KR100755582B1 - 고정밀 거울 및 그 제조 방법 - Google Patents

고정밀 거울 및 그 제조 방법 Download PDF

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Publication number
KR100755582B1
KR100755582B1 KR1020057015523A KR20057015523A KR100755582B1 KR 100755582 B1 KR100755582 B1 KR 100755582B1 KR 1020057015523 A KR1020057015523 A KR 1020057015523A KR 20057015523 A KR20057015523 A KR 20057015523A KR 100755582 B1 KR100755582 B1 KR 100755582B1
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South Korea
Prior art keywords
layer
finish
substrate
mirror
thin film
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Expired - Lifetime
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KR1020057015523A
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English (en)
Korean (ko)
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KR20050110638A (ko
Inventor
존 피. 쉐퍼
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레이던 컴퍼니
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Physical Vapour Deposition (AREA)
  • Glass Compositions (AREA)
KR1020057015523A 2003-02-24 2004-02-24 고정밀 거울 및 그 제조 방법 Expired - Lifetime KR100755582B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/373,448 US6921177B2 (en) 2003-02-24 2003-02-24 High precision mirror, and a method of making it
US10/373,448 2003-02-24

Publications (2)

Publication Number Publication Date
KR20050110638A KR20050110638A (ko) 2005-11-23
KR100755582B1 true KR100755582B1 (ko) 2007-09-06

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ID=32868709

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057015523A Expired - Lifetime KR100755582B1 (ko) 2003-02-24 2004-02-24 고정밀 거울 및 그 제조 방법

Country Status (11)

Country Link
US (1) US6921177B2 (https=)
EP (1) EP1597614B1 (https=)
JP (1) JP4664277B2 (https=)
KR (1) KR100755582B1 (https=)
AT (1) ATE476676T1 (https=)
AU (1) AU2004214919B2 (https=)
CA (1) CA2500309C (https=)
DE (1) DE602004028443D1 (https=)
IL (1) IL167673A (https=)
TW (1) TWI288247B (https=)
WO (1) WO2004077114A1 (https=)

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US20070121104A1 (en) * 2003-04-18 2007-05-31 Hendrix James L Techniques for reducing optical noise in metrology systems
US8062096B2 (en) * 2005-06-30 2011-11-22 Cabot Microelectronics Corporation Use of CMP for aluminum mirror and solar cell fabrication
US7641350B2 (en) * 2005-11-28 2010-01-05 Jds Uniphase Corporation Front surface mirror for providing white color uniformity for polarized systems with a large range of incidence angles
DE102006011973B4 (de) * 2006-03-15 2011-04-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Spiegel mit einer Silberschicht
WO2009024181A1 (en) * 2007-08-20 2009-02-26 Optosic Ag Method of manufacturing and processing silicon carbide scanning mirrors
DE102009039400A1 (de) * 2009-08-31 2011-03-03 Carl Zeiss Laser Optics Gmbh Reflektives optisches Element zur Verwendung in einem EUV-System
DE102009040785A1 (de) * 2009-09-09 2011-03-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Substrat aus einer Aluminium-Silizium-Legierung oder kristallinem Silizium, Metallspiegel, Verfahren zu dessen Herstellung sowie dessen Verwendung
US8398251B2 (en) * 2009-11-04 2013-03-19 Raytheon Canada Limited Method and apparatus for fabricating a precision optical surface
DE102010039927A1 (de) * 2010-08-30 2012-03-01 Carl Zeiss Smt Gmbh Substrat für Spiegel für die EUV-Lithographie
DE102011002953A1 (de) * 2011-01-21 2012-07-26 Carl Zeiss Smt Gmbh Substrat für Spiegel für die EUV-Lithographie
US9575223B2 (en) * 2011-05-13 2017-02-21 Raytheon Company Magnesium mirrors and methods of manufacture thereof
DE102011122329A1 (de) * 2011-12-28 2013-07-04 Qioptiq Photonics Gmbh & Co. Kg Reflektierendes optisches Bauteil
US9488760B2 (en) 2013-02-28 2016-11-08 Corning Incorporated Enhanced, durable silver coating stacks for highly reflective mirrors
US9971073B2 (en) * 2014-04-14 2018-05-15 Corning Incorporated Enhanced performance metallic based optical mirror substrates
US20160097885A1 (en) 2014-10-03 2016-04-07 Corning Incorporated Mirror substrates with highly finishable corrosion-resistant coating
KR20160061548A (ko) * 2014-11-21 2016-06-01 삼성디스플레이 주식회사 어레이 테스트 모듈레이터 및 이를 포함하는 박막트랜지스터 기판 검사 장치
DE102015218702A1 (de) * 2015-09-29 2017-03-30 Dr. Johannes Heidenhain Gmbh Optisches Schichtsystem
US10816702B2 (en) * 2016-03-18 2020-10-27 Corning Incorporated Reflective optical element with high stiffness substrate
US20170269265A1 (en) * 2016-03-18 2017-09-21 Corning Incorporated Graphite substrates for reflective optics
CN108468029B (zh) * 2018-02-12 2020-01-21 中国科学院国家天文台南京天文光学技术研究所 用于碳化硅光学镜面改性与面形提升的磁控溅射扫描方法
WO2019215243A1 (de) 2018-05-09 2019-11-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Spiegelträger für einen optischen spiegel aus einem verbundwerkstoff und verfahren zu dessen herstellung
US20200009701A1 (en) * 2018-07-09 2020-01-09 Arizona Board Of Regents On Behalf Of The University Of Arizona Polishing protocol for zirconium diboride based ceramics to be implemented into optical systems
US20200132894A1 (en) * 2018-10-31 2020-04-30 Corning Incorporated Support for reflective optical element
US11385383B2 (en) 2018-11-13 2022-07-12 Raytheon Company Coating stress mitigation through front surface coating manipulation on ultra-high reflectors or other optical devices
US11619764B2 (en) 2020-03-27 2023-04-04 Raytheon Company High-performance optical surface
US11698477B2 (en) * 2020-07-15 2023-07-11 Raytheon Company Visible quality additive manufactured aluminum mirror finishing
US12066591B2 (en) * 2020-07-15 2024-08-20 Raytheon Company Visible quality mirror finishing

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US4814232A (en) * 1987-03-25 1989-03-21 United Technologies Corporation Method for depositing laser mirror coatings
US6495272B1 (en) * 2000-07-06 2002-12-17 B-Con Engineering Inc. High quality optical surface and method of producing same

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US4865451A (en) * 1986-12-22 1989-09-12 Ahonen Robert G Silicon substrate mirror assembly for lasers
ZA912915B (en) 1990-05-10 1992-04-29 Boc Group Inc Novel monolithic front surface mirror
JPH07191207A (ja) * 1993-11-17 1995-07-28 Asahi Optical Co Ltd 反射型複合光学素子
JPH07168008A (ja) * 1993-12-13 1995-07-04 Nikon Corp Ａｇ表面鏡
JPH0868897A (ja) * 1994-08-29 1996-03-12 Nikon Corp 反射鏡およびその製造方法
EP0824154B1 (de) * 1996-08-15 2002-05-08 Alcan Technology & Management AG Reflektor mit resistenter Oberfläche
JPH10339799A (ja) * 1997-06-06 1998-12-22 Nikon Corp 反射鏡及びその製造方法
US5912777A (en) * 1997-06-26 1999-06-15 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High temperature solar reflector, its preparation and use
US5933278A (en) * 1997-06-30 1999-08-03 Polaroid Corporation Monolithic multi-faceted mirror for combining multiple beams from different light sources by reflection
JP2000019312A (ja) * 1998-07-01 2000-01-21 Konica Corp 反射ミラー
JP2000241612A (ja) * 1999-02-23 2000-09-08 Nikon Corp 反射鏡
US6078425A (en) * 1999-06-09 2000-06-20 The Regents Of The University Of California Durable silver coating for mirrors
JP4482971B2 (ja) * 1999-09-08 2010-06-16 株式会社ニコン 反射鏡
US6587263B1 (en) * 2000-03-31 2003-07-01 Lockheed Martin Corporation Optical solar reflectors
DE10125554C2 (de) * 2001-05-23 2003-06-18 Astrium Gmbh Ultraleichter und ultrasteifer vollkeramischer Reflektor und Verfahren zur Herstellung sowie Verwendung eines solchen Reflektors
JP2002357709A (ja) * 2001-06-01 2002-12-13 Canon Inc 高反射性銀鏡及び反射型光学部品
US6598985B2 (en) * 2001-06-11 2003-07-29 Nanogear Optical mirror system with multi-axis rotational control
US6994444B2 (en) * 2002-06-14 2006-02-07 Asml Holding N.V. Method and apparatus for managing actinic intensity transients in a lithography mirror

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Publication number Priority date Publication date Assignee Title
US4814232A (en) * 1987-03-25 1989-03-21 United Technologies Corporation Method for depositing laser mirror coatings
US6495272B1 (en) * 2000-07-06 2002-12-17 B-Con Engineering Inc. High quality optical surface and method of producing same

Also Published As

Publication number Publication date
JP2006518883A (ja) 2006-08-17
AU2004214919A1 (en) 2004-09-10
JP4664277B2 (ja) 2011-04-06
EP1597614A1 (en) 2005-11-23
TWI288247B (en) 2007-10-11
DE602004028443D1 (de) 2010-09-16
AU2004214919B2 (en) 2006-12-21
US20040165296A1 (en) 2004-08-26
WO2004077114A1 (en) 2004-09-10
CA2500309C (en) 2010-08-24
US6921177B2 (en) 2005-07-26
CA2500309A1 (en) 2004-09-10
ATE476676T1 (de) 2010-08-15
IL167673A (en) 2009-12-24
EP1597614B1 (en) 2010-08-04
TW200428022A (en) 2004-12-16
KR20050110638A (ko) 2005-11-23

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