KR100739279B1 - 전기 전도성 제어 방법 - Google Patents
전기 전도성 제어 방법 Download PDFInfo
- Publication number
- KR100739279B1 KR100739279B1 KR1020030073854A KR20030073854A KR100739279B1 KR 100739279 B1 KR100739279 B1 KR 100739279B1 KR 1020030073854 A KR1020030073854 A KR 1020030073854A KR 20030073854 A KR20030073854 A KR 20030073854A KR 100739279 B1 KR100739279 B1 KR 100739279B1
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- South Korea
- Prior art keywords
- irradiation
- light
- index
- thin film
- light irradiation
- Prior art date
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- 238000000034 method Methods 0.000 title claims abstract description 36
- 230000001678 irradiating effect Effects 0.000 claims abstract description 15
- 239000012535 impurity Substances 0.000 claims abstract description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 abstract description 8
- 230000009467 reduction Effects 0.000 abstract description 3
- 239000010409 thin film Substances 0.000 description 25
- 239000004065 semiconductor Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 230000001276 controlling effect Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 238000001994 activation Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 229910052724 xenon Inorganic materials 0.000 description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000003213 activating effect Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 240000006829 Ficus sundaica Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 239000013076 target substance Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78663—Amorphous silicon transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78672—Polycrystalline or microcrystalline silicon transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Recrystallisation Techniques (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (3)
- 불순물을 도입한 비정질 실리콘 또는 폴리크리스탈 실리콘을 피조사물로 하고, 플래시 램프를 배치한 광 조사 장치를 이용하여, 상기 피조사물에 광을 조사하여 상기 피조사물의 전기 전도성을 제어하는 전기 전도성 제어 방법에 있어서,광을 조사함에 있어서 광 에너지(E)를 J/cm2로 표시하고, 펄스 폭(τ)을 sec로 표시할 때, E가 5∼30J/cm2이고, τ가 0.01∼50×10-3sec인 경우에 있어서, S=E/τ1/2에 의해 정의되는 조사 지표(S)를 제어하여 광 조사를 행하고, 상기 조사 지표의 값을 400≤S≤900의 범위로 한 것을 특징으로 하는 전기 전도성 제어 방법.
- 제 1 항에 있어서, 상기 조사 지표(S)의 값을 500≤S≤900의 범위로 한 것을 특징으로 하는 전기 전도성 제어 방법.
- 삭제
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2002-00336029 | 2002-11-20 | ||
JP2002336029A JP2004172331A (ja) | 2002-11-20 | 2002-11-20 | 電気伝導性制御方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040044098A KR20040044098A (ko) | 2004-05-27 |
KR100739279B1 true KR100739279B1 (ko) | 2007-07-12 |
Family
ID=32375733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020030073854A KR100739279B1 (ko) | 2002-11-20 | 2003-10-22 | 전기 전도성 제어 방법 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6890870B2 (ko) |
JP (1) | JP2004172331A (ko) |
KR (1) | KR100739279B1 (ko) |
TW (1) | TWI252542B (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7820097B2 (en) * | 2004-11-24 | 2010-10-26 | Ncc Nano, Llc | Electrical, plating and catalytic uses of metal nanomaterial compositions |
DE102011089884B4 (de) * | 2011-08-19 | 2016-03-10 | Von Ardenne Gmbh | Niedrigemittierende Beschichtung und Verfahren zur Herstellung eines niedrigemittierenden Schichtsystems |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0338073A (ja) * | 1989-07-05 | 1991-02-19 | Sharp Corp | 化合物半導体発光素子の製造方法 |
JPH06124904A (ja) * | 1992-10-12 | 1994-05-06 | Canon Inc | プラズマ処理装置 |
JPH07106247A (ja) * | 1993-10-06 | 1995-04-21 | Matsushita Electric Ind Co Ltd | シリコン薄膜の結晶化方法および表示装置 |
JP2000286195A (ja) * | 1999-03-31 | 2000-10-13 | Mitsubishi Electric Corp | レーザ熱処理方法、レーザ熱処理装置および半導体デバイス |
KR20000018900U (ko) * | 1999-03-31 | 2000-10-25 | 구자홍 | 광조사 장비의 램프 하우스 시스템 |
JP2001297983A (ja) | 2000-04-14 | 2001-10-26 | Sumitomo Heavy Ind Ltd | 結晶成長評価方法及び装置 |
KR20020030727A (ko) * | 2000-10-17 | 2002-04-25 | 가네꼬 히사시 | 유기 전계 발광 소자의 제조 방법 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4316074A (en) * | 1978-12-20 | 1982-02-16 | Quantronix Corporation | Method and apparatus for laser irradiating semiconductor material |
US4727044A (en) * | 1984-05-18 | 1988-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Method of making a thin film transistor with laser recrystallized source and drain |
JP3211394B2 (ja) * | 1992-08-13 | 2001-09-25 | ソニー株式会社 | 半導体装置の製造方法 |
JP3450376B2 (ja) * | 1993-06-12 | 2003-09-22 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US6165875A (en) * | 1996-04-10 | 2000-12-26 | The Penn State Research Foundation | Methods for modifying solid phase crystallization kinetics for A-Si films |
US6066547A (en) * | 1997-06-20 | 2000-05-23 | Sharp Laboratories Of America, Inc. | Thin-film transistor polycrystalline film formation by nickel induced, rapid thermal annealing method |
JP4092541B2 (ja) * | 2000-12-08 | 2008-05-28 | ソニー株式会社 | 半導体薄膜の形成方法及び半導体装置の製造方法 |
JP2002198322A (ja) * | 2000-12-27 | 2002-07-12 | Ushio Inc | 熱処理方法及びその装置 |
JP2002246328A (ja) * | 2001-02-15 | 2002-08-30 | Toshiba Corp | 熱処理方法、熱処理装置及び半導体装置の製造方法 |
JP2003249505A (ja) * | 2002-02-26 | 2003-09-05 | Seiko Epson Corp | 薄膜半導体装置の製造方法 |
-
2002
- 2002-11-20 JP JP2002336029A patent/JP2004172331A/ja active Pending
-
2003
- 2003-09-25 TW TW092126497A patent/TWI252542B/zh not_active IP Right Cessation
- 2003-10-22 KR KR1020030073854A patent/KR100739279B1/ko active IP Right Grant
- 2003-11-19 US US10/715,446 patent/US6890870B2/en not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0338073A (ja) * | 1989-07-05 | 1991-02-19 | Sharp Corp | 化合物半導体発光素子の製造方法 |
JPH06124904A (ja) * | 1992-10-12 | 1994-05-06 | Canon Inc | プラズマ処理装置 |
JPH07106247A (ja) * | 1993-10-06 | 1995-04-21 | Matsushita Electric Ind Co Ltd | シリコン薄膜の結晶化方法および表示装置 |
JP2000286195A (ja) * | 1999-03-31 | 2000-10-13 | Mitsubishi Electric Corp | レーザ熱処理方法、レーザ熱処理装置および半導体デバイス |
KR20000018900U (ko) * | 1999-03-31 | 2000-10-25 | 구자홍 | 광조사 장비의 램프 하우스 시스템 |
JP2001297983A (ja) | 2000-04-14 | 2001-10-26 | Sumitomo Heavy Ind Ltd | 結晶成長評価方法及び装置 |
KR20020030727A (ko) * | 2000-10-17 | 2002-04-25 | 가네꼬 히사시 | 유기 전계 발광 소자의 제조 방법 |
Also Published As
Publication number | Publication date |
---|---|
TW200416904A (en) | 2004-09-01 |
KR20040044098A (ko) | 2004-05-27 |
US6890870B2 (en) | 2005-05-10 |
TWI252542B (en) | 2006-04-01 |
JP2004172331A (ja) | 2004-06-17 |
US20040106243A1 (en) | 2004-06-03 |
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