KR100718209B1 - 유량 조절기, 유량 조절기를 통과하는 유량 조절 방법 및 유량 조절기 교정 방법 - Google Patents

유량 조절기, 유량 조절기를 통과하는 유량 조절 방법 및 유량 조절기 교정 방법 Download PDF

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Publication number
KR100718209B1
KR100718209B1 KR1020027000296A KR20027000296A KR100718209B1 KR 100718209 B1 KR100718209 B1 KR 100718209B1 KR 1020027000296 A KR1020027000296 A KR 1020027000296A KR 20027000296 A KR20027000296 A KR 20027000296A KR 100718209 B1 KR100718209 B1 KR 100718209B1
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South Korea
Prior art keywords
flow
flow regulator
series
electronic control
flow rate
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Expired - Fee Related
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KR1020027000296A
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English (en)
Korean (ko)
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KR20020039317A (ko
Inventor
틴슬리케네스이.
테리크페이셜
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셀레리티, 아이엔씨
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Application filed by 셀레리티, 아이엔씨 filed Critical 셀레리티, 아이엔씨
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0676—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on flow sources
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0368—By speed of fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Measuring Volume Flow (AREA)
  • Drying Of Semiconductors (AREA)
KR1020027000296A 1999-07-09 2000-06-21 유량 조절기, 유량 조절기를 통과하는 유량 조절 방법 및 유량 조절기 교정 방법 Expired - Fee Related KR100718209B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/350,744 US6343617B1 (en) 1999-07-09 1999-07-09 System and method of operation of a digital mass flow controller
US09/350,744 1999-07-09

Publications (2)

Publication Number Publication Date
KR20020039317A KR20020039317A (ko) 2002-05-25
KR100718209B1 true KR100718209B1 (ko) 2007-05-15

Family

ID=23377995

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020027000296A Expired - Fee Related KR100718209B1 (ko) 1999-07-09 2000-06-21 유량 조절기, 유량 조절기를 통과하는 유량 조절 방법 및 유량 조절기 교정 방법

Country Status (9)

Country Link
US (3) US6343617B1 (enExample)
EP (2) EP1212665B1 (enExample)
JP (1) JP2003504748A (enExample)
KR (1) KR100718209B1 (enExample)
CN (1) CN1249545C (enExample)
AT (2) ATE374964T1 (enExample)
AU (1) AU5498700A (enExample)
DE (2) DE60036649T2 (enExample)
WO (1) WO2001004715A1 (enExample)

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Also Published As

Publication number Publication date
EP1359487A2 (en) 2003-11-05
DE60005849D1 (de) 2003-11-13
EP1212665A1 (en) 2002-06-12
EP1359487A3 (en) 2004-02-04
DE60036649D1 (de) 2007-11-15
KR20020039317A (ko) 2002-05-25
WO2001004715A1 (en) 2001-01-18
US20020117202A1 (en) 2002-08-29
DE60036649T2 (de) 2008-07-03
US6681787B2 (en) 2004-01-27
US20020139418A1 (en) 2002-10-03
AU5498700A (en) 2001-01-30
ATE251773T1 (de) 2003-10-15
EP1359487B1 (en) 2007-10-03
US6343617B1 (en) 2002-02-05
CN1249545C (zh) 2006-04-05
DE60005849T2 (de) 2004-09-09
US6640822B2 (en) 2003-11-04
JP2003504748A (ja) 2003-02-04
ATE374964T1 (de) 2007-10-15
EP1212665B1 (en) 2003-10-08
CN1371492A (zh) 2002-09-25

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