate 63, the second plate 65, the third plate 67 and the fourth plate 69 Respectively. When the movable body 70B is moved in the F direction while the movable body 70B is connected to the first plate 63 by the joint 71, the first plate 63 is moved in the same direction 70B relative to the second plate 65 with the same amount of movement. On the other hand, when the movable body 70B is moved in the F direction while the movable body 70B is connected to the third plate 67 by the joint 71, the third plate 67 is moved in the same direction Moves relative to the second plate (65) at the same amount of movement as the movement amount of the body (70B).

Description

[0001] PROBE CARD TRANSFERRING APPARATUS, PROBE CARD TRANSFERRING METHOD AND PROBE APPARATUS [0002]

The present invention relates to a probe card transporting apparatus, a probe card transporting method, and a probe apparatus for transporting a probe card used when inspecting a device formed on a substrate such as a semiconductor wafer.

In the manufacturing process of the semiconductor device, probe inspection is performed for evaluating the electrical characteristics of the semiconductor device. In the probe inspection, a probe is brought into contact with an electrode of a semiconductor device formed on a semiconductor substrate, an electrical signal is input to each semiconductor device, and an electrical signal is output to the semiconductor device.

A probe apparatus used for probe inspection includes a stage (stacking table) holding a substrate to be inspected on which a semiconductor device to be inspected is formed and capable of being horizontally, vertically, and rotatable, a stage And an alignment device for precisely contacting the probes with the electrodes of the semiconductor device. Alignment is performed by moving the stage on which the inspection target substrate is mounted in the X, Y, Z, and θ directions. After the alignment, the probes of the semiconductor wafer and the probe card are accurately brought into contact with each other using the stage, .

The probe card needs to be replaced in accordance with the type of the semiconductor wafer. Therefore, the probe apparatus is provided with a mechanism for transferring the probe card between the outside of the apparatus and the fixed section (insert ring) of the probe card installed in the examination chamber. As a transport mechanism of this kind of probe card, for example, the following has been proposed.

In Patent Document 1, a probe card holder having a probe card mounted thereon is brought into the tray from the outside to the inside of the probe apparatus, and then transferred to a support provided around the stage. Then, the stage is moved to a position immediately below the mounting position of the probe card holder And then moves up to the mounting position.

Patent Document 2 discloses a transport mechanism having a first drive portion for horizontally moving the probe card holder to the outside of the probe device and a second drive portion for horizontally moving the probe card holder to the inside of the probe device. The transport mechanism of Patent Document 2 has a drawback that the structure is complicated and the number of parts increases because two transporting portions are required for transporting the probe card holder. In addition, since a mechanism for pivoting the support portion supporting the probe card holder between the horizontal state and the inclined state is also required, miniaturization is difficult and there is a problem that the transport mechanism can not be accommodated in the probe device.

Patent Document 3 discloses a mechanism for transferring the probe card holder to the mounting position by moving the probe card holder to the support portion around the stage by the slide conveying mechanism and then raising the support portion. In addition to the slide conveying mechanism, the conveying mechanism of Patent Document 3 requires a mechanism for pivoting the support portion supporting the probe card holder between the horizontal state and the inclined state, so that the structure is complicated, the miniaturization is difficult, There was a problem that it did not occur.

Patent Document 4 discloses a transport mechanism for supporting a probe card holder on the uppermost portion of a plurality of plates linearly moving in a multi-stage, comprising a plurality of linear driving portions for linearly driving a plurality of plates, and a rotation driving portion for rotating the plurality of plates . The transport mechanism of Patent Document 4 requires two driving parts for stretching and shrinking a plurality of plates and a driving part for rotating them, which is complicated in structure and has a drawback that the number of parts is increased. In addition, since it is accompanied by a rotating operation during conveyance, breakage or the like is likely to occur due to interference with other members. Further, when the probe card is supplied to the transport mechanism, it is necessary to arrange the probe card in a state in which the direction of the probe card is inverted by 180 degrees from the direction of the inspection.

Japanese Patent Laid-Open No. 2001-24039 (FIG. 1, etc.) Korean Patent No. 10/847577 (FIG. 5, etc.) Korean Patent No. 10/878211 (claims and the like) Korean Patent No. 10/1503143 (claims and the like)

SUMMARY OF THE INVENTION An object of the present invention is to provide a probe card transporting apparatus of a structure which is simple in construction and capable of saving space and in which interference with other members is less likely to occur.

The probe card transporting apparatus of the present invention carries out loading and unloading of the probe card mounted on the probe card holder with respect to the inspection chamber of the probe apparatus.

The probe card transporting device includes:

A plurality of plates stacked vertically and slidable in the horizontal direction,

And a single driving unit that has a movable body capable of linear reciprocating motion and slides the plurality of plates.

In the probe card transporting apparatus of the present invention,

Wherein the plurality of plates comprises:

A holding plate having a holding portion for holding the probe card mounted on the probe card holder,

And a driving source plate on which the driving unit is mounted,

The driving unit slides the holding plate in a direction close to the test chamber and in a direction away from the test chamber.

In the probe card transporting apparatus of the present invention, the plurality of plates may include a first driven plate disposed below the drive source plate.

In this case, the movable body may be provided with a connection state in which the first follower plate is interlocked with the movable body, and a connection means that switches the non-connection state in which the first follower plate is not interlocked with the movable body. The driving force transmitting means may include a first driving force transmitting means for transmitting the driving force from the driving portion to the plate further downward from the first driven plate. The first driving force transmitting means may include a pair of pulleys disposed on the first driven plate and a belt rotatably disposed on the pair of pulleys, And another portion may be connected to the lower plate.

Further, in the probe card transporting apparatus of the present invention, the plurality of plates may include a second driven plate disposed above the drive source plate and below the holding plate.

In this case, the movable body may be provided with a connection state in which the second follower plate is interlocked with the movable body, and a connection means that switches the non-connection state in which the second follower plate is not interlocked with the movable body. Further, a second driving force transmitting means for transmitting the driving force from the driving section to the holding plate from the second driven plate may be provided. The second driving force transmitting means may have a pair of pulleys disposed on the second driven plate and a belt rotatably disposed on the pair of pulleys, And another portion may be connected to the holding plate.

Further, in the probe card transporting apparatus of the present invention,

A first driven plate disposed below the driving source plate,

And a second driven plate disposed above the driving source plate and below the holding plate.

In this case, a first connecting state in which the first driven plate is interlocked with the movable body and the second driven plate is not interlocked with the first driven plate, and a second connected state in which the first driven plate is not interlocked with the movable body, And a connection means for switching a second connection state in which the plates are interlocked with each other.

A first driving force transmitting means for transmitting the driving force from the driving portion to the plate further downward from the first driven plate;

And a second driving force transmitting means for transmitting the force from the second driven plate to the holding plate. In this case, the first driving force transmitting means may have a pair of pulleys disposed on the first driven plate, and a belt rotatably disposed on the pair of pulleys, And the other part may be connected to the lower plate. The second driving force transmitting means may have a pair of pulleys disposed on the second driven plate and a belt rotatably disposed on the pair of pulleys, And another portion may be connected to the holding plate.

Further, in the first connection state, the driving plate may have fixing means for fixing the second driven plate, and in the second connected state, the first driven plate is fixed to the driving source plate And may be provided with fixing means.

The probe apparatus of the present invention includes any one of the above probe card transport apparatuses.

The probe card transporting method of the present invention transports the probe card by any one of the above probe card transporting apparatuses.

In the probe card transporting apparatus of the present invention, since a plurality of plates can be slid by a single driving unit, the apparatus configuration can be simplified and space can be saved. In addition, since it does not involve a swinging operation or a rotating operation during transportation, interference with other members is difficult to occur, and mounting mistakes due to misdirection in the direction of the probe card can not occur. Therefore, by using the probe card transporting apparatus of the present invention, highly reliable probe inspection becomes possible.

1 is a cross-sectional view showing a schematic configuration of a probe apparatus according to an embodiment of the present invention;
Fig. 2 is a plan view of a test chamber in the probe apparatus of Fig. 1; Fig.
3 is a side view of a test chamber in the probe apparatus of FIG.
4 is a perspective view showing a state of a transfer device;
5 is a perspective view showing another state of the transport apparatus;
6 is a view showing an example of a connecting means (joint) for connecting a driving part and a plate.
7 is a view for explaining the operation of a joint;
8 is a view for explaining the operation of a joint;
9 is an explanatory view showing another example of a joint;
10 is an explanatory view showing another example of a joint;
11 is a block diagram showing the hardware configuration of the control unit;
12 is an explanatory view showing an initial state of the transport apparatus;
13 is an explanatory diagram showing a state in which the holding member of the transfer device is projected to the outside of the apparatus.
14 is an explanatory view showing a state in which a holding member of a transfer device is advanced into a test chamber;

Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 is a cross-sectional view showing a schematic configuration of a probe apparatus 100 according to an embodiment of the present invention. The probe apparatus 100 according to the present embodiment is to inspect the electrical characteristics of a device (not shown) such as a semiconductor device formed on a semiconductor wafer (hereinafter, simply referred to as " wafer "

The probe apparatus 100 includes a loader chamber 1 for forming a transfer area for transferring a wafer W, a test chamber 2 for accommodating the wafer W, A test head 3 for sending an electric signal to the device and receiving a response signal from the device and a control unit 4 for controlling each component of these inspection apparatuses 100.

The test chamber 2 has a stage 11 capable of moving in the X, Y, Z and θ directions in a state in which the wafer W is loaded and an opening 13a formed in the substantially center of the head plate 13 above the stage 11, And a probe card 23 detachably held by the probe card holder 21 with respect to the insert ring 15. The insert ring 15 is fixed to the insert ring 15, The probe card 23 has a plurality of probes (contactors) 23a. The probe card 23 is electrically connected to the test head 3 while being held by the insert ring 15. [

Although not shown, the test chamber 2 has an alignment mechanism for aligning the plurality of probes 23a and electrode pads of a plurality of devices formed on the wafer W, and the like.

The stage 11 is provided with an internal transfer mechanism 30 for receiving the probe card 23 mounted on the probe card holder 21 from the outside through a transfer device to be described later and attaching the probe card 23 to the insert ring 15, .

Fig. 2 is a plan view of the test chamber 2 in the probe apparatus 100 of Fig. 1, and Fig. 3 is a side view thereof. 2 and 3 show a state in which the test head 3 (see FIG. 1) is removed. A drive shaft 31 for turning the test head 3 and a test head drive unit 32 incorporating a drive motor (not shown) for rotating the drive shaft 31 are provided on the side of the test chamber 2 . A conveyance device 50 for conveying the probe card 23 mounted on the probe card holder 21 is accommodated in the housing 33 below the drive shaft 31 and the test head drive portion 32.

As shown in Fig. 3, the carrying apparatus 50 of the present embodiment is provided on a base 51 fixed to the lower side of the driving shaft 31 of the test head driving unit 32. As shown in Fig. This transport apparatus 50 transports the probe card 23 under the control of the control unit 4. [ When the probe card 23 is attached to the insert ring 15, the transfer device 50 transfers the probe card 23 from the outside to the inside of the test chamber 2, and the internal transfer mechanism 30 transfers the probe card 23 to the transfer device 50 to the mounting portion of the insert ring 15. The insert ring (15) fixes the probe card (23) carried by the internal transfer mechanism (30). When the probe card 23 is removed from the insert ring 15, the insert ring 15 is moved from the insert ring 15 to the transfer device 50 by the internal transfer mechanism 30, And the conveying device 50 conveys the probe card 23 to the outside of the examination room 2.

Fig. 4 is a perspective view showing a state of the transport apparatus 50, and Fig. 5 is a perspective view showing another state. The transporting apparatus 50 mainly comprises five plates 60 capable of sliding in the horizontal direction, a driving unit 70 as a driving source for driving the plates 60, A transmitting means for transmitting the driving force from the driving unit 70 to the separated plate 60, and a guide means for guiding the linear movement of each plate.

<Plate>

The transport apparatus 50 has a structure in which five plates 60 are laminated on a base 51. That is, the transport apparatus 50 includes a base plate 61 supported by the base 51, a first plate 63 slidably mounted on the base plate 61 in a horizontal direction, a first plate 63, A third plate 67 slidably mounted on the second plate 65 so as to be slidable in the horizontal direction and a second plate 65 slidably mounted on the third plate 67 in a horizontal direction And a fourth plate (69) slidably mounted. Here, the second plate 65 is a driving source plate having a driving unit 70 as a driving source for driving the plate 60. The first plate 63, the third plate 67, and the fourth plate 69 are driven plates that slide by the driving of the driving unit 70. The fourth plate 69 is a holding plate (holding member) for holding the probe card holder 21 on which the probe card 23 is mounted.

<Driving Section>

The transport apparatus 50 is provided with a drive unit 70 for slidingly moving the first plate 63, the second plate 65, the third plate 67 and the fourth plate 69. The driving unit 70 includes a long hollow member 70A and a movable member 70B guided by the hollow member 70A and reciprocating linearly. As the driving unit 70, for example, a rodless cylinder or the like can be used. The conveying device 50 of the present embodiment performs the sliding movement of the first plate 63 to the fourth plate 69 by the single drive source driving unit 70. [ The fourth plate 69 supporting the probe card holder 21 on which the probe card 23 is mounted can be advanced and retreated in the opposite direction by a single drive source so that the drive mechanism can be simplified . That is, the conveying device 50 performs a sliding operation for advancing / retreating the fourth plate 69 toward the test chamber 2 with reference to the base 51 by a single drive source driving unit 70, 2) to the opposite side (outer side). In the following description of the carrying apparatus, the probe card holder 21 on which the probe card 23 is mounted may be simply referred to as &quot; probe card holder 21 &quot;.

The driving unit 70 is provided on the second plate 65 located at the center of the five plates 60 stacked in the vertical direction. The movable member 70B of the driving unit 70 linearly reciprocates in the direction indicated by an arrow in Figs. 4 and 5 under the control of the control unit 4. [ This direction is the carrying direction in which the probe card holder 21 is carried into the test chamber 2 by the carrying device 50 or is taken out from the examination room 2. [ 4 and 5, the moving direction when the fourth plate 69 advances toward the examination room 2 side is indicated by F and the fourth plate 69 is retracted from the examination room 2 The direction of movement at the time indicated by reference character B is shown. The moving distance of the movable body 70B can be adjusted by, for example, a stopper (not shown).

<Connection Means>

The movable member 70B of the driving unit 70 is connected to the first plate 63 and the third plate 67 which are located at the upper and lower positions alternately and to the state of non- (71).

The relative position between the movable body 70B and the first plate 63 is fixed by the joint 71 so that the movable body 70B and the first plate 63 are connected to each other, The first plate 63 is interlocked. That is, when the movable body 70B is moved in the F direction while the movable body 70B is connected to the first plate 63 by the joint 71, the first plate 63 is moved in the same direction Moves relative to the second plate (65) at the same amount of movement as the movement amount of the body (70B).

The relative position between the movable body 70B and the third plate 67 is fixed by the joint 71 so that the movable body 70B and the third plate 67 are connected to each other, The third plate 67 is interlocked. That is, when the movable body 70B is moved in the F direction while the movable body 70B is connected to the third plate 67 by the joint 71, the third plate 67 is moved in the same direction Moves relative to the second plate (65) at the same amount of movement as the movement amount of the body (70B).

The joint 71 is displaced in the vertical direction as shown in Figs. 6 to 8 and the hole portion 63a of the first plate 63 and the hole portion 67a of the third plate 67, (Movable pin) 71A that can be alternately inserted into the insertion member (movable pin) 71A. The insertion member (movable pin) 71A is capable of being pivotable toward the first plate 63 downward through the long opening 65a formed in the moving direction of the movable body 70B in the second plate 65 Consists of. 7 shows a state in which the movable body 70B and the first plate 63 are connected to each other and Fig. 8 shows a state in which the movable body 70B and the third plate 67 are connected by the joint 71 Respectively.

Another example of the joint 71 is shown in Fig. The joint 71 shown in Fig. 9 is displaced in the vertical direction in place of the insertion member (movable pin) 71A and the taper And has a fitting member 71B that can be fitted to the concave portions 63b and 67b of the shape.

Another example of the joint 71 is shown in Fig. The joint 71 shown in Fig. 10 has two fan-shaped rotary members 71C1 and 71C2 that rotate in synchronism with each other. The rotating member 71C1 is switched to a state in which a part of the rotating member 71C1 is inserted into the hole portion (or concave portion) 63c of the first plate 63 by rotation and into a non-inserted state. Likewise, the rotating member 71C2 is switched to a state in which a part of the rotating member 71C2 is inserted into the hole (or concave) portion 67c of the third plate 67 and into a non-inserted state by rotation.

The drive of the joint 71 having the above-described structure is not shown, but a cylinder, a motor, or the like can be used, for example. Instead of the single joint 71, the joint 71 may be provided independently of the first plate 63 and the third plate 67, respectively. That is, a joint for switching the state of connection to the first plate 63 and a state of non-connection is provided, and a joint for switching the state of connection to the third plate 67 and a state of non- .

<Delivery Means>

The first plate 63 is provided with a lower transmitting means 73 as driving force transmitting means for transmitting the driving force from the driving unit 70 to the base plate 61 through the first plate 63. The lower transmission means 73 includes a pair of pulleys 74 and a belt 75. A part of the belt 75 of the lower transfer means 73 and the base plate 61 are fixed by a connecting member 75a. Further, another part of the belt 75 of the lower transfer means 73 and the second plate 65 are fixed by the connecting member 75b.

The third plate 67 is provided with an upper transmitting means 76 as a driving force transmitting means for transmitting the driving force from the driving section 70 to the fourth plate 69 through the third plate 67. The upper transfer means 76 includes a pair of pulleys 77 and a belt 78. The pair of pulleys 77 and the belt 78 are provided at the right and left ends of the third plate 67, respectively. A part of the belt 78 of the upper transfer means 76 and the fourth plate 69 are fixed by a connecting member 78a. The second plate 65 is fixed to the other part of the belt 78 of the upper transfer means 76 by a connecting member 78b.

<Guide Means>

A pair of guide rails 80A and 80B are provided in a convex shape on the upper surface of the base plate 61. Each of the guide rails 80A and 80B has a concave shape And is coupled with a guide member (not shown). By using the guide rails 80A and 80B and the guide member, it is possible to secure the linearity of the relative slide of the base plate 61 and the first plate 63, and to reduce the frictional resistance. Instead of the guide member, a groove may be formed on the lower surface of the first plate 63. [

A pair of guide rails 81A and 81B are provided in a convex shape on the upper surface of the first plate 63. The guide rails 81A and 81B are provided on the lower surface of the second plate 65 And is engaged with a concave guide member (not shown). By using the guide rails 81A and 81B and the guide members, it is possible to secure the linearity of the relative slide of the first plate 63 and the second plate 65, and to reduce the frictional resistance. Instead of the guide member, grooves may be formed on the lower surface of the second plate 65. [

A pair of guide rails 82A and 82B are provided in a convex shape on the upper surface of the second plate 65. The guide rails 82A and 82B are provided on the lower surface of the third plate 67 And is engaged with a concave guide member (not shown). By using the guide rails 82A and 82B and the guide member, it is possible to secure the linearity of the relative slide of the second plate 65 and the third plate 67, and to reduce the frictional resistance. Further, grooves may be formed on the lower surface of the third plate 67 instead of the guide member.

A pair of guide rails 83A and 83B are provided in a convex shape on the upper surface of the third plate 67. The guide rails 83A and 83B are provided on the lower surface of the fourth plate 69 And is engaged with a concave guide member (not shown). By using the guide rails 83A and 83B and the guide member, it is possible to secure the linearity of the relative slide of the third plate 65 and the fourth plate 67, and to reduce the frictional resistance. Instead of the guide member, grooves may be formed on the lower surface of the fourth plate 69.

<Lock mechanism>

The transport apparatus 50 is provided with a plurality of lock mechanisms as fixing means for fixing the plates in the overlapped state so as not to move, without performing the slide operation. The first plate (63) and the second plate (65) are fixed by the lower locking mechanism (84). The second plate (65) and the third plate (67) are fixed by the upper lock mechanism (85). As these lock mechanisms, for example, the same structure as that of the insertion member (movable pin) 71A exemplified in the description of the joint 71 can be used.

In the state of Fig. 4, the second plate 65 and the third plate 67 are locked by the upper lock mechanism 85 so as not to move relative to each other. 4, the first plate 63 and the movable member 70B (mounted on the second plate 65) of the drive unit 70 are connected by a joint 71. In the state shown in Fig.

In the state of Fig. 5, the first plate 63 and the second plate 65 are locked by the lower lock mechanism 84 so as not to move relative to each other. 5, the movable member 70B (mounted on the second plate 65) of the driving unit 70 and the third plate 67 are connected by a joint 71. In the state shown in Fig.

<Shock Absorbing Member>

On the upper surface of the base plate 61 and the first plate 63 to the third plate 67, there are provided a plurality of shock absorbing members 86 for absorbing shocks at the time of stopping the plate just above the slide plate have.

<Slide operation>

Next, the slide operation in the transport apparatus 50 will be described in detail with reference to Figs. 4 and 5. Fig.

(Slide in B direction and return)

The movable body 70B and the first plate 63 are connected by the joint 71 from an initial state (see Fig. 12) in which five plates 60 are stacked one above the other. At this time, the second plate 65 and the third plate 67 are locked by the upper lock mechanism 85 so as not to move relative to each other. In this state, when the movable body 70B is moved in the F direction, the first plate 63 moves relative to the second plate 65 together with the movable body 70B. The belt 75 of the lower transfer means 73 provided on the first plate 63 is connected to the base plate 61 by the connecting member 75a and to the second plate 65 by the connecting member 75b, The driving force for pushing the base plate 61 through the belt 75 in the F direction is transmitted. In this case, the relative movement distance of the base plate 61 may be up to a position where it contacts the unillustrated stopper (not shown), and may be the same as the movement distance of the movable body 70B.

Since the base plate 61 is fixed to the base 51 and is floating in the above-described operation, the first plate 63 and the second plate 65 are spaced apart from the moving direction F of the movable body 70B Moves in the reverse direction. That is, with reference to the base plate 61 fixed to the base 51, the first plate 63 and the second plate 65 slide in the B direction. 4 shows a state in which the first plate 63, the second plate 65, the third plate 67 and the fourth plate 69 are advanced in the B direction.

4, when the movable body 70B is moved in the direction B with the movable body 70B and the first plate 63 connected to each other, the first plate 63 is moved together with the movable body 70B 2 plate 65 as shown in FIG. The belt 75 of the lower transfer means 73 provided on the first plate 63 is connected to the base plate 61 and the second plate 65 by the connecting members 75a and 75b , And relatively moves the base plate 61 in the B direction through the belt 75. [ In this case, the relative movement distance of the base plate 61 may be up to a position where it contacts the unillustrated stopper (not shown), and may be the same as the movement distance of the movable body 70B.

Since the base plate 61 is fixed to the base 51 and is floating in the above operation, the first plate 63 and the second plate 65 are moved in the direction B, which is the moving direction of the movable body 70B, Moves in the reverse direction. That is, with reference to the base plate 61 fixed to the base 51, the first plate 63 and the second plate 65 slide in the F direction. In this way, it is possible to return to the initial state (see Fig. 12) in which the five plates 60 are stacked one above the other.

(Slide in F direction and return)

The movable body 70B and the third plate 67 are connected to each other by the joint 71 from an initial state (see Fig. 12) in which five plates 60 are stacked one above the other. At this time, the first plate 63 and the second plate 65 are locked by the lower lock mechanism 84 so as not to move relative to each other. In this state, when the movable body 70B is moved in the F direction, the third plate 67 slides together with the movable body 70B in the F direction with respect to the second plate 65. [ The belt 78 of the upper transfer means 76 provided on the third plate 67 is connected to the fourth plate 69 by the connecting member 78a and to the second plate 65 by the connecting member 78b, The driving force is transmitted so as to push the fourth plate 69 in the F direction, and the fourth plate 69 is slid in the F direction. Since the base plate 61 is fixed to the base 51 and the first plate 63 and the second plate 65 are locked, only the third plate 67 and the fourth plate 69 move do. 5 shows a state in which the third plate 67 and the fourth plate 69 are advanced in the F direction by the above-described operation.

5, when the movable body 70B is moved in the B direction while the movable body 70B and the third plate 67 are connected to each other, the third plate 67 is moved together with the movable body 70B 2 plate 65 in the B direction. The belt 78 of the upper transfer means 76 provided on the third plate 67 is connected to the fourth plate 69 and the second plate 65 by the connecting members 78a and 78b , And moves the fourth plate (69) in the B direction through the belt (78). In this case, the relative movement of the fourth plate 69 may be up to a position where it contacts the stopper (not shown), and may be the same as the moving distance of the movable member 70B. In this way, it is possible to return to the initial state (see Fig. 12) in which the five plates 60 are stacked one above the other.

<Control section>

The control unit (4) controls the operation of each component of the probe apparatus (100). The control unit 4 is typically a computer. Fig. 11 shows an example of the hardware configuration of the control unit 4. In Fig. The control unit 4 includes a main control unit 201, an input device 202 such as a keyboard and a mouse, an output device 203 such as a printer, a display device 204, a storage device 205, A bus 206, and a bus 207 for interconnecting them. The main control unit 201 has a CPU (Central Processing Unit) 211, a RAM (Random Access Memory) 212 and a ROM (Read Only Memory) The storage device 205 may be any type as long as it can store information, but it may be, for example, a hard disk device or an optical disk device. The storage device 205 is also adapted to record information on a computer-readable recording medium 215 and to read information from the recording medium 215. [ The recording medium 215 may be any type that can store information, for example, a hard disk, an optical disk, a flash memory, or the like. The recording medium 215 may be a recording medium on which a recipe of the probe method performed in the probe apparatus 100 of the present embodiment is recorded.

The control unit 4 controls the loading and unloading of the probe card holder 21 and the device inspection of a plurality of wafers W in the probe apparatus 100 of the present embodiment. More specifically, the control section 4 controls the respective components (for example, the test head 3, the stage 11, the drive section 70, the joint 71, the lower lock mechanism 84, the upper lock mechanism 85, etc.). These are realized by the CPU 211 executing the software (program) stored in the ROM 213 or the storage device 205 by using the RAM 212 as a work area.

[Return method]

Next, a carrying method by the carrying apparatus 50 will be described with reference to Figs. 12 to 14. Fig. 12 shows an initial state in which five plates 60 of the transport apparatus 50 are stacked one above the other and housed in the housing. 13 shows a state in which the plate 60 is slid in the B direction from the initial state of Fig. 12, and the fourth plate 69 is protruded outside the apparatus. 14 shows a state in which the third plate 67 and the fourth plate 69 are slid in the F direction from the initial state and the fourth plate 69 is advanced to the inside of the examination chamber 2. [ In the following description, with reference to the examination room 2, Fig. 13 is referred to as a "withdrawn state" and Fig. 14 is referred to as an "advanced state".

In the initial state shown in Fig. 12, the first plate 63 and the second plate 65 are fixed by the lower lock mechanism 84, and the second plate 65 and the second plate 65 are fixed by the upper lock mechanism 85, And the three plates 67 are locked.

First, the movable body 70B of the driving unit 70 and the first plate 63 are connected by the joint 71. [

Next, the lock of the first plate 63 and the second plate 65 by the lower lock mechanism 84 is released.

Next, the movable body 70B is driven in the F direction, and the first plate 63 and the second plate 65 are slid in the direction B to bring them into the retracted state shown in Fig. In this retracted state, the third plate 67 and the fourth plate 69 are detected by a sensor (not shown) provided near the opening of the housing 33, for example.

Next, the probe card holder 21 is loaded on the holding portion of the fourth plate 69. Then, This work is done manually by an external device or operator.

Next, the movable body 70B is driven in the direction B to slide the first plate 63 and the second plate 65 in the F direction, thereby returning to the initial state.

Next, the first plate 63 and the second plate 65 are locked by the lower lock mechanism 84.

Next, the joint 71 is switched so that the movable member 70B and the third plate 67 are connected.

Next, the lock of the second plate 65 and the third plate 67 by the upper lock mechanism 85 is released.

Next, the movable body 70B is driven in the F direction, and the third plate 67 and the fourth plate 69 are slid in the direction F to bring them into the advanced state shown in Fig. In this state, the probe card holder 21 held by the fourth plate 69 is carried into the inside of the examination room 2. [

The probe card holder 21 can be brought into the inside of the examination room 2 from the outside of the probe apparatus 100 by the above procedure. In this advanced state, the fourth plate 69 (and the third plate 67) is detected by a sensor (not shown) provided on the side wall of the examination chamber 2.

In the carrying operation described above, a sensor unit (not shown) having an area sensor or the like is provided on both sides of the inspection chamber 2 side and the opposite side (outer side) of the transfer device 50, It may be detected whether the plate 63 to the fourth plate 69 slide in the F direction or the B direction. As described above, in the transport apparatus 50 of the present embodiment, only by moving the movable body 70B in one direction (direction F) by switching the joint 71, the first plate 63, The fourth plate 69 can be slide-extended in either the F direction or the B direction. Therefore, it can not be determined from the positional information on the control of the movable body 70B which direction the first plate 63 to the fourth plate 69 are sliding with respect to the initial state. Therefore, the first plate 63 to the fourth plate 69 are slid in either direction, including the state during drawing, at the time of return after the power source of the probe apparatus 100 is cut off, for example Is detected by the sensor unit.

The subsequent operation is arbitrary, but an example is as follows. The probe card holder 21 held by the holding portion of the fourth plate 69 is transferred to the internal transfer mechanism 30 so that the internal transfer mechanism 30 transfers the probe card holder 21 to the insert ring 15). Next, by moving the stage 7 in the horizontal direction (X direction, Y direction,? Direction) and the vertical direction (Z direction), the relative positions of the probe card 23 and the wafer W held on the stage 11 Adjust the position, and bring the electrode of the device into contact with the probe. The test head 3 passes a test current to the device through each probe needle 23a of the probe card 23. [ The probe card 23 transmits an electrical signal indicative of the electrical characteristics of the device to the test head 3. The test head 3 stores the transmitted electrical signal as measurement data, and determines whether or not there is an electrical defect in the device to be inspected.

The carry-out of the probe card holder 21 from the examination room 2 by the transfer device 50 can be carried out by the reverse procedure to the above, so that the explanation is omitted.

The transport apparatus 50 of the present embodiment can slide the plurality of plates 60 by a single drive unit 70, thereby simplifying the structure of the apparatus and saving space. Specifically, the transfer device 50 advances and retreats the fourth plate 69, which is a holding member, to both the F direction and the B direction by a single drive unit 70 by switching the joint 71 A slide operation can be performed. Further, since the carrying apparatus 50 does not carry out a swinging operation or a rotating operation in the course of carrying, interference with other members is hard to occur, and a mounting mistake due to a mistake in the direction of the probe card 23 can not occur. Therefore, by using the probe apparatus 100 of the present embodiment, highly reliable probe inspection becomes possible.

Although the embodiment of the present invention has been described in detail for the purpose of illustration, the present invention is not limited to the above embodiment, and various modifications are possible. For example, the substrate is not limited to a semiconductor wafer. For example, a substrate for a flat panel display typified by a glass substrate used for a liquid crystal display device, a resin substrate on which a plurality of ICs (semiconductor integrated circuit) chips are mounted, Or a substrate for mounting inspection such as a substrate.

The number of the plates 60 constituting the transport apparatus 50 is not limited to five, but may be two or more, preferably three or more.

50:
51: Base
60: Plate
61: base plate
63: first plate
65: second plate
67: third plate
69: fourth plate
70:
70A: hollow member
70B:
71: Joint
73: Lower delivery means
74: Pulley
75: Belt
75a, 75b: connecting member
76: upper delivery means
77: Pulley
78: Belt
78a, 78b:
81A, 81B, 82A, 82B, 83A, 83B: guide rails
84: Lower lock mechanism
85: upper lock mechanism
86: shock absorber

Claims (18)

A probe card transporting apparatus for carrying in and out a probe card mounted on a probe card holder with respect to an inspection chamber of a probe apparatus,
A plurality of plates stacked vertically and slidable in the horizontal direction,
And a single driving unit that has a movable body capable of linear reciprocating motion and slides the plurality of plates,
Wherein the plurality of plates comprises:
A holding plate having a holding portion for holding the probe card mounted on the probe card holder,
And a driving source plate on which the driving unit is mounted,
The driving unit slides the holding plate in a direction approaching the test chamber and in a direction away from the test chamber,
Wherein the plurality of plates include a first driven plate disposed below the driving source plate,
And a connection means for switching the connection state in which the first driven plate is interlocked with the movable body and the non-connection state in which the first driven plate is not interlocked with the movable body. . delete delete The method according to claim 1,
And a first driving force transmitting means for transmitting the driving force from the driving section to the plate further downward from the first driven plate. 5. The method of claim 4,
The first driving force transmitting means includes a pair of pulleys disposed on the first driven plate and a belt rotatably disposed on the pair of pulleys,
Wherein a part of the belt is connected to the driving source plate and another part is connected to the lower plate. The method according to claim 1,
Wherein the plurality of plates includes a second driven plate disposed above the driving source plate and below the holding plate. The method according to claim 6,
And a connecting means for switching a connection state in which the second driven plate is interlocked with the movable body and a non-connection state in which the second driven plate is not interlocked with the movable body. 8. The method of claim 7,
And second driving force transmitting means for transmitting the driving force from the driving section to the holding plate from the second driven plate. 9. The method of claim 8,
The second driving force transmitting means includes a pair of pulleys disposed on the second driven plate and a belt rotatably disposed on the pair of pulleys,
Wherein the belt is partly connected to the drive source plate and another part is connected to the holding plate. The method according to claim 1,
Wherein the plurality of plates comprises:
A first driven plate disposed below the driving source plate,
And a second driven plate disposed above the driving source plate and below the holding plate. 11. The method of claim 10,
A first connecting state in which the first follower plate is interlocked with the movable body and the second follower plate is not interlocked with the movable body, and a second connecting state in which the first follower plate is not interlocked with the movable body, And a second connection state in which the second connection state is established. 12. The method of claim 11,
A first driving force transmitting means for transmitting a driving force from the driving portion to the plate further downward from the first driven plate and a second driving force transmitting means for transmitting from the second driven plate to the holding plate, Conveying device. 13. The method of claim 12,
The first driving force transmitting means includes a pair of pulleys disposed on the first driven plate and a belt rotatably disposed on the pair of pulleys,
Wherein a part of the belt is connected to the driving source plate and another part is connected to the lower plate. 13. The method of claim 12,
The second driving force transmitting means includes a pair of pulleys disposed on the second driven plate and a belt rotatably disposed on the pair of pulleys,
Wherein the belt is partly connected to the drive source plate and another part is connected to the holding plate. 12. The method of claim 11,
And a fixing means for fixing the second driven plate to the drive source plate in the first connection state. 12. The method of claim 11,
And a fixing means for fixing the first driven plate to the driving source plate in the second connection state. A probe apparatus comprising the probe card transporting apparatus according to any one of claims 1 to 16. A probe card transporting method for transporting a probe card by the probe card transporting apparatus according to any one of claims 1 to 16.

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