CN1249545C - 操作数字质量流量控制器的系统和方法 - Google Patents

操作数字质量流量控制器的系统和方法 Download PDF

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Publication number
CN1249545C
CN1249545C CNB008113238A CN00811323A CN1249545C CN 1249545 C CN1249545 C CN 1249545C CN B008113238 A CNB008113238 A CN B008113238A CN 00811323 A CN00811323 A CN 00811323A CN 1249545 C CN1249545 C CN 1249545C
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CN
China
Prior art keywords
mass flow
flow controller
control system
electronic control
data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB008113238A
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English (en)
Chinese (zh)
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CN1371492A (zh
Inventor
肯尼思·E·廷斯利
菲索·塔里克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Mykrolis Corp
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23377995&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN1249545(C) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Mykrolis Corp filed Critical Mykrolis Corp
Publication of CN1371492A publication Critical patent/CN1371492A/zh
Application granted granted Critical
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0676—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on flow sources
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0368—By speed of fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Measuring Volume Flow (AREA)
  • Drying Of Semiconductors (AREA)
CNB008113238A 1999-07-09 2000-06-21 操作数字质量流量控制器的系统和方法 Expired - Fee Related CN1249545C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/350,744 US6343617B1 (en) 1999-07-09 1999-07-09 System and method of operation of a digital mass flow controller
US09/350,744 1999-07-09

Publications (2)

Publication Number Publication Date
CN1371492A CN1371492A (zh) 2002-09-25
CN1249545C true CN1249545C (zh) 2006-04-05

Family

ID=23377995

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB008113238A Expired - Fee Related CN1249545C (zh) 1999-07-09 2000-06-21 操作数字质量流量控制器的系统和方法

Country Status (9)

Country Link
US (3) US6343617B1 (enExample)
EP (2) EP1212665B1 (enExample)
JP (1) JP2003504748A (enExample)
KR (1) KR100718209B1 (enExample)
CN (1) CN1249545C (enExample)
AT (2) ATE251773T1 (enExample)
AU (1) AU5498700A (enExample)
DE (2) DE60036649T2 (enExample)
WO (1) WO2001004715A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105320160A (zh) * 2014-06-20 2016-02-10 株式会社堀场Stec 中继器以及流体控制和测量系统

Families Citing this family (96)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6718407B2 (en) * 1999-09-30 2004-04-06 Intel Corporation Multiplexer selecting one of input/output data from a low pin count interface and a program information to update a firmware device from a communication interface
US6714977B1 (en) * 1999-10-27 2004-03-30 Netbotz, Inc. Method and system for monitoring computer networks and equipment
US7392309B2 (en) * 1999-10-27 2008-06-24 American Power Conversion Corporation Network appliance management
US7330886B2 (en) 1999-10-27 2008-02-12 American Power Conversion Corporation Network appliance management
EP1257790A1 (en) 2000-02-14 2002-11-20 Unit Instruments, Inc. Method and apparatus for balancing resistance
US20020046612A1 (en) * 2000-08-22 2002-04-25 Fugasity Corporation Fluid mass flow meter with substantial measurement range
NO20020416L (no) * 2001-01-25 2002-07-26 Ensequence Inc Fremgangsmåte for valg blant elementer kategorisert i flere kategorier
DK1360796T3 (da) 2001-01-26 2010-05-10 American Power Conv Corp Fremgangsmåde og system til at indstille et sæt netværksapparater som kan forbindes for at tilvejebringe forbedret samarbejde, skalerbarhed og pålidelighed
US8271626B2 (en) 2001-01-26 2012-09-18 American Power Conversion Corporation Methods for displaying physical network topology and environmental status by location, organization, or responsible party
US6746036B2 (en) * 2001-03-30 2004-06-08 Cequent Towing Products, Inc. Sway control conversion bracket
JP3751538B2 (ja) * 2001-04-11 2006-03-01 株式会社日立製作所 気体流量計
JP4864280B2 (ja) 2001-04-24 2012-02-01 ブルックス・インストルメント・エルエルシー 質量流量コントローラのシステムおよび方法
US6752166B2 (en) * 2001-05-24 2004-06-22 Celerity Group, Inc. Method and apparatus for providing a determined ratio of process fluids
US7010464B2 (en) * 2001-07-25 2006-03-07 Schneider Automation Inc. Mobile HVAC cavity test device, method, and computer product
US6627465B2 (en) * 2001-08-30 2003-09-30 Micron Technology, Inc. System and method for detecting flow in a mass flow controller
EP1435024A2 (en) * 2001-10-09 2004-07-07 Millipore Corporation Chemical process machine programming system
US6675073B2 (en) * 2001-11-20 2004-01-06 Steve Kieman System and method for tuning the weight control of a flow of material
DE10217729B4 (de) * 2002-04-20 2015-08-13 TÜV Rheinland Industrie Service GmbH Verfahren für sicherheitstechnische Überprüfungen von Objekten
WO2003094031A1 (en) * 2002-05-03 2003-11-13 Netbotz, Inc. Method and apparatus for collecting and displaying network device information
JP2005527819A (ja) * 2002-05-24 2005-09-15 マイクロリス コーポレイション マスフロー検出デバイスの較正のためのシステムおよび方法
GB2419677A (en) * 2002-06-24 2006-05-03 Mks Instr Inc Pressure fluctuation insensitive mass flow controller
US6948508B2 (en) 2002-06-24 2005-09-27 Mks Instruments, Inc. Apparatus and method for self-calibration of mass flow controller
US6868862B2 (en) * 2002-06-24 2005-03-22 Mks Instruments, Inc. Apparatus and method for mass flow controller with a plurality of closed loop control code sets
US7004191B2 (en) * 2002-06-24 2006-02-28 Mks Instruments, Inc. Apparatus and method for mass flow controller with embedded web server
US6810308B2 (en) 2002-06-24 2004-10-26 Mks Instruments, Inc. Apparatus and method for mass flow controller with network access to diagnostics
US7136767B2 (en) * 2002-06-24 2006-11-14 Mks Instruments, Inc. Apparatus and method for calibration of mass flow controller
US7809473B2 (en) 2002-06-24 2010-10-05 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
KR101006537B1 (ko) * 2002-06-24 2011-01-07 엠케이에스 인스트루먼츠 인코포레이티드 압력변동에 영향을 받지 않는 질량 유량 제어장치
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US7552015B2 (en) 2002-06-24 2009-06-23 Mks Instruments, Inc. Apparatus and method for displaying mass flow controller pressure
KR20050031109A (ko) 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
EP1523660A1 (en) 2002-07-19 2005-04-20 Celerity Group, Inc. Variable resistance sensor with common reference leg
US20050010341A1 (en) * 2002-09-20 2005-01-13 Bendix Commercial Vehicle Systems Llc Remote diagnostics device (rdu)
KR100486641B1 (ko) * 2002-11-20 2005-04-29 태산엘시디 주식회사 아날로그 게인 조정을 이용한 질량유량 제어기 및 동작방법
ITBG20020047A1 (it) * 2002-12-31 2004-07-01 Abb Service Srl Dispositivo di campo per un sistema fieldbus.
TWI386578B (zh) * 2003-01-17 2013-02-21 Applied Materials Inc 避免一質量流量控制器涉及一質量流量控制器陣列中之干擾的方法
US6813943B2 (en) * 2003-03-19 2004-11-09 Mks Instruments, Inc. Method and apparatus for conditioning a gas flow to improve a rate of pressure change measurement
US7043374B2 (en) * 2003-03-26 2006-05-09 Celerity, Inc. Flow sensor signal conversion
US8321096B2 (en) * 2003-04-11 2012-11-27 Borg Warner Inc. Concept for using software/electronics to calibrate the control system for an automatic transmission
EP1616236B1 (en) * 2003-04-14 2016-11-23 Schneider Electric IT Corporation Method and system for journaling and accessing sensor and configuration data
US8566292B2 (en) 2003-04-14 2013-10-22 Schneider Electric It Corporation Method and system for journaling and accessing sensor and configuration data
EP1616235B1 (en) * 2003-04-14 2009-11-25 American Power Conversion Corporation Extensible sensor monitoring, alert processing and notification system and method
EP1616237B1 (en) * 2003-04-14 2017-10-25 Schneider Electric IT Corporation Environmental monitoring device
US20040250600A1 (en) * 2003-05-12 2004-12-16 Bevers William Daniel Method of mass flow control flow verification and calibration
US6955072B2 (en) 2003-06-25 2005-10-18 Mks Instruments, Inc. System and method for in-situ flow verification and calibration
US7627651B2 (en) * 2003-10-27 2009-12-01 American Power Conversion Corporation System and method for network device communication
US20050120805A1 (en) * 2003-12-04 2005-06-09 John Lane Method and apparatus for substrate temperature control
US7437944B2 (en) * 2003-12-04 2008-10-21 Applied Materials, Inc. Method and apparatus for pressure and mix ratio control
US8615886B1 (en) * 2004-05-06 2013-12-31 Winthrop D. Childers Shaving system with energy imparting device
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US7412986B2 (en) * 2004-07-09 2008-08-19 Celerity, Inc. Method and system for flow measurement and validation of a mass flow controller
US7153709B1 (en) * 2004-08-31 2006-12-26 Advanced Micro Devices, Inc. Method and apparatus for calibrating degradable components using process state data
WO2006042053A2 (en) * 2004-10-07 2006-04-20 Richard Quintana Intelligent flow control unit and water management system
US7711814B1 (en) 2004-12-13 2010-05-04 American Power Conversion Corporation Method and system for remote monitoring of a power supply device with user registration capability
US8145748B2 (en) 2004-12-13 2012-03-27 American Power Conversion Corporation Remote monitoring system
US7746883B2 (en) * 2005-03-01 2010-06-29 Hewlett-Packard Development Company, L.P. Multi-drop ethernet
DE602005021713D1 (de) * 2005-12-02 2010-07-15 United Technologies Corp System und verfahren zur optimierung der gebrauchslebensdauer von getriebekomponenten und getriebeleistung
US7532992B2 (en) * 2006-01-20 2009-05-12 Teledyne Isco, Inc. Measuring apparatuses and methods of using them
US20170046458A1 (en) 2006-02-14 2017-02-16 Power Analytics Corporation Systems and methods for real-time dc microgrid power analytics for mission-critical power systems
US11016450B2 (en) * 2006-02-14 2021-05-25 Power Analytics Corporation Real-time predictive systems for intelligent energy monitoring and management of electrical power networks
US8026113B2 (en) * 2006-03-24 2011-09-27 Tokyo Electron Limited Method of monitoring a semiconductor processing system using a wireless sensor network
US7971604B2 (en) 2006-04-20 2011-07-05 Hitachi Metals, Ltd. Flow controller delivery of a specified-quantity of a fluid
JP2008039513A (ja) * 2006-08-03 2008-02-21 Hitachi Metals Ltd 質量流量制御装置の流量制御補正方法
US8074677B2 (en) 2007-02-26 2011-12-13 Applied Materials, Inc. Method and apparatus for controlling gas flow to a processing chamber
US7846497B2 (en) * 2007-02-26 2010-12-07 Applied Materials, Inc. Method and apparatus for controlling gas flow to a processing chamber
US7775236B2 (en) * 2007-02-26 2010-08-17 Applied Materials, Inc. Method and apparatus for controlling gas flow to a processing chamber
EP2147585B1 (en) 2007-05-15 2016-11-02 Schneider Electric IT Corporation Method and system for managing facility power and cooling
DE102007035977B4 (de) 2007-08-01 2009-07-16 Toptron Gmbh Elektronischer Durchflusssensor
US20090043938A1 (en) * 2007-08-08 2009-02-12 Siemens Aktiengesellschaft System for measuring and outputting an electric quantity
DE102007039262B4 (de) * 2007-08-20 2021-01-28 Endress+Hauser Conducta Gmbh+Co. Kg Verfahren zum Betreiben eines Messgerätes
US7769493B2 (en) * 2008-03-19 2010-08-03 King Fahd University Of Petroleum And Minerals System and method for controlling flow characteristics
US8381760B2 (en) 2008-07-14 2013-02-26 Emerson Electric Co. Stepper motor valve and method of control
US8746275B2 (en) * 2008-07-14 2014-06-10 Emerson Electric Co. Gas valve and method of control
US7905139B2 (en) * 2008-08-25 2011-03-15 Brooks Instrument, Llc Mass flow controller with improved dynamic
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
US20110082597A1 (en) 2009-10-01 2011-04-07 Edsa Micro Corporation Microgrid model based automated real time simulation for market based electric power system optimization
TWI404563B (zh) * 2010-05-11 2013-08-11 Univ Nat Central 移動式顆粒床及其氣體導引系統
US8131400B2 (en) * 2010-06-10 2012-03-06 Hitachi Metals, Ltd. Adaptive on-tool mass flow controller tuning
US8990536B2 (en) 2011-06-01 2015-03-24 Schneider Electric It Corporation Systems and methods for journaling and executing device control instructions
CN102323750B (zh) * 2011-06-02 2016-10-05 中国石油大学(华东) 嵌入式非线性脉冲协同控制器
CN102331770A (zh) * 2011-09-16 2012-01-25 无锡安东科技有限公司 一种基于devicenet总线的led看板控制系统
US9952103B2 (en) 2011-12-22 2018-04-24 Schneider Electric It Corporation Analysis of effect of transient events on temperature in a data center
CN102591373B (zh) * 2012-03-08 2013-07-10 中国计量学院 仪用高准确度二级串联闭环稳压气体源
US10222359B2 (en) * 2013-06-28 2019-03-05 Provtagaren Ab Method for verifying correct function of sampling equipment
CN104076830B (zh) * 2014-06-12 2018-05-01 北京七星华创电子股份有限公司 用于气体集成输送系统的质量流量控制装置、系统及方法
JP6415889B2 (ja) * 2014-08-01 2018-10-31 株式会社堀場エステック 流量制御装置、流量制御装置用プログラム、及び、流量制御方法
CN106054855B (zh) * 2016-05-25 2018-08-24 上海华力微电子有限公司 一种质量流量控制器的校准系统及方法
US10537093B2 (en) * 2017-10-11 2020-01-21 Mark O. Hamran Electronic gas dispenser control system having backflow and pressure sensors
CN109116885B (zh) * 2018-08-24 2020-12-04 北京无线电计量测试研究所 量子电压标准装置中热功率的主动平衡控制装置及方法
US10900421B2 (en) * 2018-10-17 2021-01-26 Woodward, Inc. Direct feedback regarding metered flow of fuel system
US11149976B2 (en) 2019-06-20 2021-10-19 Johnson Controls Tyco IP Holdings LLP Systems and methods for flow control in an HVAC system
US11092354B2 (en) 2019-06-20 2021-08-17 Johnson Controls Tyco IP Holdings LLP Systems and methods for flow control in an HVAC system
US11391480B2 (en) 2019-12-04 2022-07-19 Johnson Controls Tyco IP Holdings LLP Systems and methods for freeze protection of a coil in an HVAC system
US11624524B2 (en) 2019-12-30 2023-04-11 Johnson Controls Tyco IP Holdings LLP Systems and methods for expedited flow sensor calibration
US11815388B2 (en) * 2020-12-01 2023-11-14 Honeywell International Inc. Method and system for timely detecting gas pressure irregularities using a gas meter in a power efficient manner
CN117329448A (zh) * 2023-10-17 2024-01-02 江苏超微半导体科技有限公司 一种半导体制造用超纯气体输送系统集成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5998217A (ja) 1982-11-26 1984-06-06 Fujikin:Kk 流量制御装置
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US5660207A (en) 1994-12-29 1997-08-26 Tylan General, Inc. Flow controller, parts of flow controller, and related method
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US5944048A (en) * 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105320160A (zh) * 2014-06-20 2016-02-10 株式会社堀场Stec 中继器以及流体控制和测量系统
US10216162B2 (en) 2014-06-20 2019-02-26 Horiba Stec, Co., Ltd. Fluid control and measurement system with a relay

Also Published As

Publication number Publication date
ATE374964T1 (de) 2007-10-15
WO2001004715A1 (en) 2001-01-18
US6640822B2 (en) 2003-11-04
KR20020039317A (ko) 2002-05-25
EP1212665B1 (en) 2003-10-08
DE60005849T2 (de) 2004-09-09
EP1359487A2 (en) 2003-11-05
US20020117202A1 (en) 2002-08-29
DE60036649T2 (de) 2008-07-03
US6343617B1 (en) 2002-02-05
ATE251773T1 (de) 2003-10-15
CN1371492A (zh) 2002-09-25
AU5498700A (en) 2001-01-30
EP1359487B1 (en) 2007-10-03
DE60005849D1 (de) 2003-11-13
US6681787B2 (en) 2004-01-27
EP1359487A3 (en) 2004-02-04
US20020139418A1 (en) 2002-10-03
KR100718209B1 (ko) 2007-05-15
EP1212665A1 (en) 2002-06-12
DE60036649D1 (de) 2007-11-15
JP2003504748A (ja) 2003-02-04

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