CN218554832U - Optical mask base plate defect inspection system - Google Patents
Optical mask base plate defect inspection system Download PDFInfo
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- CN218554832U CN218554832U CN202222556994.8U CN202222556994U CN218554832U CN 218554832 U CN218554832 U CN 218554832U CN 202222556994 U CN202222556994 U CN 202222556994U CN 218554832 U CN218554832 U CN 218554832U
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Abstract
The utility model relates to an optical mask base plate defect inspection system, which comprises a workbench, a feeding conveying device spanned on the workbench, and a workpiece body lapped on the feeding conveying device, wherein a first station and a second station are sequentially arranged at the incoming position of the workpiece body on a cabinet, and detection equipment for detecting the workpiece body is respectively arranged on the first station and the second station; the first station and the second station are both provided with cantilevers which cross over the feeding and conveying device and are connected to the workbench, the cantilevers are connected with a material moving module which can move horizontally, and the material moving module is connected with a sucker assembly which can move up and down and can grab a workpiece body; the utility model discloses a move material module, air supporting triaxial motion platform and check out test set, can accomplish the automated inspection to the work piece body, entire system degree of automation is high, can switch over the platform position automatically, improves work efficiency, can also distinguish the defective products, has very strong practicality.
Description
Technical Field
The utility model belongs to the technical field of optics mask version base plate check out test set technique and specifically relates to an optics mask version base plate defect inspection system.
Background
The photoetching mask is a graphic master mask used in a photoetching process commonly used in a micro-nano processing technology. A mask pattern structure is formed on a transparent substrate by an opaque shading film, and pattern information is transferred to a product substrate through an exposure process.
The mask to be processed consists of a glass/quartz substrate, a chromium layer and a photoresist layer. The graphic structure can be obtained by processing through a plate making process.
The mask is widely used, and the mask is required to be used in the field related to the photolithography process, such as IC (Integrated Circuit), FPD (Flat Panel Display), PCB (Printed Circuit Boards), etc.
The quality of the substrate of the photoetching mask can directly influence the process quality of the mask, so that the self defects of the substrate of the photoetching mask are very necessary to detect, the detection efficiency of the substrate of the photoetching mask in the current market is low, the detection stations need to be manually switched, and the processing efficiency is influenced.
We propose a reticle substrate defect inspection system for this purpose.
SUMMERY OF THE UTILITY MODEL
The applicant provides an optical mask base plate defect inspection system aiming at the defects in the prior art, so that the workpiece is automatically conveyed, the switching of the detection stations of the workpiece body is controlled, the defective workpiece can be detected by screening, and the system has strong practicability.
The utility model discloses the technical scheme who adopts as follows:
the utility model provides an optical mask version base plate defect inspection system, includes the workstation and strides the material loading conveyor on the workstation to and, the overlap joint work piece body on the material loading conveyor, its characterized in that:
a first station and a second station are sequentially arranged in the workbench at the position where the workpiece body comes, and detection equipment for detecting the workpiece body is respectively arranged on the first station and the second station;
the first station and the second station are both provided with cantilevers which cross over the feeding and conveying device and are connected to the workbench, the outer sides of the cantilevers are connected with a material moving module which can move horizontally, and the material moving module is connected with a sucker assembly which can move up and down and can grab a workpiece body;
the first station and the second station are both provided with an air-floatation three-axis motion platform which drives the workpiece body to move along a transverse axis and a vertical axis, the air-floatation three-axis motion platform comprises a fixed platform, the fixed platform is provided with a fixed cavity for placing the workpiece body, and meanwhile, the bottom wall of the fixed cavity is provided with a special light source for irradiating the workpiece body;
and the workbench at the rear side of the platform is also connected with another cantilever spanning the feeding and conveying device, the cantilever is connected with a material moving module, and a defective product conveying device is arranged below the material moving module.
It is further characterized in that:
the workstation sets up in the rack, and the upper end of rack is connected with the warning light, and the light that can show different colours on the warning light can detect the different states of workpiece body in the rack.
The machine cabinet is provided with a feed inlet which is convenient for feeding the feeding conveying device, and discharge outlets which are respectively provided with the feeding conveying device and the defective product conveying device and correspond to each other.
The feeding and conveying device comprises two conveying belts which are close to each other and parallel, and the workpiece body is carried on the two conveying belts simultaneously.
Move the material module and include the sucking disc subassembly, it can snatch the work piece body to be provided with the sucking disc on the sucking disc subassembly, is connected with extending structure on the sucking disc subassembly, and extending structure's the other end is connected with the slide arm, and the slide arm horizontal slip is on the cantilever.
The first station and the second station are a transmission light visual detection station and a polarized light visual detection station which are not divided into front and back positions;
the detection equipment on the transmission light visual detection table is transmission light visual detection equipment, and the special light source on the transmission light visual detection table is a perspective light source;
the detection equipment on the polarized light vision detection table is polarized light vision detection equipment, and the special light source on the polarized light vision detection table is a polarized light source.
Fixed intracavity still is provided with and carries out spacing silica gel contact surface to the work piece body, and the damage can also be placed to the silica gel contact surface when adopting the silica gel material to fix the work piece body, is provided with the telescopic link of connecting the silica gel contact surface and controlling the silica gel contact surface to stretch out and draw back on fixed platform's the lateral wall.
The air-floatation three-axis motion platform is also provided with a primary air-floatation moving platform, a secondary air-floatation moving platform and a tertiary air-floatation moving platform which drive the fixed platform to realize the movement of the transverse axis and the vertical axis;
the fixed platform slides and sets up in one-level air supporting moving platform, and one-level air supporting moving platform slides on second grade air supporting moving platform, and second grade air supporting moving platform slides on tertiary air supporting moving platform, and the spout on the adjacent moving platform is vertical distribution simultaneously, and the stroke on one-level air supporting moving platform, second grade air supporting moving platform and the tertiary air supporting moving platform increases in proper order.
The cabinet is provided with a control panel assembly, a sliding arm prompt light feeding and conveying device controller is arranged in the control panel assembly, and the sliding arm prompt light feeding and conveying device controller can control the movement of the plurality of material moving modules in an automatic control mode and receive detection signals fed back by the transmission light vision detection equipment and the polarized light vision detection equipment.
And the feeding conveying device and the defective product conveying device are respectively provided with a feeding driving motor and a defective product conveying device driving motor.
The utility model has the advantages as follows:
the utility model has the advantages of compact and reasonable structure, convenient operation through moving material module, air supporting triaxial motion platform and check out test set, can accomplish the automated inspection to the work piece body, and entire system degree of automation is high, can switch over the platform position automatically, improves work efficiency, can also distinguish the defective products, has very strong practicality.
And simultaneously, the utility model discloses still possess following advantage:
(1) The workpiece body is simultaneously carried on the two conveying belts, so that the contact area between the conveying belts and the workpiece body can be reduced as much as possible, and the workpiece body is prevented from being damaged by friction force.
(2) Through being provided with first platform position and second platform position on the rack, carry out transmitted light visual detection and polarized light visual detection to the work piece body respectively, provide work efficiency.
(3) Move the material module through the setting and can snatch the work piece body on the material loading conveyor and place the relevant position and detect.
(4) Be used for placing the work piece body through setting up fixed chamber, be provided with the special light source that shines the work piece body on the diapire in fixed chamber simultaneously, improve detection effect, can also carry out the flexible fixation to the work piece body simultaneously, improve follow-up detection effect.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is another schematic view of the present invention.
Fig. 3 is a schematic structural diagram of the present invention (after removing the cabinet).
Fig. 4 is another view structure schematic diagram of the present invention (after removing the cabinet).
Fig. 5 is a top view of the present invention (after removing the cabinet).
FIG. 6 is an enlarged schematic view of the structure of the air-floating three-axis motion platform.
Wherein:
A. a first station; B. a second station; 1. a work table; 2. a feeding and conveying device; 3. a transmitted light visual inspection device; 4. a material moving module; 5. an air-floatation three-axis motion platform; 6. a cantilever; 7. a polarized light visual detection device; 8. a workpiece body; 9. a defective product conveying device; 10. a cabinet; 11. a warning light; 12. a control panel assembly;
201. a feeding driving motor; 202. a conveyor belt;
401. a slide arm; 402. a telescopic structure; 403. a sucker component;
501. a fixed platform; 502. a special light source; 503. a silica gel contact surface; 504. a telescopic rod; 505. a first-stage air-floating moving platform; 506. a secondary air-floating moving platform; 507. a three-stage air-floating moving platform; c. a fixed cavity;
901. defective products conveyor driving motor.
Detailed Description
The following describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1-6, an optical mask base plate defect inspection system comprises a cabinet 10, wherein a workbench 1 is arranged in the cabinet 10, a feeding conveyor 2 striding over the workbench 1 is connected to the cabinet 10, a feeding port convenient for feeding the feeding conveyor 2 and a discharging port respectively provided with good products and defective products are arranged on the cabinet 10, the feeding conveyor 2 comprises two conveyor belts 202 which are close to and parallel to each other, and a workpiece body 8 is simultaneously carried on the two conveyor belts 202, so that the contact area between the conveyor belts 202 and the workpiece body 8 can be reduced as much as possible, and the damage of friction to the workpiece body 8 is prevented.
A first station A and a second station B are sequentially arranged on the cabinet 10 at the coming positions of the workpiece body 8, the first station and the second station are respectively a transmission light visual detection station and a polarized light visual detection station in practical application, the two stations are not fixed in position relation and can be randomly selected to be arranged in the front and back direction, the transmission light visual detection station is connected with a transmission light visual detection device 3 through a connecting frame, the workpiece body 8 is detected through the transmission light visual detection device 3, the polarized light visual detection station is connected with a polarized light visual detection device 7 through the connecting frame, and the workpiece body 8 is detected through the polarized light visual detection device 7;
all be provided with on transmission light visual detection station and the polarized light visual detection station and stride across material loading conveyor 2 and connect cantilever 6 on workstation 1, be connected with on the cantilever 6 and move material module 4, it can snatch workpiece body 8 on the material loading conveyor 2 and place the relevant position and detect to move material module 4, it includes sucking disc subassembly 403 to move material module 4, it can snatch workpiece body 8 to be provided with the sucking disc on the sucking disc subassembly 403, be connected with extending structure 402 on the sucking disc subassembly 403, can drive sucking disc subassembly 403 and reciprocate, the other end of extending structure 402 is connected with slide arm 401 simultaneously, slide arm 401 horizontal slip is on cantilever 6, it detects to drive sucking disc subassembly 403 and remove in the corresponding station.
As shown in fig. 5, an air-floating three-axis motion platform 5 is disposed on each of the transmission light visual detection station and the polarized light visual detection station, the air-floating three-axis motion platform 5 includes a fixed platform 501, a fixed cavity c is disposed on the fixed platform 501 for placing a workpiece body 8, a special light source 502 for irradiating the workpiece body 8 is disposed on a bottom wall of the fixed cavity c, a light source of the special light source 502 at the transmission light visual detection station is a perspective light source, a polarized light source of the special light source 502 at the polarized light visual detection station is disposed on the polarized light visual detection station, a silica gel contact surface 503 for limiting the workpiece body 8 is disposed in the fixed cavity c, the silica gel contact surface 503 is made of a silica gel material and can be damaged while fixing the workpiece body 8, and a telescopic rod 504 penetrating through the fixed cavity c to connect the silica gel contact surface 503 and controlling the silica gel contact surface 503 to be clamped in a telescopic manner is disposed on a side wall of the fixed platform 501;
meanwhile, in order to facilitate movement, the fixed platform 501 is arranged in the first-stage air-floating moving platform 505 in a sliding manner, the first-stage air-floating moving platform 505 slides on the second-stage air-floating moving platform 506, the second-stage air-floating moving platform 506 slides on the third-stage air-floating moving platform 507, sliding chutes on adjacent moving platforms are vertically distributed, the strokes of the first-stage air-floating moving platform 505, the second-stage air-floating moving platform 506 and the third-stage air-floating moving platform 507 are sequentially increased, the large-stroke third-stage air-floating moving platform 507 drives the fixed platform 501 to move below corresponding detection equipment, then, the second-stage air-floating moving platform 506 and the first-stage air-floating moving platform 505 are used for realizing movement of a transverse shaft and a vertical shaft, and overall scanning detection is sequentially performed on the workpiece body 8 on the fixed platform 501, the precision can be improved by adopting the moving platform, and after belt detection is completed, the workpiece body 8 is placed on the air-floating feeding device 2 for conveying by the three-shaft moving platform 5 and the material-moving module 4;
the rear side that the rack 10 is located two positions still is connected with the cantilever 6 of strideing across material loading conveyor 2, is connected with on the cantilever 6 and moves material module 4, and the below of moving material module 4 simultaneously is provided with defective products conveyor 9, and the material module 4 that moves that is located this department can snatch the defective products work piece body 8 on the material loading conveyor 2 and place and carry the ejection of compact in the defective products conveyor 9. The feeding conveying device 2 and the defective product conveying device 9 are respectively provided with a feeding driving motor 201 and a defective product conveying device driving motor 901.
Be provided with control panel assembly 12 on the rack 10, be provided with the 2 controllers of 11 material loading conveyor of slider 401 warning light in the control panel assembly 12, the removal that a plurality of material modules 4 that move can be controlled to the 2 controllers of 11 material loading conveyor of slider 401 warning light to and accept the detection signal of transmission light visual inspection equipment 3 and polarized light visual inspection equipment 7 feedback, realize automated control effect.
The upper end of rack 10 is connected with warning light 11, and the light that can show different colours on the warning light 11 is arranged in detecting the different states of work piece body 8 among the rack 10, and when defective work piece body 8 appeared, warning light 11 can give the suggestion, convenient observation.
The specific working principle is as follows:
after the equipment is started, a workpiece body 8 is placed on a feeding conveying device 2 for conveying, when the feeding conveying device 2 passes through a second station A or a second station B, the workpiece body 8 on the feeding conveying device 2 is clamped through a material moving module 4 and is placed in an air-floating three-axis motion platform 5, the air-floating three-axis motion platform 5 provides light source irradiation through a special light source 502, meanwhile, the workpiece body 8 is fixed through a silica gel contact surface 503 and a telescopic rod 504, then the workpiece body 8 is moved to a transmission light visual detection device 3 or a polarized light visual detection device 7 through a first-stage air-floating moving platform 505, a second-stage air-floating moving platform 506 and a third-stage air-floating moving platform 507 for comprehensive detection, and after the detection is finished, the workpiece body 8 is moved to the feeding conveying device 2 through the air-floating three-axis motion platform 5 and the material moving module 4;
if and only after the workpiece body 8 is detected by the two stations, defective products do not appear, the workpiece body 8 is directly conveyed and discharged by the feeding and conveying device 2, and the defective product workpiece body 8 is obtained;
through the control of the control panel assembly 12, after a defective product signal sent by the second station A or the second station B is received, the control panel assembly 12 controls the material moving module 4 in the last row to move the defective product workpiece body 8 to the defective product conveying device 9 for conveying and discharging.
If the workpiece body 8 is detected on the first station A, defective products are generated, and the workpiece body 8 is directly moved to the defective product conveying device 9 to be conveyed and discharged by the last row of material moving modules 4 without detection of the second station B.
The information of defective products can be quickly seen through the prompting lamp 11;
through foretell a series of operations, can accomplish the automated inspection to work piece body 8, entire system degree of automation is high, can switch over the platform position automatically, improves work efficiency, can also distinguish the defective products, has very strong practicality.
The above description is for the purpose of explanation and not limitation of the invention, which is defined in the claims, and any modifications may be made within the scope of the invention.
Claims (10)
1. The utility model provides an optical mask base plate defect inspection system, includes workstation (1) and strides material loading conveyor (2) on workstation (1) to and, overlap joint work piece body (8) on material loading conveyor (2), its characterized in that:
a first station (A) and a second station (B) are sequentially arranged in the workbench (1) at the position where the workpiece body (8) comes, and detection equipment for detecting the workpiece body (8) is respectively arranged on the first station (A) and the second station (B);
the first station (A) and the second station (B) are both provided with a cantilever (6) spanning the feeding conveying device (2) and connected to the workbench (1), the outer side of the cantilever (6) is connected with a material moving module (4) capable of moving horizontally, and the material moving module (4) is connected with a sucker component (403) capable of moving up and down and grabbing the workpiece body (8);
the first station (A) and the second station (B) are both provided with an air-floatation three-axis motion platform (5) for driving the workpiece body (8) to move along a transverse axis and a vertical axis, the air-floatation three-axis motion platform (5) comprises a fixed platform (501), a fixed cavity (c) for placing the workpiece body (8) is arranged on the fixed platform (501), and meanwhile, a special light source (502) for irradiating the workpiece body (8) is arranged on the bottom wall of the fixed cavity (c);
still be connected with another cantilever (6) of strideing across material loading conveyor (2) on workstation (1) that is located two station positions rear sides, be connected with on cantilever (6) and move material module (4), the below of moving material module (4) simultaneously is provided with defective products conveyor (9).
2. The reticle substrate defect inspection system of claim 1, wherein: workstation (1) sets up in rack (10), and the upper end of rack (10) is connected with warning light (11), and the light that can show different colours on warning light (11) can detect the state that work piece body (8) are different in rack (10).
3. The reticle substrate defect inspection system of claim 2, wherein: the machine cabinet (10) is provided with a feed inlet for conveniently feeding the feeding conveying device (2) and discharge outlets corresponding to the feeding conveying device (2) and the defective product conveying device (9).
4. The reticle substrate defect inspection system of claim 1, wherein: the feeding and conveying device (2) comprises two mutually close and parallel conveying belts (202), and the workpiece body (8) is carried on the two conveying belts (202) at the same time.
5. The reticle substrate defect inspection system of claim 1, wherein: move material module (4) and include sucking disc subassembly (403), it can snatch workpiece body (8) to be provided with the sucking disc on sucking disc subassembly (403), is connected with extending structure (402) on sucking disc subassembly (403), and the other end of extending structure (402) is connected with slide arm (401), and slide arm (401) horizontal slip is on cantilever (6).
6. The reticle substrate defect inspection system of claim 1, wherein: the first station and the second station are a transmission light visual detection station and a polarized light visual detection station which are not divided into front and back positions;
the detection equipment on the transmission light visual detection table is transmission light visual detection equipment (3), and the special light source (502) on the transmission light visual detection table is a perspective light source;
the detection equipment on the polarized light visual detection bench is polarized light visual detection equipment (7), and the special light source (502) on the polarized light visual detection bench is a polarized light source.
7. The reticle substrate defect inspection system of claim 1, wherein: still be provided with in fixed chamber (c) and carry out spacing silica gel contact surface (503) to work piece body (8), silica gel contact surface (503) adopt the silica gel material can also place the damage when fixing work piece body (8), are provided with on the lateral wall of fixed platform (501) and connect silica gel contact surface (503) and control telescopic link (504) that silica gel contact surface (503) are flexible.
8. The reticle substrate defect inspection system of claim 1, wherein: the air-floatation three-axis motion platform (5) is also provided with a primary air-floatation moving platform (505), a secondary air-floatation moving platform (506) and a tertiary air-floatation moving platform (507) which drive the fixed platform (501) to realize the movement of a horizontal axis and a vertical axis;
the fixed platform (501) is arranged in the first-stage air-floating moving platform (505) in a sliding mode, the first-stage air-floating moving platform (505) slides on the second-stage air-floating moving platform (506), the second-stage air-floating moving platform (506) slides on the third-stage air-floating moving platform (507), sliding grooves in adjacent moving platforms are vertically distributed, and strokes of the first-stage air-floating moving platform (505), the second-stage air-floating moving platform (506) and the third-stage air-floating moving platform (507) are sequentially increased.
9. The reticle substrate defect inspection system of claim 2, wherein: the machine cabinet is characterized in that a control panel assembly (12) is arranged on the machine cabinet (10), a sliding arm (401) prompt lamp (11) feeding and conveying device (2) controller is arranged in the control panel assembly (12), and the sliding arm (401) prompt lamp (11) feeding and conveying device (2) controller can control the movement of a plurality of material moving modules (4) in an automatic control mode and receive detection signals fed back by transmission light vision detection equipment (3) and polarized light vision detection equipment (7).
10. The reticle substrate defect inspection system of claim 1, wherein: and the feeding conveying device (2) and the defective product conveying device (9) are respectively provided with a feeding driving motor (201) and a defective product conveying device driving motor (901).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222556994.8U CN218554832U (en) | 2022-09-26 | 2022-09-26 | Optical mask base plate defect inspection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222556994.8U CN218554832U (en) | 2022-09-26 | 2022-09-26 | Optical mask base plate defect inspection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218554832U true CN218554832U (en) | 2023-03-03 |
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ID=85312353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222556994.8U Active CN218554832U (en) | 2022-09-26 | 2022-09-26 | Optical mask base plate defect inspection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218554832U (en) |
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2022
- 2022-09-26 CN CN202222556994.8U patent/CN218554832U/en active Active
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