KR100778913B1 - 냉매를 방열재로 사용한 반도체 패키지 - Google Patents
냉매를 방열재로 사용한 반도체 패키지 Download PDFInfo
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- KR100778913B1 KR100778913B1 KR1020010027685A KR20010027685A KR100778913B1 KR 100778913 B1 KR100778913 B1 KR 100778913B1 KR 1020010027685 A KR1020010027685 A KR 1020010027685A KR 20010027685 A KR20010027685 A KR 20010027685A KR 100778913 B1 KR100778913 B1 KR 100778913B1
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- semiconductor package
- semiconductor chip
- refrigerant
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
- H01L2224/48228—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item the bond pad being disposed in a recess of the surface of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
Claims (3)
- 집적회로를 구비한 반도체 칩과,상기 반도체 칩이 부착되는 섭스트레이트와,상기 반도체 칩과 섭스트레이트를 접속시키는 전도성 와이어와,상기 반도체 칩과 전도성 와이어 및 섭스트레이트의 일부를 봉지하는 봉지재와,상기 반도체 칩 및 섭스트레이트를 통하는 전기신호를 외부로 인출하는 다수의 인출단자와,상면이 다수의 요철구조로 형성되도록 상기 봉지재의 외면에 장착되며, 내부에 저장부를 구비하여 상기 저장부내에 냉매를 저장한 냉매 탱크를 포함하는 것을 특징으로 하는 냉매를 방열재로 사용한 반도체 패키지.
- 제 1 항에 있어서,상기 냉매탱크는 알루미늄, 알루미늄 합금, 구리 또는 구리합금 중 하나의 재료로 구성된 것을 특징으로 하는 냉매를 방열재로 사용한 반도체 패키지.
- 제 1 항에 있어서,상기 냉매는 물인 것을 특징으로 하는 냉매를 방열재로 사용한 반도체 패키지.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010027685A KR100778913B1 (ko) | 2001-05-21 | 2001-05-21 | 냉매를 방열재로 사용한 반도체 패키지 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020010027685A KR100778913B1 (ko) | 2001-05-21 | 2001-05-21 | 냉매를 방열재로 사용한 반도체 패키지 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020088300A KR20020088300A (ko) | 2002-11-27 |
KR100778913B1 true KR100778913B1 (ko) | 2007-11-22 |
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Application Number | Title | Priority Date | Filing Date |
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KR1020010027685A KR100778913B1 (ko) | 2001-05-21 | 2001-05-21 | 냉매를 방열재로 사용한 반도체 패키지 |
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KR (1) | KR100778913B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101049508B1 (ko) | 2004-12-30 | 2011-07-15 | 엘지전자 주식회사 | 비지에이 패키지의 열발산 방법 및 열 발산 막대를포함하는 비지에이 패키지 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100701378B1 (ko) * | 2002-12-30 | 2007-03-28 | 동부일렉트로닉스 주식회사 | 반도체 소자 패키징 방법 |
US7365980B2 (en) | 2003-11-13 | 2008-04-29 | Intel Corporation | Micropin heat exchanger |
KR102166978B1 (ko) | 2018-12-13 | 2020-10-16 | (주)메탈라이프 | 냉각 부품 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145347A (en) * | 1981-03-03 | 1982-09-08 | Nec Corp | Semiconductor package |
JPS6489498A (en) * | 1987-09-30 | 1989-04-03 | Hitachi Ltd | Liquid cooling of large computer and liquid cooling device therefor |
JPH06104355A (ja) * | 1992-09-22 | 1994-04-15 | Toshiba Corp | 冷却液封入型半導体装置 |
KR970077560A (ko) * | 1996-05-23 | 1997-12-12 | 김광호 | 엠보싱(embossing) 형상의 금속 볼이 형성된 금속판을 이용한 볼 그리드 어레이 패키지 |
KR20000051188A (ko) * | 1999-01-19 | 2000-08-16 | 김영환 | 하이 파워 패키지용 열방출장치 |
-
2001
- 2001-05-21 KR KR1020010027685A patent/KR100778913B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145347A (en) * | 1981-03-03 | 1982-09-08 | Nec Corp | Semiconductor package |
JPS6489498A (en) * | 1987-09-30 | 1989-04-03 | Hitachi Ltd | Liquid cooling of large computer and liquid cooling device therefor |
JPH06104355A (ja) * | 1992-09-22 | 1994-04-15 | Toshiba Corp | 冷却液封入型半導体装置 |
KR970077560A (ko) * | 1996-05-23 | 1997-12-12 | 김광호 | 엠보싱(embossing) 형상의 금속 볼이 형성된 금속판을 이용한 볼 그리드 어레이 패키지 |
KR20000051188A (ko) * | 1999-01-19 | 2000-08-16 | 김영환 | 하이 파워 패키지용 열방출장치 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101049508B1 (ko) | 2004-12-30 | 2011-07-15 | 엘지전자 주식회사 | 비지에이 패키지의 열발산 방법 및 열 발산 막대를포함하는 비지에이 패키지 |
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Publication number | Publication date |
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KR20020088300A (ko) | 2002-11-27 |
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